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| Number | Title | Issue Date |
| 8170698 | Virtual robotic controller system with special application to robotic microscopy structure and methodology The present invention defines a unique, flexible system that may be applied to the manufacture and assembly of a plurality of highly configurable and reusable virtual robotic control devices. It is specifically concerned with providing a plurality of self contained ... | 05/01/2012 |
| 7860587 | Projection-area dependent display/operating device A display and/or operating device for controlling machines includes a projection device for projecting an image onto a projection area, an acquisition device for scanning the same projection area, and a control computer for controlling the projection device and the ... | 12/28/2010 |
| 7769475 | Apparatus for automatically introducing celestial object, terminal device and control system for astronomical telescope An automatic introduction apparatus for automatically introducing a target celestial object by controlling a rotation of an astronomical telescope around at least two axes comprises: an image-capturing means capable of capturing an image of a celestial object at a p... | 08/03/2010 |
| 7711441 | Aiming feedback control for multiple energy beams Plural energy beam sources are aimed at an energy receiving device by way of feedback control signals. Each energy beam is uniquely modulated by way of amplitude, polarization and/or coning patterns to enable individual detection and control. Sensors detect individu... | 05/04/2010 |
| 7444201 | Machine tool or production machine with a display unit for visually displaying operating sequences The invention relates to a machine tool or production machine in which the tool/machine has a display unit (4, 5) for visually displaying operating sequences and/or parameters of the tool/machine, whereby the display unit (4, 5) is provided in the form... | 10/28/2008 |
| 7437207 | Method and apparatus for automatically processing multiple applications in a predetermined order to affect multi-application sequencing An apparatus and method performing a sequence of processing steps on a load supported by a processing plate. The load can include a single sheet on which a plurality of applications are performed or can include a plurality of panels on which respective applications ... | 10/14/2008 |
| 7432681 | Scanner system A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to ... | 10/07/2008 |
| 7433744 | Method and apparatus for spatially coordinating, storing and manipulating computer aided design drawings A technique and associated software for spatially coordinating, storing, and manipulating computer aided Design (CAD) files with a master dimensional plan (MDP) file (FIG. 1, MPD File, Plan, Electrical, Structural, etc.). The plan, elevation, section, and oth... | 10/07/2008 |
| 7433510 | Information presentation apparatus and information presentation system using the same A three-dimensional position posture relation detection unit detects a relation of relative three-dimensional position and posture between an image input unit and a target object using the image of the target object in a real space input from the image input unit. A... | 10/07/2008 |
| 7433760 | Camera and animation controller, systems and methods Embodiments of the invention provide novel controllers for filmmaking and/or animation, as well as systems and methods for their use. In a set of embodiments, a controller has an actuator (e.g., a joystick, etc.) that receives input from a user for controlling an ob... | 10/07/2008 |
| 7430456 | Reference point teaching using an end effector to form a witness mark Apparatus and method for reference point teaching for an articulated member, such as a robotic arm. An end effector is moved to form a witness mark on a medium at a target location. An updated reference point for the end effector is generated in relation to a detect... | 09/30/2008 |
| 7389152 | High speed image scanner A document image scanner; a camera having a field of view, for sensing differentiated information areas on each physical document as the physical document is transported; an image processing system associated with the camera, for producing a virtual image data file ... | 06/17/2008 |
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a p... | 04/08/2008 |
| 7347656 | Vacuum processing apparatus and semiconductor manufacturing line using the same A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plural... | 03/25/2008 |
| 7331751 | Vacuum processing method A vacuum processing method includes an atmospheric transfer step of transferring a wafer in atmospheric air to a vacuum transfer chamber using atmospheric transfer equipment disposed in atmospheric air, a vacuum transfer step of transferring the wafer received from ... | 02/19/2008 |
| 7330308 | Alignment method of micro-alignment members and device thereof An alignment method of micro-alignment members includes a first step for moving a reticle, which is movably disposed between a first position and a second position, to face a first microscope in the first position, and for aligning a center of the reticle with an op... | 02/12/2008 |
| 7304738 | Method for actively aligning an optoelectronic device A method for actively aligning the components of an optoelectronic device. The optoelectronic device includes a first portion containing a laser and a second portion containing an optical element. In one embodiment, the optoelectronic device is a laser package havin... | 12/04/2007 |
| 7305277 | Methods and systems for position sensing of components in a manufacturing operation Methods and systems for position sensing are disclosed. In one embodiment, a method includes measuring at least three discrete point positions associated with a first component by using at least one transmitter having a known position and orientation and in a line o... | 12/04/2007 |
| 7283226 | Measurement system cluster Systems and methods are disclosed for measuring semiconductor wafers in a fabrication process using one or more of a plurality of measurement systems. A measurement system cluster is provided having a plurality of such measurement systems, along with a system for tr... | 10/16/2007 |
| 7280948 | System and method for integrating geometric models A system and method of integrating geometric models, comprising identifying a product to design or manufacture, generating a product template, initiating the generation of at least one geometry, associating knowledge with the geometry, performing operations on the g... | 10/09/2007 |
| 7265840 | Coupling method for coupling high power optical beams into an optical waveguide A method for determining an improved alignment to couple a beam having a high power level into a waveguide. The power of the beam is reduced to a minimum test power level. The reduced-power beam is aligned in a test alignment such that it forms a beam spot on the co... | 09/04/2007 |
| 7254458 | Systems and methods for metrology recipe and model generation Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generat... | 08/07/2007 |
| 7233841 | Vision system A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is p... | 06/19/2007 |
| 7231273 | Substrate processing apparatus and method including obstacle detection A camera is fixed to a camera fixture extending forward and upward from a rear end of an arm mechanism. The camera picks up the direction of extension of the arm mechanism when the substrate is carried in and out. If a normal still image in a hot plate unit previous... | 06/12/2007 |
| 7230682 | Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage medium An exposure method of forming pattern on object via projection optical system, including deciding optimal adjustment amount of adjustment device which adjusts image forming property of the projection optical system to optimize the image forming property under patter... | 06/12/2007 |
| 7224384 | 3D imaging system An optical imaging system comprising: a taking lens system that collects light from a scene being imaged with the optical imaging system; a 3D camera comprising at least one photosurface that receives light from the taking lens system simultaneously from all points ... | 05/29/2007 |
| 7221985 | On-screen calibration system and operating method thereof An on-screen calibration system for disc drives and the operating method thereof. The calibration system includes an autocollimator detecting the inclined angle of the stage of a disc drive. A control module is connected to the on-screen display module and a bar cod... | 05/22/2007 |
| 7215430 | Integrated system for quickly and accurately imaging and modeling three-dimensional objects An integrated system generates a model of a three-dimensional object. A scanning laser device scans the three-dimensional object and generates a point cloud. The points of the point cloud each indicate a location of a corresponding point on a surface of the object. ... | 05/08/2007 |
| 7209241 | Method for determining wavefront aberrations In a method for manufacturing an optical imaging system, wavefront aberrations caused by an optical imaging system are determined before and after transporting the optical imaging system. At least some of the aberration parameters which are determined in the precedi... | 04/24/2007 |
| 7206663 | Calibration cassette pod for robot teaching and method of using A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top pane... | 04/17/2007 |
| 7179334 | System and method for performing semiconductor processing on substrate being processed A semiconductor process system (10) includes a measuring section (40), an information processing section (51), and a control section (52). The measuring section (40) measures a characteristic of a test target film formed on a targe... | 02/20/2007 |
| 7164955 | Method for online characterization of a moving surface and device therefor The process for the on-line characterization of a surface in motion, preferably a galvannealed sheet, essentially comprises an industrial microscope associated with a stroboscopic laser illumination device, a positioning assembly, an assembly for acquiring and proce... | 01/16/2007 |
| 7139137 | Support mechanism, exposure apparatus having the same, and aberration reducing method A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic memb... | 11/21/2006 |
| 7126689 | Exposure method, exposure apparatus, and method for producing device An exposure apparatus for exposing a substrate with an exposure light beam passing through a mask comprises a movable stage for moving the substrate, a stage chamber for accommodating the movable stage, a transport system for transporting the substrate into the stag... | 10/24/2006 |
| 7116871 | Manipulators for fiber optic cable assemblies A manipulator for a fiber optic cable assembly (FOCA) provides microradian accuracy in control of the direction of a beam emanating from the FOCA. Such manipulators can control FOCAs to control the incidence angles of beams at a beam combiner in a beam-combining uni... | 10/03/2006 |
| 7112961 | Method and apparatus for dynamically measuring the thickness of an object A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a p... | 09/26/2006 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot A robotic positioning system that cooperates with a sensing system to correct robot motion is provided. The sensing system is decoupled from the sensors used conventionally to control the robot's motion, thereby providing repeatable detection of the robot's true pos... | 09/12/2006 |
| 7106433 | Measurement system cluster Systems and methods are disclosed for measuring semiconductor wafers in a fabrication process using one or more of a plurality of measurement systems. A measurement system cluster is provided having a plurality of such measurement systems, along with a system for tr... | 09/12/2006 |
| 7092860 | Hardware simulation systems and methods for vision inspection systems The systems and methods of this invention provide simulated images to vision inspection systems. The simulated images emulate the vision of a vision inspection system. Graphical models of objects in a virtual world and lens effects models are used to provide the sim... | 08/15/2006 |
| 7085622 | Vision system Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor proces... | 08/01/2006 |
