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Class 700/218 - Particular charging or discharging apparatus


Subclass of Class 700 - Data processing: generic control systems or specific applications
Definition: Subject matter further including a specific means to arrange
No. of patents: 328
Last issue date: 04/24/2012


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NumberTitleIssue Date
8165715Substrate processing system, substrate detecting apparatus, and substrate detecting method
A substrate processing system 1 comprises a first detecting part 40 configured to detect unprocessed wafers W, and a second detecting part 50 configured to detect processed wafers W. The first detecting part 40 is configured to detect whe...
04/24/2012
8150546Article transporting apparatus and method of operating the apparatus
An article transporting apparatus, according to one preferred embodiment, includes: a plurality of movable bodies for transporting articles, the movable bodies being movable between a plurality of article transfer locations; and
04/03/2012
8135495Systems and methods for processing packaged goods in the nature of cigarettes
A materials handling system for processing packaged tobacco products is disclosed. The system includes a picking area where individual packages of tobacco products are picked and placed onto a transport mechanism. The system also includes a picking support software ...
03/13/2012
8121723Substrate transfer system, substrate transfer apparatus and storage medium
A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring...
02/21/2012
8078312Methods for inserting a part into a storage section of a storage container and insertion tool arrangement
The invention refers to a Method (69) for automatically inserting at least one part (13) into a storage section (15) of a container (11), wherein the storage section (15) comprises a plurality of holder means (17a-...
12/13/2011
8065033Library apparatus and position controlling method
A library apparatus includes a cell unit having a plurality of cells arrayed in a matrix, a holder to insert the storage medium to one of the cells or extract the storage medium from the cell, and a position controller to move the holder over the cell unit in X-axis...
11/22/2011
8055378Device for controlling processing system, method for controlling processing system and computer-readable storage medium stored processing program
A processing system includes process modules, load lock modules, an equipment controller, and a machine controller. The equipment controller controls transfer and processing of wafers in the processing system. A transfer destination determining portion determines th...
11/08/2011
7987019Substrate transfer method and substrate transfer apparatus
The present invention is a substrate transfer apparatus including a transfer arm for transferring a substrate and a mounting portion for receiving the substrate transferred by the transfer arm from the transfer arm, including: a mounting portion detector provided at...
07/26/2011
7970489Method and device for the management of objects
The invention relates to a method for the automated monitoring and the management of objects, especially medications in hospital environments, wherein this method consists, from a network of n individual housings containing a set of n objects, of transmitting to at ...
06/28/2011
7930061Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate carrier between a docking station and a transport s...
04/19/2011
7925379Computer program products for packaging systems with breech loading chutes
Systems for enclosing at least one target product in a covering material, include an elongate product chute having an outer surface and opposing receiving and discharge end portions with an interior cavity extending therethrough and an elongate breech loading chute ...
04/12/2011
7925378Process apparatus with on-the-fly workpiece centering
A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The s...
04/12/2011
7925377Cluster tool architecture for processing a substrate
Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more...
04/12/2011
7813832Method for on the fly positioning and continuous monitoring of a substrate in a chamber
A method and apparatus for positioning a substrate in a substrate processing chamber. The method includes placing the substrate on a substrate transfer blade, moving the substrate transfer blade to a first position located in a transfer chamber, and capturing at lea...
10/12/2010
7783377Substrate loading and unloading apparatus
Substrate loading and unloading apparatus for automated loading and unloading of substrates (S) in a vacuum environment, for example the work region (A) of an electron beam lithography machine, comprises a substrate holder (13) with a substrate support table ...
08/24/2010
7747343Substrate processing apparatus and substrate housing method
A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate...
06/29/2010
7729798Substrate processing system, and method of control therefor, control program, and storage medium
A transfer schedule SA and a transfer schedule SB for an A lot and a B lot different from each other are generated on a transfer control table, the succeeding transfer schedule SB is moved ahead in the direction of a time axis within a range over which it does not i...
06/01/2010
7693600Article transport apparatus and a method of operating the apparatus
An article transporting apparatus, according to one preferred embodiment, includes: a plurality of movable bodies for transporting articles, the movable bodies being movable between a plurality of article transfer locations; and
04/06/2010
7603198Method of positioning thin flat objects in a processing machine
Method of positioning thin flat objects within a processing machine comprising an inserter for positioning these objects in a plurality of gripper members belonging to a conveyor drawing them discontinuously through successive stations. This method consists in calcu...
10/13/2009
7499767Methods and apparatus for positioning a substrate relative to a support stage
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and un...
03/03/2009
7440819Animation system for a robot comprising a set of movable parts
The object of the invention is to make the movable parts of a robot reproduce the movement of the movable parts of an animated object, via the transmission of movement parameters to the robot in a primary signal PS. The primary signal PS comprises sets of parameters...
10/21/2008
7433759Apparatus and methods for positioning wafers
A method for calibrating a controller of a robotic arm in a microelectronics manufacturing apparatus that includes storing a default position for an edge detector, moving a blade on the robotic arm based on the default position of the edge detector such that at leas...
10/07/2008
7433756Calibration of high speed loader to substrate transport system
In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the ...
10/07/2008
7426423Crane or excavator for handling a cable-suspended load provided with optimised motion guidance
The invention refers to a crane or excavator for the transaction of a load, which is carried by a load cable with a turning mechanism for the rotation of the crane or excavator, a seesaw mechanism for the erection or incline of an extension arm and a hoisting gear f...
09/16/2008
7424339Method and system for acquiring delivery position data of carrying apparatus
In a searching step, a laser beam by a laser beam projector is projected toward an object to be detected, which is previously disposed at a delivery position, while moving a holding member which is positioned apart from the object to be detected. In a delivery posit...
09/09/2008
7409263Methods and apparatus for repositioning support for a substrate carrier
In a first aspect, a first method is provided repositioning support provided by an end effector. The first method includes the steps of (1) employing the end effector to support a substrate carrier by a bottom of the substrate carrier; (2) transferring the substrate...
08/05/2008
7395133Environmentally controllable storage system
A storage system having one or more storage modules each comprising a substantially cylindrical housing having a curved sidewall portion extending between a top wall portion and a bottom wall portion, with the housing being disposed about a central axis. A carousel ...
07/01/2008
7372250Methods and apparatus for determining a position of a substrate relative to a support stage
A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is suppor...
05/13/2008
7367769Semiconductor production system, cluster tool, control method of semiconductor production system and maintenance method of cluster tool
PS control sections MC1, MC2 configured to independently control the operations in process ships PS1, PS2 are provided respectively, and an LM control section MC3 configured to control the operation in a loader module LM is provide...
05/06/2008
7366834System and method for record retention date in a write once read many storage system
This invention provides a specified retention date within a data set that is locked against deletion or modification within a WORM storage implementation. This retention date scheme does not utilize any proprietary application program interfaces (APIs) or protocols,...
04/29/2008
7363107Substrate transfer system
A substrate transfer system is used in fabricating a liquid crystal display (LCD) device. The system includes a cassette having a bar code, a cassette stocker to store the cassette; an auto guided vehicle that is able to transfer the cassette; a moving path unit to ...
04/22/2008
7356419Deriving product information
A method and a system determine that product information acquired from an electronic catalog includes a product identifier and chemical structure information that is associated with the product identifier. A substance identifier and a quality identifier for a chemic...
04/08/2008
7347334Tape library storage system having a switching rack mechanism
An apparatus for transporting a storage media cartridge within a data storage library is disclosed. The apparatus includes a first pair of rack and guide rail, a second pair of rack and guide rail, and an accessor capable of moving on the first pair of rack and guid...
03/25/2008
7350218Optical-disk drive and optical-disk ejection control method
An optical disk drive comprises a drive body, a spindle motor, an optical pickup device, a sled motor, a tray, a loading motor, and a controller. When the loaded optical disk is ejected, the controller controls the sled motor and the loading motor so that the return...
03/25/2008
7326565Storage apparatus
The invention provides an incubator 1 wherein a microplate transport device 5 is disposed inside a chamber 11 centrally thereof. The transport device 5 comprises a transport table 50 for placing a microplate thereon and is capable ...
02/05/2008
7324710Method and device for determining nominal data for electronic circuits by capturing a digital image and compare with stored nominal data
A method and a corresponding device for determining nominal mechanical data for an electronic device by automatic image processing of a digital image of a specimen of said electronic device. In the method, an object in said digital image, which object corresponds to...
01/29/2008
7323362Manufacturing system and apparatus for balanced product flow with application to low-stress underfilling of flip-chip electronic devices
A system (100) for manufacturing product, in which a first work station (101) is operable to perform a first manufacturing action on the product parts; this first station has a first entrance (101a) and a first exit 101b). A...
01/29/2008
7321299Workpiece handling alignment system
Method and apparatus for use in setting up workpiece treatment or processing equipment. A disclosed system processes silicon wafers that are treated during processing steps in producing semiconductor integrated circuits. The processing equipment includes a wafer sup...
01/22/2008
7318044Information providing system, information providing device, and system for controlling robot device
The present invention makes it possible and easier to serve optimum robot components/devices/accessories by means of an information service system including personal terminal devices (31A to 31C) connected to an information communication network via a ...
01/08/2008
7317961Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus
A substrate processing apparatus includes a plurality of cells each including a predetermined processing unit, a transport mechanism, and a cell controller. The cell controller independently controls operations in each cell in accordance with transport setting and p...
01/08/2008
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