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| Number | Title | Issue Date |
| 7275016 | Method and system for providing problem identification and trouble-shooting services In a complex plant most of the problems or errors will occur only once. Therefore corrective maintenance and trouble-shooting staff can not go back or hark back to ready-made solutions for these problems or errors. The present invention provides a method and a compu... | 09/25/2007 |
| 7275234 | System and method of automatically generating kerf design data A method and system is provided to use the same design manipulation processes for both chip design and kerf design. Concurrent generation of kerf designs and chip designs provides a consistent, accurate, and repeatable process. Improved quality of wafer testing resu... | 09/25/2007 |
| 7273772 | Method for manufacturing thin film transistor array panel The present invention relates to a method of manufacturing a thin film transistor array panel and apparatus and more particularly to an apparatus containing an in-situ fluorine generation chamber. ... | 09/25/2007 |
| 7272544 | Integrated modeling through symbolic manipulation Integrated modeling and symbolic manipulation is leveraged for the derivation, construction, maintenance, and reuse of application-independent models. Related models created for different applications share a common ancestry and maintain model consistency while enab... | 09/18/2007 |
| 7272808 | On-chip variability impact simulation and analysis for circuit performance An apparatus, method and system for performing a race analysis on an integrated circuit design which includes incorporating effects of on-chip transistor gate length (Lgate) and resistance variations into the race analysis and modeling on circuit performance while t... | 09/18/2007 |
| 7272531 | Aggregation of asset use indices within a process plant A method of monitoring an entity within a process plant wherein the entity includes a plurality of lower level entities, includes acquiring a plurality of use indices, acquiring a plurality of weighting values, and creating an aggregate use index from a combination ... | 09/18/2007 |
| 7272460 | Method for designing a manufacturing process, method for providing manufacturing process design and technology computer-aided design system A method for designing a manufacturing process of an electronic device includes calibrating a technology computer-aided design system by fitting simulation parameters of manufacturing process and electrical characteristic simulations, using first feature of commerci... | 09/18/2007 |
| 7272454 | Multiple-input/multiple-output control blocks with non-linear predictive capabilities A process controller that may be used to control a process having a set of process outputs effected by a set of process control input signals includes a multiple-input/multiple output controller that uses the process outputs to develop the set of process control inp... | 09/18/2007 |
| 7272818 | Creation of an object within an object hierarchy structure An object generator provides for creation of object(s) in an object hierarchy structure. In response to a command to expand a node/object, the object generator provides an initiator node that facilitates generation of a new object within the object hierarchy upon ex... | 09/18/2007 |
| 7271012 | Failure analysis methods and systems A method and system for exposing the delicate structures of a device encapsulated in a mold compound such as an integrated circuit (IC). A laser is used to ablate the mold compound and thus remove it, exposing the underlying structure. The laser beam can be steered ... | 09/18/2007 |
| 7270932 | Imaging composition and method Imaging compositions and methods of using the compositions are disclosed. The imaging compositions are sensitive to low levels of energy such that upon application of the low levels of energy the compositions change color or shade. The compositions may be used in me... | 09/18/2007 |
| 7271913 | Sensor systems and methods for remote quantification of compounds A system and method employing optical disc drives for quantitative analysis of physical, chemical and biochemical parameters are provided. The system includes a robotic arm for transmitting a disc including at least one sensor spot through a variety of stations that... | 09/18/2007 |
| 7268000 | Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step A method and a controller for the chemical mechanical polishing (CMP) of substrates and, in particular, for the chemical mechanical polishing of metallization layers is disclosed. In a linear model of the CMP process, the erosion of the metallization layer to be tre... | 09/11/2007 |
| 7269280 | Method and its apparatus for inspecting a pattern In a pattern inspecting apparatus, images of places which can be expected to be the same pattern are compared with one another. However, a comparison of images obtained by different stage scans and the occurrence of a place capable of being inspected only once lead ... | 09/11/2007 |
| 7268089 | Method for forming PE-TEOS layer of semiconductor integrated circuit device A method of forming a PE-TEOS layer of a semiconductor IC device provides uniformly thick PE-TEOS layers on a batch of wafers. First, a loading wafer cassette is prepared to provide the wafers to be processed. Next, a process atmosphere is pre-created in a processin... | 09/11/2007 |
| 7269469 | System and method for scheduling manufacturing jobs for a semiconductor manufacturing tool A system and method are provided for scheduling a monitor job for a tool in a semiconductor manufacturing environment and for optimizing the scheduling of jobs in such an environment. In one example, the method includes receiving a monitor job and monitoring a statu... | 09/11/2007 |
| 7269470 | Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device An aligner evaluation system includes (a) an error calculation module configured to calculate error information on mutual optical system errors among a plurality of aligners; (b) a simulation module configured to simulate device patterns to be delineated by each of ... | 09/11/2007 |
| 7266417 | System and method for semiconductor manufacturing automation The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequ... | 09/04/2007 |
| 7266502 | Feature centric release manager method and system A feature centric method of and system for monitoring the development and release process of a product, monitoring the development and release of a product, where the product is characterized by having a plurality of features is described. The method steps, which th... | 09/04/2007 |
| 7266802 | Drawing apparatus and drawing method A drawing apparatus, for forming a desired drawing pattern by drawing the pattern directly on a drawing target surface using a drawing engine equipped with a plurality of drawing devices arranged along a direction of relative movement of the drawing target surface, ... | 09/04/2007 |
| 7265382 | Method and apparatus employing integrated metrology for improved dielectric etch efficiency A method and apparatus for processing a semiconductor wafer is provided for reducing dimensional variation by feeding forward information relating to photoresist mask CD and profile and underlying layer thickness measured at several points on the wafer to adjust the... | 09/04/2007 |
| 7266418 | Substrate processing apparatus, history information recording method, history information recording program, and history information recording system A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, ... | 09/04/2007 |
| 7261832 | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies Methods and devices for mechanical and/or chemical-mechanical planarization of semiconductor wafers, field emission displays and other microelectronic substrate assemblies. One method of planarizing a microelectronic substrate assembly in accordance with the inventi... | 08/28/2007 |
| 7262408 | Process and apparatus for modifying a surface in a work region An apparatus and process for manufacturing changes of a substrate in a work region which is 100×100×100 microns or smaller is described. The apparatus uses a plasma source adjacent to the work region to produce radiation or matter which changes the surface. An ato... | 08/28/2007 |
| 7261510 | Overhead travelling carriage system The present invention provides an overhead travelling carriage system in which an overhead travelling carriage 110 is run along a running rail to convey a cassette 14 between processing devices 111. The overhead travelling carriage system is pro... | 08/28/2007 |
| 7263408 | Method and system for converting tool process ability based upon work in progress characteristics The present invention is generally directed to methods and systems for converting tool processing ability based upon work in progress considerations. In one illustrative embodiment, the method includes identifying a plurality of wafers to be processed in one of a pl... | 08/28/2007 |
| 7259097 | Control system for multi-layer chemical mechanical polishing process and control method for the same A method for controlling an apparatus to perform a multi-layer chemical mechanical polishing (CMP) process with a polishing rate for a plurality of process runs. For each process run, a multilayered structure with a first thickness formed on a wafer is polished and ... | 08/21/2007 |
| 7260444 | Real-time management systems and methods for manufacturing management and yield rate analysis integration A real-time management method for manufacturing management and yield rate analysis integration. A plurality of yield rates relating to wafer products are summed and averaged for a historical yield rate. Multiple representational inline QC parameters are selected. A ... | 08/21/2007 |
| 7260812 | Method and apparatus for expediting convergence in model-based OPC One embodiment of the invention provides a system that expedites or stabilizes convergence in a model-based optical proximity correction (OPC) process. During operation, the system receives a layout for an integrated circuit. Next, the system dissects shapes in the ... | 08/21/2007 |
| 7260442 | Method and system for mask fabrication process control A mask fabrication system. The mask fabrication system contains a processing tool, a metrology tool, and a controller. The processing tool processes a mask. The metrology tool inspects the mask to obtain an inspection result. The controller generates a manufacturing... | 08/21/2007 |
| 7260509 | Method for estimating changes in product life resulting from HALT using quadratic acceleration model A method provides early estimation of product life using accelerated stress testing data. In an embodiment, data measured from a product operating in a first, high-stress environment is used to predict how long the product will operate in a second, normal operating ... | 08/21/2007 |
| 7260803 | Incremental dummy metal insertions A method and system for performing dummy metal insertion in design data for an integrated circuit is disclosed, wherein the design data includes dummy metal objects inserted by a dummy fill tool. After a portion of the design data is changed, a check is performed to... | 08/21/2007 |
| 7260443 | System and program for making recipe and method for manufacturing products by using recipe A system for making a recipe for each of manufacturing tools used to manufacture products includes a merging unit merging product information for the products and process information for each of manufacturing processes used for the products to make intermediate reci... | 08/21/2007 |
| 7260662 | I2C bus controlling method A module has an IC for communication control (a PHY unit) and an EEPROM (or MCU) connected to the PHY unit via an I2C bus. When a software reset is triggered while the PHY unit reads non-volatile register (NVR) data from the EEPROM (or MCU) via the I2C bus, the modu... | 08/21/2007 |
| 7258953 | Multi-layer registration and dimensional test mark for scatterometrical measurement A layered test pattern for measuring registration and critical dimension (CD) for multi-layer semiconductor integrated circuits is disclosed. A first layer includes a first pattern having vertical and horizontal portions. A second layer is formed over the first laye... | 08/21/2007 |
| 7259043 | Circular test pads on scribe street area A semiconductor wafer design and process having test pads (36) reducing cracks generated during the wafer saw process from extending into and damaging adjacent die. The present invention provides a plurality of circular test pads (36) in a wafer scribe... | 08/21/2007 |
| 7257457 | System and method for monitoring semiconductor production apparatus A plurality of pieces of process data are acquired from a semiconductor production apparatus while it is in operation, and then, a multivariate analysis model is created using at least a portion of the plurality of pieces of process data. ... | 08/14/2007 |
| 7257459 | Method and apparatus for scheduling pilot lots A method includes identifying a queue of workpiece lots awaiting processing in a process tool. At least one of the workpiece lots is associated with an obsolete control thread for controlling the process tool. Each of the plurality of workpiece lots is modeled as a ... | 08/14/2007 |
| 7255273 | Descriptor for identifying a defective die site The present invention relates to the marking and identification of defective die sites on a mounting substrate. A mounting substrate is provided which is inspected and tested for visual and electrical defects. Information relating to the functionality and/or various... | 08/14/2007 |
| 7257494 | Inter-process sensing of wafer outcome A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a process... | 08/14/2007 |
