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| Number | Title | Issue Date |
| 8135486 | Substrate position determining method and substrate position detecting method Even in case that a wafer is so greatly deviated that a peripheral portion of the wafer cannot be detected, position determination of the wafer can be performed without inflicting a damage on the wafer. The wafer peripheral portion, which is a target, is detected ba... | 03/13/2012 |
| 8135485 | Offset correction techniques for positioning substrates within a processing chamber A method for aligning a substrate to a process center of a support mechanism is provided. The method includes determining substrate thickness after substrate processing at a plurality of orientations and at a plurality of radial distances from a geometric center of ... | 03/13/2012 |
| 8112171 | Substrate apparatus calibration and synchronization procedure A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the fi... | 02/07/2012 |
| 8099184 | Load compensation for robotic applications Disclosed is a method and system for compensating for the load a part places on a part positioner system that positions the part for work operations by a robot. The part positioner system rotates a part holding assembly about the axis of rotation of a shoulder drive... | 01/17/2012 |
| 8086340 | Hub posture detection method and apparatus Distance meters measure distances from a reference position to a first area including an upper pitch circle portion and a second area including a lower pitch circle portion. Center coordinates of the hub is calculated based on respective center coordinates of two hu... | 12/27/2011 |
| 8005563 | System for assembling aircraft A system automatically moves large scale components of a vehicle such as an airplane, into final assembly alignment. A noncontact measurement system determines the locations of aerodynamically significant features on each of the components. The measured locations of... | 08/23/2011 |
| 7953509 | Power assist apparatus and control method thereof In a control method for a power assist apparatus, a pressing force acting on a workpiece held by a workpiece holding apparatus is detected, a determination is made as to whether or not the detected pressing force exceeds a preset threshold, a determination is made a... | 05/31/2011 |
| 7917242 | System, method, and computer program product for computing jack locations to align parts for assembly Illustrative computer-executable methods, systems, and computer software program products compute assembly jack locations to align parts for assembly. Initial locations of at least one component to be moved and a desired final location for the at least one component... | 03/29/2011 |
| 7885723 | Setting device, component mounting system, program and calculating method Technology is provided for changing a mounting angle of a component to reduce the amount of relative displacement between a mounting head and a board. A component, for which a mounting angle can be changed, is specified based on information stored in a mounting data... | 02/08/2011 |
| 7873432 | Manufacturing inspection/analysis system analyzing device, analyzing device control program, storage medium storing analyzing device control program, and method for manufacturing inspection and analysis A position change section of a processing device changes the position of a treatment object, at the time of performing a process by a process section, to correspond to a predetermined position in conformity to the treatment object. An inspection device inspects the ... | 01/18/2011 |
| 7869895 | System, method, and computer program product for computing orientation alignment transfer tool locations to transfer predicted cruise orientation alignment of an as-built airplane Illustrative computer-executable methods, systems, and computer software program products compute orientation alignment transfer tool location. Orientation of at least one aerodynamically significant feature of an as-built airplane is automatically determined. Orien... | 01/11/2011 |
| 7774083 | Methods and systems for position sensing Methods and systems for position sensing are disclosed. In one embodiment, a method includes measuring at least three discrete point positions associated with a first component using at least one transmitter having a known position and orientation and in a line of s... | 08/10/2010 |
| 7738987 | Device and method for controlling substrate processing apparatus Depending on the degree of microfabrication requested for each wafer lot, transfer of wafers is controlled. A substrate processing apparatus includes a plurality of PMs 400 and an LLM 500 and is controlled by an EC 200. The EC 200 include... | 06/15/2010 |
| 7729793 | System and method for organizing work pieces A system and method provides computer-assisted organization of workpieces to be processed in a production process, wherein the workpiece in question is subjected to at least one processing, preferably to a plurality of different processings. A workpiece position is ... | 06/01/2010 |
| 7706907 | Substrate processing apparatus, substrate processing method, computer program, and storage medium A substrate processing apparatus is provided, which can place a substrate in a correct position, even though a positional error occurs between the substrate carried in a processing vessel and a placing table. This substrate processing apparatus can take a necessary ... | 04/27/2010 |
| 7706908 | Method for positioning a wafer The invention relates to a method for positioning a wafer (3) with a reference mark (6) in a vacuum processing unit with a transport chamber containing a transport device (2, 20, 21) for moving the wafers (3) in a plane to a process chamb... | 04/27/2010 |
| 7643897 | Method for automatically checking sequence of loading boats and batches for semiconductor manufacturing process A method for automatically checking a sequence of loading boats and batches for a semiconductor manufacturing process is provided. According to a developed logic, a loading sequence is automatically calculated by a system. By comparing the actual loading sequence wi... | 01/05/2010 |
| 7519448 | Method for determining position of semiconductor wafer, and apparatus using the same A light source emits light toward a semiconductor wafer, and a light receiving sensor detects light passing a peripheral edge of the semiconductor wafer. Each coordinates of the peripheral edge of the semiconductor wafer is obtained from a result of the detection. F... | 04/14/2009 |
| 7512456 | Substrate processing apparatus When a first substrate transferred outwardly from an indexer cell is the last substrate prior to reticle change in an exposure apparatus, the outward transfer of a second substrate to be processed subsequently to the first substrate from the indexer cell is temporar... | 03/31/2009 |
| 7439531 | Alignment systems and methods for lithographic systems An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi... | 10/21/2008 |
| 7426419 | Scheduling system and method Photolithography operation in a wafer fab using relative weightings of work in progress to iteratively schedule wafers. ... | 09/16/2008 |
| 7406360 | Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment A dummy substrate (17) differs from a substrate to be processed in having a first guide (G1) for assisting centering, however, it can be handled as a substitute of the substrate to be processed. In a process chamber (2), a second guide (G2 | 07/29/2008 |
| 7390681 | Derived metric for monitoring die placement A method for monitoring die placement includes receiving measurements of an alignment of a semiconductor die mounted in a package by a die packaging tool. The measurements include center offset metrics associated with displacement of a center of the die. A plurality... | 06/24/2008 |
| 7372549 | Lithographic apparatus and device manufacturing method A lithographic apparatus is disclosed that has a support structure constructed to support a patterning object, the patterning object being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table... | 05/13/2008 |
| 7359842 | Soft sensor device and device for evaluating the same A case base generator divides an input space of history data into unit input spaces according to a desired output allowable error, and creates a representative case from the history data arranged in the unit input spaces, thereby generating a case base. A case retri... | 04/15/2008 |
| 7356580 | Plug and play sensor integration for a process module A process chamber with a computer system that controls the process chamber is connected to one or more sensors, which are used to monitor the process in the process chamber. The sensors are connected to the computer system in a client/server relationship, in a way t... | 04/08/2008 |
| 7353076 | Vacuum processing method and vacuum processing apparatus The invention provides a semiconductor processing apparatus having a high throughput capable of appropriately coping with the positional displacement that may occur during transfer of the wafer after correcting the position thereof, without slowing down the transfer... | 04/01/2008 |
| 7346847 | Power tool control system user interface A power tool control system allows a user to operate a power tool through a graphical user interface communicatively coupled with a non-contact measurement and alignment device. The graphical user interface correlates user engageable selectors with a logically relat... | 03/18/2008 |
| 7346415 | Semiconductor wafer positioning method, and apparatus using the same The intensity of light of a predetermined wavelength corresponding to the type of a protective tape joined to the surface of a semiconductor wafer is adjusted by a controller, and a holding stage for holding the semiconductor wafer is scanned rotationally. At this t... | 03/18/2008 |
| 7337552 | Method and apparatus for registration with integral alignment optics A method and apparatus for front to back substrate registration is described. Alignment characteristics of features on surfaces of substrates can be used to physically align substrates with a multiplicity of integrated alignment optics. Measurement of offsets of the... | 03/04/2008 |
| 7332732 | Alignment systems and methods for lithographic systems An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi... | 02/19/2008 |
| 7329888 | Alignment systems and methods for lithographic systems An alignment system for a lithographic apparatus has a source of alignment radiation; a detection system that has a first detector channel and a second detector channel; and a position determining unit in communication with the detection system. The position determi... | 02/12/2008 |
| 7310566 | Quality control method for two-dimensional matrix codes on metallic workpieces, using an image processing device A quality control method for two-dimensional matrix codes on metallic workpieces, the codes being in the form of stamped marking dots is disclosed. The stamping process for the marking dots is carried out by a marking tool (17) with the aid of predetermined d... | 12/18/2007 |
| 7310789 | Use of overlay diagnostics for enhanced automatic process control Disclosed are apparatus and methods for obtaining and analyzing various unique metrics or “target diagnostics” from one or more semiconductor overlay targets. In one embodiment, an overlay target is measured to obtain one or both of two specific types of target ... | 12/18/2007 |
| 7305277 | Methods and systems for position sensing of components in a manufacturing operation Methods and systems for position sensing are disclosed. In one embodiment, a method includes measuring at least three discrete point positions associated with a first component by using at least one transmitter having a known position and orientation and in a line o... | 12/04/2007 |
| 7302306 | Determining processing times at stations in an assembly system An assembly system may assemble articles of manufacture at a plurality of assembly regions and may log a time at which each article of manufacture enters or exits an assembly region. Assembly regions may include sequential assembly stations that process the articles... | 11/27/2007 |
| 7287317 | Apparatus for mounting semiconductor chips An apparatus for mounting semiconductor chips with a transport device that transports the substrates in cycles to a bonding station where a semiconductor chip is deposited comprises a receiving table with a support surface on which the substrates are presented one a... | 10/30/2007 |
| 7290242 | Pattern generation on a semiconductor surface A method of forming a pattern of elements is shown. In one embodiment, the method is used to create a reticle. In another embodiment, the method is used to further form a number of elements on a surface of a semiconductor wafer. A pattern on a reticle is first gener... | 10/30/2007 |
| 7286890 | Transfer apparatus for target object A processing system includes a transfer chamber, a plurality of chambers connected to the transfer chamber, a transfer apparatus disposed in the transfer chamber, and a control section configured to control the transfer apparatus. The transfer apparatus includes a b... | 10/23/2007 |
| 7274971 | Methods and apparatus for electronic device manufacturing system monitoring and control In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more... | 09/25/2007 |
