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Class 700/110 - Defect analysis or recognition


Subclass of Class 700 - Data processing: generic control systems or specific applications
Definition: Subject matter wherein the data processing system or calculating
No. of patents: 698
Last issue date: 05/15/2012


1                      
NumberTitleIssue Date
8180472Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device
A control method for a semiconductor manufacturing apparatus, comprising: generating, as log data, a history of operation states of the semiconductor manufacturing apparatus when a wafer is processed by the semiconductor manufacturing apparatus; specifying, based on...
05/15/2012
8165913System, method, program for assigning virtual attribute to product, and system, method, and program for tracing cause of phenomenon occurring in product
A system for tracing a cause of a phenomenon occurring in products produced in a production process chain is provided. The system is provided with a storage unit for storing a virtual attribute in association with corresponding second products, a receiving unit for ...
04/24/2012
8165706Methods for generating representations of flatness defects on wafers
Methods are disclosed for generating a representation of flatness defects on a wafer. Data is received describing the thickness of the wafer at a plurality of points on a wafer divided into a plurality of sites. A reference plane is defined for each of the plurality...
04/24/2012
8145338Systems and methods for detecting and rejecting defective absorbent articles from a converting line
The present disclosure relates to systems and processes for detecting and rejecting defective absorbent articles from a converting line. In particular, the systems and methods may utilize feedback from technologies, such as vision systems, sensors, remote input and ...
03/27/2012
8126581Improving design manufacturing, and transportation in mass manufacturing through analysis of defect data
A system for optimizing at least one of a design, production, or testing process of a product in a mass manufacturing process includes: a central processing unit; a network interface operatively connected to the central processing unit; a storage device; a memory in...
02/28/2012
8112170Method and system for machining process control
A method and system for controlling machining processes are provided. The system includes a computer system communicatively coupled to a database. The computer system is configured to receive data relating to manufactured part processes, identify at least one machin...
02/07/2012
8108805Simplified micro-bridging and roughness analysis
The invention provides apparatus and methods for processing substrates using pooled statistically based variance data. The statistically based variance data can include Pooled Polymer De-protection Variance (PPDV) data that can be used to determine micro-bridging de...
01/31/2012
8086339Electronic device history record and product release system
A method for monitoring the manufacture of molded ophthalmic lenses is disclosed. The method monitors the occurrence of predetermined events and records such events in a device history record and a shadow table. ...
12/27/2011
8060232Potted insert installation and validation
Methods and computer storage media provide for the installation of potted inserts and installation validation. According to embodiments described herein, an insert is placed within an insert aperture of a panel or other structure. Potting compound is injected into a...
11/15/2011
8041443Surface defect data display and management system and a method of displaying and managing a surface defect data
A surface defect data display and management system comprises a risk score calculation unit for calculating the magnitude of an influence a surface defect on a wafer detected by a wafer inspection system or review system has upon a reduction in the yield of a final ...
10/18/2011
8019457Method of controlling result parameter of IC manufacturing procedure
A method of controlling a result parameter of an IC manufacturing procedure is described. The value of at least one first variable of a process correlated with the result parameter is acquired, and the difference between the predicted value and the target value of t...
09/13/2011
8019456Product repair support system, product manufacturing system, and product manufacturing method
A product repair support system is configured to support repair of a product rejected in an inspection based on a prescribed inspection standard. The product repair support system includes: repair information storage part; reference information storage part; and rep...
09/13/2011
8005562Process-parameter prognostic system for predicting shape of semiconductor structure, semiconductor fabrication apparatus having the system, and method of using the apparatus
Provided are a process-parameter prognostic system for predicting the shape of a semiconductor structure, a semiconductor fabrication apparatus having the process-parameter prognostic system, and a method of using the same. The process-parameter prognostic system ma...
08/23/2011
8000827Processing information management system in a plasma processing tool
A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a pr...
08/16/2011
7983779Fail-to-safe fault detection system for continuous production line
Some embodiments for a fault detection apparatus may include one or more monitors to detect at least three operating states of a sensor, such as pass, fail, and inoperative so as to enable a manufacturing facility to differentiate between situations in which a conta...
07/19/2011
7974725Integrated testing system and method for validation of a manufacturing automation system
A method of testing a physical manufacturing automation system for manufactured work pieces is provided via a testing system and includes connecting a computer-simulated manufacturing automation system to a controller of the physical manufacturing automation system,...
07/05/2011
7945345Semiconductor manufacturing apparatus
A semiconductor manufacturing apparatus includes a first program on a controller and a second program on an interface board between the controller and controlled devices. Both of the programs update their own counters and exchange their counter values with each othe...
05/17/2011
7937179Dynamic inline yield analysis and prediction of a defect limited yield using inline inspection defects
In one embodiment, a method for predicting yield includes calculating a criticality factor (CF) for each of a plurality of defects detected in an inspection process step of a wafer, and determining a yield-loss contribution of the inspection process step to the fina...
05/03/2011
7925367Defect review and classification system
The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially exe...
04/12/2011
7920934Manufacturing system and controller, controlling method, controlling system, and control program for the manufacturing system
A manufacturing system, located at a manufacturing system site, includes a discharger for discharging a liquid material having fluidity onto a substrate, communication means for transmitting and receiving data through a communication line, and monitoring means for m...
04/05/2011
7917241Method and system for increasing throughput during location specific processing of a plurality of substrates
A method and system of location specific processing on a plurality of substrates is described. The method comprises measuring metrology data for the plurality of substrates. Thereafter, the method comprises computing correction data for a first substrate using the m...
03/29/2011
7908024Method and system for detecting tool errors to stop a process recipe for a single chamber
A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with t...
03/15/2011
7848837Method and apparatus for monitoring the quality of a machining operation
A method for monitoring the quality of a machining operation, such as a friction stir welding operation, in which a tool is rotatably driven by a motor during the machining operation. The energy consumption of the motor is determined from the initiation and to the c...
12/07/2010
7797068Defect probability calculating method and semiconductor device manufacturing method
A defect probability calculating method includes assuming a plurality of process conditions containing process variations caused in a process of forming a pattern on a substrate based on a design pattern, acquiring appearance probabilities of the respective process ...
09/14/2010
7774082Substrate processing method and storage medium having program stored therein
First feedforward calculation is executed when a preprocessing surface profile is measured and a processing chamber with its processing parameter value having been obtained through the first feedforward calculation judged to be within an allowable range is determine...
08/10/2010
7742834Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same
According to the present, there is proved a semiconductor fabrication apparatus management system having: a sensor which monitors and outputs a plurality of apparatus parameters of a semiconductor fabrication apparatus which fabricates a semiconductor device;...
06/22/2010
7725208Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
Systems, methods and mediums are provided for dynamic adjustment of sampling plans in connection with a wafer (or other device) to be measured. The invention adjusts the frequency and/or spatial resolution of measurements on an as-needed basis when one or more event...
05/25/2010
7698012Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
Systems, methods and mediums are provided for dynamic adjustment of sampling plans in connection with a wafer (or other device) to be measured. A sampling plan provides information on specific measure points within a die, a die being the section on the wafer that wi...
04/13/2010
7689312Downstream error handling in manufacturing systems
A method, computer program product, and system for handling an error that occurs during processing of a job in a manufacturing system are provided. The method, computer program product, and system provide for determining a first location in the job where a first sub...
03/30/2010
7689313Electronic device history record and product release system
A method for monitoring the manufacture of molded ophthalmic lenses is disclosed. The method monitors the occurrence of predetermined events and records such events in a device history record and a shadow table. ...
03/30/2010
7684887Advanced process control method and advanced process control system for acquiring production data in a chip production installation
For monitoring production data, a grouping table in which machines are grouped into machine groups, machine components are grouped into machine component groups, chip manufacturing recipes are grouped into recipe groups or chip manufacturing parameters are grouped i...
03/23/2010
7676295Processing information management in a plasma processing tool
A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an ident...
03/09/2010
7664562Automatic defect review and classification system
The invention proposes a system that interrupts a processing associated with an ADC having low priority when an ADC processing cannot catch up with ADR by an ADC alone that is not under execution but uses an ADC for an ADR having high priority. To preferentially exe...
02/16/2010
7660643Solder material test apparatus, and method of controlling the same
A solder material test apparatus includes a control unit and a storage unit which stores master data in advance in which a printing process time when a printing process is performed by using a test-sample solder material is associated with deterioration degree data ...
02/09/2010
7647132Method and system for problem case packaging
A method of problem case packaging handling consists collecting manufacturing problem information from entities associated with fabrication of a semiconductor product; and distributing the manufacturing problem information into problem cases which are stored in a pr...
01/12/2010
7640070Real-time fault detection and classification system in use with a semiconductor fabrication process
A real-time fault detection and classification (FDC) system, which is in use with a semiconductor fabrication process having a first sub-fabrication process and a second sub-fabrication process, includes a computer integrated manufacturing (CIM) host adopting a SEMI...
12/29/2009
7596419Inspection system and method of making and using same
An inspection system adapted to perform retro positive material identification of components of a multi-feature system. The inspection system comprises an electronic drawing, a positive material identification database, a field load sheet and a data logger. The elec...
09/29/2009
7584012Automatic defect review and classification system
An automatic defect review and classification system including at least one automatic defect review apparatus for specifically observing defect portions of a sample and at least one automatic defect classification apparatus for automatically classifying the defects,...
09/01/2009
7577486Quality improvement system
A quality improvement system, which automatically performs engineering analysis and problem coping to improve the quality of semiconductor products. The quality improvement system is connected to a plurality of external databases, which store semiconductor product q...
08/18/2009
7574279Manufacturing system and controller, controlling method, controlling system, and control program for the manufacturing system
A manufacturing system, located at a manufacturing system site, includes a discharger for discharging a liquid material having fluidity onto a substrate, communication means for transmitting and receiving data through a communication line, and monitoring means for m...
08/11/2009
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