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Class 700/108 - Performance monitoring


Subclass of Class 700 - Data processing: generic control systems or specific applications
Definition: Subject matter wherein the data processing system or calculating
No. of patents: 998
Last issue date: 05/29/2012


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NumberTitleIssue Date
7098617Advanced programmable closed loop fan control method
A fan control system and method that maintains the operating temperature of computer and electronic devices or components at about a predetermined control level to minimize power consumption and audible noise. The fan control system is a programmable closed loop sys...
08/29/2006
7097351System of monitoring operating conditions of rotating equipment
A monitoring system for rotating equipment includes detection of temperature conditions in various areas of the system including motor and pump bearings, mechanical seal environment including seal flush, seal cooler and seal reservoir and process fluid temperature. ...
08/29/2006
7096468Programmer/feeder system task linking program
A task linking program is provided for using a computer for interacting with on-line and off-line programming systems to perform tasks related to programming microdevices. The program is secure in being capable of being setup only in an administrator mode where micr...
08/22/2006
7096294Method and computer program product for graphically providing interrupt request (IRQ) routing information
A method and an associated computer program product are provided for obtaining interrupt requests (IRQ) routing information in a more efficient and intuitive manner. In this regard, a graphical representation of the routing of a plurality of IRQs capable of being as...
08/22/2006
7096085Process control by distinguishing a white noise component of a process variance
A method, system and medium is provided for enabling improved control systems. An error, or deviation from a target result, is observed for example during manufacture of semiconductor chips. The error within standard deviation is caused by two components: a white no...
08/22/2006
7096082Design control document linking template
A control document template streamlines the creation of control documents and facilitates consistent entry of data. A multi-page spreadsheet file incorporates the design and process failure mode effects analysis pages, the control plan, tools for forming the process...
08/22/2006
7094292Mechanism for applying paint to canvas
A mechanism and method for depositing oil paints, acrylics, or other textural paints provides a means for automating the process of painting a picture. The process can be programmed into a data base which is stored and used at will, or the artist can utilize control...
08/22/2006
7096086Apparatus, method and program for generating a recipe for an inspection tool
An apparatus for generating a recipe for an inspection tool includes an extracting module extracting recipe parameters to be set to the inspection tool from among a group of recipe, a recipe candidate generator generating recipe candidates by combining settings of r...
08/22/2006
7092777Intelligent agent system and method for evaluating data integrity in process information databases
A data integrity module and method for evaluating data in a process information database. A neural network generates statistical patterns for specifying patterns for the data being evaluated. A fuzzy expert rules base specifies rules for evaluating the data. A proce...
08/15/2006
7092794Method and apparatus for connecting to HVAC device
A system for remotely monitoring and controlling an HVAC device includes a server which receives queries from an entry device and data from the HVAC device. Databases with information regarding the location and status of the HVAC devices reside on the server, as doe...
08/15/2006
7089077Monitor wafer purchase and controls database
Controlling stocker capacity in an automated facility and controlling monitor budgets by capped releases, capped FOUP supplies, and wafer reuse methodology. A Database is used to order, track, and reclaim test (monitor) wafers in the FAB. The database automatically ...
08/08/2006
7089075Systems and methods for metrology recipe and model generation
Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generat...
08/08/2006
7085674Alarm management method and apparatus therefor
An alarm management device includes: a data collection device for collecting alarm data generated by an apparatus to be managed; a database device for storing the collected alarm data; and an alarm statistic device for preparing alarm statistics using the stored ala...
08/01/2006
7085623Method and system for using short ranged wireless enabled computers as a service tool
A handheld device for use in a wireless environment to operate an apparatus is provided. The handheld device sends a request to an apparatus controller to initiate a maintenance sequence. The handheld device receives information from the apparatus controller to cont...
08/01/2006
7085619Method for controlling an industrial process
The invention relates to a method for controlling an industrial process for manufacturing or processing a product, in particular for controlling the cooling line of a hot-rolling mill, said cooling line being simulated by a physical model. To optimize the cooling pr...
08/01/2006
7085615Dynamic on-line optimization of production processes
A process is modeled by a dynamic model, handling time dependent relations between manipulated variables of different process sections (10A–D) and measured process output variables. Suggested input trajectories for manipulated variables for a subsequent tim...
08/01/2006
7082441Method and storage and manipulation of storage system metrics
A method for storage and manipulation of storage system metrics incorporates a self-describing format wherein each data file includes a header block that contains the description and order of the periodic data. The header block is followed by a data block in which t...
07/25/2006
7082345Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
The invention relates to a method, system and computer program useful for producing a product, such as a microelectronic device, for example in an assembly line, where the production facility includes parallel production of assembly lines of products on identically ...
07/25/2006
7079911Method and system for automatically isolating suspect items in a manufacturing or assembly environment
A computer-implemented method and system includes capabilities for receiving suspect item definitions (e.g. item serial numbers, lot numbers, operation identifiers, date ranges, etc.) into a computer database, detecting item identifiers in a manufacturing or assembl...
07/18/2006
7079904Adaptive software management
Adaptive control techniques, such as power management techniques for use in managing power consumption in an electronic device, employ optimization analysis to generate power consumption/quality of service performance plots. The optimization analysis can include exp...
07/18/2006
7076321Method and system for dynamically adjusting metrology sampling based upon available metrology capacity
The present invention is generally directed to various methods and systems for dynamically adjusting metrology sampling based upon available metrology capacity. In one illustrative embodiment, the method comprises providing a metrology control unit that is adapted t...
07/11/2006
7076320Scatterometry monitor in cluster process tool environment for advanced process control (APC)
Systems and methods that improve process control in semiconductor manufacturing are disclosed. According to an aspect of the invention, conditions in a cluster tool environment and/or a wafer therein can be monitored in-situ via, for example, a scatterometry system,...
07/11/2006
7072798Semiconductor fabricating apparatus
A resonant frequency sensor is disposed in a plasma-processing chamber included in a semiconductor fabricating apparatus. A change in the resonant frequency caused by etching, sputtering or deposition is sensed in order to detect the timing of performing the mainten...
07/04/2006
7072731Starvation avoidance lot start agent (SALSA)
A system and method are provided for monitoring work in process (“WIP”) in a manufacturing facility. The system and method utilize software objects to identify a bottleneck workstation and calculate a WIP value representing the amount of work approaching the bot...
07/04/2006
7071705Apparatus and method for communications testing
A communications connector tester for quickly and accurately analyzing communications connectors at production to determine whether the connectors are fit for use in certain communications applications is disclosed. Test signals at several discrete frequencies are s...
07/04/2006
7069104Management system, management apparatus, management method, and device manufacturing method
A management system including an acquisition device for acquiring actual processing results obtained by operating an industrial device with a set parameter value and another parameter value, and an estimated processing result, an inspection device for inspecting the...
06/27/2006
7069103Controlling cumulative wafer effects
A method and apparatus provided for controlling cumulative wafer effects. The method comprises processing a workpiece, determining a cumulative effect of the processing on the workpiece and comparing the determined cumulative effect to a reference target value. The ...
06/27/2006
7069098Method and system for prioritizing material to clear exception conditions
The present invention is generally directed to various methods and systems for prioritizing material to clear exception conditions. In one illustrative embodiment, the method includes providing a plurality of workpieces, each of the workpieces having an associated q...
06/27/2006
7065460Apparatus and method for inspecting semiconductor device
An image of the shape of a semiconductor wafer is displayed on a display apparatus for displaying an inspection result of a semiconductor device, and a different color or pattern is displayed for each inspection result as display information indicating the inspectio...
06/20/2006
7065725Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure ...
06/20/2006
7065524Identification and correction of confounders in a statistical analysis
Systems and methods are disclosed for identifying and/or compensating for relationships between influencers and outcomes. First, a metadata model of information that characterizes relationships between influencers and outcomes is built. A query is accepted from a us...
06/20/2006
7065472System for aiding the preparation of operation and maintenance plans for a power generation installation
In order to provide an operation and maintenance planning aiding system for a power generation installation which prepares an operation plan for a plurality of power generation units by making use of actual plant data and based on a total judgement including a varie...
06/20/2006
7065423Optical metrology model optimization for process control
To evaluate the adequacy of a profile model, one or more types of process control to be used in controlling a fabrication process are selected. Profile model parameters and acceptable ranges for the profile model parameters are selected. A first and second metrology...
06/20/2006
7065422Method and apparatus for system state classification
A method for identifying a state of a manufacturing system includes defining at least one virtual sensor having a value. At least one state descriptor including a plurality of condition terms and a trigger probability is defined. Each condition term includes a funct...
06/20/2006
7065419Job flow Petri Net and controlling mechanism for parallel processing
The present disclosure provides a job flow system for use in a manufacturing environment, such as a semiconductor fab. The job flow system includes a plurality of sequence-related jobs associated with the manufacturing and a computer-controlled Petri Net structure. ...
06/20/2006
7062893System and method for accommodating atypical customer requirements in a mass customization
A build cell is utilized to manufacture computers and load data into the computers according to customer orders. The build cell may include a build station at which components are assembled into a computer and a first network connection that links the computer with ...
06/20/2006
7062409System for, method of and computer program product for detecting failure of manufacturing apparatuses
A method of detecting failure of manufacturing apparatuses has: identifying a low-yield-period apparatus having a significantly lower yield period compared with other manufacturing apparatus and the significantly lower yield period by comparing yields of a plurality...
06/13/2006
7062343Remote maintenance system
Factories (102–104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). T...
06/13/2006
7058470Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
A semiconductor processing apparatus for processing a semiconductor wafer includes a sensor for monitoring a processing state of the semiconductor processing apparatus, a processing result input unit which inputs measured values for processing results of a semicondu...
06/06/2006
7058553Method and system for pre-processing
Effects of components in a process model on other components are determined. The effects are then used to perform preprocessing. ...
06/06/2006
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