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| Number | Title | Issue Date |
| 8190283 | Server and program A server device includes: an abnormality information output unit for storing a plurality of measurement information, which is time sequential information related to information measured in a plurality of manufacturing apparatuses, having manufacturing apparatus iden... | 05/29/2012 |
| 8190284 | Auto discovery of embedded historians in network Systems and methods that facilitate discovery of history data via a locator component associated with a plant embedded historian(s) of an industrial programmer (e.g., a controller device.) Such locator component can further detect micro historians that are distribut... | 05/29/2012 |
| 8190282 | Work management apparatus, picking carriage, work performance collection system, rework measurement system, workability management system, rework measurement measuring method, work performance collection method, workability management method and workability management program The invention aims at providing a work performance collection system for reliably collecting information of work performance without applying a burden to a worker in assembly of a work object article. This system includes a work specification ID tag into which infor... | 05/29/2012 |
| 8180471 | Tuning a process controller based on a dynamic sampling rate A method for estimating a state of a process implemented by a tool for fabricating workpieces includes collecting metrology data associated with a subset of workpieces processed in the tool. The collecting exhibits an irregular pattern. Metrology data associated wit... | 05/15/2012 |
| 8170704 | Method and system for automatic generation of throughput models for semiconductor tools The throughput of complex cluster tools of a semiconductor manufacturing environment may be determined for a desired manufacturing scenario on the basis of automatically generated throughput models. The throughput models may be established on the basis of rule messa... | 05/01/2012 |
| 8165705 | Methods and systems for continuously estimating persistent and intermittent failure probabilities for production resources Production control systems and methods are presented for estimation of production resource failure probabilities in which a set of four count values are maintained and updated for each resource including a first count value m11 indicating a number of plan... | 04/24/2012 |
| 8145337 | Methodology to enable wafer result prediction of semiconductor wafer batch processing equipment A method to enable wafer result prediction from a batch processing tool, includes collecting manufacturing data from a batch of wafers processed in batch in the batch processing tool, to form a batch processing result; defining a degree of freedom of the batch proce... | 03/27/2012 |
| 8112169 | Polishing apparatus and polishing method A polishing apparatus has a polishing table having a polishing surface and a top ring for pressing a substrate against the polishing surface while independently controlling pressing forces applied to a plurality of areas on the substrate. The polishing apparatus has... | 02/07/2012 |
| 8108060 | System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture System and method for implementing wafer acceptance test (“WAT”) advanced process control (“APC”) are described. In one embodiment, the method comprises performing a key process on a sample number of wafers of a lot of wafers; performing a key inline measure... | 01/31/2012 |
| 8090463 | Operating method for an evaluation device for a production machine During the production of a product by means of a production machine, an evaluation device receives actual states of components of the production machine, detected by sensors at detection times, and/or operating states of a control device of the production machine at... | 01/03/2012 |
| 8086338 | Component mounting apparatus, service providing device and servicing method A service providing method for monitoring a mounting tact of a component mounting apparatus includes collecting, from the service receiver, mounting tact information including a mounting tact result value of the component mounting apparatus from the service receiver... | 12/27/2011 |
| 8078919 | Method, apparatus and program storage device for managing multiple step processes triggered by a signal A method, apparatus and program storage device for managing multiple step processes triggered by a signal is disclosed. Status records are created for each process step. When an error occurs, error status record in recorded in the status record. A user may then use ... | 12/13/2011 |
| 8055371 | Services portal An apparatus for monitoring performance of an industrial process includes a service portal for collecting, transmitting and analyzing parameter data from process field devices that includes a network connection that connects to a process control system of the indust... | 11/08/2011 |
| 8055370 | Apparatus and methods for monitoring health of semiconductor process systems Disclosed are apparatus and methods for monitoring an operation parameter of a process tool, independently of a process system recipe, are provided. In general, an indirect effect that results from implementing an event from a process system recipe on the process sy... | 11/08/2011 |
| 8014887 | Substrate processing apparatus A substrate processing apparatus includes an operating section. The operating section includes a display unit having an operation screen, a screen file that stores daily check data monitor screen data in which a row number is settable as a data number, and a data na... | 09/06/2011 |
| 8010218 | Industrial automation interfaces integrated with enterprise manufacturing intelligence (EMI) systems A visualization system integrated with an enterprise manufacturing intelligence (EMI) system utilizing preconfigured EMI data models, workflow reports and process event notifications to optimize a manufacturing process. The visualization system and the EMI system ex... | 08/30/2011 |
| 7991497 | Method and system for defect detection in manufacturing integrated circuits Method and system for defect detection in manufacturing integrated circuits. In an embodiment, the invention provides a method for identifying one or more sources for possible causing manufacturing detects in integrated circuits. The method includes a step for provi... | 08/02/2011 |
| 7974724 | Product-related feedback for process control A method, apparatus, and a system for performing a product feedback for process control are provided. Metrology data relating to a first workpiece is received. An end of line parameter relating to the first workpiece is received. The end of line parameter is correla... | 07/05/2011 |
| 7970483 | Methods and apparatus for improving operation of an electronic device manufacturing system In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing... | 06/28/2011 |
| 7962234 | Multidimensional process window optimization in semiconductor manufacturing A method for optimizing multiple process windows in a semiconductor manufacturing process is disclosed. The method comprises performing dependent variable composition on a plurality of dependent variables. Metrology data is joined with the dependent variables, and t... | 06/14/2011 |
| 7937178 | Charging method for semiconductor device manufacturing apparatus, storage medium storing program for implementing the charging method, and semiconductor device manufacturing apparatus implementing the charging method A charging method for a semiconductor device manufacturing apparatus, which can appropriately and promptly distribute profits between a customer and a manufacturer according to the yield of semiconductor devices. An indicator related to the yield of the semiconducto... | 05/03/2011 |
| 7908023 | Method of establishing a lot grade system for product lots in a semiconductor manufacturing process A method of establishing a lot grading system for lots in a semiconductor manufacturing process includes defining a new lot grade for at least one lot in the semiconductor manufacturing process. The at least one lot is has a current lot grade and the new lot grade i... | 03/15/2011 |
| 7840297 | Dynamic control system for manufacturing processes including indirect process variable profiles Methods, apparatuses and systems that facilitate the design, production, control and/or measurement tasks associated with manufacturing and other processes. In one implementation, the present invention facilitates or enables the use of indirect process variables for... | 11/23/2010 |
| 7840296 | Services portal An apparatus for monitoring performance of an industrial process includes a service portal for collecting, transmitting and analyzing parameter data from process field devices that includes a network connection that connects to a process control system of the indust... | 11/23/2010 |
| 7835814 | Tool for reporting the status and drill-down of a control application in an automated manufacturing environment Disclosed are embodiments that provide near real-time monitoring of a control application in a manufacturing environment to detect and determine the root cause of faults within the control application. The embodiments monitor the flow of data within the control appl... | 11/16/2010 |
| 7831326 | Graphical user interface for presenting multivariate fault contributions Recipe steps of a manufacturing process run that generated a fault are displayed in a current view of a user interface, the recipe steps being displayed in association with a first axis. At least one of measured parameters or calculated parameters of the manufacturi... | 11/09/2010 |
| 7831325 | Computing estimated performance of a software application in a target system User input regarding a target system on which a software application is to be deployed is received. A benchmark system from plural candidate benchmark systems is matched to the target system. An estimated performance of the software application on the target system ... | 11/09/2010 |
| 7822500 | Polishing apparatus and polishing method A polishing apparatus has a polishing table (18) having a polishing surface (40) and a top ring (20) for pressing a substrate against the polishing surface (40) while independently controlling pressing forces applied to a plurality of are... | 10/26/2010 |
| 7818083 | Automated washing system with compliance verification and automated compliance monitoring reporting A system is provided for providing automated washing and verifying compliance of use. The system provides for identifying individual users of one or more cleaning stations through various technologies, such as RFID. Individual's use of cleaning stations is monitored... | 10/19/2010 |
| 7801634 | Manufacturing management method, manufacturing management apparatus, and mounter A mounter for a manufacturing management method suppresses an occurrence of inventory shortage or excess inventory as much as possible, and provides energy savings when manufacturing is not performed at full capacity. A throughput determining step acquires manufactu... | 09/21/2010 |
| 7787978 | Apparatus and method for controller performance monitoring in a process control system An apparatus, method, and computer program are provided for controller performance monitoring in a process control system. A level of disturbance associated with the process system is determined, and at least one value identifying a stability measure of a controller... | 08/31/2010 |
| 7783372 | Automated throughput control system and method of operating the same An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance dur... | 08/24/2010 |
| 7774081 | Manufacturing system, manufacturing method, managing apparatus, managing method and computer readable medium There is provided a manufacturing system for manufacturing an electronic device through a plurality of manufacturing stages. The manufacturing system includes a plurality of manufacturing apparatuses performing processes corresponding to the plurality of manufacturi... | 08/10/2010 |
| 7769480 | Writing method of hardware performance information of unit in vehicle In an inspection procedure of a completed product of an automatic transmission main body at a unit factory, a control system transmits a control signal to an actuator to receive characteristic data (hardware performance information) output in response to operation o... | 08/03/2010 |
| 7765020 | Graphical user interface for presenting multivariate fault contributions Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. T... | 07/27/2010 |
| 7765021 | Method to check model accuracy during wafer patterning simulation A method, and computer program product and system for performing the method, is provided for designing a mask used in the manufacture of semiconductor integrated circuits, in which a model of the lithographic process is used during the mask design process. More part... | 07/27/2010 |
| 7756598 | System and method for automating integration of semiconductor work in process updates WIP status updates, as received from semiconductor manufacturing suppliers, is converted to transactions. In one approach, supply chain events, for example lot splits, lot merges, and lot scrap, are identified based on previous lot statuses and current lot statuses ... | 07/13/2010 |
| 7751921 | Semiconductor manufacturing apparatus, method of detecting abnormality, identifying cause of abnormality, or predicting abnormality in the semiconductor manufacturing apparatus, and storage medium storing computer program for performing the method In order to detect an abnormality of semiconductor manufacturing apparatus, a biaxial coordinate system having first and second axes respectively assigned two different monitoring parameters selected from plural apparatus status parameters representing statuses of s... | 07/06/2010 |
| 7742833 | Auto discovery of embedded historians in network Systems and methods that facilitate discovery of history data via a locator component associated with a plant embedded historian(s) of an industrial programmer (e.g., a controller device.) Such locator component can further detect micro historians that are distribut... | 06/22/2010 |
| 7729792 | Version control for objects in a process plant configuration system A version control system helps to keep track of versions of process plant items that may represent, or be capable of representing, entities in a process plant. The process plant items may comprise, for example, module objects which may be capable of specifically rep... | 06/01/2010 |
