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| Number | Title | Issue Date |
| 7469558 | As-deposited planar optical waveguides with low scattering loss and methods for their manufacture An as-deposited waveguide structure is formed by a vapor deposition process without etching of core material. A planar optical device of a lighthouse design includes a ridge-structured lower cladding layer of a low refractive index material. The lower cladding layer... | 12/30/2008 |
| 7448233 | Method for manufacturing optical waveguide, optical waveguide device, electro-optical apparatus and electronic apparatus A method for manufacturing an optical waveguide includes the steps of forming a liquid-repellent region upon a substrate, and forming the optical waveguide in a region upon the substrate other than the liquid-repellent region. ... | 11/11/2008 |
| 7440653 | Fabrication of waveguides and Bragg gratings with UV-irradiation A method of simultaneously defining a waveguide and grating in a sample of photosensitive material comprises providing a sample of material (24) having a region which is photosensitive to light of a specific wavelength, generating a spot of light (22) ... | 10/21/2008 |
| 7421858 | Optical transmission substrate, method for manufacturing optical transmission substrate and optoelectronic integrated circuit Provided is an optical transmission substrate including: a first substrate; an optical waveguide which has clad covering a core and a periphery of the core and extends on an upper surface of the first substrate; a second substrate provided parallel to the first subs... | 09/09/2008 |
| 7406243 | Optical fiber array substrate and method for producing the same An optical fiber array substrate 11 has, in one surface thereof, eight V-grooves 12 for securing eight optical fibers 14 aligned in parallel to each other, and V-shaped side grooves 13 formed outside of the respective outermost V-grooves ... | 07/29/2008 |
| 7406244 | Method of using an ultrathin optical element The present invention provides an ultra-thin high-precision glass optic and method of manufacturing the same. The optic has an axial thickness that is less than 1,000 microns. A pattern and/or coating is disposed on a surface of the optic to provide attenuation of l... | 07/29/2008 |
| 7383702 | Method of forming a phosphorus doped optical core using a PECVD process Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide ... | 06/10/2008 |
| 7366375 | Optical waveguide device, manufacturing method thereof, optical information processing apparatus, and electronic equipment Disclosed herein is an optical waveguide device including a cladding having first and second surfaces opposite to each other, a core laminated to the first surface of the cladding for guiding light in a longitudinal direction thereof, the core having a pair of light... | 04/29/2008 |
| 7359608 | Constructing well structures for hybrid optical waveguides A well may be formed for access to an optical waveguide core by a process that results in an L-shaped well. The L-shaped well may then be filled with a polymer. By controlling the size of each portion of well, the occurrence of bubbles within the well and cuts to th... | 04/15/2008 |
| 7340121 | Optoelectric composite substrate and method of manufacturing the same An optoelectric composite substrate of the present invention includes an insulating film, an optical waveguide embedded in the insulating film in a state that an upper surface is exposed from the insulating film, a via hole formed to pass through the insulating film... | 03/04/2008 |
| 7333703 | Two-dimensional photonic crystal having air-bridge structure and method for manufacturing such a crystal The present invention intends to provide a two-dimensional photonic crystal having a high level of mechanical strength and functioning as a high-efficiency resonator. The two-dimensional photonic crystal according to the present invention includes a slab layer 31... | 02/19/2008 |
| 7325419 | Method of forming a phosphorus doped optical core using a PECVD process Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide ... | 02/05/2008 |
| 7324727 | Planar lightwave circuit having optical filter A planar lightwave circuit having an optical filter, which comprises: a first waveguide; a second waveguide separated from the first waveguide, in which the width of a first cross-section opposite to the first waveguide is wider than that of a second cross-section o... | 01/29/2008 |
| 7294279 | Method for releasing a micromechanical structure A method for releasing a micromechanical structure. A substrate is provided. At least one micromechanical structural layer is provided above the substrate, wherein the micromechanical structural layer is sustained by a sacrificial layer of a silicon material. An ami... | 11/13/2007 |
| 7290407 | Triangle-shaped planar optical waveguide having reduced scattering loss A method for forming an optical waveguide is disclosed. The method comprises first forming a lower cladding layer having at least one waveguide support. Next, a core material is formed onto the waveguide support using a high density plasma chemical vapor deposition ... | 11/06/2007 |
| 7277619 | Nano-imprinted photonic crystal waveguide This invention relates to a method for forming a nano-imprinted photonic crystal waveguide, comprising the steps of: preparing an optical film on a substrate; preparing a template having a plurality of protrusions of less than 500 nm in length such that the protrusi... | 10/02/2007 |
| 7262140 | Method of smoothing waveguide structures A semiconductor based structure containing substantially smoothed waveguides having a rounded surface is disclosed, as well as methods of fabricating such a structure. The substantially smoothed waveguides may be formed of waveguide materials such as amorphous silic... | 08/28/2007 |
| 7228045 | Optical waveguide device and method of manufacturing same A method of manufacturing an optical waveguide device that is capable of reducing the imbalance in the refractive index profile of a core, and an optical waveguide device that has the reduced imbalance in the refractive index profile are provided. The method of manu... | 06/05/2007 |
| 7226875 | Method for enhancing FSG film stability A method for enhancing stability of a fluorinated silicon glass layer is disclosed. A fluorinated silicon glass layer provided on a substrate is subjected to a phosphorous-containing and hydrogen-containing gas such as phosphine (PH3), for example. The ga... | 06/05/2007 |
| 7228043 | Optical waveguide circuit and manufacturing method thereof An optical waveguide circuit comprising a plurality of first cores (203) arranged at intervals widening as they are away from the branch point or the joining point of optical signal, a clad (205) filling at least these first cores, and second cores ( | 06/05/2007 |
| 7223706 | Method for forming plasma enhanced deposited, fully oxidized PSG film A method of forming a plasma enhanced deposited oxide film on a substrate includes introducing into a chamber containing the substrate silane gas and a dopant gas such as phosphine. The chamber is pressurized and energy is applied to create a plasma. The energy may ... | 05/29/2007 |
| 7215854 | Low-loss optical waveguide crossovers using an out-of-plane waveguide An improved low-loss waveguide crossover uses an out-of-plane, such as vertical, waveguide to bridge over any number of waveguides with very low, or essentially no, optical loss or crosstalk. Optical signals transmitted in a waveguide system having the improved wave... | 05/08/2007 |
| 7206480 | Method of forming interlayer connections in integrated optical circuits, and devices formed using same A method and system of forming vertical optical interconnects in optical integrated circuits is disclosed. The method includes forming a first optical transmission layer over a substrate. A first cladding layer is then formed on the first optical transmission layer ... | 04/17/2007 |
| RE39535 | Method of making fused silica by decomposing siloxanes This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said prod... | 04/03/2007 |
| 7187817 | Awg coupler for separating electromagnetic radiation of various wavelength regions, and a telecommunications system A single free-beam region for coupling electromagnetic radiation in and out is provided in order in the case of an AWG coupler for spectrally separating electromagnetic radiation to achieve a more stable thermal characteristic and a space-saving layout. ... | 03/06/2007 |
| 7177490 | Optical waveguide, optical device, and method of manufacturing optical waveguide An optical waveguide is formed on a substrate and includes a curved ridge structure, a curved optical path, and a buffer layer. The curved ridge structure is formed on the substrate so as to have a curvature in a longitudinal direction of the curved ridge structure.... | 02/13/2007 |
| 7160746 | GeBPSG top clad for a planar lightwave circuit A method of depositing a top clad layer for an optical waveguide of a planar lightwave circuit. A GeBPSG top clad layer for an optical waveguide structure of a planar lightwave circuit is fabricated such that the top clad layer comprises doped silica glass, wherein ... | 01/09/2007 |
| 7159421 | Manufacture of planar waveguides using sol-gel techniques Silica sol techniques are described for making thick silica or silica based films useful for planar optical waveguides. The process involves coating of a colloidal silica sol onto a substrate, drying the sol, and consolidating the dried sol to form the planar wavegu... | 01/09/2007 |
| 7146086 | Constructing well structures for hybrid optical waveguides A well may be formed for access to an optical waveguide core by a process that results in an L-shaped well. The L-shaped well may then be filled with a polymer. By controlling the size of each portion of well, the occurrence of bubbles within the well and cuts to th... | 12/05/2006 |
| 7106937 | Optical waveguide and method of fabricating the same An optical waveguide comprises a silica substrate, a buffer layer formed on the silica substrate, cores formed on the buffer layer, and upper cladding layer formed on the buffer layer, covering the cores. The thermal expansion coefficients of the buffer layer and up... | 09/12/2006 |
| 7095935 | Method for forming optical waveguide The present invention provides a method for forming an optical waveguide characterized by applying a paste containing a copper compound to a glass substrate containing an alkali metal as a glass component over the whole surface thereof or in a patterned form, and pe... | 08/22/2006 |
| 7092419 | Wavelength agile laser An electric field that changes across space is synthesized, by applying voltage levels independent of one another at several locations. The independence in voltage levels allows the electric field that is synthesized to be made periodic or aperiodic. Such a synthesi... | 08/15/2006 |
| 7087179 | Optical integrated circuits (ICs) In one aspect, the invention provides methods and apparatus for forming optical devices on large area substrates. The large area substrates are preferably made of quartz, silica or fused silica. The large area substrates enable larger optical devices to be formed on... | 08/08/2006 |
| 7085450 | Fabrication of structures in an optical substrate A system and method for fabricating structures in an optical substrate. An optical element produces first and second write beams that intersect at a first intersection location at the optical substrate. The first intersection location includes a fringe pattern produ... | 08/01/2006 |
| 7085469 | Process for producing three-dimensional polyimide optical waveguide This invention provides a process for producing a three-dimensional polyimide optical waveguide, which comprises: (I) irradiating a polyamic acid film with a laser beam while converging the laser beam at an inside portion of the film and relatively moving the light ... | 08/01/2006 |
| 7080528 | Method of forming a phosphorus doped optical core using a PECVD process Embodiments of the present invention provide a highly uniform low cost production worthy solution for manufacturing low propagation loss optical waveguides on a substrate. In one embodiment, the present invention provides a method of forming a PSG optical waveguide ... | 07/25/2006 |
| 7079740 | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides Methods are provided for forming optical devices, such as waveguides, with minimal defect formation. In one aspect, the invention provides a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, ... | 07/18/2006 |
| 7068870 | Variable width waveguide for mode-matching and method for making A variable width waveguide useful for mode matching between dissimilar optical waveguides and optical fibers and a method for making the same is described. In one embodiment, a tapered waveguide is etched in a substrate, a cladding material is laid over the upper su... | 06/27/2006 |
| 7062141 | Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications Undercladding and uppercladding layers that form part of an optical waveguide are deposited with a thermal CVD technique. The optical waveguide has a structure in which optical cores are formed over the undercladding layer and in which the uppercladding layer is for... | 06/13/2006 |
| 7058245 | Integrated optical circuits An optoelectronic device having a flexible substrate and an optical interconnect (i.e. waveguide) comprising a sol-gel based material formed on the substrate. The sol-gel based waveguide is capable of being integrated into an all-optical system and provides for grea... | 06/06/2006 |
