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| Number | Title | Issue Date |
| 7975507 | Process for producing synthetic quartz glass and synthetic quartz glass for optical member The invention provides a process for producing a synthetic quartz glass, comprising: (a) depositing fine quartz glass particles synthesized by flame hydrolysis of a glass-forming material, on a substrate, to form a porous quartz glass base; (b) presintering the poro... | 07/12/2011 |
| 7849711 | Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that... | 12/14/2010 |
| 7726153 | Method of manufacturing glass particulate stacked body An object of the present invention is to provide a method for manufacturing a glass particle deposited body in which a taper portion formed at an end portion of the glass particle deposited body is reduced without increasing the number of burners. The inventi... | 06/01/2010 |
| 7677058 | Process and apparatus for making glass sheet An apparatus and process for making glass soot sheet and sintered glass sheet. Glass soot particles are deposited on a curved deposition surface of a rotating drum to form a soot sheet. The soot sheet is then released from the deposition surface. The soot sheet can ... | 03/16/2010 |
| 7441416 | Method for manufacturing optical fibre preforms Multi-flame burner wherein each flame is separated with respect to the neighboring flame by at least one separating tube made of a heat resistant material, for example, quartz glass or ceramic material. The burner also has a plurality of co-axial pipes, preferably m... | 10/28/2008 |
| 7429546 | Silica glass containing TiOand process for its production A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., a F concentration of at least 100 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C. A process for producing a silica glass contai... | 09/30/2008 |
| 7368403 | Synthetic quartz glass for optical member, projection exposure apparatus and projection exposure method A synthetic quartz glass for an optical member, which is to be used in an optical device employing an ArF excimer laser beam as a light source at an energy density of at most 2 mJ/cm2/pulse or in an optical device employing a KrF excimer laser beam as a l... | 05/06/2008 |
| 7361207 | System and method for electrostatically depositing aerosol particles A system useful for electrostatic deposition (ESD) of aerosol particles and methods of depositing the aerosol particles onto a substrate are disclosed. The ESD system and the method of the present invention are useful for electrostatically depositing nanoparticles p... | 04/22/2008 |
| 7338699 | Island projection-modified part, method for producing the same, and apparatus comprising the same In film-forming devices and plasma-processing devices, filmy matter adheres to the surfaces of the inner parts and it peels to cause dust and particles in the devices. In the devices, the dust and particles contaminate the objects for film formation thereon or the o... | 03/04/2008 |
| 7313312 | Optical fiber and method for making such fiber According to one example of the invention an optical fiber comprises: (i) silica based, rare earth doped core having a first index of refraction n1; (ii) at least one silica based cladding surrounding the core and having a second index of refraction n | 12/25/2007 |
| 7311965 | Strong, high density foam glass tile having a small pore size A strong, high density foam glass tile having a small pore size which can be used as a facade on both exterior and interior building walls. The foam glass tile of the present invention is strong enough that it can also be used as a structural member for a building. ... | 12/25/2007 |
| 7305852 | Method for manufacturing quartz glass ingot The invention provides a method for manufacturing a large scale quartz glass slab ingot in a flame hydrolysis reaction in a furnace, including the steps of rotating the furnace, depositing a fused silica on a furnace bed, and extending the deposit outwardly by heati... | 12/11/2007 |
| 7299659 | Method for manufacturing optical fiber preforms Method and burner for increasing the deposition rate of porous glass deposit in the manufacture of optical preforms, by modifying the cross-sectional shape of the flow of glass particles impacting onto a target preform. In particular, the cross-section of the flow o... | 11/27/2007 |
| 7299657 | Method of making high strain point glass A method of forming a glass sheet includes obtaining a preform generated from a glass composition and conveying the preform through a channel having a temperature that decreases along a length of the channel to form a glass sheet having a predetermined width and thi... | 11/27/2007 |
| 7294595 | Silica glass A silica glass containing from 3 to 10 mass % of TiO2, which has a coefficient of thermal expansion from 0 to 100° C., i.e. CTE0 to 100, of 0±300 ppb/° C. and an internal transmittance per mm in thickness within a wavelength region of from 2... | 11/13/2007 |
| 7265070 | Synthetic silica glass optical material having high resistance to optically induced index change Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength region of less than about 250 nm and particularly, exhibiting a low laser ind... | 09/04/2007 |
| 7232975 | Plasma generators, reactor systems and related methods A plasma generator, reactor and associated systems and methods are provided in accordance with the present invention. A plasma reactor may include multiple sections or modules which are removably coupled together to form a chamber. Associated with each section is an... | 06/19/2007 |
| 7232778 | Synthetic quartz glass ingot, synthetic quartz glass, and methods of manufacture thereof In a synthetic quartz glass ingot which is produced by vapor phase hydrolyzing or oxidatively decomposing a silica-forming starting compound in an oxyhydrogen flame such that silica growth in a direction occurs at a silica particle deposition and melting face, stria... | 06/19/2007 |
| RE39535 | Method of making fused silica by decomposing siloxanes This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said prod... | 04/03/2007 |
| 7197896 | Methods of making AlO-SiO ceramics Methods for making glasses and glass-ceramics comprising Al2O3 and SiO2. Glasses made according to the present invention can be made, formed as, or converted into glass beads, articles (e.g., plates), fibers, particles, and thin coat... | 04/03/2007 |
| 7172983 | SiO-TiOglass body with improved resistance to radiation The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen... | 02/06/2007 |
| 7165425 | Multi-tube burner and glass preform manufacturing method using the same A multi-tube burner is provided which includes a cylindrical outermost nozzle and at least one cylindrical inner nozzle provided coaxially with the outermost nozzle to form annular jet openings for gases used to manufacture a glass preform. The angle between a cente... | 01/23/2007 |
| 7162894 | Method for charging quartz glass objects with hydrogen The invention relates to the loading of quartz glass objects with hydrogen in an annealing process in a furnace for improving the homogeneity of the refractive index and the laser resistance while, at the same time, maintaining a specified stress birefringence of ea... | 01/16/2007 |
| 7159418 | Method of producing synthetic quartz glass Fluorine-containing synthetic quartz glass is produced by feeding silica-forming material, hydrogen, and oxygen gases from a burner to a reaction zone, flame hydrolyzing the silica-forming material in the reaction zone to form particles of silica, depositing the sil... | 01/09/2007 |
| 7155936 | Doped silica glass articles and methods of forming doped silica glass boules and articles The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about ... | 01/02/2007 |
| 7143608 | Burner for synthesizing glass particles and method for producing porous glass body A concentric multi-tubular burner for synthesizing glass particles having a center port group constituted by a combination of jet ports of raw material gas, combustible gas and oxygen gas, wherein an outer wall of the oxygen gas jet port in the center port group pro... | 12/05/2006 |
| 7133591 | Jacket tube made of synthetically produced quartz glass and optical fibres produced using said jacket tube Jacket tubes of synthetically produced quartz glass as a semi-finished product for producing an outer cladding glass layer of an optical fiber are generally known. The invention relates to an improvement of a jacket tube in terms of inexpensive producibility and of ... | 11/07/2006 |
| 7089766 | Method of forming optical fiber preforms Methods, apparatus and precursors for producing substantially water-free silica soot, preforms and glass. The methods and apparatus make substantially water-free fused silica preforms or glass by removing water as a reaction product, removing water from the atmosphe... | 08/15/2006 |
| 7082789 | Silica glass member for semiconductor and production method thereof A silica glass member for semiconductor in which each concentration of Fe, Cu, Cr and Ni is 5 ppb or less and the concentration of an OH group is 30 ppm or less and which has a viscosity of 1013.0 poise or more at 1200° C. is provided as a silica glass m... | 08/01/2006 |
| 7082790 | Quartz glass blank for an optical component, and manufacturing procedure and use thereof The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a w... | 08/01/2006 |
| 7080527 | Quartz glass blank for an optical component, and manufacturing procedure and use thereof The present invention relates to a quartz glass blank for an optical component for transmission of ultraviolet radiation of a wavelength of 250 nm or shorter, and to a use of the quartz glass blank in microlithography in combination with ultraviolet radiation of a w... | 07/25/2006 |
| 7077533 | Reflecting device for electromagnetic waves A device serves for reflecting electromagnetic waves, in particular in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrie... | 07/18/2006 |
| 7055345 | Glass base material manufacturing apparatus and glass base material manufacturing method An apparatus for manufacturing a glass base material, which is a base material of an optical fiber, comprising: a base rod, around and along which said glass base material is formed; a burner that hydrolyzes and accumulates a gas material, which is a base material o... | 06/06/2006 |
| 7037842 | Method and apparatus for dissolving a gas into a liquid for single wet wafer processing A method and apparatus for processing a wafer is described. According to the present invention a wafer is placed on a substrate support. A liquid is then fed through a conduit having an output opening over the wafer. A gas is dissolved in the liquid prior to the liq... | 05/02/2006 |
| 7011515 | Gas lighter having device for preventing flame from being extinguished by wind The present invention is to provide a gas lighter, which comprises a nozzle provided at one end of a barrel extended forwardly from a housing, an auxiliary ceramic sleeve member provided at one end of a ceramic sleeve member in the barrel adjacent the nozzle, a meta... | 03/14/2006 |
| 6997015 | EUV lithography glass structures formed by extrusion consolidation process The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as mirrors and platen stage structures that can be used, for example, in ... | 02/14/2006 |
| 6993934 | Dental glass powders Dental glass powders, methods for producing the powders and dental compositions including the glass powders. The powders preferably have a well-controlled particle size, narrow size distribution and a spherical morphology. The method includes forming the particles b... | 02/07/2006 |
| 6992753 | Projection optical system Radiation-induced damage to a lens material in a projection exposure system is reduced by selection of maximum design fluence values HD for lenses and at least one lens made of a material having a characteristic transition point TRC after expos... | 01/31/2006 |
| 6990836 | Method of producing fluorine-containing synthetic quartz glass Synthetic quartz glass is produced by feeding a silica-forming raw material gas, hydrogen gas, oxygen gas and a fluorine compound gas from a burner to a reaction zone, flame hydrolyzing the silica-forming raw material gas in the reaction zone to form fine particles ... | 01/31/2006 |
| 6988378 | Light weight porous structure These glass bodies are light weight porous structures such as a boules of high purity fused silica (HPFS). More specifically, the porous structures are supports for HPFS mirror blanks. Porous glass is made utilizing flame deposition of pure silica or doped silica in... | 01/24/2006 |
