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| Number | Title | Issue Date |
| 7913496 | Apparatus and method for pumping a cryogenic fluid from a storage vessel and diagnosing cryogenic pump performance An apparatus and method are provided for pumping a cryogenic fluid from a storage vessel. The cryogenic fluid is pumped from the storage vessel to a heat exchanger and then to a delivery conduit. A pressure sensor measures fluid pressure in the delivery conduit. An ... | 03/29/2011 |
| 7637113 | Apparatus and method for pumping a fluid from a storage vessel and detecting when the storage vessel is empty An apparatus for delivering a process fluid comprises a storage vessel, a process pump for pumping the process fluid from the storage vessel, a hydraulic drive system comprising a hydraulic drive unit operatively connected to drive the process pump, a pressure senso... | 12/29/2009 |
| 7416548 | Cryogenic system A cryosurgical system and method for supplying cryogen to a probe. The system including a container filled with cryogen and having bellows of a pump submerged within said cryogen. Conduits fluidly interconnect the bellows and a probe that is outside the container to... | 08/26/2008 |
| 7410348 | Multi-speed compressor/pump apparatus A pumping/compressing apparatus for use in a fluid handling system transferring a fluid from one location, e.g., a tank, to another location or to an end use is provided. The apparatus basically includes a motor and a multistage, e.g., two stage, device including at... | 08/12/2008 |
| 7356996 | Apparatus and method for holding a cryogenic fluid and removing cryogenic fluid therefrom with reduced heat leak The apparatus comprises a double walled vacuum insulated vessel defining a cryogen space for holding a cryogenic fluid, a pump assembly comprising a pump with a suction inlet disposed within the cryogen space, and at least one elongated member extending from the pum... | 04/15/2008 |
| 7335576 | Method for precision integrated circuit die singulation using differential etch rates A preprocessed semiconductor substrate such as a wafer is provided with a metal etch mask which defines singulation channels on the substrate surface. An isotropic etch process is used to define a singulation channel with a first depth extending into the semiconduct... | 02/26/2008 |
| 7316363 | System and method for delivering cryogenic fluid According to an embodiment of the present invention, a rotating nozzle assembly includes a rotatable shaft having a bore to transport a cryogenic fluid therethrough. The rotatable shaft has an upstream portion associated with a feed chamber and a downstream portion.... | 01/08/2008 |
| 7310955 | System and method for delivering cryogenic fluid According to an embodiment of the present invention, a cryogenic fluid delivery system includes a vessel containing a cryogenic fluid at a first pressure and a first temperature, a first heat exchanger coupled to the vessel for receiving the cryogenic fluid and cool... | 12/25/2007 |
| 7305836 | Cryogenic container and superconductivity magnetic energy storage (SMES) system A cryogenic container includes an inner vessel for containing a cryogenic fluid, and an outer vessel for insulating the cryogenic fluid from the environment. The inner vessel includes a superconductive layer formed of a material having superconducting properties at ... | 12/11/2007 |
| 7299641 | Cryogenic storage system with improved temperature control A cryogenic storage system for cryogenic storage using liquid refrigerant is provided. The cryogenic storage system includes first and second vacuum vessels, a vacuum source, a quantity of a liquid refrigerant, and at least one temperature control assembly. An insul... | 11/27/2007 |
| 7293418 | Method and apparatus for delivering a high pressure gas from a cryogenic storage tank A cryogenic tank assembly has a pump which discharges into an accumulator which is located in the cryogenic storage area. This reduces the space required for the device as well as the functioning of the device. The high pressure fluid in the accumulator remains at a... | 11/13/2007 |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7255772 | High pressure processing chamber for semiconductor substrate A high pressure chamber comprises a chamber housing, a platen, and a mechanical drive mechanism. The chamber housing comprises a first sealing surface. The platen comprises a region for holding the semiconductor substrate and a second sealing surface. The mechanical... | 08/14/2007 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing A method and system for processing a substrate in a film removal system. The method includes providing the substrate in a substrate chamber of a film removal system, where the substrate has a micro-feature containing a dielectric film on a sidewall of the micro-feat... | 07/31/2007 |
| 7223080 | Double-acting, high pressure cryogenic pump A double-acting, reciprocating piston, high discharge pressure, cryogenic fluid pump having a unique blow-by venting system. In two different embodiments, a double-acting piston has two pair of piston heads and two sets of seals. In a first embodiment, a blow-by ven... | 05/29/2007 |
| 7191603 | Gaseous fluid production apparatus and method Gaseous fluid production apparatus according to one embodiment of the invention includes a fluid container containing fluid in substantially the liquid state. A first fluid line is connected to the fluid container so that it receives from the fluid container a first... | 03/20/2007 |
| 7144228 | Cryogenic fluid delivery system A cryogenic fluid delivery system includes a pump having a pumping cylinder within which a sliding pumping piston is positioned. The pump also includes an actuating cylinder within which a sliding actuating piston is positioned and a supplemental linear actuator, su... | 12/05/2006 |
| 7140393 | Non-contact shuttle valve for flow diversion in high pressure systems A valve for redirecting flow in a supercritical fluid or other high pressure processing system is disclosed. In high pressure supercritical carbon dioxide (SCCO2) equipment for semiconductor wafer processing, a major hurtle in providing clean equipment and clean waf... | 11/28/2006 |
| 7131294 | Method and apparatus for control of carbon dioxide gas cooler pressure by use of a capillary tube A transcritical vapor compression system that includes a fluid circuit circulating a refrigerant in a closed loop. The fluid circuit has operably disposed therein, in serial order, a compressor, a first heat exchanger, a first capillary tube and a second heat exchan... | 11/07/2006 |
| 7131278 | Tank cooling system and method for cryogenic liquids A system and method to transfer a cryogenic liquid from a station tank system to a recipient tank is provided. At least a part of said cryogenic liquid is stored at a first pressure higher than the pressure in said recipient tank and is cooled to a temperature below... | 11/07/2006 |
| 7121433 | Portable dispensing pump A lightweight portable battery powered pump for moving fluids from a reservoir to a variety of end applications is disclosed. A simple and easy to manufacture centrifugal pump impeller and housing are shown. ... | 10/17/2006 |
| 7073340 | Cryogenic compressor enclosure device and method A low-leakage enclosure for cryogenic compressor apparatus includes climate control equipment and guide fixtures to direct ultra-cold coolant lines to a superconducting utility power transformer. The self-contained system maintains the required number of high perfor... | 07/11/2006 |
| 7004185 | Liquid loading techniques An improved method for loading propellants into separate tanks on a reusable launch vehicle (RLV) uses three innovative methods. The liquid loading provides three liquid transfer methods, integrated and coordinated to provide less complicated loading and unloading o... | 02/28/2006 |
| 6981850 | Apparatus and method for producing a pressurized vapor stream A cryogenic stream is pumped by a cryopump and then vaporized in a vaporizer to produce the pressurized vapor stream. The cryopump is driven by a transmission that is in turn driven by a hydraulic fluid. The hydraulic fluid flows within a hydraulic fluid circuit hav... | 01/03/2006 |
| 6923007 | System and method of pumping liquified gas A system and method of pumping liquified gas. Applicants systems includes a liquified gas storage vessel and a smaller high pressure high pressure liquified gas storage cylinder. Applicant provides a pump between the two vessels for pumping the liquified gas from on... | 08/02/2005 |
| 6912862 | Cryopump piston position tracking An improved cryogenic compressor with piston position sensing is disclosed. Precision optical encoders using incremental or absolute encoding are incorporated into a compressor to allow for accurate position sensing of moving elements within the compressor. Appropri... | 07/05/2005 |
| 6898940 | High pressure pump system for supplying a cryogenic fluid from a storage tank A medium and high pressure pump systems supplies a cryogenic fluid from a storage tank. The system comprises a pump that is operable to pump cryogenic liquid or a mixture of cryogenic liquid and vapor. The pump preferably comprises an inducer with at least two chamb... | 05/31/2005 |
| 6848502 | Method and apparatus for warming and storage of cold fluids Stranded natural gas is sometimes liquefied and sent to other countries that can use the gas in a transport ship. Conventional receiving terminals use large cryogenic storage tanks to hold the liquefied natural gas (LNG) after it has been offloaded from the ship. Th... | 02/01/2005 |
| 6663350 | Self generating lift cryogenic pump for mobile LNG fuel supply system A high pressure pump and delivery system mating to LNG storage and suited for natural gas powered trucks and buses, but also suitable for other cryogenic liquid fuels. The reciprocating pump is comprised of a liquid pumping portion and a vapor compressing... | 12/16/2003 |
| 6659730 | High pressure pump system for supplying a cryogenic fluid from a storage tank A method and apparatus is provided for supplying both cryogenic liquid and vapor from a storage tank to a pump to reduce the need for venting. The pump is operable to pump cryogenic liquid or a mixture of liquid and vapor. Different operating modes are se... | 12/09/2003 |
| 6655930 | Insulation means for a centrifugal pump A centrifugal pump for pumping low temperature fluid includes a motor portion driving an impeller of a pump portion. The motor portion and impeller are coaxial. A pot, sealed to the pump portion, receives the low temperature fluid. The low temperature flu... | 12/02/2003 |
| 6640556 | Method and apparatus for pumping a cryogenic fluid from a storage tank In the present method and apparatus, cryogenic liquid and vapor are pumped from a storage tank and the proportion of liquid and vapor is controlled so as to influence flow rate through the apparatus. In an induction stroke, the piston of a reciprocating p... | 11/04/2003 |
| 6581390 | Cryogenic fluid delivery system A cryogenic fluid delivery system includes an insulated storage tank containing a supply of cryogenic liquid, a pump, a heat exchanger and a gas and liquid mixer. The pump includes a pumping cylinder within which a sliding pumping piston is positioned. Th... | 06/24/2003 |
| 6530761 | Double-acting, two-stage pump A reciprocating pump includes a housing, a piston slideably mounted within the housing for a reciprocating movement, a shaft connected to the piston and adapted for reciprocating movement concurrently with the piston, an inlet valve, a discharge valve, an... | 03/11/2003 |
| 6481218 | Pump system for delivering cryogenic liquids The invention relates to a pump system for delivering cryogenic liquids. Said pump system can be used for refuelling motor vehicles with H2 and consists of a container (1) for receiving the cryogenic liquid. At least one pump (2) is arranged in... | 11/19/2002 |
| 6311519 | Process and plant for separating a gaseous mixture by cryogenic distillation A cryogenic distillation apparatus comprising a system of columns (9, 11) also includes at least one external source of a gas other than a column of the system and means for sending this pressurized gas to the first pump (17) in order to serve as barrier ... | 11/06/2001 |
| 6286320 | Bottom entry pumping system with tertiary containment A bottom entry pumping system for liquids, particularly cryogenic liquids, is described which includes a container with an outer wall, which may be concrete and/or metal, and an optional inner metal liner. A line is provided for transporting liquid from a... | 09/11/2001 |
| 6250896 | Pump for a cryogenic liquid and pump unit and distillation column which are equipped with such a pump A pump for a cryogenic liquid, in particular liquid oxygen, includes a hydraulic motor which is supplied with a motor liquid under pressure and drives a wheel for pumping the cryogenic liquid, and relative sealing device preventing contamination of the cr... | 06/26/2001 |
| 6220037 | Cryogenic pump manifold with subcooler and heat exchanger A cryogenic pump manifold with subcooler and heat exchanger. The manifold comprises an inlet header with a subcooler disposed around it and a heat exchanger on the inlet side of the inlet header and subcooler. An expansion device is disposed between the i... | 04/24/2001 |
| 6006525 | Very low NPSH cryogenic pump and mobile LNG station A reciprocating cryogenic pump, suitable for medium and high pressures having very low net positive suction head (NPSH) requirements. The pump comprises a cylinder having both liquid inlets and vapor outlets, and two interacting pistons, each piston recip... | 12/28/1999 |
