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| Number | Title | Issue Date |
| 8168811 | Precursors for CVD/ALD of metal-containing films Precursors useful for vapor phase deposition processes, e.g., CVD/ALD, to form metal-containing films on substrates. The precursors include, in one class, a central metal atom M to which is coordinated at least one ligand of formula (I): | 05/01/2012 |
| 8163948 | Processes for producing transition metal amido and imido compounds Processes are provided for producing transition metal amidos and/or imidos. In methods according to this invention, at least one halogenated transition metal, an amine compound and a solvent are combined, followed by the addition of an alkylated metal or a Grignard ... | 04/24/2012 |
| 8088939 | Processes for producing transition metal amides Processes are provided for producing transition metal amides. In methods according to this invention, at least a halogenated transition metal and an amine are combined in a solvent to produce an intermediate composition and an alkylated metal or a Grignard reagent i... | 01/03/2012 |
| 8088938 | Low decomposition storage of a tantalum precursor Methods of storing a precursor which decreases the precursor decomposition rate. A vessel is provided, where the vessel has an outer surface made of a first material, and an inner surface made of a second material. The first and second materials are different. A tan... | 01/03/2012 |
| 7910762 | Asymmetric reaction catalyst and method for preparing optically active compound using the same An asymmetric reaction catalyst is obtained by mixing a pentavalent niobium compound and an optically active triol or tetraol having a binaphthol structure of R or s configuration, and the triol is represented by the following formula: | 03/22/2011 |
| 7906668 | Imide complex, method for producing the same, metal-containing thin film and method for producing the same Objects of the present invention are to provide a novel niobium or tantalum complex having good vapor pressure and becoming a raw material for producing a niobium- or tantalum-containing thin film by a method such as CVD method, ALD method or the like, a method for ... | 03/15/2011 |
| 7858816 | Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta0thin films Tantalum compounds of Formula I hereof are disclosed, having utility as precursors for forming tantalum-containing films such as barrier layers. The tantalum compounds of Formula I may be deposited by CVD or ALD for forming semiconductor device structures including ... | 12/28/2010 |
| 7858815 | Systems and methods for forming tantalum oxide layers and tantalum precursor compounds A method of forming (and apparatus for forming) a tantalum oxide layer on a substrate, particularly a semiconductor substrate or substrate assembly, using a vapor deposition process and a tantalum precursor compound that includes alkoxide ligands, for example. ... | 12/28/2010 |
| 7750173 | Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films Tantalum compounds of Formula I hereof are disclosed, having utility as precursors for forming tantalum-containing films such as barrier layers. The tantalum compounds of Formula I may be deposited by CVD or ALD for forming semiconductor device structures including ... | 07/06/2010 |
| 7723535 | Organometallic precursor compounds This invention relates to organometallic precursor compounds represented by the formula i-PrN═Ta(NR1R2)3 wherein R1 and R2 are the same or different and are alkyl having from 1 to 3 carbon atoms, provided that... | 05/25/2010 |
| 7566796 | Processes for preparing niobium alkoxides, and niobium alkoxides prepared thereby Processes for preparing high-purity niobium alkoxides, especially niobium ethoxide, are described which include: (a) providing a crude niobium alkoxide starting material comprising at least one compound of the general formula (I) Nb(OR)5 (I... | 07/28/2009 |
| 7371878 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same Tantalum precursors useful in depositing tantalum nitride or tantalum oxides materials on substrates, by processes such as chemical vapor deposition and atomic layer deposition. The precursors are useful in forming tantalum-based diffusion barrier layers on microele... | 05/13/2008 |
| 7358209 | Polymerisation catalysts A transition metal complex having the following Formula (A): wherein the monovalent groups R1 and R2 are —Ra, —ORb, —NRcRd, and —NHRe: the monovalent groups Ra, Rb | 04/15/2008 |
| 7332442 | Systems and methods for forming metal oxide layers A method of forming (and apparatus for forming) a metal oxide layer, preferably a dielectric layer, on a substrate, particularly a semiconductor substrate or substrate assembly, using a vapor deposition process and ozone with one or more metal organo-amine precursor... | 02/19/2008 |
| 7332618 | Organometallic precursor compounds This invention relates to organometallic precursor compounds represented by the formula (H)mM(R)n wherein M is a metal or metalloid, R is the same or different and is a substituted or unsubstituted, saturated or unsaturated, heterocyclic radica... | 02/19/2008 |
| 7323581 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition A metalorganic complex composition comprising a metalorganic complex selected from the group consisting of: metalorganic complexes comprising one or more metal central atoms coordinated to one or more monodentate or multidentate organic ligands, and complexed with o... | 01/29/2008 |
| 7314844 | Process for the cyanation aldehydes A process for cyanating an aldehyde is provided. The process comprises reacting the aldehyde with: i) a cyanide source which does not comprise a Si—CN bond or a C—(C═O)—CN moiety; and ii) a substrate susceptible to nucleophilic atta... | 01/01/2008 |
| 7301040 | Bidentate catalyst for olefin polymerization, methods of forming such and products therefrom Bidentate catalyst systems and the methods or forming such are described herein. The catalyst systems generally are compounds having the general formula: where R, R1, R2 and R3 ar... | 11/27/2007 |
| 7273943 | Process for the preparation of high-purity zirconium, hafnium, tantalum and niobium alkoxides A novel process for the preparation of high-purity zirconium, hafnium, tantalum and niobium alkoxides (alcoholates), novel tantalum and niobium compounds and a process for their preparation are provided. The process comprises the steps of mixing crude metal alkoxide... | 09/25/2007 |
| 7268253 | Process for preparing α, α-dialkyl-α-hydroxymethyl-carboxylic acid derivatives The invention relates to a novel process for hydroxymethylating noncyclic α,α-dialkylcarboxylic acid derivatives with formaldehyde using amide bases at temperatures of from −40° C. up to the boiling point of the solvent or solvent mixture used. ... | 09/11/2007 |
| 7241911 | Niobium compound The present invention relates to novel, water-soluble niobium compounds, a process for their preparation and their formulations. ... | 07/10/2007 |
| 7238821 | Method for large scale production of organometallic compounds This invention relates to a one pot method for large scale production of an organometallic compound comprising (i) reacting a hydrocarbon or heteroatom-containing material with a base material in the presence of a solvent and under reaction conditions sufficient to ... | 07/03/2007 |
| 7208427 | Precursor compositions and processes for MOCVD of barrier materials in semiconductor manufacturing Metalorganic precursors of the formula: (R1R2N)a−bMXb wherein: M is the precursor metal center, selected from the group of Ta, Ti, W, Nb, Si, Al and B; a is a number equal to the valence of M; 1≦b... | 04/24/2007 |
| 7195795 | Material for forming insulation film and film-forming method with the use of the material A material for forming an insulation film comprising an alkoxide compound of lithium and at least one kind of organic solvent selected from ether, ketone, ester, alcohol, and hydrocarbon. A material for forming an insulation film comprising a carboxylate of lithium,... | 03/27/2007 |
| 7179765 | Process for preparing hydrogen peroxide from the elements The present invention relates to a process for the preparation of hydrogen peroxide from oxygen or oxygen-delivering substances and hydrogen or hydrogen-delivering substances in the presence of at least one catalyst containing a metal-organic framework material, whe... | 02/20/2007 |
| 7166719 | Fluorinated photosensitizers related to chlorins and bacteriochlorins for photodynamic therapy Provided herein are compounds for detection, diagnosis and treatment of target tissues or target compositions, including hyperproliferative tissues such as tumors, using photodynamic methods. In particular, photosensitizer compounds that collect in hyperproliferativ... | 01/23/2007 |
| 7151070 | Chiral catalyst, process for preparing the same and its use in the oxidate coupling of naphthols The compound of this invention is a useful catalyst for the oxidative coupling of naphthol. Its originality lies in that it is a novel vanadium complex of Schiff's base formed by a chiral amino acid and a formyl biphenol or its derivative. Its axis chirality is indu... | 12/19/2006 |
| 7148367 | Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same The organometallic compound of the present invention is a compound that has bonds between metal atoms and nitrogen atoms or bonds between semimetal atoms and nitrogen atoms, and the content of chlorine in the compound is 200 ppm or less and the content of water is 3... | 12/12/2006 |
| 7105672 | Cyclometallated catalysts A catalyst compound of formula I or II: (wherein R1–R11, M, E, T, X, Y, m and n are defined herein). The compound, when combined with a suitable activator, is active for the polymerization o... | 09/12/2006 |
| 7101939 | Ethylene/α-olefin copolymer made with a non-single-site/single-site catalyst combination, its preparation and use An ethylene/α-olefin copolymer comprising a component produced by a non-single-site polymerization catalyst and a component produced by a single-site polymerization catalyst, its preparation and use are described. The copolymer has an α-olefin content of 5 to 20 p... | 09/05/2006 |
| 7084306 | Process for preparing β-diketone compound and process for preparing metal complex thereof Disclosed is a process for preparing 2,2,6,6-tetramethyl-3,5-heptanedione, comprising reacting a pivalic acid alkyl ester with pinacolone in the presence of an alkali metal alkoxide catalyst using a pivalic acid alkyl ester as a solvent but using no other solvent or... | 08/01/2006 |
| 7067416 | Method of forming a conductive contact Conductive contacts in a semiconductor structure, and methods for forming the conductive components are provided. The method comprises depositing a conductive material over a substrate to fill a contact opening, removing excess material from the substrate leaving th... | 06/27/2006 |
| 7067422 | Method of forming a tantalum-containing gate electrode structure A method for forming a tantalum-containing gate electrode structure by providing a substrate having a high-k dielectric layer thereon in a process chamber and forming a tantalum-containing layer on the high-k dielectric layer in a thermal chemical vapor deposition p... | 06/27/2006 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first precursor gas is introduced to an enclosure at a first enclosure pressure.... | 06/06/2006 |
| 7053210 | Efficient synthesis of pyropheophorbide a and its derivatives A process for the preparation of pyropheophorbide a and its derivatives, including 3-devinyl-3-(1′-hexyloxy)ethyl-pyropheophorbide-a, otherwise known as HPPH, is provided. The process involves treating chlorin e6, in the form of its trimethyl ester, wit... | 05/30/2006 |
| 6998497 | Metal bis-triflimide compounds and methods for synthesis of metal bis-triflimide compounds A metal bis-triflimide compound having the formula: [Mx]n+[(N(SO2CF3)2)(nx−yz)](nx−yz)−[Ly]z− where M is a metal selected from the metals in groups 5 to 10, 12... | 02/14/2006 |
| 6974878 | Catalyst ligands, catalytic metal complexes and processes using same A new ligands that include a benzene ring in the backbone can be combined with a metal or metal precursor compound or formed into a metal-ligand complex catalyze a number of different chemical transformations, including olefin polymerization reactions. The ligands, ... | 12/13/2005 |
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same Tantalum precursors useful in depositing tantalum nitride or tantalum oxides materials on substrates, by processes such as chemical vapor deposition and atomic layer deposition. The precursors are useful in forming tantalum-based diffusion barrier layers on microele... | 11/01/2005 |
| 6946568 | Complexed compounds and use thereof for the polymerization of olefins Complexes of the formulae Ia and Ib where M=Ti, Zr, Hf, V, Nb or Ta, can be used for the polymerization and copolymerization of olefins, for example in suspension polymerization processes, gas-phase polymerization proc... | 09/20/2005 |
| 6939983 | Alkyl group VA metal compounds A method of preparing Group VA organometal compounds in high yield and high purity by the reaction of a Grignard reagent with a Group VA metal halide in certain ethereal solvents is provided. A method of preparing Group VA organometal hydrides is also provided. ... | 09/06/2005 |
