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| Number | Title | Issue Date |
| 7393468 | Adhesive with differential optical properties and its application for substrate processing An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove... | 07/01/2008 |
| 7354531 | Polymer electrolyte composition A composition for use as a polymer electrolyte, wherein said composition includes one or more polar materials and one or more polyesters of formula III, wherein each unit A may be identical or different and is of the struct... | 04/08/2008 |
| 7344820 | Chemically amplified polymer having pendant group with dicyclohexyl and resist composition comprising the same The present invention relates to a chemically amplified polymer having a pendent group with dicyclohexyl bonded thereto, a process for the preparation thereof, and a resist composition comprising it, and more particularly, to a novel (meth)acrylic or norbornene carb... | 03/18/2008 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition A method for etching a feature in a low-k dielectric layer through a photoresist etch mask over a substrate. A gas-modulated cyclic stripping process is performed for more than three cycles for stripping a single photoresist mask. Each cycle of the gas-modulated cyc... | 11/13/2007 |
| 7169695 | Method for forming a dual damascene structure A method for forming a dual damascene feature is provided. Vias are formed in an etch layer. A trench patterned mask is provided over the etch layer. A trench is etched, where the etching the trench comprises a cycle of forming protective sidewalls over the sidewall... | 01/30/2007 |
| 7112633 | Preparation of a compound containing cyclic and linear carbonate groups The invention relates to a process for the preparation of compound(s) comprising at least one acrylate or methacrylate group, at least one linear carbonate group and at least one 5-membered cyclic carbonate group. The process comprises (A) a selective ring-opening s... | 09/26/2006 |
| 7087675 | Monomer and polymerization process The β-hydroxy carbamate, ethylenically unsaturated monomer of the invention can be polymerized as a homopolymer or copolymerized with other monomers. The polymerization can be carried out in an aqueous medium. The β-hydroxy carbamate monomer is polymerized to form... | 08/08/2006 |
| 7081407 | Method of preventing damage to porous low-k materials during resist stripping A method of forming a feature in a porous low-K dielectric layer is provided. A porous low-K dielectric layer is placed over a substrate. A patterned photoresist mask is placed over the porous low-K dielectric layer. A feature is etched into the porous low-K dielect... | 07/25/2006 |
| 7037990 | Transition metal complexes in the controlled synthesis of polyolefins substituted with functional groups A method is provided for the polymerization of olefins substituted with a functional group using a transition metal catalyst that, by virtue of one or more stabilizing groups incorporated within the catalyst structure, “fixes” the stereoconfiguration of each ole... | 05/02/2006 |
| 7022789 | Telechelic alkadiene polymers with crosslinkable end groups and methods for making the same The present invention relates to telechelic polymers having crosslinkable end groups of the formula and methods for preparing the same wherein n is an integer; is an alkadi... | 04/04/2006 |
| 6979716 | Process for producing branched polymer and polymer This invention is related to a production method of a branched polymer which comprises polymerizing a macromonomer [I], said macromonomer [I] being a vinyl polymer obtainable by radical polymerization and terminall... | 12/27/2005 |
| 6916746 | Method for plasma etching using periodic modulation of gas chemistry A method for etching a layer over a substrate is provided. A gas-modulated cyclic process is performed for more than three cycles. Each cycle comprises performing a protective layer forming phase using first gas chemistry with a deposition gas chemistry, which is pe... | 07/12/2005 |
| 6867274 | Telechelic alkadiene polymers with crosslinkable end groups and methods for making the same The present invention relates to telechelic polymers having crosslinkable end groups of the formula and methods for preparing the same wherein n is an integer; is an alka... | 03/15/2005 |
| 6866984 | ArF photoresist copolymers A photoresist copolymer is prepared from one or more carboxy-substituted bicycloalkene monomers, and this copolymer is used to prepare a photoresist for submicrolithography processes employing deep ultraviolet (ArF) as a light source. In addition to having high etch... | 03/15/2005 |
| 6849376 | Polymers and photoresist compositions comprising same The invention includes polymers that contain a polymers of the invention contain one or more 1) carbonate units and/or 2) a lactone provided by a monomer having a ring oxygen adjacent to the monomer vinyl group. The invention also provides photoresists that contain ... | 02/01/2005 |
| 6818039 | Anionic polymers composed of dicarboxylic acids and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of dicarboxylic monomers such as maleic anhydride, itaconic anhydride or citraconic anhydride. Free radical polymerization is used in the synthesis of the poly... | 11/16/2004 |
| 6808859 | ArF photoresist copolymers A photoresist copolymer is prepared from one or more carboxy-substituted bicycloalkene monomers, and this copolymer is used to prepare a photoresist for submicrolithography processes employing deep ultraviolet (ArF) as a light source. In addition to having high etch... | 10/26/2004 |
| 6756438 | Water based emulsion copolymers incorporating vinyl ethylene carbonate Aqueous based emulsion copolymers containing vinyl ethylene carbonate, vinyl acetate, and one or more other ethylenically unsaturated monomers, and aqueous based poly(vinyl alcohol)-containing emulsion copolymers formed by emulsion copolymerization of vinyl ethylene... | 06/29/2004 |
| 6756461 | Anionic polymers composed of dicarboxylic acids and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of dicarboxylic monomers such as maleic anhydride, itaconic anhydride or citraconic anhydride. Free radical polymerization is used in the synthesis of the poly... | 06/29/2004 |
| 6753395 | Anionic polymers composed of dicarboxylic acids and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of dicarboxylic monomers such as maleic anhydride, itaconic anhydride or citraconic anhydride. Free radical polymerization is used in the synthesis of the poly... | 06/22/2004 |
| 6706837 | Anionic polymers composed of dicarboxylic acids and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of dicarboxylic monomers such as maleic anhydride, itaconic anhydride or citraconic anhydride. Free radical polymerization is used in the synthesis of the poly... | 03/16/2004 |
| 6703469 | Anionic polymers composed of dicarboxylic acids and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of dicarboxylic monomers such as maleic anhydride, itaconic anhydride or citraconic anhydride. Free radical polymerization is used in the synthesis ... | 03/09/2004 |
| 6632903 | Polymer-containing photoresist, and process for manufacturing the same The present invention relates to a semiconductor device using a copolymer-containing photoresist, and a process for manufacturing the same. As a norbornene derivative (monomer) having a hydrophilic group is synthesized and introduced to the backbone chain... | 10/14/2003 |
| 6627762 | Acetal and hemiacetal ester linked propylene carbonate functional (meth)acrylic esters and method of making same Compounds of the formula: ##STR1## wherein R1 is H or methyl, R2 is H or alkyl, R3 is C2 -C4 alkylene, n is 0-4, n' is 1-4, x is one or more, y is one or more, x+y=z, and A i... | 09/30/2003 |
| 6608157 | Process for preparing ethylene interpolymers and ethylene interpolymers There is described a novel process for preparing interpolymers comprising ethylene, at least one monomer unit selected from heteroatom substituted olefin monomer units derived from a compound of the formula XV ##STR1## wherein E and G represent the same o... | 08/19/2003 |
| 6608156 | Process for preparing interpolymers of ethylene and 2,3-dihydrofuran, or a heteroatom substituted olefin monomer and ethylene interpolymers There is described a novel process for preparing interpolymers comprising ethylene, at least one monomer unit selected from heteroatom substituted olefin monomer units derived from a compound of the formula XV ##STR1## wherein E and G represent the same o... | 08/19/2003 |
| 6608158 | Copolymer resin, preparation thereof, and photoresist using the same The present invention relates to a copolymer resin for a photoresist used in far ultraviolet ray such as KrF or ArF, process for preparation thereof, and photoresist comprising the same resin. The copolymer resin according to the present invention is easi... | 08/19/2003 |
| 6596831 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 07/22/2003 |
| 6593412 | Water based emulsion copolymers incorporating vinyl ethylene carbonate Aqueous based emulsion copolymers containing vinyl ethylene carbonate, vinyl acetate, and one or more other ethylenically unsaturated monomers, and aqueous based poly(vinyl alcohol)-containing emulsion copolymers formed by emulsion copolymerization of vin... | 07/15/2003 |
| 6538085 | Copolymerization of norbornene and functional norbornene monomers The present invention is directed to copolymers of norbornene and functional group containing norbornene comonomers and processes for the preparation thereof. These polymers may be random, alternating or block copolymers or terpolymers, etc. In general, t... | 03/25/2003 |
| 6538087 | Polymeric compositions for forming optical waveguides; optical waveguides formed therefrom; and methods for making same The present invention relates to polymer compositions and methods of polymerizing such compositions. Furthermore, the present invention relates to polymer compositions that are useful in forming waveguides and to methods for making waveguides using such p... | 03/25/2003 |
| 6525155 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 02/25/2003 |
| 6518382 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 02/11/2003 |
| 6515091 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 02/04/2003 |
| 6515090 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 02/04/2003 |
| 6515092 | Anionic vinyl/dicarboxylic acid polymers and uses thereof Biodegradable anionic polymers are disclosed which include recurring polymeric subunits preferably made up of vinylic and dicarboxylic monomers such as vinyl acetate or vinyl alcohol and maleic anhydride, itaconic anhydride or citraconic anhydride, or com... | 02/04/2003 |
| 6492449 | Polymers obtained from monomers allowing a sequential polymerization, and their use for preparing ionic conductors The present invention concerns polymers obtained by anionic initiation and bearing functions that can be activated by cationic initiations that are not reactive in the presence of anionic polymerization initiators. The presence of such cationic initiation... | 12/10/2002 |
| 6472491 | Process for preparing ethylene interpolymers and ethylene interpolymers There is desribed a novel process for preparing interpolymers comprising ethylene and at least two monomer units selected from heteroatom substituted olefin monomer units derived from a compound of the formula XV ##STR1## wherein E and G represent the sam... | 10/29/2002 |
| 6465590 | Telechelic alkadiene polymers with crosslinkable end groups and methods for making the same The present invention relates to telechelic polymers having crosslinkable end groups of the formula ##STR1## and methods for preparing the same wherein n is an integer; ##STR2## is an alkadienyl group; Y is an alkyl group; and Z is crosslinkable end ... | 10/15/2002 |
| 6451949 | Method for production of poly (trimethylene carbonate) Disclosed is a process for the production of poly(trimethylene carbonate) which comprises reacting trimethylene carbonate, a catalyst, and an alcohol, preferably a polyhydric alcohol, under nitrogen at atmospheric pressure and a moderate temperature, in a... | 09/17/2002 |
