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Class 510/257 - With inorganic fluorine containing component (e.g., HF, etc.)


Subclass of Class 510 - Cleaning compositions for solid surfaces, auxiliary compositions therefor, or processes of preparing the compositions
Definition: Compositions which include an inorganic component which
No. of patents: 82
Last issue date: 07/29/2008


1      
NumberTitleIssue Date
7405189Surface treatment composition and method for removing Si component and reduced metal salt produced on the aluminum die cast material in etching process
A surface treatment composition and method for removing Si and reduced metal salt produced during etching of an aluminum die cast material (“ALDC material”) without generation of nitrogen oxide (NOx) or hydrogen fluoride (HF). In surface treatment of an ALDC mat...
07/29/2008
7253111Barrier polishing solution
The polishing solution is useful for preferentially removing barrier materials in the presence of nonferrous interconnect metals with limited erosion of dielectrics. The polishing solution comprises 0 to 20 weight percent oxidizer, at least 0.001 weight percent inhi...
08/07/2007
7216653Cleaning solution and cleaning method of a semiconductor device
A cleaning method for removing foreign bodies during the fabrication of semiconductor devices including treating a substrate with a cleaning solution including an oxidizer to form a chemical oxide layer and then removing the chemical oxide layer, thereby removing fo...
05/15/2007
7199091Photoresist stripper
Recently, use is made of copper wiring as the wiring material for semiconductor devices, and of low dielectric constant films as the insulating film between the lines of wiring. In this connection, a photoresist stripper is in need which can inhibit corrosion or dam...
04/03/2007
7166419Compositions substrate for removing etching residue and use thereof
Compositions containing certain organic solvents and a fluorine source are capable of removing photoresist and etching residue. ...
01/23/2007
7160847Water solution using in metal surface treating process and process for removing oxidized film and burred edge using the same
A method for chemical etching is disclosed for taking away oxidized film and removing cut as well as punched edge burs of harden-treated carbon steel (SK3, SK4 and SK5). Thereby, the fillet edge of the cut section is achieved. An oxidized film with a thickness of se...
01/09/2007
7129029Compositions substrate for removing etching residue and use thereof
Compositions containing certain organic solvents and a fluorine source are capable of removing photoresist and etching residue. ...
10/31/2006
7105475Cleaning solution and cleaning method of a semiconductor device
A cleaning method for removing foreign bodies during the fabrication of semiconductor devices including treating a substrate with a cleaning solution including an oxidizer to form a chemical oxide layer and then removing the chemical oxide layer, thereby removing fo...
09/12/2006
7041629Stripper for special steel
The inventive aqueous pickling agent on the basis of sulfuric acid or phosphoric acid and hydrogen fluoride for stainless steels, which pickling agent is free of wetting and emulsifying agents, contains (each as 100 wt-% substance)
05/09/2006
7033978Post-planarization clean-up
Cleaning solutions for removing residuals from the surface of an integrated circuit device. Such cleaning solutions find particular application in the fabrication of a dual damascene structure following removal of excess portions of a silver-containing metal layer f...
04/25/2006
7018560Composition for polishing semiconductor layers
An aqueous polishing composition comprises a corrosion inhibitor for limiting removal of an interconnect metal with an acidic pH. The composition includes an organic-containing ammonium salt formed with R1, R...
03/28/2006
7018552Method of manufacturing electronic device
A method of manufacturing an electronic device comprises forming a wiring material layer made of aluminum or an aluminum alloy on the surface of an insulating film on a substrate, patterning the wiring material layer by a reactive ion etching treatment with a resist...
03/28/2006
7001533Chromate-free method for surface etching of aluminum and aluminum alloys
Non-chromate solutions for treating and/or etching metals, particularly, aluminum, aluminum alloys, steel and titanium, and method of applying same wherein the solutions include either a titanate or titanium dioxide as a “drop-in replacement” for a chromium-cont...
02/21/2006
6927198Methods and apparatus for cleaning semiconductor substrates after polishing of copper film
A cleaning solution, method, and apparatus for cleaning semiconductor substrates after chemical mechanical polishing of copper films is described. The present invention includes a cleaning solution which combines deionized water, an organic compound, and a fluoride ...
08/09/2005
6851432Cleaning compositions
An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effective to re...
02/08/2005
6821351Hydrofluoric acid generating composition and method of treating surfaces
The present invention relates to compositions, kits and processes for the brightening of metal surfaces by the application of the chemical compositions. These compositions act to release hydrofluoric acid as a brightening agent. The solutions are preferably mixed du...
11/23/2004
6787293Photoresist residue remover composition
A photoresist residue remover composition is provided that includes one type or two or more types of fluoride compound and one type or two or more types chosen from the group consisting of glyoxylic acid, ascorbic acid, glucose, fructose, lactose, and mannose (but e...
09/07/2004
6773873pH buffered compositions useful for cleaning residue from semiconductor substrates
A semi-aqueous cleaning formulation useful for removing particles from semiconductor wafer substrates formed during a dry etching process for semiconductor devices, the cleaning formulation comprising a buffering system a polar organic solvent, and a fluoride source...
08/10/2004
6673757Process for removing contaminant from a surface and composition useful therefor
Particulate and metal ion contamination is removed from a surface, such as a semiconductor wafer containing copper damascene or dual damascene features, employing aqueous composition comprising a fluoride containing compound; a dicarboxylic acid and/or sa...
01/06/2004
6645926Fluoride cleaning masking system
The present invention relates to a maskant system for use with a fluoride cleaning system. The maskant system comprises a parting compound applied to a surface which requires protection and a chromium rich maskant for substantially preventing intergranula...
11/11/2003
6627587Cleaning compositions
An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effe...
09/30/2003
6593282Cleaning solutions for semiconductor substrates after polishing of copper film
A cleaning solution, method, and apparatus for cleaning semiconductor substrates after chemical mechanical polishing of copper films is described. The present invention includes a cleaning solution which combines deionized water, an organic compound, and ...
07/15/2003
6579377Hydrofluoric acid generating composition and method of treating surfaces
The present invention relates to compositions, kits and processes for the brightening of metal surfaces by the application of the chemical compositions. These compositions act to release hydrofluoric acid as a brightening agent. The solutions are preferab...
06/17/2003
6565664Method for stripping copper in damascene interconnects
An inexpensive and safe copper removal method in the fabrication of integrated circuits is described. Copper is stripped or removed by a chemical mixture comprising an ammonium salt, an amine, and water. The rate of copper stripping can be controlled by v...
05/20/2003
6554912Polymer remover
Compositions for the removal of polymeric material from a substrate are provided where the compositions include a polyol compound selected from (C3 -C20)alkanediols, substituted (C3 --C20)alkanediols, (C3
04/29/2003
6521575Method and unit for regeneration of solution for cleaning glass, method and unit for cleaning silicate glass, and cathode-ray tube
A treatment solution (2) containing fluoride is added to a cleaning solution (1) drained from a cleaning tank (11). Fluoride is allowed to react with fluorosilicic acid in the cleaning solution to settle a precipitate (4) containing fluorosilicate, and th...
02/18/2003
6465404Aqueous cleaning composition with controlled PH
Aqueous cleaning compositions in which the pH is controlled comprise an acidic metal cleaning compound; at least one nitrogen containing compound to provide a stabilized pH; an emulsifier, a nonionic surfactant and optionally at least one water soluble so...
10/15/2002
6462005Cleaning agent for a semiconductor device and a method of manufacturing a semiconductor device
A cleaning agent for use in the manufacture of a semiconductor device comprising an aqueous solution containing a quarternary ammonium salt and a fluoro compound, or an aqueous solution containing a quarternary ammonium salt and a fluoro compound, as well...
10/08/2002
6440224Hydrofluoric acid generating composition and method of treating surfaces
A method of treating a surface of a metal is provided. A source of fluoride ion is mixed with a source of acid to form hydrofluoric acid and, when applied to a metal surface to be treated, the hydrofluoric acid acts as a brightening agent....
08/27/2002
6407047Composition for desmutting aluminum
This invention provides an improved composition and process for pretreatment of aluminum prior to electroplating. The invention is an aqueous composition comprised of an acid, an oxidizing agent, and, optionally, a halogenated compound. This composition i...
06/18/2002
6394114Method for stripping copper in damascene interconnects
An inexpensive and safe copper removal method in the fabrication of integrated circuits is described. Copper is stripped or removed by a chemical mixture comprising an ammonium salt, an amine, and water. The rate of copper stripping can be controlled by v...
05/28/2002
6387859Method and cleaner composition for stripping copper containing residue layers
A cleaner composition for removing from within a microelectronic fabrication a copper containing residue layer in the presence of a copper containing conductor layer, and a method for stripping from within a microelectronic fabrication the copper containi...
05/14/2002
6361712Composition for selective etching of oxides over metals
A composition for selective etching of oxides over a metal. The composition contains water, hydroxylammonium salt, carboxylic acid, a fluorine containing compound, and optionally, a base. The pH of the composition is about 2 to 6....
03/26/2002
6355605Composition and method for removing iron stain and scale
A cleaning composition and method are provided for removing iron stains and scale from the external surfaces of duck decoys. An illustrative composition contains hydrochloric acid, stannous chloride, ammonium bifluoride, and water. The compositions are ap...
03/12/2002
6346505Cleaning solution for electromaterials and method for using same
A cleaning solution for electromaterials including hydrogen fluoride and either oxygen or hydrogen gas dissolved in water. The cleaning solution may alternatively include hydrogen fluoride, hydrochloric acid or nitric acid, and hydrogen or oxygen gas diss...
02/12/2002
6323169Resist stripping composition and process for stripping resist
An aqueous resist stripping composition contains (a) an oxidizing agent, (b) a chelating agent, (c) a water-soluble fluorine compound, and optionally (d) an organic solvent. Also provided is a process of stripping resist films and resist residues remainin...
11/27/2001
6316115Non-chromate chemical treatments used on magnesium alloys
Formulations and a process are disclosed for chemically treating a surface of a product made from magnesium alloys. One formulation comprises an acid pickle comprising hydrofluoric acid and a binary alcohol and a second formulation comprises a conversion ...
11/13/2001
6310018Fluorinated solvent compositions containing hydrogen fluoride
A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described....
10/30/2001
6245155Method for removing photoresist and plasma etch residues
A method for the removing of plasma etch residues on a substrate comprising the steps of: (i) contacting the substrate with a cleaning composition, and (ii) contacting the substrate with ozonated water. The preferred cleaning composition has a pH from 2 t...
06/12/2001
6235693Lactam compositions for cleaning organic and plasma etched residues for semiconductor devices
A composition for the cleaning of residues from substrates from about 0.01 percent by weight to about 10 percent by weight of one or more fluoride compounds, from about 20 percent by weight to about 50 percent by weight water, from about 20 percent by wei...
05/22/2001
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