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Class 505/477 - Using plasma


Subclass of Class 505 - Superconductor technology: apparatus, material, process
Definition: Process wherein a gaseous vapor of ions in equilibrium or
No. of patents: 51
Last issue date: 06/17/2008


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NumberTitleIssue Date
7387811Method for manufacturing high temperature superconducting conductors using chemical vapor deposition (CVD)
A CVD apparatus capable of substantially simultaneously processing multiple portions of at least one substrate or substantially simultaneously processing portions of multiple substrates or substantially simultaneously processing multiple portions of at least one sub...
06/17/2008
7361377Fluorinated precursors of superconducting ceramics, and methods of making the same
This invention provides a method of making a fluorinated precursor of a superconducting ceramic. The method comprises providing a solution comprising a rare earth salt, an alkaline earth metal salt and a copper salt; spraying the solution onto a substrate to provide...
04/22/2008
7215697Matched impedance controlled avalanche driver
Controlled avalanche driver circuits and apparatuses for gas lasers. One embodiment typically delivers short, rapid, high voltage ionizing pulses in combination with an electric field whose magnitude is too low to sustain a normal glow discharge. The plasma is typic...
05/08/2007
7074744Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
A method of coating a substrate for a high temperature superconductor material is disclosed, including loading a substrate into a first deposition chamber, routing the substrate in the first deposition chamber such that the substrate forms a helical winding in the f...
07/11/2006
6929820Method of forming a superconductor film
A method includes forming an as-grown film of a superconductor composed of a MgB2 compound which is made by simultaneous evaporation of magnesium and boron. The as-grown film is superconductive without an annealing process to make the film superconductive...
08/16/2005
6906008Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
The present invention is a deposition system for the production of coated substrates that provides a first deposition process that subsequently feeds a second deposition process and where the two deposition processes are occurring concurrently. The consecutive depos...
06/14/2005
6849580Method of producing biaxially textured buffer layers and related articles, devices and systems
A superconductor article includes a substrate and a first buffer film disposed on the substrate. The first buffer film has a uniaxial crystal texture characterized (i) texture in a first crystallographic direction that extends out-of-plane of the first buffer film w...
02/01/2005
6677001Microwave enhanced CVD method and apparatus
A new chemical vapor reaction system is described. Instead of ECR where electrons can move as independent particles without interaction, a mixed cyclotron resonance is a main exciting principal for chemical vapor reaction. In the new proposed resonance, t...
01/13/2004
6506439Apparatus and process for the production of a superconductive layer
An apparatus and process for applying a superconductive layer on an elongate substrate that includes moving the elongate substrate through a heating zone, applying a pulsed laser beam against a target, having a length, that is coated with superconductive ...
01/14/2003
6242387High temperature superconductor/insulator composite thin films with Josephson coupled grains
High temperature superconductor composite thin film devices with easily moved Josephson vortices are described having high Tc and good magnetic vortex properties. A preferred composite material was YBCO/CeO2 thin film on a MgO substr...
06/05/2001
6172009Controlled conversion of metal oxyfluorides into superconducting oxides
An oxide superconductor article is provided having an oxide superconductor film having a thickness of greater than 0.5 microns disposed on a substrate, said article having a transport critical current density (Jc) of greater than or equal to ab...
01/09/2001
5873985Process of making squid device having tilt-boundary junction
An oxide film having a desired pattern is first formed on a magnesia substrate. A superconducting oxide film is then formed on the exposed portion of the magnesia substrate and also on the oxide film. Thus, a tilt-boundary junction is formed in the bounda...
02/23/1999
5731271Method for preparing an oxide superconducting tape
A method for growing a superconductive film, comprising: (a) helically winding a tape substrate around the outer periphery of a cylindrical or columnar holder and (b) growing a superconductive film on the surface of the tape substrate by plasma flash evaporati...
03/24/1998
5686151Method of forming a metal oxide film
Disclosed is method of forming a metal oxide film including the steps of introducing a gas containing a metal compound having at least one element selected from the group consisting of carbon and a halogen element, into a process chamber accommodating a s...
11/11/1997
5635454Method for making low density ceramic composites
A cold surface is obtained by coating a mat of ceramic particles that are bound together with a sol-gel binder and cooling the surface with a cryogen that wicks to the surface through pores in the mat....
06/03/1997
5627142Method of producing composite metal oxide material
A composite material is disclosed which includes a substrate, an oriented film provided on a surface of the substrate and formed of a crystal of a Y123 metal oxide of the formula LnBa2 Cu3 Oy wherein Ln stands for Y or an ...
05/06/1997
5545613Preparation of superconducting oxides and oxide-metal composites
A method of preparing a superconducting oxide by combining the metallic elements of the oxide to form an alloy, followed by oxidation of the alloy to form the oxide. Superconducting oxide-metal composites are prepared in which a noble metal phase intimate...
08/13/1996
5453306Process for depositing oxide film on metallic substrate by heat plasma flash evaporation method
The generation of a reaction product is suppressed between a metallic substrate and plasma in depositing a ceramic intermediate layer on the metallic substrate in a process for depositing an oxide film on the metallic substrate by thermal plasma flash eva...
09/26/1995
5399388Method of forming thin films on substrates at low temperatures
A method is provided for forming thin films, such as high temperature superconductors, on a surface of a substrate using pulsed microwaves to control substrate temperature. The method includes vaporizing a liquid source to form a series of vapor pulses, i...
03/21/1995
5376409Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials
A process and apparatus for the use of liquid-source bubbler/delivery systems for the delivery of solid source precursors employed in the growth of advanced technical materials such as the deposition of copper films in microelectronic devices....
12/27/1994
5374613Method for manufacturing an oxide superconductor thin film
A method for manufacturing an oxide superconductor thin film is disclosed, which comprises the steps of: (1) preparing a substrate; depositing an oxide superconductor thin film on said substrate by directing a beam containing constituent elements of an ox...
12/20/1994
5366770Aerosol-plasma deposition of films for electronic cells
An atmospheric process for the production of a coating of film upon a nickel-containing substrate. In the first step of this process, an aerosol mist containing reactants necessary to form the coating is provided. Thereafter, the mist is subjected to radi...
11/22/1994
5350737MBE process for preparing oxide superconducting films
In a process for preparing a thin film of oxide superconductor having a layered crystal structure by depositing each layer of said layered crystal structure on a substrate by Molecular Beam Epitaxy (MBE) method with introducing oxygen-containing gas which...
09/27/1994
5340793Layer-by-layer process for forming Bi -containing oxide superconducting films
A method of forming a Bi system copper oxide superconducting thin film of Bi2 Sr2 Can-1 Cun Ox (nࣙ2) including at least the equivalent of a pair of a full CuO molecular layer and a full CaO molecula...
08/23/1994
5284824Method for manufacturing an oxide superconductor thin film
A method for manufacturing an oxide superconductor film is disclosed, which comprises the steps of: preparing a substrate; depositing an oxide superconductor film on said substrate by chemical vapor deposition (CVD); and supplying excited oxygen to or nea...
02/08/1994
5276010Process for producing bismuth-based oxide superconducting films
A process for producing an oxide crystalline thin film having a structure in which atomic layers having different chemical compositions are laminated along the film thickness direction, the process including the steps of depositing amorphous atomic layers...
01/04/1994
5273957Thermally sprayed lead-containing thick layers
A process is described for producing a superconducting thick layer on a base material by thermally spraying a powder containing bismuth, lead, strontium, calcium and copper in oxidic form. First a powdered starting mixture is prepared which has a composit...
12/28/1993
5262396Plasma-enhanced CVD of oxide superconducting films by utilizing a magnetic field
A method for forming a superconducting oxide material including introducing an oxygen or an oxidizing gas and a reactive gas or reactive solution or reactive minute particles into a plasma generating chamber; applying a magnetic field to the plasma genera...
11/16/1993
5258364Method of shaping superconducting oxide material
A method of forming a superconducting oxide material comprises the steps of forming of a superconducting oxide material into a thin film on a film-forming surface portion, creating a plasma to form an activated oxygen atmosphere, subjecting the thin film ...
11/02/1993
5248657Method for forming internally helixed high temperature superconductor assembly
A superconducting conductor assembly using high temperature materials. A double-walled tubular structure has at least one helical strip of superconductive material on the inner wall of the inside tube. Brittle, non-ductile superconducting materials may be...
09/28/1993
5206213Method of preparing oriented, polycrystalline superconducting ceramic oxides
A process for the preparation of oriented, ceramic oxides from a bilayer structure of a polycrystalline superconducting ceramic oxide and a second ceramic oxide material having a lower melting point than the superconducting ceramic oxide. The process comp...
04/27/1993
5194419Method for manufacturing an oxide superconductive multilayer circuit
A method for manufacturing a superconductive multilayer circuit has a first thin film forming step for forming a thin film, which is composed of superconductive material or a similar material thereto, on a substrate, a first circuit layer forming step for...
03/16/1993
5162296Plasma-enhanced CVD of oxide superconducting films by utilizing a magnetic field
A method for forming a superconducting oxide material including introducing oxygen or an oxidizing gas and a reactive gas or reactive minute particles into a plasma generating chamber; applying a magnetic field to the plasma generating chamber; supplying ...
11/10/1992
5158931Method for manufacturing an oxide superconductor thin film
A laser beam 5 is directed to a target made of an oxide superconductor to allow a target spot which is irradiated with the beam to be evaporated and a matter which is evaporated to be deposited as a thin film on the surface of a substrate 3 at which time ...
10/27/1992
5157015Process for preparing superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereaft...
10/20/1992
5120703Process for preparing oxide superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereaft...
06/09/1992
5100868Process for preparing superconducting films by radio-frequency-generated aerosol plasma deposition
A two-step process for the preparation of a thallium-containing superconductive film is described. In the first step of this process, an aerosol mist containing reactants necessary to produce a calcium/barium/strontium/copper precursor material is provide...
03/31/1992
5087608Environmental protection and patterning of superconducting perovskites
A method for the passivation of superconductive rare earth cuprates involves depositing thereon a thin film of an amorphous or diamond-like carbon film of a thickness ranging from 100 Å to 10 microns. The cuprate film may be in the as-deposited form, so ...
02/11/1992
5079224Production method of superconductive thin film and a device thereof
The superconductive thin film is made in the procedures that; in a vacuum vessel having an internal pressure maintained at least lower than 10-2 torr, each metal of the component elements of the superconductive thin film to be made is charged i...
01/07/1992
5061684Production of thin layers of a high temperature superconductor (HTSC) by a plasma-activated physical vapor deposition process, and cathodes used therein
In the process according to the invention, material is vaporized off a cathode and deposited on a substrate in a cathodic arc vaporization process, the arc base being moved on the cathode surface in a random or controlled manner. In the arc vaporization p...
10/29/1991
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