Class 505/413 - Utilizing mask (e.g., photoresist, etc.)

Subclass of Class 505 - Superconductor technology: apparatus, material, process
Definition: Process wherein a shield is utilized during the etching
No. of patents: 39
Last issue date: 04/22/2008

Number	Title	Issue Date
7361377	Fluorinated precursors of superconducting ceramics, and methods of making the same This invention provides a method of making a fluorinated precursor of a superconducting ceramic. The method comprises providing a solution comprising a rare earth salt, an alkaline earth metal salt and a copper salt; spraying the solution onto a substrate to provide...	04/22/2008
7335283	Production method for composite oxide thin film and device therefor and composite oxide film produced thereby A method and an apparatus which permits making a composite oxide thin film excellent in crystallinity easily and at a low temperature, with the capability of controlling the basic unit cell structure as desired, and without the need for a post annealing, as well as ...	02/26/2008
7193106	Halogenoacetoxyadamantane derivatives and process for production thereof Provided are a novel halogenoacetoxyadamantane derivative which is useful as a modifying agent for a resin for a photoresist and a dry etching resistance-improving agent in the photolithography field, agricultural and medical intermediates and a compound for other v...	03/20/2007
6943136	Superconducting structure A superconductive structure including a dielectric oxide substrate, a thin buffer layer of a superconducting material thereon; and, a layer of a rare earth-barium-copper oxide superconducting film thereon the thin layer of yttrium-barium-copper oxide, the rare earth...	09/13/2005
6638895	Method for fabricating high aspect ratio structures in perovskite material A method of fabricating high aspect ratio ceramic structures in which a selected portion of perovskite or perovskite-like crystalline material is exposed to a high energy ion beam for a time sufficient to cause the crystalline material contacted by the io...	10/28/2003
6387851	Micro-fabrication method and equipment thereby An SrTiO3 monocrystal substrate having a crystallographic plane (100) or (110) is anisotropically etched in an H3 PO4 solution using an SiO2 thin film as an etching mask. The H3 PO4 solution ...	05/14/2002
6066600	Method of making high-T_c SSNS and SNS Josephson junction A high temperature superconductor junction and a method of forming the junction are disclosed. The junction 40 comprises a first high-Tc superconductive layer (first base electrode layer) 46 on a substrate 42 and a dielectric layer 48 on the fi...	05/23/2000
5952269	Formation of superconducting devices using a selective etching technique A method for forming a superconducting device using a selective etching technique on superconducting thin films. The method utilizes rapid etching which combines ion implantation with chemical etching. The portions of the superconducting film to be retain...	09/14/1999
5811375	Superconducting multilayer interconnection formed of oxide superconductor material and method for manufacturing the same A superconducting multilayer interconnection comprises a substrate having a principal surface, a first superconducting current path of a c-axis orientated oxide superconductor thin film formed on the principal surface of the substrate, an insulating layer...	09/22/1998
5750474	Method for manufacturing a superconductor-insulator-superconductor Josephson tunnel junction A superconductor-insulator-superconductor Josephson tunnel junction, comprising: a single crystalline substrate having a perovskite crystal structure; a template layer formed of a b-axis oriented PBCO thin film on the substrate; and a trilayer structure c...	05/12/1998
5650377	Selective epitaxial growth of high-T_C superconductive material Fine epitaxial patterns of yttrium barium copper oxide on a strontium titanate substrate are provided by using a silicon nitride mask to define the pattern to be formed. A thin film of yttrium barium copper oxide is placed on the silicon nitride mask and ...	07/22/1997
5646095	Selective insulation etching for fabricating superconductor microcircuits A method for selectively etching insulative material composed of SrTiO3 or MgO in the presence of a copper oxide perovskite superconductive material includes treating the insulative material with a liquid selective etchant solution containing hydrogen flu...	07/08/1997
5567330	Electrical interconnect structures and processes Electrical interconnect structures comprised of high temperature superconducting signal layers on a substrate bonded to one another or optionally to a base substructure containing power and ground planes and processes for their preparation are disclosed....	10/22/1996
5552375	Method for forming high T_c superconducting devices Disclosed are methods of forming superconducting devices including a type having a structure of a superconductor--a normal-conductor (or a semiconductor)--a superconductor, and a type having a superconducting weak-link portion between superconductors. The...	09/03/1996
5446016	Method for forming a patterned oxide superconductor thin film A method for forming a patterned oxide superconductor thin film on a substrate comprises steps of forming a metal or semi-metal layer on a portion of the substrate, on which the oxide superconductor thin film will be formed, forming a layer of a material ...	08/29/1995
5411937	Josephson junction A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination wi...	05/02/1995
5326747	Process for patterning layered thin films including a superconductor A process for patterning layered thin films comprising a bottom oxide superconductor (1) layer deposited on a substrate (3) and another thin film (2) deposited on the bottom superconductor layer and consisting of insulator, ordinary conductor or oxide sup...	07/05/1994
5318950	Josephson device or junction and its production process This device or junction is essentially constituted by a substrate made from an electrically insulating material (2), a vertical wall (4) formed on the substrate and extending in a given direction (x), said wall being made from said insulating material, a ...	06/07/1994
5262392	Method for patterning metallo-organic percursor film and method for producing a patterned ceramic film and film products A method for patterning precursor film, a product thereof, a method for preparing a patterned ceramic film and a processing workpiece. The method for patterning precursor film includes the steps of depositing a blocking layer over the precursor film, patt...	11/16/1993
5240905	Method for forming electrode for electrical connections to oxide super-conductor A metal electrode formed on an oxide superconductor for electric connection to the oxide superconductor, includes a first layer of Ag in direct contact with the oxide superconductor, and a second layer formed on the first layer. The second layer is formed...	08/31/1993
5238913	Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials Superconducting microcircuits including a thin layer of Ba2 Cu3 O5+x (0	08/24/1993
5232901	Method of producing superconducting ceramic wire having protective metal coating thereon There is provided a method of producing a protective metal coated or covered superconducting ceramic wire by applying a finely pulverized protective metal-dispersed polymeric resin onto the surface of a glass wire in amorphous state of metal oxides capabl...	08/03/1993
5219830	Process for preparing high-Tc superconducting integrated circuits A process for preparing high-Tc superconducting integrated circuits by using a method in which a thin surface layer of non-superconducting tetragonal YBa2 Cu3 Oy wafer is selectively transformed into a superconducting orthorhombic ph...	06/15/1993
5212147	Method of forming a patterned in-situ high Tc superconductive film A method of forming a patterned in-situ photoconductive film on a substrate including providing a patterned photoresist layer on upper and lower metallic layers formed on a substrate. The patterned photoresist layer is used to form an opening in the upper...	05/18/1993
5198412	Method for making superconductor films A process is disclosed for producing superconductor films on a variety of substrates, and more particularly a patterned superconductor film on a planar substrate. The basic process includes the steps of: 1) depositing a metal film of superconductor precur...	03/30/1993
5196395	Method for producing crystallographic boundary junctions in oxide superconducting thin films A method for generating repeatable and reproducible crystallographic grain-boundary junctions is provided by forming a film on a crystalline substrate which has intersecting faces. In a preferred embodiment, a single crystal substrate is etched by an anis...	03/23/1993
5173474	Silicon substrate having an epitaxial superconducting layer thereon and method of making same An HTSC material epitaxially deposited on a YSZ buffer layer on a surface of a monocrystalline silicon substrate has a zero resistance transition temperature of at least 85° K., a transition width (10-90%) of no more than 1.0° K., a resistivity at 300°...	12/22/1992
5132280	Method of producing a superconductive oxide layer on a substrate A method of forming a superconductive metal oxide film on a substrate is disclosed. The method comprises depositing a metal layer on the substrate and heat treating the metal layer in an oxygen-containing atmosphere such that the oxide film is formed ther...	07/21/1992
5130296	Method of preparing an oxide superconducting thin film on a substrate with a plurality of grooves When an oxide superconducting thin film is formed on a substrate by a vapor phase method such as laser ablation, for example, a plurality of grooves are formed on the substrate by photolithography or beam application in the same direction with an average ...	07/14/1992
5087608	Environmental protection and patterning of superconducting perovskites A method for the passivation of superconductive rare earth cuprates involves depositing thereon a thin film of an amorphous or diamond-like carbon film of a thickness ranging from 100 Å to 10 microns. The cuprate film may be in the as-deposited form, so ...	02/11/1992
5041420	Method for making superconductor films from organometallic precursors A process is disclosed for producing superconductor films on a variety of substrates, and more particularly a patterned superconductor film on a planar substrate. The basic process includes the steps of: 1) depositing a metal film of superconductor precur...	08/20/1991
5021398	Method of forming patterned oxide superconducting films The present invention describes a method to produce a patterned superconducting solid preferably as a thin film. Unsaturated organic acid metal salts of suitable metals are dissolved in an organic solvent, mixed thoroughly and cast as a film on a substrat...	06/04/1991
4992415	Method for fabricating ceramic superconductors A method for fabricating a ceramic superconductor comprising the following steps: mixing a copper or copper alloy metal, a first metal oxide or carbonate which includes one element selected from group IIA of the Chemical Periodic Table, and a second metal...	02/12/1991
4980338	Method of producing superconducting ceramic patterns by etching Superconducting ceramic patterns are produced by dry etching. A superconducting ceramic film is deposited by plasma CVD on a semiconductor substrate which is covered with a blocking film in advance. The ceramic film is coated with a photomask followed by ...	12/25/1990
4971948	Method of patterning superconductive oxide films by use of diffusion barrier In a method of manufacturing a device comprising a film of an oxide superconducting material which comprises an alkaline earth metal, another metal component, copper and oxygen. A superconductor precursor material comprising copper oxide, alkaline earth m...	11/20/1990
4937226	Method for producing a small superconducting solenoid A large number of small superconducting solenoids are produced on a common substrate simultaneously. Two parallel slits (5) passing through a silicon wafer are dug in such manner that a core (10) is left between the slits and then a superconducting thin f...	06/26/1990
4933318	Plasma etch of masked superconductor film A method of manufacturing a thin film of an oxidic superconducting material in accordance with a pattern, in which a pattern is manufactured by means of etching using reactive ions and a mask of aluminium oxide or silicon oxide, said method enabling patte...	06/12/1990
4916115	Selective laser pyrolysis of metallo-organics as a method of forming patterned thin film superconductors Fine line superconductors of yttrium-barium-copper were formed on strontium titanate substrates by the completely non-vacuum techniques of metallo-organic deposition in selective laser pyrolysis. Lines 125 micrometers wide were written in a film of ...	04/10/1990
4900709	Method of patterning superconducting oxide thin films Method of applying in accordance with a pattern thin layers of oxidic superconductive material onto a substrate, it not being necessary to subject the superconductive material to mechanical or chemical treatments. At its surface the substrate is provided ...	02/13/1990

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Class 505/413 - Utilizing mask (e.g., photoresist, etc.)