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| Number | Title | Issue Date |
| 7367872 | Conditioner disk for use in chemical mechanical polishing A conditioner disk for use on a polish pad in chemical mechanical polishing process includes a base structure a plurality of curved blades supported by the base structure. The blades radiate outwardly from a center region of the base structure and curve in a common ... | 05/06/2008 |
| 7364502 | Cutting wheel The present invention relates to an improved cutting wheel, comprising a disk-shaped abrasive body having two opposite faces and a non-uniform thickness. ... | 04/29/2008 |
| 7364497 | Polish pad and chemical mechanical polishing apparatus comprising the same A polishing pad for use in chemically mechanically polishing a semiconductor substrate enhances the uniformity of the rate at which material is removed from the surface of the semiconductor substrate, thereby ensuring the reproducibility of the chemical mechanical p... | 04/29/2008 |
| 7300342 | Scratch removal device and method A polishing wheel including a lower polishing surface and defining a different color from a secondary portion of the polishing wheel, so as to indicate wear of the polishing surface. The polishing surface includes a plurality of main radial flutes extending from a c... | 11/27/2007 |
| 7137872 | Scratch removal device and method A polishing wheel including a lower polishing surface and defining a different color from a secondary portion of the polishing wheel, so as to indicate wear of the polishing surface. The polishing surface includes a plurality of main radial flutes extending from a c... | 11/21/2006 |
| 7011565 | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus The polishing pad for a chemical mechanical polishing apparatus, and a method of making the same. The polishing pad has a covering layer with a polishing surface and a backing layer which is adjacent to the platen. A first opening in the covering layer with a first ... | 03/14/2006 |
| 6949012 | Polishing pad conditioning method and apparatus A method and apparatus is provided that comprises an improved substrate polishing pad conditioning plate. In one embodiment, the conditioning plate contains multiple channels interposed between the abrasive surfaces so as to manage slurry and debris to resist cloggi... | 09/27/2005 |
| 6394888 | Abrasive tools for grinding electronic components Abrasive tools containing high concentrations of hollow filler materials in a resin bond are suitable for polishing and backgrinding of hard materials, such as ceramic wafers and components requiring a controlled amount of surface defects. These highly po... | 05/28/2002 |
| 6178722 | Application system for sliders at form-fill-seal machine A method and apparatus for manufacturing reclosable bags having slide zippers on a form-fill-seal machine is provided. In a first embodiment the sliders are preapplied to the zipper and the bags are made using conventional form-fill-seal techniques. In a ... | 01/30/2001 |
| 6159088 | Polishing pad, polishing apparatus and polishing method A polishing pad for chemical mechanical polishing capable of simultaneously realizing a reduction of process costs by the reduction of the amount of usage of a polishing slurry and an improvement of a polishing quality of a wafer surface, and a polishing ... | 12/12/2000 |
| 5928071 | Abrasive cutting element with increased performance A polycrystalline diamond cutting element has a non-planar, non-linear interface between a substrate and a table. The substrate has one or more protrusions mounted on the surface of the substrate and in spaced relationship. Each protrusion has a generally... | 07/27/1999 |
| 5782682 | Grinding wheel having abrasive tips A grinding wheel with tips which can be uniformly abraded regardless of the position of the tips is disclosed. In the wheel, the inside and outside tips may be formed by bonding diamond dust of the same concentration with resinoid or metal bonds of lower ... | 07/21/1998 |
| 5707276 | Abrader with integral depth control An abrader blade with integral depth control wings. The depth control wings which slide on a portion of the material being abraded to limit the depth of abrasion. The cutting surface of the abrasive surgical device is covered with abrading material. In a ... | 01/13/1998 |
| 5681216 | High precision polishing tool A polishing tool having a polishing wheel that forms a set of pockets wherein the pockets receive a stream of water and are formed such that a high hydrostatic pressure builds in the pockets as the polishing tool rotates in a high precision grinding machi... | 10/28/1997 |
| 4037367 | Grinding tool In a rotary tool adapted for grinding under a flowing liquid film, wherein the particles of abrasive are metal-bonded to a rigid supporting surface, the improvement consists of a network in the supporting surface of grooves having constant depth and const... | 07/26/1977 |
