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Class 451/494 - Having magnetic or suction tool holding means


Subclass of Class 451 - Abrading
Definition: Tool support having means to secure the tool to a support
No. of patents: 58
Last issue date: 06/03/2008


1    
NumberTitleIssue Date
7381116Polishing media stabilizer
A polishing apparatus that employs a polishing media retention arrangement to prevent slippage or wrinkles in the polishing media during polishing. The polishing media is drawn against a support surface by a vacuum applied between the polishing media and the support...
06/03/2008
7320634Sanding tool and dust collection system therefor
A hand-held manually-operated sanding tool includes a base having a lower surface including a plurality of attachment posts extending outwardly therefrom and a handle opposite the base lower surface for a user to grasp and maneuver the tool. ...
01/22/2008
7303662Contacts for electrochemical processing
Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact elem...
12/04/2007
7264542Knife sharpening method and system
A method and system are disclosed. The system may include a device for sharpening a convex edge on the blade of a knife. The device may include a resilient material and a plurality of abrasive sheets of varying grit values. Each abrasive sheet may be removably attac...
09/04/2007
7223165Abrasive pad for a manual grinding machine
An abrasive pad for a manual grinding machine, in particular for an eccentric grinder, has a flat contact surface (13) on which an abrasive sheet is placed, and attachment means located on the contact surface (13) for creating an adhesive connection wi...
05/29/2007
7175504Vacuum suction holding apparatus and holding method, polishing apparatus using this holding apparatus, and device manufacturing method using this polishing apparatus
The vacuum suction holding apparatus of the present invention has a vacuum duct which is disposed inside a polishing head, with one end of this vacuum duct being opened in the attachment surface and the other end thereof being connected to a vacuum source. A polishi...
02/13/2007
7156722Platen structure of polishing apparatus for processing semiconductor wafer and method for exchanging polishing pad affixed to the same
A platen structure of a polishing apparatus for semiconductor wafer and a method for exchanging a polishing pad affixed to the same are provided in which the polishing pad supported by the platen is exchanged with convenience within a short time. The platen structur...
01/02/2007
7147543Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces
Carrier assemblies, planarizing machines with carrier assemblies, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, the carrier assembly includes a head having a chamber, a magneti...
12/12/2006
7125477Contacts for electrochemical processing
Systems and methods for electrochemically processing. A contact element defines a substrate contact surface positionable in contact a substrate during processing. In one embodiment, the contact element comprises a wire element. In another embodiment the contact elem...
10/24/2006
7121934Carrier head for chemical mechanical polishing apparatus
Disclosed is a carrier head of a chemical mechanical polishing apparatus for planarizing a semiconductor wafer. An adjustment chamber is provided in a space section formed between a membrane lower holder and a membrane upper holder of a wafer support assembly. Press...
10/17/2006
7112124Rotary blade sharpener
A rotary blade sharpener is comprised of a motorized platen positioned in a housing with a surrounding wall and an open top. An abrasive sheet with an adhesive bottom surface is adhered to a disc, which is tightened to the platen by a knob. The disc is color coded t...
09/26/2006
7094140Abrasive sanding surface
An abrasive sandpaper system having a backing plate (16) with a canted outer periphery (28) and an off-centered aperture (26) for interlocking with lugs (18) of a power driver (12). The sandpaper (30) has a canted outer peri...
08/22/2006
7077721Pad assembly for electrochemical mechanical processing
Embodiments of a processing pad assembly for processing a substrate are provided. The processing pad assembly includes an upper layer having a processing surface and an electrode having a top side coupled to the upper layer and a bottom side opposite the top side. A...
07/18/2006
7077733Subpad support with a releasable subpad securing element and polishing apparatus including the subpad support
A subpad support for use in a web format or belt format polishing apparatus for polishing one or more layers of semiconductor device structures. The subpad support includes a subpad retention element for non-adhesively securing the subpad thereto. The subpad support...
07/18/2006
7059948Articles for polishing semiconductor substrates
Methods, articles of manufacture, and apparatus are provided for depositing a layer, planarizing a layer, or combinations thereof, a material layer on a substrate. In one embodiment, an article of manufacture is provided for polishing a substrate, comprising a polis...
06/13/2006
7040973Abrasive sheet
An abrasive sheet is made from an abrasive media mounted to a polymeric foam support member forming a one-piece abrasive sheet that is easily cut into any desirable configuration. The abrasive sheet is easily mounted to a holder adaptable to hand-held manual or powe...
05/09/2006
7040964Polishing media stabilizer
A polishing apparatus that employs a polishing media retention arrangement to prevent slippage or wrinkles in the polishing media during polishing. The polishing media is drawn against a support surface by a vacuum applied between the polishing media and the support...
05/09/2006
7029365Pad assembly for electrochemical mechanical processing
Embodiments of a pad assembly for processing a substrate are provided. The pad assembly includes a processing layer having a working surface adapted to process a substrate, a lower layer coupled to and disposed below the processing layer, and an electrode having an ...
04/18/2006
7001251Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine
A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen that are co...
02/21/2006
6979248Conductive polishing article for electrochemical mechanical polishing
An article of manufacture, method, and apparatus are provided for planarizing a substrate surface. In one aspect, an article of manufacture is provided for polishing a substrate including a polishing article having a body comprising at least a portion of fibers coat...
12/27/2005
6962524Conductive polishing article for electrochemical mechanical polishing
Embodiments of a ball assembly are provided. In one embodiment, a ball assembly includes a housing, a ball, a conductive adapter and a contact element. The housing has an annular seat extending into a first end of an interior passage. The conductive adapter is coupl...
11/08/2005
6958001Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpieces
Carrier assemblies, planarizing machines with carrier assemblies, and methods for mechanical and/or chemical-mechanical planarization of micro-device workpieces are disclosed herein. In one embodiment, the carrier assembly includes a head having a chamber, a magneti...
10/25/2005
6951297Sandpaper dispenser
A sandpaper dispenser (100) is provided. The sandpaper dispenser includes a frame (102) adapted to be coupled to a sanding device (106) and a sandpaper dispensing assembly 144 coupled to the frame. A sanding pad (105 or 110)...
10/04/2005
6857950Polishing apparatus, semiconductor device manufacturing method using the polishing apparatus, and semiconductor device manufactured by the manufacturing method
The present invention provides a polishing apparatus with a construction which makes it possible to prevent the peripheral portions of a substrate from sloping downward as a result of the polishing member tilting at the peripheral portions of the substrate during th...
02/22/2005
6722949Ventilated platen/polishing pad assembly for chemcial mechanical polishing and method of using
A ventilated platen/polishing pad assembly for chemical mechanical polishing copper conductors on a semiconductor wafer is disclosed. The ventilated platen is constructed by a platen having a multiplicity of apertures through a thickness of the platen, and a polishi...
04/20/2004
6663470Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine
A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen ...
12/16/2003
6514125Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine
A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen ...
02/04/2003
6506101Method and apparatus for releasably attaching a polishing pad to a chemical-mechanical planarization machine
A method and apparatus for releasably attaching a planarizing medium, such as a polishing pad, to the platen of a chemical-mechanical planarization machine. In one embodiment, the apparatus can include several apertures in the upper surface of the platen ...
01/14/2003
6491570Polishing media stabilizer
A polishing apparatus that employs a polishing media retention arrangement to prevent slippage or wrinkles in the polishing media during polishing. The polishing media is drawn against a support surface by a vacuum applied between the polishing media and ...
12/10/2002
6394887Apparatus for use with automated abrading equipment
An adapter for use with automated abrading equipment. The adapter includes a first surface for the releasable mounting of abrasive articles, such as those mounted with releasable adhesive, and a second surface for releasable mounting to automated equipmen...
05/28/2002
6361424Back-up pad for abrasive articles and method of making
A back-up pad for pad for supporting an abrasive article. A preferred embodiment of the invention provides a back-up pad having a dust collection groove, in which the engagement component for securing the abrasive article is attached to the dust collectio...
03/26/2002
6302775Apparatus and method for cold cross-sectioning of soft materials
Apparatus and a method of cold cross-sectioning soft materials includes providing a chuck attached to a drive motor with a composite plate attached to the chuck and including a heat insulating portion, a heat conducting layer, and a central axially extend...
10/16/2001
6261958Method for performing chemical-mechanical polishing
An apparatus and method for performing chemical-mechanical polishing is disclosed in which the pad is secured to the platen without the use of adhesives. A polishing pad and a platen are secured together by a releasable attractive force; the force may com...
07/17/2001
6244941Method and apparatus for pad removal and replacement
A method and apparatus for facilitating the removal and replacement of polishing pads utilized in the process of polishing and planarizing workpieces such as semiconductors where the polishing machine employed includes a rotatable platen. The apparatus fo...
06/12/2001
6224474Magnetic disc system for grinding or polishing specimens
A magnetic disc system for grinding or polishing metallographic test specimens on a movable platen includes a barrier that is magnetically attached to a movable platen. A grinding or polishing surface attaches to the barrier. The barrier magnetically atta...
05/01/2001
6217425Apparatus and method for lapping magnetic heads
An apparatus for lapping a workpiece including a plurality of magnetic heads supported by a tool is disclosed. The lapping apparatus comprises a rotary lapping table, a lapping head attachment frame, an adjuster ring resiliently supported by the frame, a ...
04/17/2001
6120349Polishing system
A polishing system includes a polishing pad for polishing a surface of a layer provided on a substrate, a surface condition measuring device for detecting a condition of a polishing surface of the polishing pad and a controller for controlling a process t...
09/19/2000
6116998Attachment means and use of such means for attaching a sheet-formed abrasive or polishing means to a magnetized support
An attachment means for attaching a sheet-formed abrasive and/or polishing means to a magnetized support, said attachment means comprising a ferromagnetic base layer and an external adhesive layer to which the abrasive and/or polishing means attached, and...
09/12/2000
6089963Attachment system for lens surfacing pad
An attachment system for a lens surfacing and polishing pad adapted for use with a lapping tool is described. The lapping tool includes a curved surface having a metallic surface disposed on at least a portion thereof. The pad has a configuration conformi...
07/18/2000
6083083Separation type grinding surface plate and grinding apparatus using same
A separation type grinding or polishing (hereinafter "grinding") surface plate (11) comprises a surface plate body (12) connected to a drive of a grinding apparatus directly or through a water cooled jacket or the like, and a disk (13) for grinding which ...
07/04/2000
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