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| Number | Title | Issue Date |
| 7303461 | Method of machining airfoils by disc tools A method for machining a rotor having a disc and a plurality of integral airfoils projecting outwardly from the disc, according to one aspect of the invention, comprises a step of machining each airfoil with a disc tool having a grinding periphery thereof adapted fo... | 12/04/2007 |
| 7090560 | System and method for detecting abrasive article orientation Systems and methods control abrading operations of an abrading machine by sensing characteristics of an abrading article installed on the abrading machine. When a problem is discovered by sensing the article, appropriate actions may be taken. As one example, the abr... | 08/15/2006 |
| 6988934 | Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system An apparatus for use in a chemical mechanical planarization (CMP) system is provided. The apparatus includes a platen capable of introducing fluid beneath a polishing pad and a platen support cover configured to surround the platen. The platen is disposed at a first... | 01/24/2006 |
| 6926589 | Chemical mechanical polishing apparatus and methods using a flexible pad and variable fluid flow for variable polishing The present invention relates to methods and apparatus that allow for chemical mechanical polishing using a flexible pad and variable fluid flow for variable polishing. ... | 08/09/2005 |
| 6916232 | Apparatus for superpolishing the inside surface of a seam of a continuous photoreceptor belt Apparatus is provided for superpolishing the inside diameter surface of a seam of a flexible continuous photoreceptor belt. The apparatus includes (a) spaced apart support rollers for supporting the inside surface of the flexible continuous photoreceptor belt into a... | 07/12/2005 |
| 6913521 | Methods using active retainer rings for improving edge performance in CMP applications An invention improves edge performance in chemical mechanical polishing processes. A method operation provides a wafer head above a wafer. The wafer head includes a first active retaining ring capable of extension and retraction. Another operation provides a polishi... | 07/05/2005 |
| 6893329 | Polishing apparatus with abrasive tape, polishing method using abrasive tape and manufacturing method for magnetic disk An abrasive tape is supplied to a tape head by a tape supply unit and taken up from the tape head by a tape take-up unit. The tape head presses the abrasive tape against a surface of an object under polish, which is rotated by a rotating unit. A tape head pressuring... | 05/17/2005 |
| 6869341 | Single-sided finishing apparatus A single-sided finishing apparatus is provided having a plurality of finishing stations with rotating transfer stations positioned therebetween. A hold down system presents the edge of the workpiece to the finishing head. The rotating transfer station includes a cla... | 03/22/2005 |
| 6837779 | Chemical mechanical polisher with grooved belt A chemical mechanical polishing apparatus has a substrate holder, a polishing belt, and a backing member positioned on a side of the polishing belt opposite the substrate holder. The polishing belt has a polishing surface to contact at least a portion of the substra... | 01/04/2005 |
| 6776695 | Platen design for improving edge performance in CMP applications An invention is disclosed for improving edge performance in a chemical mechanical polishing process is disclosed. The system includes a wafer head disposed above a wafer, where the wafer head includes a first active retaining ring capable of extension and retraction... | 08/17/2004 |
| 6746315 | Ball spinner and polish apparatus An apparatus is provided for polishing balls that comprises a cradle that is supported for rotation about a first axis. The cradle is shaped to support a spherical object and includes a ball spinner positioned and adapted to spin the spherical object in the cradle a... | 06/08/2004 |
| 6641464 | Method and apparatus for polishing the edge of a bonded wafer A polishing bar is provided with a plurality of backings that are carried via blocks of impact absorbent material on a bar of greater stiffness. Each backing is shaped with two surfaces at an angle to each other. A polishing tape is disposed over the angl... | 11/04/2003 |
| 6468134 | Method and apparatus for slurry distribution A method and apparatus for slurry distribution is provided. The apparatus for the distribution of slurry over a polishing pad surface used in chemical mechanical polishing includes a roller positioned over a polishing pad surface. The roller is connected ... | 10/22/2002 |
| 6402596 | Single-side polishing method for substrate edge, and apparatus therefor A single-side polishing method, and an apparatus therefor, for the upper surface and the end face of a substrate edge with a polishing strip are provided. The apparatus comprises a substrate holding member rotatably holding the substrate and a supporting ... | 06/11/2002 |
| 6312319 | Polishing media magazine for improved polishing A polishing media magazine for improved polishing. The polishing media magazine may include a conditioning element for rapid, uniform conditioning and cleaning of the polishing media. The polishing media magazine may include polishing media having section... | 11/06/2001 |
| 6280305 | Vibration surface finishing apparatus An orbiting head is rotatably mounted in the housing. The orbiting head has an axial end with a grinding surface for contact with the workpiece having its surface finished. The orbiting head defines a fluid passage with one end having an opening at the gr... | 08/28/2001 |
| 6068542 | Pad tape surface polishing method and apparatus A surface polishing method comprises allowing a holder to hold a flat sheet-like workpiece, placing a pad tape in a location opposite to the holder, the pad tape consisting of a tape substrate and grains bonded to the substrate surface, supplying free gra... | 05/30/2000 |
| 5944585 | Use of abrasive tape conveying assemblies for conditioning polishing pads A conveying assembly in a conditioning sub-assembly for conveying a conditioning surface to a polishing pad during conditioning is described. The conveying assembly includes an arm and a guiding component connected to the arm and adapted to guide the cond... | 08/31/1999 |
| 5755615 | Lapping apparatus A lapping apparatus for improving the durability of a lap film and the reliability of a lapping apparatus. A shoe having a recessed workpiece retaining section is installed on each of the opposed faces of a pair of clamp arms. A deep groove is formed in t... | 05/26/1998 |
| 5664985 | Method and apparatus for texturizing disks A method and apparatus is disclosed for texturizing magnetic storage disks. The disk texturizing apparatus utilizes a combination of servomotors for rotating the disk and oscillating the disk towards and away from a texturizing media. The servomotors are ... | 09/09/1997 |
| 5388373 | Apparatus for applying a cutting edge to a needle An apparatus for applying a cutting edge on surgical needles having at least one abrading device and a needle holding mechanism. The abrading device includes an abrasive member such as a rotatable abrasive belt or grinding wheel. The needle holding mechan... | 02/14/1995 |
| 5377452 | Grinder for grinding stamper used for disc molding A grinding apparatus for grinding a stamper for forming a signal recording part, of an information signal recording disc is disclosed. The grinding apparatus includes a turntable holding and rotationally driving the stamper and an abrasive head for bringi... | 01/03/1995 |
| 5276999 | Machine for polishing surface of glass plate A machine 80 for polishing a surface of a glass plate 20, comprising a polishing belt 1 provided with a polishing layer in an outside surface thereof, a traveling unit 2for traveling the polishing belt 1, a flatly supporting unit 21 for flatly supporting ... | 01/11/1994 |
| 5095663 | Size control shoe for microfinishing machine Microfinishing devices and processes for in-process gauging of a microfinishing process of generally cylindrical workpieces. A size control shoe is used with a microfinishing shoe such that the diameter of a generally cylindrical workpiece can be continua... | 03/17/1992 |
| 4993190 | Polishing apparatus A polishing apparatus for polishing optical components and mechanical parts requiring a high surface precision, such as lenses and mirrors, by pressing a running tape to such component.... | 02/19/1991 |
| 4964242 | Apparatus for texturing rigid-disks used in digital magnetic recording systems An apparatus for texturing the front and back surfaces of a rigid-disk substrate used in magnetic recording systems is disclosed. The apparatus comprises first and second mechanical assemblies; each of the assemblies including an abrasive tape, a load-bea... | 10/23/1990 |
| 4833833 | Sanding apparatus for working a peripheral edge of a workpiece A sander for finish working the peripheral edge of a workpiece includes a power driven workpiece carrying member which is moved in a horizontal plane and supports the workpiece so that the workpiece moves with the workpiece carrying member. The workpiece ... | 05/30/1989 |
| 4747237 | Method for manufacturing a finished turbine blade from a raw workpiece An improved method and apparatus for manufacturing finished turbine blades from a raw workpiece is disclosed wherein the path of a sanding shoe with respect to the workpiece is controlled as the workpiece is rotated on a spindle. The method involves plott... | 05/31/1988 |
| 4580367 | Abrading apparatus Apparatus for grinding irregular surfaces of a workpiece includes a frame, a slide movable longitudinally on this frame, a shaft mounted for rotation on the slide and having a workholder mounted on it, a grinder adapted to contact the surface to be ground... | 04/08/1986 |
| 4407096 | Method and apparatus for surface grinding A surface grinding method in a first embodiment of which a workpiece supported on a surface (56) is rotated about a vertical axis while being translated along ways (46, 47) past a cutting head (22) comprising an abrasive belt (71) driven about a drum (72)... | 10/04/1983 |
| 4145846 | Contour belt grinding device A propeller grinding device and method employs two endless grinding belts which are transported past a grinding station to finish the front and back surfaces. A propeller blank is inserted between the belts and the belts are distorted by platens, each of ... | 03/27/1979 |
| 4112628 | Duplicating grinding machine This invention relates to a duplicating grinding machine for grinding workpieces of irregular three-dimensional shape, wherein a model and at least one workpiece are mounted side by side in spaced parallel relation to one another between clamping devices ... | 09/12/1978 |
