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Class 438/911 - DIFFERENTIAL OXIDATION AND ETCHING


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Art collection involving differential oxidation combined
No. of patents: 139
Last issue date: 09/16/2008


1        
NumberTitleIssue Date
7425480Semiconductor device and method of manufacture thereof
A method of manufacturing a MOS transistor incorporating a silicon oxide film serving as a gate insulating film and containing nitrogen and a polycrystalline silicon film serving as a gate electrode and containing a dopant and arranged such that the gate electrode i...
09/16/2008
7303946Method of manufacturing a semiconductor device using an oxidation process
A method of manufacturing a MOS transistor incorporating a silicon oxide film serving as a gate insulating film and containing nitrogen and a polycrystalline silicon film serving as a gate electrode and containing a dopant and arranged such that the gate electrode i...
12/04/2007
7208325Refreshing wafers having low-k dielectric materials
A low-k dielectric layer having a composition of silicon, oxygen and carbon is removed from a wafer. The low-k dielectric layer is removed by exposing a surface of the low-k dielectric layer to an oxygen-containing gas to oxidized the surface. The oxidized surface i...
04/24/2007
6890832Radiation hardening method for shallow trench isolation in CMOS
A radiation-hardened STI process includes implanting a partially formed wafer with a fairly large dose (1013 to 1017 ions/cm2) of a large atom group III element, such as B, Al, Ga or In at an energy between about 30 and 500 keV. The ...
05/10/2005
6844225Self-aligned mask formed utilizing differential oxidation rates of materials
A self-aligned oxide mask is formed utilizing differential oxidation rates of different materials. The self-aligned oxide mask is formed on a CVD grown base NPN base layer which compromises single crystal Si (or Si/SiGe) at active area and polycrystal Si (or Si/SiGe...
01/18/2005
6784115Method of simultaneously implementing differential gate oxide thickness using fluorine bearing impurities
Improved methods for fabricating semiconductor integrated circuit devices, in particular flash EEPROM devices. According to an embodiment, the present invention provides a method of forming a semiconductor device having a gate oxide layer (160) that is thin i...
08/31/2004
6777333Method for fabricating semiconductor device
A method for fabricating a semiconductor device includes the steps of: forming an insulating film on a conductive pattern formed on a substrate; forming a resist pattern on the insulating film; performing etching to the insulating film using the resist pattern as a ...
08/17/2004
6759263Method of patterning a layer of magnetic material
A method of patterning a layer of magnetic material to form isolated magnetic regions. The method forms a mask on a film stack comprising a layer of magnetic material such the protected and unprotected regions are defined. The unprotected regions are oxidized to for...
07/06/2004
6610211Method of processing internal surfaces of a chemical vapor deposition reactor
The invention encompasses methods of processing internal surfaces of a chemical vapor deposition reactor. In one implementation, material is deposited over internal surfaces of a chemical vapor deposition reactor while processing semiconductor substrates ...
08/26/2003
6555484Method for controlling the oxidation of implanted silicon
Two different regions of a semiconductor substrate are implanted with dopants/ions. The implantation may occur though a sacrificial oxide layer disposed over the substrate. Following implantation in one or both regions, the substrate may be annealed and t...
04/29/2003
6455440Method for preventing polysilicon stringer in memory device
In accordance with the present invention, a method for preventing polysilicon stringers in memory devices is disclosed. The key aspect of the present invention is the formation of a floating gate structure with multi-level oxidation rates the lower portio...
09/24/2002
6368986Use of selective ozone TEOS oxide to create variable thickness layers and spacers
A process for selectively depositing a silicon oxide layer onto silicon substrates of different conductivity types is disclosed. The silicon oxide layer is formed by the ozone decomposition of TEOS at relatively low temperatures and relatively high pressu...
04/09/2002
6344416Deliberate semiconductor film variation to compensate for radial processing differences, determine optimal device characteristics, or produce small productions
Methods and apparatuses are disclosed that can introduce deliberate semiconductor film variation during semiconductor manufacturing to compensate for radial processing differences, to determine optimal device characteristics, or produce small production r...
02/05/2002
6335288Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD
A method and apparatus are disclosed for depositing a dielectric film in a gap having an aspect ratio at least as large as 6:1. By cycling the gas chemistry of a high-density-plasma chemical-vapor-deposition system between deposition and etching condition...
01/01/2002
6239478Semiconductor structure for a MOS transistor
The MOS transistor has field plates and a subarea of the gate formed from the same polysilicon layer. A gate oxide lying underneath them is produced at the beginning of the fabrication process and it therefore exhibits particularly high quality. The polys...
05/29/2001
6225167Method of generating multiple oxide thicknesses by one oxidation step using NH3 nitridation followed by re-oxidation
A method is disclosed to form a plurality of oxides of different thicknesses with one step oxidation. In a first embodiment, a substrate is provided having a high-voltage cell area and a peripheral low-voltage logic area separated by a trench isolation re...
05/01/2001
6211058Semiconductor device with multiple contact sizes
A semiconductor device having multiple layers uses different size contacts at different layer in order in order to simply the manufacturing process and the depth of etching required. Contact sizes are selected based on the responsiveness of the material t...
04/03/2001
6087243Method of forming trench isolation with high integrity, ultra thin gate oxide
The quality of an ultra thin gate oxide film, particularly at the edges of a shallow trench isolation structure, is improved employing a double sacrificial oxide technique. After trench filling and planarization, the pad oxide layer thickness is increased...
07/11/2000
6063670Gate fabrication processes for split-gate transistors
A method for forming an integrated circuit having multiple gate oxide thicknesses is disclosed herein. The circuit (10) is processed up to gate oxide formation. A first gate dielectric (20) is formed. Next, a disposable layer (22) is formed over the first...
05/16/2000
6052261Method for manufacturing magnetoresistance head
A method for manufacturing a magnetoresistance head of the present invention comprises the steps of forming an organic film on a multilayered film constituting a magnetoresistance device, forming an upper film formed of resist or inorganic film on the org...
04/18/2000
6043128Semiconductor device handling multi-level voltages
A method of fabricating a multi power source semiconductor device handling multi-level voltages, comprises the steps of: forming first gate oxide layers by thermally oxidizing surfaces of the plurality of the active regions of said semiconductor substrate...
03/28/2000
6015736Method and system for gate stack reoxidation control
A system and method for providing at least one memory cell on a semiconductor is disclosed. The method and system include providing a tunneling barrier on the semiconductor, providing at least one floating gate having a corner, and oxidizing the tunneling...
01/18/2000
5994216Method of forming a reduced size contact in a dielectric layer by using bird's beak of oxidized polysilicon to create an etching mask
A method for forming a reduced size contact hole over a structure. The method comprises the steps of: forming a dielectric layer on said structure; forming a polysilicon layer on said dielectric layer; forming a silicon nitride layer on said polysilicon l...
11/30/1999
5972757Method of forming a self aligned through-hole on a diffused layer
The present invention relates to a semiconductor device whose through-holes are formed by self-alignment, and a method for fabricating the same. The through-holes formed on the gate electrodes can be formed simultaneously with SACs without complicating th...
10/26/1999
5922621Quantum semiconductor device and a fabrication process thereof
A method for fabricating a quantum semiconductor device includes the steps of forming an etch pit of a triangular pyramid on a {111}A-oriented principal surface of a substrate having zinc blende structure by a dry etching process, and depositing semicondu...
07/13/1999
5824601Carboxylic acid etching solution and method
A sacrificial oxide etching solution of carboxylic acid and HF having a high etch selectivity for silicon oxide relative to polysilicon, metal, and nitride. The solution is useful in the fabrication of microstructures having integrated electronics on the ...
10/20/1998
5798303Etching method for use in fabrication of semiconductor devices
An etching method includes providing a first surface and a second surface with the second surface lying substantially vertical to the first surface. A material is provided over at least a portion of the first and second surface. The material is anisotropi...
08/25/1998
5707888Oxide formed in semiconductor substrate by implantation of substrate with a noble gas prior to oxidation
A process and resulting product is described for forming an oxide in a semiconductor substrate which comprises initially implanting the substrate with atoms of a noble gas, then oxidizing the implanted substrate at a reduced temperature, e.g., less than 9...
01/13/1998
5705027Method of removing etching residues
The method is to selectively etch the etching residue in non-conductive state occurring in semiconductor manufacturing process. A silicon substrate cassette is used in such selective etching. In removing the etching residue in non-conductive state occurring in...
01/06/1998
5700628Dry microlithography process
An all-dry microlithography process, where a fluorinated layer 30 is deposited on a processable layer 18 of a semiconductor wafer, and regions of the fluorinated layer 30 are exposed to a masked radiation source so that exposed regions and unexposed areas...
12/23/1997
5686346Method for enhancing field oxide thickness at field oxide perimeters
A method for enhancing the thickness of a field oxide layer at perimeters of the field regions is presented. The use of a relatively thin pad oxide layer under a nitride layer reduces lateral encroachment of the field oxide layer into device active areas,...
11/11/1997
5679600Double locos for submicron isolation
An improved LOCOS process is provided particularly for use with submicron isolation dimensions in the form of a double LOCOS process, in which double LOCOS stacks are formed upon a silicon substrate including a thin first oxide (pad oxide) layer, a thin f...
10/21/1997
5674776Semiconductor processing methods of forming field oxidation regions on a semiconductor substrate
A semiconductor processing method of forming a pair of adjacent field oxide regions includes, i) providing a sacrificial pad oxide layer to a thickness of from 20 Angstroms to 100 Angstroms; ii) providing a patterned masking layer over the sacrificial pad...
10/07/1997
5670412Semiconductor processing methods of forming field oxidation regions on a semiconductor substrate
A semiconductor processing method of forming field oxide regions includes, a) providing a sacrificial pad oxide layer over a semiconductor substrate; b) providing a Gex Siy layer over the pad oxide layer, where x is greater than 0.2,...
09/23/1997
5654215Method for fabrication of a non-symmetrical transistor
In the present invention, a method for fabrication of a non-symmetrical LDD-IGFET is described. In one embodiment, a gate insulator and a gate electrode, such as a polysilicon, are formed over a semiconductor substrate, the gate electrode having a top sur...
08/05/1997
5650351Method to form a capacitor having multiple pillars for advanced DRAMS
A method of fabricating a capacitor having multiple pillars is presented. The invention uses an oxidized hemispherical grain silicon (HSG-Si) layer as a masking layer, in a series of masking steps, to form pillarets on a storage electrode. The method begi...
07/22/1997
5627099Method of manufacturing semiconductor device
In a method of manufacturing a semiconductor device, after forming a poly silicon film 54 on a surface of a silicon substrate 51, a silicon nitride film 55 is formed in accordance with a desired pattern and a local oxidation process is carried out to form...
05/06/1997
5624861Method of manufacturing semiconductor device
A manufacturing method of a semiconductor device includes the steps of depositing a metallic film (light-shielding film), an insulating film and a semiconductor film in this order on an insulating substrate, and after patterning the insulating film and th...
04/29/1997
5612246Method for manufacturing semiconductor substrate having buck transistor and SOI transistor areas
A method for manufacturing a semiconductor substrate structure wherein a comprising the steps of defining bulk transistor and SOI transistor areas, the bulk transistor area disposed on a lower single crystalline silicon layer, and the SOI transistor area ...
03/18/1997
5595922Process for thickening selective gate oxide regions
One embodiment of the present invention is a method of simultaneously forming high-voltage (12) and low-voltage (10) devices on a single substrate (14), the method comprising: forming a thin oxide layer (18) on the substrate, the thin oxide layer having a...
01/21/1997
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