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| Number | Title | Issue Date |
| 8110511 | Methods and systems of transferring a substrate to minimize heat loss A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 prese... | 02/07/2012 |
| 8110510 | Low temperature synthesis of nanowires in solution Methods synthesizing nanowires in solution at low temperatures (e.g., about 400° C. or lower) are provided. In the present methods, the nanowires are synthesized by exposing nanowire precursors to metal nanocrystals in a nanowire growth solution comprising a solven... | 02/07/2012 |
| 8084375 | Hot edge ring with sloped upper surface A hot edge ring with extended lifetime comprises an annular body having a sloped upper surface. The hot edge ring includes a step underlying an outer edge of a semiconductor substrate supported in a plasma processing chamber wherein plasma is used to process the sub... | 12/27/2011 |
| 7968474 | Methods for nanowire alignment and deposition The present invention provides methods and systems for nanowire alignment and deposition. Energizing (e.g., an alternating current electric field) is used to align and associate nanowires with electrodes. By modulating the energizing, the nanowires are coupled to th... | 06/28/2011 |
| 7960297 | Load lock design for rapid wafer heating A semiconductor processing tool heats wafers using radiant heat and resistive heat in chamber or in a load lock where pressure changes. The wafers are heated in greater part with a resistive heat source until a transition temperature or pressure is reached, then the... | 06/14/2011 |
| 7932190 | Flow control of photo-polymerizable resin This invention provides methods and systems, e.g., to control the flow of photo-polymerizable resins. In the method, e.g., flow of a photo-polymerizable resin is restricted from illuminated resin exclusion regions on a substrate surface by precisely situated flow ba... | 04/26/2011 |
| 7897525 | Methods and systems of transferring, docking and processing substrates In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carrie... | 03/01/2011 |
| RE41989 | Method and apparatus for electronic device manufacture using shadow masks Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least two shadow masks associated therewith. Each of the two masks is alterna... | 12/07/2010 |
| 7842623 | Composition for removing an insulation material and related methods A composition for removing an insulation material and related methods of use are disclosed. The composition comprises about 1 to 50 percent by weight of an oxidizing agent, about 0.1 to 35 percent by weight of a fluorine-containing compound, and water. The insulatio... | 11/30/2010 |
| 7807587 | Substrate processing apparatus and substrate processing method The present invention is a substrate processing apparatus including: a holder that holds substrates in a tier-like manner; a processing container that contains the holder and that conducts a predetermined thermal process to the substrates in a process-gas atmosphere... | 10/05/2010 |
| 7754623 | Apparatus for forming film hole An exemplary film hole forming apparatus (400) includes a chemical etching system (410) and a driving system (420). The driving system includes a transmission belt, which passes through the chemical etching system. A material of the transmission... | 07/13/2010 |
| 7737055 | Systems and methods for manipulating liquid films on semiconductor substrates A semiconductor substrate undergoing processing to fabricate integrated circuit devices thereon is spun about a rotational axis while introducing liquid onto a surface of the substrate. An annular-shaped sheet of liquid is formed on the surface, the sheet of liquid ... | 06/15/2010 |
| 7713889 | Substrate processing method, photomask manufacturing method, photomask, and device manufacturing method A device linewidth characteristic is predicted based on a sharp-edged feature of a projected image of a predetermined pattern (steps 104 to 110), and an exposure condition of the pattern is adjusted based on the device linewidth characteristic that has... | 05/11/2010 |
| 7713888 | Magnetic processing of electronic materials The electronic properties (such as electron mobility, resistivity, etc.) of an electronic material can be modified/enhanced when subjected to dynamic or stationary magnetic fields in conjunction with select cycles of heating, cooling and passage of electric current ... | 05/11/2010 |
| 7674729 | Method and apparatus for imprinting a circuit pattern using ultrasonic vibrations Embodiments of a method and apparatus for imprinting a trench pattern on a substrate using ultrasonic vibrations. The trench pattern corresponds to a circuit pattern that is to be formed on the substrate, the circuit pattern including a number of conductive traces a... | 03/09/2010 |
| 7662732 | Method of preparing patterned carbon nanotube array and patterned carbon nanotube array prepared thereby A method of preparing a patterned carbon nanotube array a patterned carbon nanotube array prepared thereby are provided. The method includes forming carbon nanotubes in channels of porous templates, arranging the templates in a predetermined pattern on a substrate a... | 02/16/2010 |
| 7662733 | Vapor phase growth apparatus A method of cooling a complex electronic system includes preventing system air from passing through a front side and a rear side of a server system main board, organizing a plurality of electronic segments of the server system main board, providing cool air horizont... | 02/16/2010 |
| 7645713 | Substrate processing system and substrate processing method A substrate processing system processes a plurality of substrates in a single-substrate processing mode by a plurality of processes and provided with a plurality of modules respectively for carrying out processes. When a defect is found in a substrate, a defective p... | 01/12/2010 |
| 7632762 | Carbon nanotube-based electronic devices made by electrolytic deposition and applications thereof Carbon nanotube-based devices made by electrolytic deposition and applications thereof are provided. In a preferred embodiment, the present invention provides a device comprising at least one array of active carbon nanotube junctions deposited on at least one microe... | 12/15/2009 |
| 7595271 | Polymer coating for vapor deposition tool Described herein is an apparatus useful for depositing a material on a substrate. At least one component of the apparatus comprises a protective coating, which facilitates the cleaning and/or removal of the deposited material from the component. Also described are m... | 09/29/2009 |
| 7592275 | Method and apparatus for manufacturing active matrix device including top gate type TFT A method and an apparatus are provided for manufacturing an active matrix device including a top gate type TFT. A manufacturing process of the top gate type TFT includes the steps of forming an oxide film on the inner wall of a CVD processing chamber and arranging a... | 09/22/2009 |
| 7589033 | Fabrication of wafer-level test module for testing image sensor chips A wafer-level test module is disclosed to include a base layer having multiple first apertures spaced from one another at a pitch corresponding to the pitch of the image sensor chips of an integrated circuit wafer, a cover layer having second apertures respectively ... | 09/15/2009 |
| 7579288 | Method of manufacturing a microelectronic component utilizing a tool comprising an ESD dissipative ceramic This invention relates to a dense ceramics having ESD dissipative characteristics, tunable volume and surface resistivities in semi-insulative range (103-1011 Ohm-cm), substantially pore free, high flexural strength, light colors, for desired E... | 08/25/2009 |
| 7576017 | Method and apparatus for forming a thin-film solar cell using a continuous process The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated appara... | 08/18/2009 |
| 7576018 | Method for flexing a substrate during processing A method is provided to cause deformation of a substrate during processing of the substrate. The method comprises supporting a substrate on a substrate support in a vacuum chamber for processing; providing backside gas through inlet ports of each of a plurality of g... | 08/18/2009 |
| 7572743 | Low temperature methods for forming patterned electrically conductive thin films and patterned articles therefrom A method of forming patterned thin films includes the steps of providing a porous membrane and a solution including a plurality of solid constituents and at least one surface stabilizing agent for preventing the solid constituents from flocculating out of suspension... | 08/11/2009 |
| 7572742 | Equipment and method for processing semiconductor Semiconductor processing equipment includes a transfer chamber (3) having a plurality of transfer ports (33) arranged at different positions in a lateral direction. A process chamber (4A) for performing a semiconductor process to a substrate (W)... | 08/11/2009 |
| 7557051 | 3-D interconnected multi-layer microstructure of thermoplastic materials Methods for compression molding through holes in polymer layers are provided, as are the resulting patterned polymer layers. Two key aspects of the invention are provision of a mold and substrate having different mechanical hardness, and provision of room for local ... | 07/07/2009 |
| 7544626 | Preparation of self-assembled silicon nanotubes by hydrothermal method The present invention relates to a method for preparing self-assembled silicon nanotubes (SiNTs) by a hydrothermal method. A method for preparing self-assembled SiNTs comprises forming a mixture of silicon oxide and water in a sealed container, wherein the mixture h... | 06/09/2009 |
| 7531470 | Method and apparatus for electronic device manufacture using shadow masks Electronic devices are formed on a substrate that is advanced stepwise through a plurality of deposition vessels. Each deposition vessel includes a source of deposition material and has at least two shadow masks associated therewith. Each of the two masks is alterna... | 05/12/2009 |
| 7491662 | Substrate processing apparatus Substrate processing with return processing is carried out efficiently by a substrate processing apparatus that continuously processes a plurality of substrates. The apparatus is equipped with a conveyor chamber constituting a substrate convey space, a plurality of ... | 02/17/2009 |
| 7470638 | Systems and methods for manipulating liquid films on semiconductor substrates A semiconductor substrate undergoing processing to fabricate integrated circuit devices thereon is spun about a rotational axis while introducing liquid onto a surface of the substrate. An annular-shaped sheet of liquid is formed on the surface, the sheet of liquid ... | 12/30/2008 |
| 7468331 | Angled elongated features for improved alignment process integration Elongated features may be incorporated at least partially in an alignment region. The alignment region may be defined by a plurality of alignment features aligned along a first axis. A long axis of the elongated features may be neither parallel nor perpendicular to ... | 12/23/2008 |
| 7442924 | Repetitive circumferential milling for sample preparation A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts... | 10/28/2008 |
| 7427771 | Universal gates for ising TQFT via time-tilted interferometry Experiments suggest that the mathematically weakest non-abelian TQFT may be physically the most robust. Such TQFT's—the v=5/2 FQHE state in particular—have discrete braid group representations, so one cannot build a universal quantum computer from these alone. T... | 09/23/2008 |
| 7422988 | Rapid detection of imminent failure in laser thermal processing of a substrate A thermal processing system includes a source of laser radiation having an array of lasers emitting light at a laser wavelength, a substrate support, optics disposed between said source and said substrate support for forming a line beam in a substrate plane of the s... | 09/09/2008 |
| 7417016 | Composition for the removing of sidewall residues The present invention relates to a composition for the removal of so-called “sidewall residues” from metal surfaces, in particular from aluminium or aluminium-containing surfaces, in particular from aluminium or aluminium-containing surfaces, during the producti... | 08/26/2008 |
| 7416998 | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system In a semiconductor-fabrication equipment of a minienvironment system, ambient air is prevented from entering a gap between an opening of the semiconductor-fabrication equipment and a wafer gateway of a hermetic container to prevent dust entrained in the ambient air ... | 08/26/2008 |
| 7410903 | Methods of patterning substrates The invention includes a template comprising one or both of CdS and CdSe adhered to a base in a desired pattern. The base can be any transparent or translucent material, and the desired pattern can include two or more separated segments. The template can be utilized... | 08/12/2008 |
| 7410919 | Mask and substrate alignment for solder bump process A system for of aligning a mask to a substrate comprising: a fixture for holding the mask and the substrate in fixed positions relative to each other; means for holding the substrate, the means for holding the substrate protruding through openings in a table and the... | 08/12/2008 |
