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Class 438/751 - Each etch step exposes surface of an adjacent layer


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes wherein a layer on the semiconductor substrate
No. of patents: 182
Last issue date: 04/24/2012


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NumberTitleIssue Date
5455193Method of forming a silicon-on-insulator (SOI) material having a high degree of thickness uniformity
A silicon-on-insulator (SOI) material is formed from a bonded silicon wafer structure which includes, in order, a silicon handler substrate, an insulating oxide layer, a silicon device layer, a highly-doped silicon etch stop layer, and a top silicon subst...
10/03/1995
5372675Method for producing fine structure for electronic device
In a method for producing a fine semiconductor structure, a first layer is formed on a second layer, an etching-resistant mask is formed on the first layer, the second layer is etched in an etchant to form a desired shape thereof, a composition of the fir...
12/13/1994
5344524SOI substrate fabrication
A back-etch silicon-on-insulator SOI process that has a silicon handle wafer with an oxide layer bonded at room temperature to a silicon device wafer with an etch stop and silicon device layer. The surfaces that are bonded at room temperature are first co...
09/06/1994
5334259Amorphous silicon solar cell and method of manufacture
A method of amorphous silicon solar cell manufacture comprises forming thin films of transparent electrode, amorphous silicon, and backside electrode, in that order, on a transparent substrate. An alkali resistant metal is used For the backside electrode....
08/02/1994
5330932Method for fabricating GaInP/GaAs structures
In one form of the invention, a method is disclosed for removing portions of successive layers of GaAs 34 and GaInP 32 comprising the steps of: performing an anisotropic reactive ion etch on the GaAs layer; and performing an isotropic wet etch on the GaIn...
07/19/1994
5316618Etching method for obtaining at least one cavity in a substrate
Flat-bottomed cavities are formed in a substrate (2) by a method comprising two etching steps: a first anisotropic etching through a mask (4) leaving exposed bands (6,8) of the substrate (2) and a second anisotropic etching through a mask leaving exposed ...
05/31/1994
5277748Semiconductor device substrate and process for preparing the same
A process for preparing a semiconductor device substrate comprises a step of making at least one surface of a first substrate composed of Si material porous, a step of oxidizing inside walls of pores in the resulting porous Si surface layer, a step of for...
01/11/1994
5264076Integrated circuit process using a "hard mask"
A layer of spin-on-glass is used as a hard mask for patterning an underlying layer of polysilicon. The patterned polysilicon may be used in the gate structures of field effect transistors....
11/23/1993
5261999Process for making strain-compensated bonded silicon-on-insulator material free of dislocations
A silicon-on-insulator material is formed by a method which includes the steps of forming a p-type silicon epitaxial layer, doped with boron and a higher concentration of germanium, on the surface of a semiconductor silicon substrate, forming an additiona...
11/16/1993
5223081Method for roughening a silicon or polysilicon surface for a semiconductor substrate
This invention relates to a method for roughening a silicon or polysilicon substrate of a semiconductor. The method includes the steps of: depositing a metal layer onto the substrate, heating the metal layer and substrate through to form a metal silicide ...
06/29/1993
5185277Method for the making of a transistor gate
Disclosed is a method for making a mushroom gate for a microwave transistor. Three masking layers are deposited on the semiconductor body of a transistor. At least two of these masking layers are different and have selective solvents. After the opening of...
02/09/1993
5173447Method for producing strained quantum well semiconductor laser elements
A semiconductor laser element having a GaAs substrate formed thereon with an active layer of a strained quantum well construction provided with an Inx Ga1-x As strained quantum well layer and a GaAs barrier layer, and clad layers arr...
12/22/1992
5147808High energy ion implanted silicon on insulator structure
A silicon on insulator structure and method of making the structure. A high purity, substantially defect free silicon wafer is the basis for forming a final thin silicon layer on an insulator layer, the silicon having substantially the same chemical and s...
09/15/1992
5137845Method of forming metal contact pads and terminals on semiconductor chips
A method of forming metal contact terminals (35) of a determined size having an insulating substrate (17) with a metal land (18) formed thereon and a passivating layer (19) provided with an opening exposing a part of the metal land by forming intermediate...
08/11/1992
5081002Method of localized photohemical etching of multilayered semiconductor body
The sensitivity of localized photochemical etching to the optical and electrical properties of multilayered semiconductor materials is utilized for selectively etching a laterally extending undercut in a buried layer. The semiconductor body is immersed in...
01/14/1992
4954218Method for etching a pattern
A photoresist layer having a prescribed pattern is formed on a substrate to be etched. The substrate is immersed into a predetermined solution to form a layer on the substrate except on those portions where the photoresist layer is formed. The photoresist...
09/04/1990
4944838Method of making tapered semiconductor waveguides
Adiabatic mode control and structural reproducibility are achieved by a tapered semiconductor waveguide structure wherein semiconductor guiding layers are interleaved with stop-etch layers and each guiding layer extends further along the propagation axis ...
07/31/1990
4588471Process for etching composite chrome layers
Chrome/copper/chrome conductor arrays deposited on glass plates are etched with an aqueous acidic composition which contains an acid and a thiourea compound....
05/13/1986
4495026Method for manufacturing metallized semiconductor components
A method for the manufacture of metallized semiconductor components, particularly power semiconductor components such as thyristors in which the semiconductor substrate is covered with at least three metal layers including a base layer attached to the sub...
01/22/1985
4372803Method for etch thinning silicon devices
An improved method for etch-thinning silicon devices using three sequential tches. The device is pre-thinned in a hot KOH-H2 O etch. The thinning etch is a hydrofluoric, nitric, acetic acids (1:3:10) and a precise amount of hydrogen peroxide mix...
02/08/1983
4354898Method of preferentially etching optically flat mirror facets in InGaAsP/InP heterostructures
Highly reproducible, optically flat mirror facets are created by contacting a predetermined area of the InGaAsP/InP heterostructure system with a chemical etchant for a time period sufficient to expose a substantially vertical crystallographic surface thr...
10/19/1982
4255229Method of reworking PROMS
PROM wafers having fuses on raised oxide are reworked by stripping the fuses and connectors, non-selectively etching the oxide layer to form a substantially planar, oxide surface resulting from the differential etching rate of the heavily phosphorus doped...
03/10/1981
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