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Class 438/629 - Diverse conductive layers limited to viahole/plug


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes wherein the diverse conductive layers of a metallization
No. of patents: 897
Last issue date: 02/14/2012


1                      
NumberTitleIssue Date
8114768Electromigration resistant via-to-line interconnect
A liner-to-liner direct contact is formed between an upper metallic liner of a conductive via and a lower metallic liner of a metal line below. The liner-to-liner contact impedes abrupt electromigration failures and enhances electromigration resistance of the metal ...
02/14/2012
8110495Multilayer wiring structure of semiconductor device, method of producing said multilayer wiring structure and semiconductor device to be used for reliability evaluation
A multilayer wiring structure of a semiconductor device having a stacked structure is arranged to restrain reliability degradation due to stress applied to the region of wiring between opposite upper and lower plugs. The rate of overlap of contact surface between up...
02/07/2012
8105937Conformal adhesion promoter liner for metal interconnects
A dielectric layer is patterned with at least one line trough and/or at least one via cavity. A metallic nitride liner is formed on the surfaces of the patterned dielectric layer. A metal liner is formed on the surface of the metallic nitride liner. A conformal copp...
01/31/2012
8101517Semiconductor device and method for making same
One or more embodiments may relate to a method for making a semiconductor structure, the method including: forming an opening at least partially through a workpiece; and forming an enclosed cavity within the opening, the forming the cavity comprising forming a paste...
01/24/2012
8062970Production method for semiconductor device
The present invention is a production method for a semiconductor device equipped with a conductive film with predetermined film thickness on a sidewall of a concave portion formed in an insulating film, and comprises a step of forming the concave portion in the insu...
11/22/2011
8058165Semiconductor device and method of manufacturing the same
A method of manufacturing according to an embodiment of the present invention includes forming a seed metal layer 20a on a supporting substrate 70, forming an interconnect layer 10 including an interconnect 18 on the seed metal lay...
11/15/2011
8026168Semiconductor device containing an aluminum tantalum carbonitride barrier film and method of forming
The method includes providing a substrate containing a dielectric layer having a recessed feature and forming a aluminum tantalum carbonitride barrier film over a surface of the recessed feature. The aluminum tantalum carbonitride barrier film is formed by depositin...
09/27/2011
8003519Systems and methods for back end of line processing of semiconductor circuits
A BEOL manufacturing process for forming a via process between two metal lines on a semiconductor wafer comprises depositing a portion of a first metal adhesion layer within a patterned via hole, followed by a cooling step. The cooling step is then followed by forma...
08/23/2011
7998857Integrated circuit and process for fabricating thereof
A process for fabricating an Integrated Circuit (IC) and the IC formed thereby is disclosed. The process comprises providing a substrate. The process further comprises forming a plurality of longitudinal trenches in the substrate and depositing a layer of a first co...
08/16/2011
7994049Manufacturing method of semiconductor device including filling a connecting hole with metal film
The present invention is to possible to avoid an inconvenience at a coupling portion between a barrier metal film obtained by depositing a titanium nitride film on a titanium film and thus having a film stack structure and a metal film filled, via the barrier metal ...
08/09/2011
7994048Method of manufacturing a through electrode
A through electrode that offers excellent performance and can be manufactured through a simple process is to be provided. In a silicon spacer including a silicon substrate, an insulative thick film is provided so as to be in contact with a surface of the silicon sub...
08/09/2011
7977235Method for manufacturing a semiconductor device with metal-containing cap layers
A method for integrating metal-containing cap layers into copper (Cu) metallization of semiconductor devices. In one embodiment, the method includes providing a patterned substrate containing Cu metal surfaces and dielectric layer surfaces, forming a patterned mask ...
07/12/2011
7960276Conductor-dielectric structure and method for fabricating
A conductor-dielectric interconnect structure is fabricated by providing a structure comprising a dielectric layer having a patterned feature therein; depositing a plating seed layer on the dielectric layer in the patterned feature; depositing a sacrificial seed lay...
06/14/2011
7955969Ultra thin FET
Processes are described for forming very thin semiconductor die (1 to 10 microns thick) in which a thin layer of the upper surface of the wafer is processed with junction patterns and contacts while the wafer bulk is intact. The top surface is then contacted by a ri...
06/07/2011
7935626Semiconductor device and method for manufacturing the same
In a manufacturing process of a semiconductor device, electroplating and CMP have had a problem of increase in manufacturing costs for forming a wiring. Correspondingly, an opening is formed in a porous insulating film after a mask is formed thereover, and a conduct...
05/03/2011
7935625Method of forming a metal line of a semiconductor memory device
A method of forming a metal line of a semiconductor memory device is disclosed. An interlayer insulating layer, an etch-stop layer, a trench oxide layer, a hard mask layer and a photoresist layer are laminated over a semiconductor substrate in which a contact is for...
05/03/2011
7867891Dual metal interconnects for improved gap-fill, reliability, and reduced capacitance
Embodiments of apparatus and methods for forming dual metal interconnects are described herein. Other embodiments may be described and claimed. ...
01/11/2011
7863183Method for fabricating last level copper-to-C4 connection with interfacial cap structure
The present invention relates to a method for fabricating a semiconductor device with a last level copper-to-C4 connection that is essentially free of aluminum. Specifically, the last level copper-to-C4 connection comprises an interfacial cap structure containing Co...
01/04/2011
7829456Method to modulate coverage of barrier and seed layer using titanium nitride
Methods for processing substrates are provided herein. In some embodiments, a method for processing substrates includes providing to a process chamber a substrate comprising an exposed dielectric layer having a feature formed therein. A mask layer comprising titaniu...
11/09/2010
7820545Methods of forming conductive interconnects
The invention includes methods of electroless plating of nickel selectively on exposed conductive surfaces relative to exposed insulative surfaces. The electroless plating can utilize a bath which contains triethanolamine, maleic anhydride and at least one nickel sa...
10/26/2010
7759246Semiconductor device having a plurality of semiconductor chips and method for manufacturing the same
A semiconductor device includes a first semiconductor chip (5) having a first terminal (7) on one surface, a second semiconductor chip (1a) which is larger than the first semiconductor chip (5) and on which the first semiconductor ...
07/20/2010
7678689Method of fabricating memory device
Disclosed herein is a method of fabricating a memory device. The method includes forming an etch stop layer, bit lines, and a first hard mask pattern over a semiconductor substrate. A first SNC plug is formed between the bit lines, and an etch process is performed t...
03/16/2010
7678688Method for forming metal interconnection in image sensor
A method for forming a metal interconnection in an image sensor includes forming a first interlayer dielectric (ILD) layer having a contact plug over a substrate, forming a diffusion barrier layer over the first ILD layer, performing a forming gas annealing, forming...
03/16/2010
7632751Semiconductor device having via connecting between interconnects
A first insulating film is provided between a lower interconnect and an upper interconnect. The lower interconnect and the upper interconnect are connected to each other by way of a via formed in the first insulating film. A dummy via or an insulating slit is formed...
12/15/2009
7618888Temperature-controlled metallic dry-fill process
A method for performing ionized physical vapor deposition (iPVD) is described, whereby the substrate temperature can be rapidly changed to control a metal deposition process and increase the quality of the metal deposited. In one embodiment, a copper deposition proc...
11/17/2009
7608535Method for forming metal contact in semiconductor device
An interlayer insulation layer is formed on a semiconductor substrate to cover a lower wiring layer that is also formed on the semiconductor substrate. A contact hole to expose a surface of the lower wiring layer is formed by etching the interlayer insulation film. ...
10/27/2009
7582558Reducing corrosion in copper damascene processes
Copper interconnects may be made using the damascene process with reduced copper corrosion. Copper corrosion may be reduced by planarizing through excess copper down to, but not completely through, a copper diffusion barrier layer. The copper diffusion barrier layer...
09/01/2009
7524756Process of forming a semiconductor assembly having a contact structure and contact liner
A contact structure and a method of forming thereof for semiconductor devices or assemblies are described. The method provides process steps to create a contact structure encompassed by a sacrificial contact medium having an opening therein that is lined with a cond...
04/28/2009
7514354Methods for forming damascene wiring structures having line and plug conductors formed from different materials
Methods are provided for forming dual damascene interconnect structures using different conductor materials to fill via holes and line trenches. For example, a method for forming an interconnection structure includes depositing dielectric material on a semiconductor...
04/07/2009
7504334Semiconductor device and method for manufacturing same
Embodiments relate to a semiconductor device and a manufacturing method thereof. In embodiments, the semiconductor device may include a semiconductor substrate formed thereon with a first metal line, a PMD (pre metal dielectric) layer formed on the semiconductor sub...
03/17/2009
7494919Method for post lithographic critical dimension shrinking using thermal reflow process
A method for reducing the size of a patterned semiconductor feature includes forming a first layer over a substrate to be patterned, and forming a photoresist layer over the first layer. The photoresist layer is patterned so as to expose portions of the first layer,...
02/24/2009
7494920Method of fabricating a vertically mountable IC package
A method of fabricating a vertically mountable integrated circuit (IC) package is presented. An integrated circuit is mounted on a printed circuit board (PCB) and electrically coupled to a bond pad on the PCB. The bond pad is coupled with a via that is embedded in t...
02/24/2009
7482264Method of forming metal line of semiconductor device, and semiconductor device
A semiconductor device includes a first barrier metal layer and a second barrier metal layer, a third barrier metal layer, and a metal line. The first barrier metal layer and the second barrier metal layer are formed and on a top surface of an insulating layer over ...
01/27/2009
7473639Method of forming dual damascene pattern
Disclosed is a method of forming a dual damascene pattern. The method can include forming a first etch stop layer, a first dielectric layer, a second etch stop layer, a second dielectric layer and a cap insulating layer on a substrate, forming a preliminary via hole...
01/06/2009
7468318Method for manufacturing mold type semiconductor device
A method for manufacturing a mold type semiconductor device is provided. The device includes a semiconductor chip having a semiconductor part and a metallic member connecting to the chip via a conductive layer and a connecting member. The method includes: forming th...
12/23/2008
7456094LDMOS transistor
A semiconductor device comprises a semiconductor substrate, an insulating layer on top of the substrate, a lateral field effect transistor comprising a drain region and a source region arranged in the substrate and a gate arranged above the substrate within the insu...
11/25/2008
7452805Aluminum based conductor for via fill and interconnect
A semiconductor device including a dielectric layer having a opening form therein having a cross-sectional area of less than 1 μm2 and a PVD aluminum base conductor filled in the opening. ...
11/18/2008
7435679Alloyed underlayer for microelectronic interconnects
Apparatus and methods of fabricating a microelectronic interconnect having an underlayer which acts as both a barrier layer and a seed layer. The underlayer is formed by co-depositing a noble metal and a barrier material, such as a refractory metal, or formed during...
10/14/2008
7432199Method of fabricating semiconductor device having reduced contact resistance
Provided is a method for fabricating a semiconductor device having reduced contact resistance. In the method, gate patterns defining a narrow opening and a wide opening are formed having an upper portion of a predetermined region of a semiconductor substrate. After ...
10/07/2008
7422978Methods of manufacturing interposers with flexible solder pad elements
Various embodiments of an interposer for mounting a semiconductor die, as well as methods for forming the interposer, are disclosed. The interposer includes flexible solder pad elements that are formed from a core material of the interposer, such that the interposer...
09/09/2008
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