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| Number | Title | Issue Date |
| 5780313 | Method of fabricating semiconductor device An improved semiconductor device manufacturing system and method is shown. In the system, undesirable sputtering effect can be averted by virtue of a combination of an ECR system and a CVD system. Prior to the deposition according to the above combination... | 07/14/1998 |
| 5753531 | Method for continuously making a semiconductor device A method of continuous manufacture of semiconductor integrated circuits, said method and apparatus adapted to contain the semiconductor substrate, semiconductor deposition coating processes, and etching processes within a substantially collocated series o... | 05/19/1998 |
| 5593532 | Process for manufacturing photovoltaic modules The invention concerns a process and equipment for manufacturing laminated photovoltaic modules, where (a) a module-stack (2) formed by the system of solar cells, the encapsulating materials and the separating foils is deposited at the loading station (1)... | 01/14/1997 |
| 5470397 | Process for making photovoltaic devices and resultant product A process and apparatus (70) for making a large area photovoltaic device (22) that is capable of generating low cost electrical power. The apparatus (70) for performing the process includes an enclosure (126) providing a controlled environment in which an... | 11/28/1995 |
| 5470784 | Method of forming semiconducting materials and barriers using a multiple chamber arrangement In a gaseous glow-discharge process for coating a substrate with semiconductor material, a variable electric field in the region of the substrate and the pressure of the gaseous material are controlled to produce a uniform coating having useful semiconduc... | 11/28/1995 |
| 5468521 | Method for forming a photoelectric deposited film A deposited film forming method includes the steps of: continuously carrying a long substrate into or out of a vacuum chamber, flowing a first deposited film forming gas in a reverse direction parallel to the substrate and opposite to a conveying directio... | 11/21/1995 |
| 5466302 | Solar cell array interconnects Electrical interconnects for solar cells or other electronic components using a silver-silicone paste or a lead-tin (Pb-Sn) no-clean fluxless solder cream, whereby the high breakage of thin ( | 11/14/1995 |
| 5270248 | Method for forming diffusion junctions in solar cell substrates Silicon solar cells are made by subjecting semiconductor substrates to a diffusion junction forming process wherein a liquid source material containing a selected dopant is sprayed onto one side of the substrates, and thereafter the substrates are fired i... | 12/14/1993 |
| 5248349 | Process for making photovoltaic devices and resultant product A process and apparatus (70) for making a large area photovoltaic device (22) that is capable of generating low cost electrical power. The apparatus (70) for performing the process includes an enclosure (126) providing a controlled environment in which an... | 09/28/1993 |
| 5156978 | Method of fabricating solar cells A method and apparatus for producing crystalline substrate for use in fabricating solid state electronic devices. A hollow crystalline body is grown from a melt containing a dopant and a P-N junction is formed in said crystalline body as it is being grown... | 10/20/1992 |
| 5154810 | Thin film coating and method A system and process for forming optical quality, protective, relatively thick, thin film coatings on workpieces such as detectors or solar cells. The apparatus includes a rotary cylindrical sputtering system which incorporates separate deposition devices... | 10/13/1992 |
| 5151373 | Method of making a solar cell electrode An electrode structure of a solar cell includes a metal wire fixed to the light incident surface of the solar cell with an electrically conductive adhesive. An electrode production method of a solar cell includes applying an electrically conductive adhesi... | 09/29/1992 |
| 4988642 | Semiconductor device, manufacturing method, and system An improved semiconductor device manufacturing system and method is shown. In the system, undesirable sputtering effect can be averted by virtue of a combination of an ECR system and a CVD system. Prior to the deposition according to the above combination... | 01/29/1991 |
| 4650524 | Method for dividing semiconductor film formed on a substrate into plural regions by backside energy beam irradiation An amorphous silicon film having a PIN junction inside in parallel to the film surface is formed extending continuously over transparent film electrodes in each plurality of regions being formed and spaced from each other on one main surface of a light tr... | 03/17/1987 |
| 4617722 | Method for electrically interconnecting solar cells A method for electrically interconnecting a plurality of solar cells in series using a multi-faced drum, a first bus spool having an associated first bus strip, and a second bus spool having an associated second bus strip, wherein the method involves plac... | 10/21/1986 |
| 4567642 | Method of making photovoltaic modules An apparatus for making a photovoltaic module having a plurality of cell strips. The apparatus (10) includes a frame (11) and a support drum (25) rotatably received in the frame (11). The support drum (25) has a substantially curved surface (42) having a ... | 02/04/1986 |
| 4562637 | Method of manufacturing solar battery A method of manufacturing a solar battery by serially connecting a plurality of solar battery elements arranged spaced from each other. A pair of flexible films are used to sandwich the arrangement of the solar battery elements, and each of the flexible f... | 01/07/1986 |
| 4543267 | Method of making a non-single-crystalline semi-conductor layer on a substrate A multi-layer semiconductor manufacturing method which employs a plurality of sequentially arranged, adjacent reaction chambers and a plurality of normally closed shutter means respectively separating the reaction chambers. The reaction chambers are each ... | 09/24/1985 |
| 4492716 | Method of making non-crystalline semiconductor layer Substrates are disposed in a reaction chamber having a gas inlet and a gas outlet and a mixture gas containing at least a semiconductor material gas and a carrier gas is introduced into the reaction chamber in such a state in which a gas in the reaction c... | 01/08/1985 |
| 4492605 | Method of making photovoltaic device A method for making photovoltaic device comprising the steps of moving at least one substrate into a reaction chamber, causing a plasma reaction of raw material gases in said reaction chamber, thereby forming an amorphous silicon layer of a first conducti... | 01/08/1985 |
| 4430519 | Electron beam welded photovoltaic cell interconnections Interconnect strip for connecting rectangular photovoltaic cells into series strings comprises tabs spaced as collector pads on a cell to facilitate connection thereto and a bus portion for connection to the opposite side of an adjacent cell. The strip is... | 02/07/1984 |
| 4353160 | Solar cell junction processing system An integrated system and process for the continuous formation of p-n junctions in solar cells in a cost-effective manner and under computer control. The integrated system essentially comprises an ion beam implanter, an electron beam annealer and a combina... | 10/12/1982 |
| 4228570 | Electroding preparation apparatus An apparatus is provided for forming a large area photovoltaic cell into a plurality of photovoltaic cells on a common substrate and preparing the individual cells for an overlying layer of conductive material. A tool bit is urged against the polycrystall... | 10/21/1980 |
