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Class 438/60 - Charge transfer device (e.g., CCD, etc.)


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a charge transfer device having combined
No. of patents: 332
Last issue date: 05/08/2012


1                  
NumberTitleIssue Date
8173476Image pickup device and image pickup system
There is provided an image pickup device, including a photoelectric conversion element converting light into charges, a transfer gate for transferring the converted charges to a floating node, a source follower transistor for outputting a signal based on a voltage o...
05/08/2012
8163588Manufacturing method of a photoelectric conversion device
A manufacturing method of a photoelectric conversion device included a first step of forming a gate electrode, a second step of forming a semiconductor region of a first conductivity type, a third step of forming an insulation film, and a fourth step of forming a pr...
04/24/2012
8021908Method and apparatus for dark current and blooming suppression in 4T CMOS imager pixel
A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period. ...
09/20/2011
8017425Method for fabricating an image sensor capable of increasing photosensitivity
An image sensor capable of overcoming a decrease in photo sensitivity resulted from using a single crystal silicon substrate, and a method for fabricating the same are provided. An image sensor includes a single crystal silicon substrate, an amorphous silicon layer ...
09/13/2011
8003424Method for fabricating CMOS image sensor with pocket photodiode for minimizng image lag
A CMOS image sensor includes a photosensitive device, a floating diffusion region, a transfer transistor, and a pocket photodiode formed in a semiconductor substrate of a first conductivity type. The floating diffusion region is of a second conductivity type. The tr...
08/23/2011
7998779Solid-state imaging device and method of fabricating solid-state imaging device
A solid-state imaging device includes: a solid-state imaging element having a light-receiving area; a transparent member disposed so as to oppose the light-receiving area; a supporting member configured to support the transparent member; a first mark disposed at eit...
08/16/2011
7993953Method of manufacturing photoelectric conversion device
A method of manufacturing a photoelectric conversion device, comprises forming a first insulating film on a semiconductor substrate, forming a gate electrode by forming an electrically conductive layer on the first insulating film and patterning the electrically con...
08/09/2011
7993952Charge transfer device
A charge transfer device 1 has an P-type region, an N-type well provided to the surficial portion of the P-type region, and transfer electrodes having P-type conductivity, provided over the N-type substrate while placing an insulating film in between. ...
08/09/2011
7985612Method and device for reducing crosstalk in back illuminated imagers
A method and resulting device for reducing crosstalk in a back-illuminated imager is disclosed, comprising providing a substrate comprising an insulator layer and a seed layer substantially overlying the insulator layer, an interface being formed where the seed laye...
07/26/2011
7981717Image sensor and method of manufacturing the same
An image sensor includes a pixel array including a photodiode, a peripheral region including a logic circuit, and an isolation region formed between the pixel array and the peripheral region and formed under the peripheral region to electrically isolate the pixel ar...
07/19/2011
7968365Method for manufacturing solid-state imaging device
A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is form...
06/28/2011
7955888Method of fabricating image sensor having reduced dark current
An image sensor includes a light receiving device, a field effect transistor, a stress layer pattern, and a surface passivation material. The light receiving device is formed in a first region of a substrate. The field effect transistor is formed in a second region ...
06/07/2011
7935557Manufacturing method of a photoelectric conversion device
A manufacturing method of a photoelectric conversion device included a first step of forming a gate electrode, a second step of forming a semiconductor region of a first conductivity type, a third step of forming an insulation film, and a fourth step of forming a pr...
05/03/2011
7915067Backside illuminated image sensor with reduced dark current
A backside illuminated image sensor comprises a sensor layer implementing a plurality of photosensitive elements of a pixel array, and an oxide layer adjacent a backside surface of the sensor layer. The sensor layer comprises a seed layer and an epitaxial layer form...
03/29/2011
7883923Method for manufacturing image sensor
Embodiments relate to an image sensor and a method for manufacturing an image sensor. According to embodiments, a method may include forming a semiconductor substrate including a pixel part and a peripheral part, forming an interlayer dielectric film including a met...
02/08/2011
7863076Solid-state image pickup device, method for making same, and image pickup apparatus
Disclosed herein is a solid-state image pickup device which includes: a light-receiving unit for photoelectric conversion of incident light; and a charge transfer unit of an n-channel insulating gate type configured to transfer a signal charge photoelectrically conv...
01/04/2011
7863077Image sensor and method for manufacturing the same
An image sensor and method of manufacturing the same are disclosed. A semiconductor substrate can be prepared comprising a photodiode region, a transistor region, and a floating diffusion region. A gate dielectric can be disposed under a surface of the semiconductor...
01/04/2011
7846760Doped plug for CCD gaps
A method and structure of providing a doped plug to improve the performance of CCD gaps is discussed. A highly-doped region is implemented in a semiconductor, aligned beneath a gap. The plug provides a highly-conductive region at the semiconductor surface, therefore...
12/07/2010
7785914Image sensor and method for manufacturing the same
An image sensor including a substrate and an interlayer dielectric layer divided into a pixel region and a logic pad region. An image sensor may include at least one of the following: a color filter, an over coating layer, and a micro lens sequentially formed over t...
08/31/2010
7723145Solid-state imaging device and manufacturing method for the same
A solid-state imaging device includes a semiconductor substrate including: a plurality of light-receptive portions that are arranged one-dimensionally or two-dimensionally; a vertical transfer portion that transfers signal electric charge read out from the light-rec...
05/25/2010
7704776Method of forming a vertical image sensor that includes patterning an oxide layer to form a mask for implanting a floating diffusion area
Embodiments relate to an image sensor and a method for manufacturing an image sensor that may prevent a photoresist pattern from remaining on gates by forming a floating diffusion area faster than the gates. According to embodiments, since the gates may not be influ...
04/27/2010
7704775CCD type solid-state imaging apparatus and manufacturing method for the same
The invention provides CCD type solid-state imaging apparatus comprises: photoelectric conversion elements; a plurality of first transfer paths extending in a first direction; and second transfer paths extending in a first direction; the first transfer paths and the...
04/27/2010
7687302Frame shutter pixel with an isolated storage node
A frame shutter type device provides a separated well in which the storage node is located. The storage node is also shielded by a light shield to prevent photoelectric conversion. ...
03/30/2010
7662658Photodiode with ultra-shallow junction for high quantum efficiency CMOS image sensor and method of formation
A pinned photodiode with an ultra-shallow highly-doped surface layer of a first conductivity type and a method of formation are disclosed. The ultra-shallow highly-doped surface latter has a thickness of about 100 Angstroms to about 500 Angstroms and a dopant concen...
02/16/2010
7655495Damascene copper wiring optical image sensor
A CMOS image sensor array and method of fabrication wherein the sensor includes Copper (Cu) metallization levels allowing for incorporation of a thinner interlevel dielectric stack with improved thickness uniformity to result in a pixel array exhibiting increased li...
02/02/2010
7645629Fabricating CMOS image sensor
A CMOS image sensor and a fabricating method thereof are provided. The method includes forming a nitride layer over a boundary region between a device isolation region and a pixel region, forming a silicide barrier layer in the pixel region and performing a silicide...
01/12/2010
7638354Image sensor and method of fabricating the same
An image sensor can include a gate insulation layer, a gate electrode, a photodiode, and a floating diffusion region. The gate insulation layer can be formed on and/or over a semiconductor substrate for a transfer transistor. The gate insulation layer includes a fir...
12/29/2009
7625774Method of manufacturing CMOS image sensor
Embodiments relate to a method of manufacturing a CMOS image sensor in which, when a buried photodiode is formed, a p-type impurity region may be formed simultaneously with a p-type LDD region in the photo diode region. Additionally, a p-type impurity region may be ...
12/01/2009
7622321High dielectric constant spacer for imagers
An imager having gates with spacers formed of a high dielectric material. The high dielectric spacer provides larger fringing fields for charge transfer and improves image lag and charge transfer efficiency. ...
11/24/2009
7598110CMOS image sensor and method for manufacturing the same
A method for manufacturing a CMOS image sensor may include at least one of the following steps: Forming a salicide blocking layer on an entire surface of a semiconductor substrate having a photodiode area and a transistor. Forming a photoresist pattern inclined at a...
10/06/2009
7595214Solid-state image pickup device and manufacturing method for the same
A solid-state image pickup device includes, in a substrate, a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion, a reading gate for reading a signal charge from the photoelectric conversion regions, and a transfe...
09/29/2009
7595213Semiconductor devices, CMOS image sensors, and methods of manufacturing same
A semiconductor device includes: a trench device isolating region formed in a substrate to define a photodiode active region; a channel stop impurity region formed in the substrate contacting the device isolating region, wherein the channel stop impurity region surr...
09/29/2009
7585694Manufacturing method of solid-state imaging device
Provided is a manufacturing method of a CCD solid-state imaging device having such an impurity concentration distribution with which shading is reduced and formation of a buried channel endowed with a large saturation signal charge amount is made possible. The manuf...
09/08/2009
7569414CMOS imager with integrated non-volatile memory
A CMOS imager and non-volatile memory are integrated on a single substrate along with logic and support circuitry for decoding and processing optical information received by the CMOS imager. A protective layer covers the non-volatile memory contained on the substrat...
08/04/2009
7534644Solid-state imaging device, production method and drive method thereof, and camera
A solid-state imaging device capable of reducing an eclipse (blocking) of an incident light at a circumferential portion of a light receiving portion and realizing a larger angle of view and high-speed driving. A single-layer transfer electrode configuration of form...
05/19/2009
7534643CMOS image sensor and method for fabricating the same
A method for fabricating a CMOS image sensor includes: forming a gate electrode on a pixel region of the semiconductor substrate and, at the same time, forming a polysilicon pattern on a middle resistor region; forming a first lightly doped n-type diffusion region o...
05/19/2009
7524695Image sensor and pixel having an optimized floating diffusion
An active pixel includes a a photosensitive element formed in a semiconductor substrate. A transfer transistor is formed between the photosensitive element and a floating diffusion and selectively operative to transfer a signal from the photosensitive element to the...
04/28/2009
7507598Image sensor fabrication method and structure
A method is provided for processing a substrate. The substrate has at least one filter region, a plurality of bond pads, and a plurality of scribe lines arranged around the filter region and bond pads. A first planarization layer is formed above the substrate. The p...
03/24/2009
7498188Contacts for CMOS imagers and method of formation
Low leakage contacts on leakage sensitive areas of a CMOS imager, such as a floating diffusion region or a photodiode, are disclosed. At least one low leakage polysilicon contact is provided over a leakage sensitive area of a CMOS imager. The polysilicon contact com...
03/03/2009
7436012Solid state imaging apparatus and method for fabricating the same
A semiconductor device of the present invention includes a substrate; an imaging region which is formed at part of the substrate and in which photoelectric conversion cells including photoelectric conversion sections are arranged in the form of an array; a control-c...
10/14/2008
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