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Class 438/571 - Combined with formation of ohmic contact to semiconductor region


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Processes additionally having a method for the formation
No. of patents: 406
Last issue date: 03/20/2012


1                      
NumberTitleIssue Date
8138073Method for forming a Schottky diode having a metal-semiconductor Schottky contact
A method for forming a metal-semiconductor Schottky contact in a well region is provided. The method includes forming a first insulating layer overlying a shallow trench isolation in the well region; and removing a portion of the first insulating layer such that onl...
03/20/2012
8084342Method of manufacturing a CMOS device with zero soft error rate
A CMOS device and method of manufacture is provided for producing an integrated circuit that is not susceptible to various soft errors such as single-event upsets, multi-bit upsets or single-event latchup. The CMOS device and method utilizes a new and novel well arc...
12/27/2011
7923362Method for manufacturing a metal-semiconductor contact in semiconductor components
A method for manufacturing a metal-semiconductor contact in semiconductor Components is disclosed. There is a relatively high risk of contamination in the course of metal depositions in prior-art methods. In the disclosed method, the actual metal -semiconductor or S...
04/12/2011
7884002Method of fabricating self aligned Schottky junctions for semiconductor devices
A method of fabricating a self-aligned Schottky junction (29) in respect of a semiconductor device. After gate etching and spacer formation, a recess defining the junction regions is formed in the Silicon substrate (10) and a SiGe layer (22) is ...
02/08/2011
7884003Method for depinning the fermi level of a semiconductor at an electrical junction and devices incorporating such junctions
An electrical device in which an interface layer is disposed between and in contact with a metal and a Si-based semiconductor, the interface layer being of a thickness effective to depin of the Fermi level of the semiconductor while still permitting current to flow ...
02/08/2011
7879705Semiconductor devices and manufacturing method thereof
A method is set forth of forming an ohmic electrode having good characteristics on a SiC semiconductor layer. In the method, a Ti-layer and an Al-layer are formed on a surface of the SiC substrate. The SiC substrate having the Ti-layer and the Al-layer is maintained...
02/01/2011
7759231Method for producing metal/semiconductor contacts through a dielectric
A method of forming contacts between at least one metallic layer and at least one semiconductor substrate through at least one layer of dielectric in a semiconductor device. The semiconductor device includes, on at least one base face of the semiconductor substrate,...
07/20/2010
7745317Semiconductor device and method of manufacturing the same
A semiconductor device provided with a silicon carbide semiconductor substrate, and an ohmic metal layer joined to one surface of the silicon carbide semiconductor substrate in an ohmic contact and composed of a metal material whose silicide formation free energy an...
06/29/2010
7618884Method and device with durable contact on silicon carbide
A Schottky barrier silicon carbide device has a Re Schottky metal contact. The Re contact 27 is thicker than 250 Angstroms and may be between 2000 and 4000 Angstroms. A termination structure is provided by ion milling an annular region around the Schottky con...
11/17/2009
7419862Method of fabricating pseudomorphic high electron mobility transistor
Provided is a method of fabricating a pseudomorphic high electron mobility transistor (PHEMT). The method includes the steps of: preparing a substrate including a channel layer and a capping layer that is the uppermost layer; forming a source and a drain on the capp...
09/02/2008
7368371Silicon carbide Schottky diode and method of making the same
A method of forming silicon carbide Schottky diode is disclosed. The processes required two photo-masks only. The processes are as follows: firstly, an n+-silicon carbide substrate having an n− silicon carbide drift layer is provided. Then a silicon layer is forme...
05/06/2008
7361535Liquid crystal display device having polycrystalline TFT and fabricating method thereof
A thin film transistor includes a substrate, a crystallized semiconductor layer formed over the substrate having a channel region, low-density impurity regions and high-density impurity regions, a gate insulating layer formed on the crystallized semiconductor layer,...
04/22/2008
7352017Nitride semiconductor device and manufacturing method thereof
A nitride semiconductor device enabiling to supress current collapse and manufacturing method thereof including a III-V group nitride semiconductor layer formed of III group elements includes at least one element from the group consisting of gallium, aluminum, boron...
04/01/2008
7332365Method for fabricating group-III nitride devices and devices fabricated using method
A method according to the present invention for fabricating high light extraction photonic devices comprising growing an epitaxial semiconductor structure on a substrate and depositing a first mirror layer on the epitaxial semiconductor structure such that the epita...
02/19/2008
7314834Semiconductor device fabrication method
A semiconductor device fabrication method applies a diazo novolac photoresist to a semiconductor wafer, followed by light exposure of its entire surface to form an underlying resist layer; forms a surface resist layer thereover; performs patterned-light exposure and...
01/01/2008
7309660Buffer layer for selective SiGe growth for uniform nucleation
Methods for preparing a surface for selective silicon-germanium epitaxy by forming a thin silicon (Si) buffer layer or a thin, low concentration SiGe buffer layer for uniform nucleation, are disclosed. ...
12/18/2007
7294858Semiconductor device and method of manufacturing the same
A semiconductor device provided with a silicon carbide semiconductor substrate, and an ohmic metal layer joined to one surface of the silicon carbide semiconductor substrate in an ohmic contact and composed of a metal material whose silicide formation free energy an...
11/13/2007
7282778Chemical sensor using chemically induced electron-hole production at a Schottky barrier
Electron-hole production at a Schottky barrier has recently been observed experimentally as a result of chemical processes. This conversion of chemical energy to electronic energy may serve as a basic link between chemistry and electronics and offers the potential f...
10/16/2007
7274082Chemical sensor using chemically induced electron-hole production at a schottky barrier
Electron-hole production at a Schottky barrier has recently been observed experimentally as a result of chemical processes. This conversion of chemical energy to electronic energy may serve as a basic link between chemistry and electronics and offers the potential f...
09/25/2007
7262434Semiconductor device with a silicon carbide substrate and ohmic metal layer
A semiconductor device provided with a silicon carbide semiconductor substrate, and an ohmic metal layer joined to one surface of the silicon carbide semiconductor substrate in an ohmic contact and composed of a metal material whose silicide formation free energy an...
08/28/2007
7241694Method for manufacturing semiconductor device having trench in silicon carbide semiconductor substrate
A method for manufacturing a silicon carbide semiconductor device includes the steps of: forming a trench mask on an upper surface of a semiconductor substrate; forming the trench such that the trench having an aspect ratio equal to or larger than 2 and having a tre...
07/10/2007
7229874Method and apparatus for allowing formation of self-aligned base contacts
A method and apparatus for depositing self-aligned base contacts where over-etching the emitter sidewall to undercut the emitter contact is not needed. A semiconductor structure has a T-shaped emitter contact that comprises a T-top and T-foot. The T-top acts as a ma...
06/12/2007
7229903Recessed semiconductor device
A semiconductor structure includes a first semiconductor layer, a second semiconductor layer over the first semiconductor layer, a third semiconductor layer over the second semiconductor layer, and a fourth semiconductor layer over the third semiconductor layer. A f...
06/12/2007
7227212Method of forming a floating metal structure in an integrated circuit
In one embodiment, a sacrificial layer is deposited over a base layer. The sacrificial layer is used to define a subsequently formed floating metal structure. The floating metal structure may be anchored into the base layer. Once the floating metal structure is form...
06/05/2007
7205228Selective metal encapsulation schemes
A method and system of processing a semiconductor substrate includes, in one or more embodiments, depositing a protective layer on the substrate surface comprising a conductive element disposed in a dielectric material; processing the protective layer to expose the ...
04/17/2007
7195996Method of manufacturing silicon carbide semiconductor device
A manufacturing method for forming a region into which impurity ions are implanted, and an electrode is coupled to the region, in a self-aligned manner. An oxide film is formed on an n-type semiconductor layer composed of a silicon carbide semiconductor, and then th...
03/27/2007
7192827Methods of forming capacitor structures
The invention includes a method of forming a capacitor structure. A first electrical node is formed, and a layer of metallic aluminum is formed over the first electrical node. Subsequently, an entirety of the metallic aluminum within the layer is transformed into on...
03/20/2007
7173285Lithographic methods to reduce stacking fault nucleation sites
Epitaxial silicon carbide layers are fabricated by forming features in a surface of a silicon carbide substrate having an off-axis orientation toward a crystallographic direction. The features include at least one sidewall that is orientated nonparallel (i.e., obliq...
02/06/2007
7172933Recessed polysilicon gate structure for a strained silicon MOSFET device
A method of forming a channel region for a MOSFET device in a strained silicon layer via employment of adjacent and surrounding silicon-germanium shapes, has been developed. The method features simultaneous formation of recesses in a top portion of a conductive gate...
02/06/2007
7160766Field-effect semiconductor device and method for making the same
A method for making a filed-effect semiconductor device includes the steps of forming a gate electrode on a semiconductor layer composed of a gallium nitride-based compound semiconductor represented by the formula AlxInyGa1−x−yN,...
01/09/2007
7148125Method for manufacturing semiconductor power device
A semiconductor device, which has a relatively low ON resistance, is manufactured using the following steps. First, a semiconductor wafer that includes a semiconductor layer and a semiconductor element layer, which is located on the semiconductor layer, is formed. T...
12/12/2006
7141498Method of forming an ohmic contact in wide band semiconductor
A method of forming an ohmic contact on a substrate composed of a wide-band gap semiconductor material includes: depositing a transition metal group metal on the substrate; annealing the substrate at a high temperature to cause a solid state chemical reaction betwee...
11/28/2006
7138321Boost capacitor layout technique for an H-bridge integrated circuit motor controller to ensure matching characteristics with that of the low-side switching devices of the bridge
An H-bridge circuit having a boost capacitor coupled to the gate of the low-side driver. A driver, in the form of a switching transistor is connected between the load and ground, thus providing a low-side driver. A capacitor is coupled to the gate of the low-side dr...
11/21/2006
7132701Contact method for thin silicon carbide epitaxial layer and semiconductor devices formed by those methods
Provided is a process for forming a contact for a compound semiconductor device without electrically shorting the device. In one embodiment, a highly doped compound semiconductor material is electrically connected to a compound semiconductor material of the same con...
11/07/2006
7125786Method of forming vias in silicon carbide and resulting devices and circuits
A method of fabricating an integrated circuit on a silicon carbide substrate is disclosed that eliminates wire bonding that can otherwise cause undesired inductance. The method includes fabricating a semiconductor device in epitaxial layers on a surface of a silicon...
10/24/2006
7115921Nano-scaled gate structure with self-interconnect capabilities
Gate conductors on an integrated circuit are formed with enlarged upper portions which are utilized to electrically connect the gate conductors with other devices. A semiconductor device comprises a gate conductor with an enlarged upper portion which electrically co...
10/03/2006
7067850Stacked switchable element and diode combination
A device (10) comprises a semiconductor diode (12) and a switchable element (14) positioned in stacked adjacent relationship so that the semiconductor diode (12) and the switchable element (14) are electrically connected in series ...
06/27/2006
7067361Methods of fabricating silicon carbide metal-semiconductor field effect transistors
SiC MESFETs are disclosed which utilize a semi-insulating SiC substrate which substantially free of deep-level dopants. Utilization of the semi-insulating substrate may reduce back-gating effects in the MESFETs. Also provided are SiC MESFETs with a two recess gate s...
06/27/2006
7052945Short-channel Schottky-barrier MOSFET device and manufacturing method
A MOSFET device and method of fabricating are disclosed. The present invention utilizes Schottky barrier contacts for source and/or drain contact fabrication within the context of a MOSFET device structure to eliminate the requirement for halo/pocket implants and sh...
05/30/2006
7002187Integrated schottky diode using buried power buss structure and method for making same
An integrated Schottky diode and method of manufacture of such a diode is disclosed. In a first aspect, a Schottky diode comprises a semiconductor substrate. The semiconductor substrate includes an epitaxial layer (EPI) on the substrate region. The diode includes a ...
02/21/2006
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