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Class 438/49 - Chemically responsive


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a semiconductor device responsive to
No. of patents: 211
Last issue date: 03/20/2012


          6  
NumberTitleIssue Date
4456522Support and anchoring mechanism for membranes in selectively responsive field effect devices
In the formation of a chemically sensitive field effect device, prior to formation of the gate membrane, an aluminum pad is disposed over the gate, and a polyimide layer is disposed thereover. Photoresist and etching steps produce openings in the polyimid...
06/26/1984
4411741Apparatus and method for measuring the concentration of components in fluids
An apparatus and method for measuring the concentration of various components in a fluid sample. The apparatus comprises a chemically sensitive field effect transistor (CHEMFET) having a semiconductor substrate and a pair of diffusion regions formed at th...
10/25/1983
4397888Thick film sensor for hydrogen and carbon monoxide
An improved thick film stannic oxide sensor is disclosed whereby the sensitivity of the sensor to CO is enhanced by the addition of a rare earth oxide to the sensor composition and the catalytic reactivity of the sensor, when contacted by a gas containing...
08/09/1983
4381922Combustion detecting device using metallo-phthalocynine semiconductor and process of preparing same
A device for detecting combustion products and effects resulting from combustion is made by preparing a composition of metallo-phthalocyanine in amorphous or crystaline form selected from the group of FeII Pc, FeIII Pc, NiII
05/03/1983
4374456Process for producing a gas detecting element
A gas detecting element including a semiconductor wafer formed of a transition-metal oxide with an electrode layer bonded to both sides of the wafer and a protective layer overlaid on the surface of the electrode layer. A metal lead wire is attached to ea...
02/22/1983
4354308Method for manufacture of a selective chemical sensitive FET transducer
A selective chemical sensitive field-effect transistor device for use in detection and measurement of chemical properties of substances to which the device is exposed is disclosed. The chemical sensitive FET device comprises a semiconductor substrate, at ...
10/19/1982
4302530Method for making substance-sensitive electrical structures by processing substance-sensitive photoresist material
Disclosed is a substance-sensitive semiconductor and a method for making the same, wherein a substance-sensitive material is combined with photoresist material and applied to an electronic device structure. The substance-sensitive material may be applied ...
11/24/1981
4218298Selective chemical sensitive FET transducer
A selective chemical sensitive field-effect transistor device for use in detection and measurement of chemical properties of substances to which the device is exposed is disclosed. The chemical sensitive FET device comprises a semiconductor substrate, at ...
08/19/1980
4203087Absolute humidity sensors and methods of manufacturing humidity sensors
Disclosed are humidity sensor structures, and fabrication techniques, which result in uniform and reliable humidity sensing, reliable electrical connections in small sensors, and simplified and inexpensive manufacture....
05/13/1980
4144636Method for manufacture of a moisture sensor
A method and resulting structure for a relative humidity monitor which can be built into an integrated circuit chip. A small area on a silicon chip is made porous by anodic etching. This region is then oxidized and a metal counter electrode is deposited o...
03/20/1979
4020830Selective chemical sensitive FET transducers
A chemical sensitive field-effect transistor transducer capable of selectively detecting and measuring chemical properties of substances to which the transducer is exposed. The transducer includes a semiconductor substrate material having a certain doping...
05/03/1977
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