...When G.G. Hubbard learned of his future son-in-law's invention, he called it "only a toy." His daughter was engaged to a young man named Alexander Graham Bell.
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| Number | Title | Issue Date |
| 8187956 | Method for manufacturing microcrystalline semiconductor film, thin film transistor having microcrystalline semiconductor film, and photoelectric conversion device having microcrystalline semiconductor film A method for forming a microcrystalline semiconductor film over a base formed of a different material, which has high crystallinity in the entire film and at an interface with the base, is proposed. Further, a method for manufacturing a thin film transistor includin... | 05/29/2012 |
| 8158497 | Planar nonpolar m-plane group III nitride films grown on miscut substrates A nonpolar III-nitride film grown on a miscut angle of a substrate, in order to suppress the surface undulations, is provided. The surface morphology of the film is improved with a miscut angle towards an a-axis direction comprising a 0.15° or greater miscut angle ... | 04/17/2012 |
| 8158498 | P-channel MOS transistor and fabrication process thereof A p-channel MOS transistor includes a gate electrode formed on a silicon substrate in correspondence to a channel region therein via a gate insulation film, the gate electrode carrying sidewall insulation films on respective sidewall surfaces thereof, and source and... | 04/17/2012 |
| 8101509 | Semiconductor integrated circuit device A method of fabricating a semiconductor integrated circuit includes forming a first dielectric layer on a semiconductor substrate, patterning the first dielectric layer to form a first patterned dielectric layer, forming a non-single crystal seed layer on the first ... | 01/24/2012 |
| 8088676 | Metal-induced crystallization of amorphous silicon, polycrystalline silicon thin films produced thereby and thin film transistors produced therefrom Crystallization-inducing metal elements are introduced onto an amorphous silicon thin film. A first, low-temperature, heat-treatment induces nucleation of metal-induced crystallization (MIC), resulting in the formation of small polycrystalline silicon “islands”.... | 01/03/2012 |
| 8048783 | Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same A method of forming a polycrystalline silicon layer and an atomic layer deposition apparatus used for the same. The method includes forming an amorphous silicon layer on a substrate, exposing the substrate having the amorphous silicon layer to a hydrophilic or hydro... | 11/01/2011 |
| 8043943 | Low-temperature formation of polycrystalline semiconductor films via enhanced metal-induced crystallization A method for forming polycrystalline semiconductor film from amorphous semiconductor film at reduced temperatures and/or accelerated rates. The inclusion of a small percentage of semiconductor material, such as 2% within the metal layer, reduces the temperatures req... | 10/25/2011 |
| 8030189 | Method for maintaining a smooth surface of crystallizable material A method for maintaining a smooth surface of crystallizable material is disclosed. First, a substrate is provided. A target material layer is then formed on the substrate, with the target material being a crystallizable material. A protecting layer is subsequently f... | 10/04/2011 |
| 8017506 | Semiconductor device and method for forming the same A thin film transistor device reduced substantially in resistance between the source and the drain by incorporating a silicide film, which is fabricated by a process comprising forming a gate insulator film and a gate contact on a silicon substrate, anodically oxidi... | 09/13/2011 |
| 8008171 | Method of fabricating polycrystalline semiconductor Disclosed is a method of providing a poly-Si layer used in fabricating poly-Si TFT's or devices containing poly-Si layers. Particularly, a method utilizing at least one metal plate covering the amorphous silicon layer or the substrate, and applying RTA (Rapid Therma... | 08/30/2011 |
| 8003498 | Particle beam assisted modification of thin film materials Several examples of a method for processing a substrate are disclosed. In a particular embodiment, the method may include: introducing a plurality of first particles to a first region of the substrate so as to form at least one crystal having a grain boundary in the... | 08/23/2011 |
| 7998844 | Method for manufacturing a semiconductor device A process for fabricating a highly stable and reliable semiconductor, comprising: coating the surface of an amorphous silicon film with a solution containing a catalyst element capable of accelerating the crystallization of the amorphous silicon film, and heat treat... | 08/16/2011 |
| 7989326 | Thin film transistor and method of fabricating the same A thin film transistor and method of fabricating the same are provided. The thin film transistor includes: a metal catalyst layer formed on a substrate, and a first capping layer and a second capping layer pattern sequentially formed on the metal catalyst layer. The... | 08/02/2011 |
| 7981778 | Directional solid phase crystallization of thin amorphous silicon for solar cell applications Embodiments of the present invention provide a method for converting a doped amorphous silicon layer deposited onto a crystalline silicon substrate into crystalline silicon having the same grain structure and crystal orientation as the underlying crystalline silicon... | 07/19/2011 |
| 7977217 | Method of crystallizing silicon A method of crystallizing silicon including preparing a substrate having an amorphous silicon film formed thereon, aligning a mask having a first energy region and a second energy region over a first region of the amorphous silicon film formed on the substrate, irra... | 07/12/2011 |
| 7955958 | Method for fabrication of polycrystalline diodes for resistive memories The present invention, in one embodiment, provides a method of producing a PN junction the method including at least the steps of providing a Si-containing substrate; forming an insulating layer on the Si-containing substrate; forming a via through the insulating la... | 06/07/2011 |
| 7923357 | Method for forming poly-silicon film A poly-silicon film formation method for forming a poly-silicon film doped with phosphorous or boron includes heating a target substrate placed in a vacuum atmosphere inside a reaction container, and supplying into the reaction container a silicon film formation gas... | 04/12/2011 |
| 7919398 | Microcrystalline silicon deposition for thin film solar applications Embodiments of the invention as recited in the claims relate to thin film multi-junction solar cells and methods and apparatuses for forming the same. In one embodiment a method of forming a thin film multi-junction solar cell over a substrate is provided. The metho... | 04/05/2011 |
| 7906413 | Abrupt “delta-like” doping in Si and SiGe films by UHV-CVD A structure and method of forming an abrupt doping profile is described incorporating a substrate, a first epitaxial layer of Ge less than the critical thickness having a P or As concentration greater than 5×1019 atoms/cc, and a second epitaxial layer ha... | 03/15/2011 |
| 7897494 | Formation of single crystal semiconductor nanowires A method is provided for growing mono-crystalline nanostructures onto a substrate. The method comprises at least the steps of first providing a pattern onto a main surface of the substrate wherein said pattern has openings extending to the surface of the substrate, ... | 03/01/2011 |
| 7897493 | Inducement of strain in a semiconductor layer Strain is induced in a semiconductor layer. Embodiments include inducing strain by, for example, creation of free surfaces. ... | 03/01/2011 |
| 7888246 | Semiconductor integrated circuit device and a method of fabricating the same A method of fabricating a semiconductor integrated circuit includes forming a first dielectric layer on a semiconductor substrate, patterning the first dielectric layer to form a first patterned dielectric layer, forming a non-single crystal seed layer on the first ... | 02/15/2011 |
| 7863166 | Method of manufacturing semiconductor storage device A method of manufacturing a semiconductor storage device includes providing an opening portion in a plurality of positions in an insulating film formed on a silicon substrate, and thereafter forming an amorphous silicon film on the insulating film, in which the open... | 01/04/2011 |
| 7842588 | Group-III metal nitride and preparation thereof A method for forming a group-III metal nitride material film attached to a substrate including subjecting the substrate to an ambient pressure of no greater than 0.01 Pa, and heating the substrate to a temperature of between approximately 500° C.-800° C. The metho... | 11/30/2010 |
| 7811909 | Production of a hexagonal boron nitride crystal body capable of emitting out ultraviolet radiation The invention has for its object to provide a process of synthesizing high-purity hBN crystal bodies on a robust substrate even under normal pressure. The inventive process of producing hexagonal boron nitride crystal bodies is characterized by comprising a p... | 10/12/2010 |
| 7803700 | Crystal imprinting methods for fabricating substrates with thin active silicon layers Methods of forming semiconductor structures characterized by a thin active silicon layer on an insulating substrate by a crystal imprinting or damascene approach. The methods include patterning an insulating layer to define a plurality of apertures, filling the aper... | 09/28/2010 |
| 7803699 | Polysilicon thin film transistor and method of fabricating the same A polysilicon thin film transistor (TFT) may include a substrate, at least one insulating layer, a semiconductor layer, a gate electrode, a source electrode, a drain electrode, and a heat retaining layer formed to contact the semiconductor layer. The heat retaining ... | 09/28/2010 |
| 7767558 | Method of crystallizing amorphous silicon and device fabricated using the same A method of crystallizing amorphous silicon includes forming an amorphous silicon film over a substrate, crystallizing the amorphous silicon film to form a polycrystalline silicon film using a sequential lateral solidification crystallization method, and performing ... | 08/03/2010 |
| 7759230 | System for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts in overlap regions, and a mask for facilitating such artifact reduction/elimination An arrangement, process and mask for implementing single-scan continuous motion sequential lateral solidification of a thin film provided on a sample such that artifacts formed at the edges of the beamlets irradiating the thin film are significantly reduced. Accordi... | 07/20/2010 |
| 7749873 | Polycrystalline silicon layer, flat panel display using the same, and methods of fabricating the same A polycrystalline silicon layer, a flat panel display using the polycrystalline silicon layer, and methods of fabricating the same are provided. An amorphous silicon layer is formed on a substrate. A first pattern layer, a second pattern layer, and a metal catalyst ... | 07/06/2010 |
| 7709359 | Integrated circuit with dielectric layer A method of fabricating an integrated circuit with a dielectric layer on a substrate is disclosed. One embodiment provides forming the dielectric layer in an amorphous state on the substrate, the dielectric layer having a crystallization temperature; a doping the di... | 05/04/2010 |
| 7709360 | Method for manufacturing a crystalline silicon layer A method of forming a crystalline silicon layer on a microrough face of a substrate by reducing the microroughness of the face and then performing a metal induced crystallization process on the face is disclosed. The method further comprises, after metal induced cry... | 05/04/2010 |
| 7700461 | Methods of laterally forming single crystalline thin film regions from seed layers In a method of manufacturing a semiconductor device, a string structure including a selection transistor and a memory cell on a substrate. An insulation layer pattern is formed on the substrate to cover the string structure. The insulation layer pattern includes at ... | 04/20/2010 |
| 7691733 | Laser processing method for trench-edge-defect-free solid phase epitaxy in confined geometrics The present invention provides an improved amorphization/templated recrystallization (ATR) method for fabricating low-defect-density hybrid orientation substrates. ATR methods for hybrid orientation substrate fabrication generally start with a Si layer having a firs... | 04/06/2010 |
| 7670935 | Manufacturing method of semiconductor device Island-like semiconductor films and markers are formed prior to laser irradiation. Markers are used as positional references so as not to perform laser irradiation all over the semiconductor within a substrate surface, but to perform a minimum crystallization on at ... | 03/02/2010 |
| 7662702 | Method for manufacturing a crystalline silicon layer A method of forming a crystalline silicon layer on a microrough face of a substrate by reducing the microroughness of the face and then performing a metal induced crystallization process on the face is disclosed. ... | 02/16/2010 |
| 7659185 | Method for forming silicon thin-film on flexible metal substrate Disclosed are a method for forming a silicon thin-film on a substrate, and more particularly a method for forming a polycrystalline silicon thin-film of good quality on a flexible metal substrate. A metal substrate (110) is prepared and a surface of the metal... | 02/09/2010 |
| 7651928 | Method for crystallizing a semiconductor thin film A method for crystallizing a semiconductor thin film is provided. The method includes continuously irradiating an energy beam on a semiconductor thin film while scanning at a given speed. The energy beam is scanned in parallel lines while keeping pitches of not larg... | 01/26/2010 |
| 7651929 | Hybrid oriented substrates and crystal imprinting methods for forming such hybrid oriented substrates A semiconductor structure with an insulating layer on a silicon substrate, a plurality of electrically-isolated silicon-on-insulator (SOI) regions separated from the substrate by the insulating layer, and a plurality of electrically-isolated silicon bulk regions ext... | 01/26/2010 |
| 7651930 | Method of manufacturing semiconductor storage device A method of manufacturing a semiconductor storage device includes providing an opening portion in a plurality of positions in an insulating film formed on a silicon substrate, and thereafter forming an amorphous silicon film on the insulating film, in which the open... | 01/26/2010 |