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Class 438/481 - Utilizing epitaxial lateral overgrowth


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process wherein the semiconductor material is deposited
No. of patents: 439
Last issue date: 05/22/2012


1                      
NumberTitleIssue Date
8183134Semiconductor device and manufacturing method with improved epitaxial quality of III-V compound on silicon surfaces
Stacking faults are reduced or eliminated by epitaxially growing a III-V compound semiconductor region in a trench followed by capping and annealing the region. The capping layer limits the escape of atoms from the region and enables the reduction or elimination of ...
05/22/2012
8178427Epitaxial methods for reducing surface dislocation density in semiconductor materials
The invention provides methods and structures for reducing surface dislocations of a semiconductor layer, and can be employed during the epitaxial growth of semiconductor structures and layers comprising III-nitride materials. Embodiments involve the formation of a ...
05/15/2012
8173524Process for epitaxially growing epitaxial material regions
Methods form epitaxial materials by forming at least two gate stacks on a silicon substrate and forming sidewall spacers on sides of the gate stacks. Such methods pattern a recess in the silicon substrate between adjacent ones of the gate stacks. The methods also pr...
05/08/2012
8148244Lateral growth method for defect reduction of semipolar nitride films
A lateral growth method for defect reduction of semipolar nitride films. The process steps include selecting a semipolar nitride plane and composition, selecting a suitable substrate for growth of the semipolar nitride plane and composition, and applying a selective...
04/03/2012
8119505Method of making group III nitride-based compound semiconductor
A method of making a group III nitride-based compound semiconductor includes providing a semiconductor substrate comprising group III nitride-based compound semiconductor, polishing a surface of said semiconductor substrate such that said polished surface includes a...
02/21/2012
8097528Manufacturing method of nitride substrate, nitride substrate, and nitride-based semiconductor device
A manufacturing method of a nitride substrate includes the steps of: preparing a ground substrate; forming a mask on the ground substrate; placing the ground substrate in a reactor, and heating the ground substrate to a temperature of 850° C. to 1100° C. In the st...
01/17/2012
8067300AlInGaN mixture crystal substrate, method of growing same and method of producing same
Seeds are implanted in a regular pattern upon an undersubstrate. An AlxInyGa1-x-yN (0≦x≦1, 0≦y≦1, 0
11/29/2011
8062963Method of fabricating a semiconductor device having an epitaxy region
A method is described which includes providing a semiconductor substrate and forming a trench in the semiconductor substrate. An epitaxy region is grown in the trench. An amorphous layer is deposited overlying the epitaxy region. The semiconductor substrate is then ...
11/22/2011
8039371Reduced defect semiconductor-on-insulator hetero-structures
A semiconductor-on-insulator hetero-structure and a method for fabricating the semiconductor -on-insulator hetero-structure include a crystalline substrate and a dielectric layer located thereupon having an aperture that exposes the crystalline substrate. The semico...
10/18/2011
8034697Formation of devices by epitaxial layer overgrowth
Methods and structures are provided for formation of devices, e.g., solar cells, on substrates including, e.g., lattice-mismatched materials, by the use of aspect ratio trapping (ART) and epitaxial layer overgrowth (ELO). In general, in a first aspect, embodiments o...
10/11/2011
8034696Manufacturing method of semiconductor device
It is an object of the present invention to provide a method of manufacturing an SOI wafer at low cost and with high yield. It is another object of the present invention to provide a semiconductor device including also bulk type MISFETs used as high voltage regions ...
10/11/2011
8026156Method of fabricating nitride-based compound layer, GaN substrate and vertical structure nitride-based semiconductor light emitting device
In a method for fabricating a nitride-based compound layer, first, a GaN substrate is prepared. A mask layer with a predetermined pattern is formed on the GaN substrate to expose a partial area of the GaN substrate. Then a buffer layer is formed on the partially exp...
09/27/2011
8012860Atomic layer deposition for functionalizing colloidal and semiconductor particles
A method for producing a product of a functionalized nanocomposition colloidal material using atomic layer deposition to coat the colloidal material. The ALD layer comprises an inorganic material which enables improved optical and electrical properties for the nanoc...
09/06/2011
8008170Method for manufacturing semiconductor device
There is provided a method for manufacturing a semiconductor device in which a selective growth mask for partially covering a growth substrate is formed on a growth substrate; a buffer layer that is thicker than the mask is formed on a non-mask part not covered by t...
08/30/2011
7981775Nitride semiconductor light-emitting device having high light efficiency and method of manfacturing the same
Provided is a nitride semiconductor light emitting diode and a method of manufacturing the same. The method includes sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on a substrate, in-situ depositing a mask layer o...
07/19/2011
7955957Group III-nitride semiconductor thin film, method for fabricating the same, and group III-nitride semiconductor light emitting device
Disclosed herein is a high-quality group III-nitride semiconductor thin film and group III-nitride semiconductor light emitting device using the same. To obtain the group III-nitride semiconductor thin film, an AlInN buffer layer is formed on a (1-102)-plane (so cal...
06/07/2011
7943494Method for blocking dislocation propagation of semiconductor
The present invention provides a method for blocking the dislocation propagation of a semiconductor. A semiconductor layer is formed by epitaxial process on a substrate. A plurality of recesses is formed on the semiconductor layer by etching fragile locations of the...
05/17/2011
7935615III-V nitride semiconductor substrate and its production method
A self-supported III-V nitride semiconductor substrate having a substantially uniform carrier concentration distribution in a surface layer existing from a top surface to a depth of at least 10 μm is produced by growing a III-V nitride semiconductor crystal while f...
05/03/2011
7923355Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device
A manufacturing method for a semiconductor device includes retaining a wafer in a reaction chamber, supplying first process gas including source gas and second process gas containing H2 or inert gas onto the wafer in a rectified state alternately in a pre...
04/12/2011
7919397Method for reducing agglomeration of Si layer, method for manufacturing semiconductor device and vacuum treatment apparatus
The present invention provides a method for reducing the agglomeration of a Si layer in an SOI substrate, which can prevent the agglomeration of the Si layer from occurring in a heating and temperature-raising process for the Si layer, when heating and temperature-r...
04/05/2011
7888244Threading-dislocation-free nanoheteroepitaxy of Ge on Si using self-directed touch-down of Ge through a thin SiOlayer
A method of forming a virtually defect free lattice mismatched nanoheteroepitaxial layer is disclosed. The method includes forming an interface layer on a portion of a substrate. A plurality of seed pads are then formed by self-directed touchdown by exposing the int...
02/15/2011
7863163Epitaxial deposition of doped semiconductor materials
A method for depositing a carbon doped epitaxial semiconductor layer comprises maintaining a pressure of greater than about 700 torr in a process chamber housing a patterned substrate having exposed single crystal material. The method further comprises providing a f...
01/04/2011
7846820Nitride semiconductor device and process for producing the same
A process for producing a nitride semiconductor according to the present invention includes: step (A) of provided an n-GaN substrate 101; step (B) of forming on the substrate 101 a plurality of stripe ridges having upper faces which are parallel to a p...
12/07/2010
7811907Method for manufacturing semiconductor device and epitaxial growth equipment
A method for manufacturing a semiconductor device includes steps of: forming a trench on a main surface of a silicon substrate; forming a first epitaxial film on the main surface and in the trench; and forming a second epitaxial film on the first epitaxial film. The...
10/12/2010
7790581Semiconductor substrate with multiple crystallographic orientations
A pair of semiconductor structures and a method for fabricating a semiconductor structure each utilize a semiconductor substrate having a first crystallographic orientation, and a dielectric layer located thereupon. The method provides for epitaxially growing a semi...
09/07/2010
7732306Methods for producing improved epitaxial materials
This invention provides methods for fabricating substantially continuous layers of group III nitride semiconductor materials having low defect densities. The methods include epitaxial growth of nucleation layers on a base substrate, thermally treatment of said nucle...
06/08/2010
7718516Method for epitaxial growth of (110)-oriented SrTiOthin films on silicon without template
A process and structure utilizes pulsed laser deposition technique to grow SrTiO3 (STO) films with single (110) out-of-plane orientation upon a surface of all (100), (110) and (111)-oriented silicon (Si) substrates. No designed buffer layer is needed bene...
05/18/2010
7704860Nitride-based semiconductor device and method for fabricating the same
A nitride-based semiconductor device according to the present invention includes a semiconductor multilayer structure supported on a substrate structure 101 with electrical conductivity. The principal surface of the substrate structure 101 has at least...
04/27/2010
7691732Manufacturing method of nitride substrate, nitride substrate, and nitride-based semiconductor device
A manufacturing method of a nitride substrate includes the steps of preparing a ground substrate; forming a mask on the ground substrate; placing the ground substrate in a reactor, and heating the ground substrate to a temperature of 850° C. to 1100° C. In the ste...
04/06/2010
7687378Fabricating method of nitride semiconductor substrate and composite material substrate
A fabricating method of nitride semiconductor substrate is provided. First, a first substrate including a first base material, a nitride semiconductor template layer stacked on the first base material, and a first dielectric layer stacked on the nitride semiconducto...
03/30/2010
7682947Epitaxial semiconductor deposition methods and structures
Methods for depositing epitaxial films such as epitaxial Ge and SiGe films. During cooling from high temperature processing to lower deposition temperatures for Ge-containing layers, Si or Ge compounds are provided to the substrate. Smooth, thin, relatively defect-f...
03/23/2010
7682946Apparatus and process for plasma-enhanced atomic layer deposition
Embodiments of the invention provide a method for forming a material on a substrate during an atomic layer deposition (ALD) process, such as a plasma-enhanced ALD (PE-ALD) process. In one embodiment, a method is provided which includes flowing at least one process g...
03/23/2010
7674693Method for manufacturing semiconductor device
A method forming a semiconductor device includes forming a domed gate oxide film to relieve stress resulting from a thermal expansion rate difference of an oxide film and silicon film during a subsequent thermal process and preventing leakage current between source/...
03/09/2010
7670933Nanowire-templated lateral epitaxial growth of non-polar group III nitrides
A method for growing high quality, nonpolar Group III nitrides using lateral growth from Group III nitride nanowires. The method of nanowire-templated lateral epitaxial growth (NTLEG) employs crystallographically aligned, substantially vertical Group III nitride nan...
03/02/2010
7670934Methods for fabricating MOS devices having epitaxially grown stress-inducing source and drain regions
Methods of fabricating a semiconductor device on and in a semiconductor substrate having a first region and a second region are provided. In accordance with an exemplary embodiment of the invention, a method comprises forming a first gate stack overlying the first r...
03/02/2010
7670932MOS structures with contact projections for lower contact resistance and methods for fabricating the same
MOS structures with contact projections for lower contact resistance and methods for fabricating such MOS structures have been provided. In an embodiment, a method comprises providing a semiconductor substrate, fabricating a gate stack on the substrate, and forming ...
03/02/2010
7648893Method for manufacturing a semiconductor-on-insulator substrate for microelectronics and optoelectronics
A method for manufacturing a semiconductor including the steps of supplying a substrate having a support with one face supporting a strained silicon thin layer; forming a first mask on a portion of the strained silicon thin layer; epitaxy of Si1-xGex...
01/19/2010
7608526Strained layers within semiconductor buffer structures
A semiconductor workpiece including a substrate, a relaxed buffer layer including a graded portion formed on the substrate, and at least one strained transitional layer within the graded portion of the relaxed buffer layer and method of manufacturing the same. The a...
10/27/2009
7589001Semiconductor base and its manufacturing method, and semiconductor crystal manufacturing method
A growth plane of substrate 1 is processed to have a concavo-convex surface. The bottom of the concave part may be masked. When a crystal is grown by vapor phase growth using this substrate, an ingredient gas does not sufficiently reach the inside of a concav...
09/15/2009
7579263Threading-dislocation-free nanoheteroepitaxy of Ge on Si using self-directed touch-down of Ge through a thin SiOlayer
A method of forming a virtually defect free lattice mismatched nanoheteroepitaxial layer is disclosed. The method includes forming an interface layer on a portion of a substrate. A plurality of seed pads are then formed by self-directed touchdown by exposing the int...
08/25/2009
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