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Class 438/477 - By vapor phase surface reaction


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process in which the substrate is treated with a reactive
No. of patents: 113
Last issue date: 07/12/2011


1      
NumberTitleIssue Date
7977216Silicon wafer and fabrication method thereof
Provided is a silicon wafer including: a first denuded zone formed with a predetermined depth from a top surface of the silicon wafer; and a bulk area formed between the first denuded zone and a backside of the silicon wafer, wherein the first denuded zone is formed...
07/12/2011
7939432Method of improving intrinsic gettering ability of wafer
A method of improving the intrinsic gettering ability of a wafer is described. A first annealing step is performed to the wafer at a first temperature in an atmosphere containing at least one of oxygen gas and nitrogen gas. A second annealing step is performed to th...
05/10/2011
7737005Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program
A cleaning process is performed on the surface of a nickel silicide film serving as an underlayer. Then, a Ti film is formed to have a film thickness of not less than 2 nm but less than 10 nm by CVD using a Ti compound gas. Then, the Ti film is nitrided. Then, a TiN...
06/15/2010
7507642Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
In a vapor-phase growth method in which a silicon-germanium mixed crystal layer is deposited on a semiconductor substrate, the vapor-phase growth method comprises a first step of introducing silicon raw material gas into a reaction furnace in such a manner that a si...
03/24/2009
7348267Flash memory and method of fabricating the same
A method of fabricating a flash memory device produces a device that has a small cell area and yet a high coupling ratio. First, a basic structure is provided that includes a substrate, a field isolation film protruding from the substrate, and floating gates dispose...
03/25/2008
7341775Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device
Provided are a composition for forming film which can form a porous film excelling in dielectric constant, adhesiveness, uniformity of the film, mechanical strength and having low hygroscopicity; a porous film and a method for forming the film; and a high-performing...
03/11/2008
7335564Method for forming device isolation layer of semiconductor device
A method for forming a device isolation device of a semiconductor device is disclosed. The method includes the steps of forming a moat pattern for forming a trench on a semiconductor substrate, forming a trench by etching the semiconductor substrate to a predetermin...
02/26/2008
7303979Vapor-phase growth method, semiconductor manufacturing method and semiconductor device manufacturing method
In a vapor-phase growth method in which a silicon-germanium mixed crystal layer is deposited on a semiconductor substrate, the vapor-phase growth method comprises a first step of introducing silicon raw material gas into a reaction furnace in such a manner that a si...
12/04/2007
7302982Label applicator and system
A label applicator including a support surface having a central area and curving downwardly from the central area. A post assembly extends up from the central area such that a label having a label through-hole can be positioned in a support position generally on the...
12/04/2007
7247252Method of avoiding plasma arcing during RIE etching
A method for avoiding plasma arcing during a reactive ion etching (RIE) process including providing a semiconductor wafer having a process surface for depositing a dielectric insulating layer; depositing at least a portion of a dielectric insulating layer to form a ...
07/24/2007
7242012Lithography device for semiconductor circuit pattern generator
General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor ...
07/10/2007
7235427Method for treating substrates for microelectronics and substrates obtained by said method
An embodiment of a multilayer wafer according to the invention includes a base substrate, a first layer associated with the base substrate, and a second layer on the first layer on side opposite from the base substrate in an axial direction and having a lateral edge...
06/26/2007
7229667Reduced moisture compositions comprising an acid gas and a matrix gas, articles of manufacture comprising said compositions, and processes for manufacturing same
Compositions comprising a reactive gas and a matrix gas are disclosed, as well as articles of manufacture and methods of making the articles. The methods of manufacturing preferably employ zeolites to remove moisture from the reactive gas and from the matrix gas, an...
06/12/2007
7226513Silicon wafer cleaning method
This invention provides a cleaning method of silicon wafer for obtaining a silicon wafer in which micro roughness thereof under spatial frequency of 20/μm is 0.3 to 1.5 nm3 in terms of power spectrum density, by passing a process of oxidizing the silicon...
06/05/2007
7223696Methods for maskless lithography
General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor ...
05/29/2007
7211513Process for chemical vapor desposition of a nitrogen-doped titanium oxide coating
Nitrogen doped titanium oxide coatings on a hot glass substrate are prepared by providing a uniform vaporized reactant mixture containing a titanium compound, a nitrogen compound and an oxygen-containing compound, and delivering the reactant mixture to the surface o...
05/01/2007
7211295Silicon dioxide film forming method
Disclosed herein is a silicon dioxide film forming method including: a reaction chamber heating step of heating a reaction chamber to a predetermined temperature, the reaction chamber containing an object to be processed; a gas pretreating step of energizing a proce...
05/01/2007
7208325Refreshing wafers having low-k dielectric materials
A low-k dielectric layer having a composition of silicon, oxygen and carbon is removed from a wafer. The low-k dielectric layer is removed by exposing a surface of the low-k dielectric layer to an oxygen-containing gas to oxidized the surface. The oxidized surface i...
04/24/2007
7199057Method of eliminating boron contamination in annealed wafer
A method by which a silicon wafer is prevented from increasing boron concentration near the surface and difference in the boron concentration does not arise between the surface of the annealed wafer and the silicon bulk to eliminate boron contamination in the silico...
04/03/2007
7193239Three dimensional structure integrated circuit
A Three-Dimensional Structure (3DS) Memory allows for physical separation of the memory circuits and the control logic circuit onto different layers such that each layer may be separately optimized. One control logic circuit suffices for several memory circuits, red...
03/20/2007
7176545Apparatus and methods for maskless pattern generation
General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor ...
02/13/2007
7166505Method for making a semiconductor device having a high-k gate dielectric
A method for making a semiconductor device is described. That method includes forming on a substrate a dielectric layer that has a dielectric constant that is greater than the dielectric constant of silicon dioxide. The dielectric layer is modified so that it will b...
01/23/2007
7144822High density plasma process for optimum film quality and electrical results
A method for plasma processing of semiconductor wafers is provided that reduces plasma-induced damage to the gate dielectric while limiting damage to the wafer from particulates that flake off of the interior surfaces of the reaction chamber. Plasma conditions are m...
12/05/2006
7138295Method of information processing using three dimensional integrated circuits
A Three-Dimensional Structure (3DS) Memory allows for physical separation of the memory circuits and the control logic circuit onto different layers such that each layer may be separately optimized. One control logic circuit suffices for several memory circuits, red...
11/21/2006
7098064Semiconductor laser device and its manufacturing method, and optical disc reproducing and recording apparatus
Immediately after stacking of a barrier layer formed of GaAsP of a multiple-strain quantum well active layer 105 at a growth temperature of 650° C., a second upper guide layer 126 formed of AlGaAs is stacked. This second upper guide layer 126 i...
08/29/2006
7087518Method of passivating and/or removing contaminants on a low-k dielectric/copper surface
One aspect of the invention relates to a method of removing contaminants from a low-k film. The method involves forming a sacrificial layer over the contaminated film. The contaminants combine with the sacrificial layer and are removed by etching away the sacrificia...
08/08/2006
7084505Porous film, composition and manufacturing method, interlayer dielectric film, and semiconductor device
A porous film-forming composition comprising (A) a curable silicone resin having a Mn of at least 100, (B) a micelle-forming surfactant, and (C) a compound which generates an acid upon pyrolysis remains stable during storage. The composition is coated and heat treat...
08/01/2006
7083680Sublimation and purification method
A glass bottle containing a sample of an organic material to be purified is located at a position surrounded by a heater near one end in an outer glass tube. An inner glass tube for catching organic crystals obtained by recrystallization is located at a position nea...
08/01/2006
7064072Method for fabricating trench isolation
A semiconductor substrate having a front surface and a backside is prepared. A first silicon oxide layer is formed on the front surface of the semiconductor substrate and, simultaneously, forming a second silicon oxide layer on the backside of the semiconductor subs...
06/20/2006
7049209De-fluorination of wafer surface and related structure
Methods of de-fluorinating a wafer surface after damascene processing and prior to photoresist removal are disclosed, as is a related structure. In one embodiment, the method places the wafer surface in a chamber and exposes the wafer surface to a plasma from a sour...
05/23/2006
7033938Method of making a long wavelength indium gallium arsenide nitride (InGaAsN) active region
The active region of a long-wavelength light emitting device is made by providing an organometallic vapor phase epitaxy (OMVPE) reactor, placing a substrate wafer capable of supporting growth of indium gallium arsenide nitride in the reactor, supplying a Group IIIâ€...
04/25/2006
7015119Fabrication method of semiconductor integrated circuit device
A method of fabrication of a semiconductor integrated circuit device, calls for disposing, in an ultrapure water preparing system, UF equipment having therein a UF module which has been manufactured by disposing, in a body thereof, a plurality of capillary hollow fi...
03/21/2006
7005385Method for removing a resist mask with high selectivity to a carbon hard mask used for semiconductor structuring
The present invention relates to a method for removing a resist selective to a carbon hard mask including providing an etching plasma comprising of at least hydrogen at a predetermined temperature level and a predetermined pressure level in a reaction chamber, and e...
02/28/2006
6962855Method of forming a porous material layer in a semiconductor device
A material layer containing impurities that react with water molecules is formed on a substrate. The material layer is then heated under a pressure exceeding one atmosphere and in the presence of water vapor to generate pores in the material layer. The material laye...
11/08/2005
6949478Oxide film forming method
A method of forming an oxide film having high insularity capability is performed within an ultra clean environment, using charged particles. ...
09/27/2005
6930393Composition for forming porous film, porous film and method for forming the same, interlayer insulator film, and semiconductor device
The object of the invention is to provide a porous film having the dielectric constant of 2.2 or less and having practicable mechanical strength. This invention provides a porous film-forming composition comprising (A) and (B): (A)...
08/16/2005
6921727Method for modifying dielectric characteristics of dielectric layers
A method of treating a dielectric layer having a low dielectric constant, where the dielectric layer has been processed in a manner that causes a change in the dielectric constant of an affected region of the layer. The treatment of the affected region may comprise ...
07/26/2005
6838395Method for fabricating a semiconductor crystal
A method for fabricating a semiconductor crystal that has a first step for forming a semiconductor crystal layer (202) that contains carbon atoms and at least one kind of Group IV element other than carbon on a substrate (201), a second step for adding...
01/04/2005
6830950Integrated method for release and passivation of MEMS structures
Disclosed herein is a method of improving the adhesion of a hydrophobic self-assembled monolayer (SAM) coating to a surface of a MEMS structure, for the purpose of preventing stiction. The method comprises pretreating surfaces of the MEMS structure with a plasma gen...
12/14/2004
6828690Non-uniform minority carrier lifetime distributions in high performance silicon power devices
A process for heat-treating a single crystal silicon segment to influence the profile of minority carrier recombination centers in the segment. The segment has a front surface, a back surface, and a central plane between the front and back surfaces. In the process, ...
12/07/2004
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