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Class 438/46 - Compound semiconductor


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a device emissive of electromagnetic
No. of patents: 982
Last issue date: 05/29/2012


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NumberTitleIssue Date
7955881Method of fabricating quantum well structure
In the method of fabricating a quantum well structure which includes a well layer and a barrier layer, the well layer is grown at a first temperature on a sapphire substrate. The well layer comprises a group III nitride semiconductor which contains indium as a const...
06/07/2011
7951632Optical device and method of making
An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing...
05/31/2011
7947521Method for forming electrode for group-III nitride compound semiconductor light-emitting devices
A method for forming an electrode for Group-III nitride compound semiconductor light-emitting devices includes a step of forming a first electrode layer having an average thickness of less than 1 nm on a Group-III nitride compound semiconductor layer, the first elec...
05/24/2011
7939354Method of fabricating nitride semiconductor laser
A method of fabricating a nitride semiconductor laser comprises preparing a substrate having a plurality of marker structures and a crystalline mass made of a hexagonal gallium nitride semiconductor. The primary and back surfaces of the substrate intersect with a pr...
05/10/2011
7932114Method of manufacturing GaN substrate, method of manufacturing epitaxialwafer, method of manufacturing semiconductor device and epitaxialwafer
Assuming that r (m) represents the radius of a GaN substrate, t1 (m) represents the thickness of the GaN substrate, h1 (m) represents a warp of the GaN substrate before formation of an epitaxialwafer, t2 (m) represents the thickness of an Al
04/26/2011
7927901Method for fabricating LED chip comprising reduced mask count and lift-off processing
A method for fabricating a light emitting diode chip is provided. In the method, a half-tone mask process, a gray-tone mask process or a multi-tone mask process is applied and combined with a lift-off process to further reduce process steps of the light emitting dio...
04/19/2011
7892873Fabrication method of nitride-based semiconductor device
A fabrication method of a nitride-based semiconductor device includes the steps of forming a stacked structure constituted of a nitride-based semiconductor on a support substrate, depositing a first bonding metal on the stacked structure, depositing a second bonding...
02/22/2011
7883915Method of making nitride semiconductor laser, method of making epitaxial wafer, and nitride semiconductor laser
A method of making a nitride semiconductor laser comprises forming a first InGaN film for an active layer on a gallium nitride based semiconductor region, and the first InGaN film has a first thickness. In the formation of the first InGaN film, a first gallium raw m...
02/08/2011
7883914Method for fabricating a photonic crystal or photonic bandgap vertical-cavity surface-emitting laser
The invention relates to fabrication of VCSELs. It provides a method for fabricating a VCSEL that contains a micro/nano-structured mode selective lateral layer, where the micro/nano-structured layer is obtained by well controlled local etching. The invention enables...
02/08/2011
RE42074Manufacturing method of light emitting device
A method of manufacturing a light emitting device, including the steps of: forming an active layer composed of a compound semiconductor containing indium by a vapor phase growth method; and forming a cap layer composed of a compound semiconductor on said active laye...
01/25/2011
7871843Method of preparing light emitting device
The object of this invention is to provide a high-output type nitride light emitting device. The nitride light emitting device comprises an n-type nitride semiconductor layer, a p-type nitride semiconductor layer and an active layer therebetween, wherein the light e...
01/18/2011
7867800Light-emitting semiconductor device using group III nitrogen compound
A light-emitting semiconductor device (10) consecutively includes a sapphire substrate (1), an AlN buffer layer (2), a silicon (Si) doped GaN n+-layer (3) of high carrier (n-type) concentration, a Si-doped (Alx3Ga
01/11/2011
7867801Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof
An apparatus for producing a group-III nitride semiconductor layer which forms a group-III nitride semiconductor layer on a substrate by a sputtering method, the apparatus including: a first plasma-generating region where a target containing a group-III element is d...
01/11/2011
7867799MBE growth of a semiconductor laser diode
A method of fabricating a continuous wave semiconductor laser diode in the (Al,Ga,In)N materials system comprises: growing, in sequence, a first cladding region (4), a first optical guiding region (5), an active region (6), a second optical guid...
01/11/2011
7867802Diamond LED devices and associated methods
LED devices incorporating diamond materials and methods for making such devices are provided. One such method may include forming epitaxially a substantially single crystal SiC layer on a substantially single crystal Si wafer, forming epitaxially a substantially sin...
01/11/2011
7858418Light emitting device and method of manufacturing the same
Herein disclosed a method of manufacturing a light emitting device, including the steps of: (A) sequentially forming a first compound semiconductor layer of a first conduction type, an active layer, and a second compound semiconductor layer of a second conduction ty...
12/28/2010
7851243Nitride based semiconductor optical device, epitaxial wafer for nitride based semiconductor optical device, and method of fabricating semiconductor light-emitting device
In the nitride based semiconductor optical device LE1, the strained well layers 21 extend along a reference plane SR1 tilting at a tilt angle α from the plane that is orthogonal to a reference axis extending in the direction of the c-axis. The ...
12/14/2010
7846757Technique for the growth and fabrication of semipolar (Ga,A1,In,B)N thin films, heterostructures, and devices
A method for growth and fabrication of semipolar (Ga,Al,In,B)N thin films, heterostructures, and devices, comprising identifying desired material properties for a particular device application, selecting a semipolar growth orientation based on the desired material p...
12/07/2010
7838315Method of manufacturing vertical light emitting diode
Provided is a method of manufacturing a vertical LED, the method including the steps of: preparing a sapphire substrate; forming a light emitting structure in which an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer are ...
11/23/2010
7838316Method for manufacturing a nitride semiconductor laser element and a nitride semiconductor laser element
A method for manufacturing a nitride semiconductor laser element, which has over a substrate a laminate including an element region constituting a cavity, an island layer separated from the element region, an exposed region separating the element region from the isl...
11/23/2010
7824942Method of fabricating photoelectric device of group III nitride semiconductor and structure thereof
A method of fabricating a photoelectric device of Group III nitride semiconductor comprises the steps of: forming a first Group III nitride semiconductor layer on a surface of an original substrate; forming a patterned epitaxial-blocking layer on the first Group III...
11/02/2010
7811847Optical semiconductor device and method for manufacturing the same
Because of a large lattice mismatch between a sapphire substrate and a group III-V compound semiconductor, a good crystal is difficult to grow. A high-quality AlN buffer growth structure A on a sapphire substrate includes a sapphire (0001) substrate 1, an AlN...
10/12/2010
7807491Method of manufacturing nitride semiconductor light-emitting device
Provided is a method of manufacturing a nitride semiconductor light-emitting device including the step of contacting a surfactant material with the surface of an n-type nitride semiconductor layer or the surface of a p-type nitride semiconductor layer before the gro...
10/05/2010
7790489III-V group nitride system semiconductor self-standing substrate, method of making the same and III-V group nitride system semiconductor wafer
A III-V group nitride system semiconductor self-standing substrate has: a first III-V group nitride system semiconductor crystal layer that has a region with dislocation lines gathered densely, the dislocation lines being gathered substantially perpendicular to a su...
09/07/2010
7776636Method for significant reduction of dislocations for a very high A1 composition A1GaN layer
A method for reducing dislocation density between an AlGaN layer and a sapphire substrate involving the step of forming a self-organizing porous AlN layer of non-coalescing column-like islands with flat tops on the substrate. ...
08/17/2010
7776637Method of manufacturing light emitting diodes
A method of manufacturing a light emitting diode, wherein a laser lift-off (LLO) layer and an epi-layer are formed on a nitride semiconductor substrate, and the nitride semiconductor substrate is then separated through a laser lift-off process, thereby improving the...
08/17/2010
7759149Gallium nitride-based semiconductor stacked structure
A gallium-nitride-based semiconductor stacked structure includes a sapphire substrate; a low-temperature-deposited buffer layer which is composed of a Group III nitride material of AlXGaYN (0.5
07/20/2010
7754514Method of making a light emitting element
A method of making a light emitting element, the light emitting element with a semiconductor layer represented by: AlXInYGa1−X−YN (0≦X≦1, 0≦Y≦1, 0≦X+Y≦1), has the step of wet-etching a surface of the semiconductor lay...
07/13/2010
7732236III nitride semiconductor crystal and manufacturing method thereof, III nitride semiconductor device manufacturing method thereof, and light emitting device
The invention provides Group III nitride semiconductor crystals of a size appropriate for semiconductor devices and methods for manufacturing the same, Group III nitride semiconductor devices and methods for manufacturing the same, and light-emitting appliances. A m...
06/08/2010
7727791Semiconductor layer, process for forming the same, and semiconductor light emitting device
A semiconductor layer contains, as a principal constituent, a Group III-V semiconductor compound, which may be represented by the general formula: AlxGayInzN, wherein x represents a number satisfying the condition 0≦x
06/01/2010
7727792Laser diode epitaxial wafer and method for producing same
A laser diode epitaxial wafer has an n-type GaAs substrate, an n-type cladding layer formed on the n-type GaAs substrate, an active layer formed on the n-type cladding layer, and a p-type cladding layer formed on the active layer. The n-type cladding layer, the acti...
06/01/2010
7709284Method for deposition of magnesium doped (Al, In, Ga, B)N layers
A method for growing an improved quality device by depositing a low temperature (LT) magnesium (Mg) doped nitride semiconductor thin film. The low temperature Mg doped nitride semiconductor thin film may have a thickness greater than 50 nm. A multi quantum well (MQW...
05/04/2010
7704770Light emitting diode by use of metal diffusion bonding technology and method of producing light emitting diode
The main objective of present invention is to provide a manufacturing method of light emitting diode that utilizes metal diffusion bonding technology. AlInGaP light emitting diode epitaxial structure on a temporary substrate is bonded to a permanent substrate having...
04/27/2010
7700395Hybrid integration based on wafer-bonding of devices to AlSb monolithically grown on Si
Exemplary embodiments provide a semiconductor fabrication method including a combination of monolithic integration techniques with wafer bonding techniques. The resulting semiconductor devices can be used in a wide variety of opto-electronic and/or electronic applic...
04/20/2010
7695991Method for manufacturing GaN semiconductor light-emitting element
A method for manufacturing a GaN semiconductor light-emitting element is provided. The method for manufacturing a GaN semiconductor light-emitting element includes forming, by crystal growth, a first GaN compound semiconductor layer of a first conductivity type, the...
04/13/2010
7691656Method for fabricating a semiconductor component based on GaN
A semiconductor component has a plurality of GaN-based layers, which are preferably used to generate radiation, produced in a fabrication process. In the process, the plurality of GaN-based layers are applied to a composite substrate that includes a substrate body a...
04/06/2010
7691657Light emitting device using nitride semiconductor and fabrication method of the same
A nitride based 3-5 group compound semiconductor light emitting device comprising: a substrate; a buffer layer formed above the substrate; a first In-doped GaN layer formed above the buffer layer; an InxGa1-xN/InyGa1â...
04/06/2010
7691658Method for improved growth of semipolar (Al,In,Ga,B)N
A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow...
04/06/2010
7687294Nitride semiconductor device and method of manufacturing the same
The present invention provides a nitride semiconductor device. The nitride semiconductor device comprises an n-type nitride semiconductor layer formed on a nitride crystal growth substrate. An active layer is formed on the n-type nitride semiconductor layer. A first...
03/30/2010
7687295Method for manufacturing optical semiconductor device
In an optical semiconductor device that emits or receives light substantially perpendicularly to or in parallel to an active surface formed on a semiconductor substrate, the optical semiconductor device, an electrode that is formed on the active surface side and con...
03/30/2010
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