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...that after Parker Brothers executives turned down the game of Monopoly because it had "52 fundamental errors" (including taking too long to play), a copy of the game wound up in the home of the company president who stayed up until 1 a.m. to finish playing it? He was so impressed by the game that the next day he wrote to inventor Charles Darrow and offered to buy it!

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Class 438/455 - BONDING OF PLURAL SEMICONDUCTOR SUBSTRATES


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process in which plural semiconductive substrates are joined
No. of patents: 1606
Last issue date: 05/22/2012


1                      
NumberTitleIssue Date
8183127Method for bonding wafers to produce stacked integrated circuits
A basic building block for wafer scale stacked integrated circuits is disclosed. The building block includes an integrated circuit device having an integrated circuit substrate having a circuit layer sandwiched between a buffer layer and a dielectric layer. The diel...
05/22/2012
8183126Patterning embedded control lines for vertically stacked semiconductor elements
Various embodiments of the present invention are generally directed to an apparatus with embedded (bottom side) control lines for vertically stacked semiconductor elements, and a method for forming the same. In accordance with various embodiments, a first semiconduc...
05/22/2012
8173518Method of wafer bonding
Provided is a method of fabricating a semiconductor device. The method includes providing a device substrate having a front side, a back side, and a first edge portion, forming a material layer over a portion of the front side of the device substrate, trimming the f...
05/08/2012
8168509Etching methods and methods of manufacturing a CMOS image sensor using the same
In an etching method, a thin layer is formed on a first surface of a first substrate doped with first impurities having a first doping concentration. The thin layer is doped with second impurities having a second doping concentration lower than the first doping conc...
05/01/2012
8158489Formation of TSV backside interconnects by modifying carrier wafers
An integrated circuit structure includes a semiconductor wafer, which includes a first notch extending from an edge of the semiconductor wafer into the semiconductor wafer. A carrier wafer is mounted onto the semiconductor wafer. The carrier wafer has a second notch...
04/17/2012
8153506Semiconductor device and method of manufacturing the same
It is provided a contacting method when a plurality of films to be peeled are laminating. Reduction of total layout area, miniaturization of a module, weight reduction, thinning, narrowing a frame of a display device, or the like can be realized by sequentially lami...
04/10/2012
8153504Process for manufacturing a composite substrate
The invention relates to a process for manufacturing a composite substrate comprising bonding a first substrate onto a second semiconducting substrate, characterized in that the process includes, before bonding, the formation of a bonding layer between the first and...
04/10/2012
8153505Method for low temperature bonding and bonded structure
A method for bonding at low or room temperature includes steps of surface cleaning and activation by cleaning or etching. The method may also include removing by-products of interface polymerization to prevent a reverse polymerization reaction to allow room temperat...
04/10/2012
8153503Protection of cavities opening onto a face of a microstructured element
The invention relates to a method for protecting the interior of at least one cavity (4) having a portion of interest (5) and opening onto a face of a microstructured element (1), consisting of depositing, on said face, a nonconformal layer (...
04/10/2012
8148236Display device and method for manufacturing thereof
An object is to provide a system-on-panel display device including a display portion and a peripheral circuit for controlling display on the display portion over one substrate, which can operate more accurately. The display device has a display portion provided with...
04/03/2012
8138061Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide
The present invention provides a method for removing or reducing the thickness of ultrathin interfacial oxides remaining at Si—Si interfaces after silicon wafer bonding. In particular, the invention provides a method for removing ultrathin interfacial oxides remai...
03/20/2012
8138062Electrical coupling of wafer structures
A method for electrically coupling a first wafer with a second wafer is provided. The method includes bonding the first wafer with the second wafer using a bonding material. The method further includes forming an opening in the first wafer in a scribe area of the se...
03/20/2012
8129255Firm, insulating and electrically conducting connection of processed semiconductor wafers
The invention relates to a process for and an arrangement of the connection of processed semiconductor wafers (1, 2) wherein, in addition to the firm connection, there is an electric connection (5) between the semiconductor wafers and/or the electronic...
03/06/2012
81292563D integrated circuit device fabrication with precisely controllable substrate removal
A method is provided for fabricating a 3D integrated circuit structure. According to the method, a first active circuitry layer wafer is provided. The first active circuitry layer wafer comprises a P+ portion covered by a P− layer, and the P− layer includes acti...
03/06/2012
8119497Thin embedded active IC circuit integration techniques for flexible and rigid circuits
A flexible electronic circuit member formed of a plurality of dielectric layers includes a plurality of thinned semiconductor chips embedded within the circuit member for increased levels of integration and component density. The thinned semiconductor chips may incl...
02/21/2012
8114757Semiconductor device and structure
A method of manufacturing a semiconductor wafer, the method comprising providing a base wafer comprising a semiconductor substrate; preparing a first monocrystalline layer comprising semiconductor regions; performing a first layer transfer of the first monocrystalli...
02/14/2012
8105915Semiconductor device and method of forming vertical interconnect structure between non-linear portions of conductive layers
A semiconductor device is made by forming a first conductive layer over a first temporary carrier having rounded indentations. The first conductive layer has a non-linear portion due to the rounded indentations. A bump is formed over the non-linear portion of the fi...
01/31/2012
8101498Bonded intermediate substrate and method of making same
An intermediate substrate includes a handle substrate bonded to a thin layer suitable for epitaxial growth of a compound semiconductor layer, such as a III-nitride semiconductor layer. The handle substrate may be a metal or metal alloy substrate, such as a molybdenu...
01/24/2012
8101499Formation of TSV backside interconnects by modifying carrier wafers
An integrated circuit structure includes a semiconductor wafer, which includes a first notch extending from an edge of the semiconductor wafer into the semiconductor wafer. A carrier wafer is mounted onto the semiconductor wafer. The carrier wafer has a second notch...
01/24/2012
8097523Method for manufacturing bonded wafer
A method for manufacturing a bonded wafer, including at least implanting at least one type of gas ion selected from a hydrogen ion and a rare gas ion from a surface of a bond wafer to form an ion-implanted layer in the wafer, bonding an ion-implanted surface of the ...
01/17/2012
8062957Semiconductor substrate surface preparation method
The invention relates to a method for preparing a surface of a semiconductor substrate by oxidizing the surface of the semiconductor substrate to thereby transform the natural oxide into an artificial oxide and then removing the artificial oxide, in particular to ob...
11/22/2011
8062956Semiconductor on insulator and methods of forming same using temperature gradient in an anodic bonding process
Methods and apparatus for producing a semiconductor on glass (SOG) structure include: bringing a first surface of a glass substrate into direct or indirect contact with a semiconductor wafer; heating at least one of the glass substrate and the semiconductor wafer su...
11/22/2011
8058142Bonded semiconductor structure and method of making the same
A bonded semiconductor structure static random access memory circuit includes a support substrate which carries a first horizontally oriented transistor, and an interconnect region which includes a conductive line. The memory circuit includes a donor substrate which...
11/15/2011
8053330Quasi-hydrophobic Si-Si wafer bonding using hydrophilic Si surfaces and dissolution of interfacial bonding oxide
The present invention provides a method for removing or reducing the thickness of ultrathin interfacial oxides remaining at Si—Si interfaces after silicon wafer bonding. In particular, the invention provides a method for removing ultrathin interfacial oxides remai...
11/08/2011
8053329Method for low temperature bonding and bonded structure
A method for bonding at low or room temperature includes steps of surface cleaning and activation by cleaning or etching. The method may also include removing by-products of interface polymerization to prevent a reverse polymerization reaction to allow room temperat...
11/08/2011
8048766Integrated circuit on high performance chip
A method of fabricating a die containing an integrated circuit, including active components and passive components, includes producing a first substrate containing at least one active component of active components and a second substrate containing critical componen...
11/01/2011
8048768Joined wafer, fabrication method thereof, and fabrication method of semiconductor devices
A method of fabricating a joined wafer has an exposure process which comprises a device formed-area exposure process of exposing by a stepper such that parts of the photosensitive adhesive layer formed over a surface of the transparent wafer or the device formed waf...
11/01/2011
8048767Bonded wafer and method for producing bonded wafer
A bonded wafer is produced by directly bonding a silicon wafer for active layer and a silicon wafer for support substrate without an insulating film and thinning the silicon wafer for active layer to a given thickness, in which a silicon wafer cut out from an ingot ...
11/01/2011
8043935Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
An object is to manufacture a semiconductor substrate having a single crystal semiconductor layer with favorable characteristics, without requiring CMP treatment and/or heat treatment at high temperature. In addition, another object is to improve productivity of sem...
10/25/2011
8039361Multilayered semiconductor wafer and process for manufacturing the same
The invention relates to a process for manufacturing a multilayered semiconductor wafer comprising a handle wafer (5) and a layer (40) comprising silicon carbide bonded to the handle wafer (5), the process comprising the steps of: a) providing a...
10/18/2011
8039360Method of assembling integrated circuit components
The disclosure identified as methods of mounting integrated circuits, including solar cells, to a substrate wherein the circuits are mounted prior to being singulated into discrete die. Once the semiconductor die sites or other circuits are formed on a wafer, the wa...
10/18/2011
RE42830Method for separating a device-forming layer from a base body
A porous Si layer is formed on a single-crystal Si substrate, and then a p+-type Si layer, p-type Si layer and n+-type Si layer which all make up a solar cell layer. After a protective film is made on the n+-type Si layer, the rear s...
10/11/2011
8030175Method of bonding selected integrated circuit to adhesive substrate
A method of bonding an integrated circuit to an adhesive substrate. The integrated circuit is one of a plurality of integrated circuits, each having a respective frontside releasably attached to a film frame tape supported by a wafer film frame. The method includes ...
10/04/2011
8030174Method for manufacturing SOI substrate
An object is to provide a method for manufacturing an SOI substrate, by which defective bonding can be prevented. An embrittled layer is formed in a region of a semiconductor substrate at a predetermined depth; an insulating layer is formed over the semiconductor su...
10/04/2011
8021960Method for manufacturing semiconductor device
A chip provided with a layer for separation of a surface region and a hydrophilic surface is manufactured. One or both of a hydrophilic region and a hydrophobic region are formed on a substrate surface where the chip is placed. Liquid is dropped onto the hydrophilic...
09/20/2011
8021959Method for the ultrasonic planarization of a substrate, from one surface of which a buried weakened layer has been uncovered by fracture
A method for forming a plurality of thin films from a microtechnological donar substrate with a view to recycling of the donor substrate, the method including exposing a face of the donor substrate by fracturing the donor substrate along a layer weakened by implanta...
09/20/2011
8021958Method for manufacturing SOI substrate and method for manufacturing semiconductor device
A method for manufacturing an SOI substrate in which crystal defects of a single crystal semiconductor layer are reduced is provided. An oxide film containing halogen is formed on each of surfaces of a single crystal semiconductor substrate and of a semiconductor su...
09/20/2011
8017497Method for manufacturing semiconductor
A method for manufacturing a high quality semiconductor device having a through via structure. A substrate is manufactured with an oxide layer including a window region in a region in which a through via is formed. The substrate is bonded with another substrate to f...
09/13/2011
8008164Wafer bonding method and wafer structure
A wafer bonding method includes providing a primary wafer and a plurality of secondary wafers, wherein the primary wafer is larger than the secondary wafers. An intermediate material layer is formed on at least one of a bonding surface of the primary wafer and bondi...
08/30/2011
7998833Method for bonding wafers
The invention relates to a method for bonding wafers along their corresponding surfaces. ...
08/16/2011
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