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Class 438/38 - Passivating of surface


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process having a step of making the surface of the semiconductor
No. of patents: 186
Last issue date: 01/10/2012


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NumberTitleIssue Date
5403775Method of making semiconductor devices and techniques for controlled optical confinement
The disclosure is directed to improved techniques and devices employing an aluminum-bearing III-V semiconductor material and a native oxide of aluminum that is formed in the semiconductor material. Effective optical confinement, tailored to obtain desired...
04/04/1995
5316968Method of making semiconductor surface emitting laser
The present applicant has discovered that one can make a surface emitting laser with enhanced operating characteristics by etching away the outer reflector stack peripheral to the intended active area and protecting the reflector stack mesa remaining over...
05/31/1994
5284792Full-wafer processing of laser diodes with cleaved facets
A method for full-wafer processing of laser diodes with cleaved facets combining the advantages of full-wafer processing, to date known from processing lasers with etched facets, with the advantages of cleaved facets. The steps being: defining the positio...
02/08/1994
5260231Method for the production of a semiconductor laser
A semiconductor laser device is disclosed which emits laser light from a facet. The semiconductor laser device comprises a multi-layered structure formed on a semiconductor substrate, the multi-layered structure having an AlGaAs active layer for laser osc...
11/09/1993
5177031Method of passivating etched mirror facets of semiconductor laser diodes
A method of passivating etched mirror facets of semiconductor laser diodes which enhances device reliability. The etched mirror facet is first subjected to a weet-etch process to substantially remove any native oxide as well as any surface layer which may...
01/05/1993
5171706Method for the production of a semiconductor laser device
There is provided a method for the production of a semiconductor laser device which emits laser light from a facet. The method includes the steps of: growing a multi-layered structure containing an active layer for laser oscillation on a semiconductor sub...
12/15/1992
5171717Method for batch cleaving semiconductor wafers and coating cleaved facets
A method for cleaving semiconductor wafers, or segments thereof, which comprises placing the wafer, provided with scribe lines defining the planes where cleaving is to take place, inbetween a pair of flexible transport bands and guiding it around a curved...
12/15/1992
5147827Method for producing a passivation film of InP compound semiconductor
A device such as a phototransistor, a photodiode, a laser diode or the like including a compound semiconductor coated with a stable passivation film to reduce leakage current is disclosed. The passivation film includes oxygen, a metallic element and const...
09/15/1992
5063173Method for mirror passivation of semiconductor laser diodes
A method for passivating mirrors in the process of fabricating semiconductor laser diodes is disclosed. Key steps of the method are: (1) providing a contamination-free mirror facet, followed by (2) an in-situ application of a continuous, insulating (or lo...
11/05/1991
4985370Method of manufacturing semiconductor laser device
The invention relates a method of manufacturing a semiconductor laser device having a coating on surfaces of a semiconductor body intended for emanation of a laser beam....
01/15/1991
4895615Monolithic fabrication techniques for front face optoelectronic couplers and/or optical components including ridge structured waveguides
The invention involves a method for the monolithic fabrication of front face optoelectronic couplers and/or optical components (10) including a ridge structured waveguide (4) in which the light-coupling edges (2) of the component (10) using a mask in the ...
01/23/1990
4855256Method of manufacturing masked semiconductor laser
A masking layer is formed on the light-emitting mirror surface of a semiconductor laser body. The masking layer is capable of blocking light emitted from the semiconductor laser body and of being thermally melted and evaporated by exposure to the emitted ...
08/08/1989
4840922Method of manufacturing masked semiconductor laser
A masking layer is formed on the light-emitting mirror surface of a semiconductor laser body. The masking layer is capable of blocking or cutting off light emitted from the semiconductor laser body and of being made optically transparent by exposure to th...
06/20/1989
4830986Laser manufacture
A ridge waveguide laser structure is manufactured by a method including providing a photoresist stripe (8) on an exposed area of a p cap layer (4) of a multilayer laser wafer; etching channels (9) through the cap layer (4) and a p passive layer (3) using ...
05/16/1989
4789642Method for fabricating low loss crystalline silicon waveguides by dielectric implantation
A method of fabricating low loss silicon optical waveguides by high energy ion implantation which converts a buried region into dielectric material. The top silicon surface can them be etched or formed into waveguides that are isolated by the buried diele...
12/06/1988
4696828Passivation of InP by plasma deposited phosphorus
Pnictide thin films, particularly phosphorus, grown on III-V semiconductors, particularly InP, GaP, and GaAs, are amorphous and have a novel layer-like, puckered sheet-like local order. The thin films are typically 400 Angstroms thick and grown preferably...
09/29/1987
4653858Method of fabrication of diode-type control matrices for a flat electrooptical display screen and a flat screen constructed in accordance with said method
Diode-type control matrix arrays for electrooptical flat-panel screens which find application in liquid-crystal displays are fabricated by depositing a layer of conductive material on a substrate and etching the control electrodes and control leads in thi...
03/31/1987
4617192Process for making optical INP devices
The invention is a process for putting down coatings of aluminum oxide on optical surfaces using electron-beam deposition in an oxygen-enriched atmosphere. Particularly good results are obtained when oxygen is flowed over or directed at the surface to be ...
10/14/1986
4612211Selective semiconductor coating and protective mask therefor
An improved method of selectively depositing coatings onto bodies of semiconductor material employs as a protective mask an alkyl ester of a sulfosuccinate salt. The mask material is applied to areas which are to be kept free of the coatings. The overspra...
09/16/1986
4563368Passivation for surfaces and interfaces of semiconductor laser facets or the like
A method of making a facet coating for a semiconductor light emitting device, such as a semiconductor laser or the like, comprising the steps of depositing a thin layer of a reactive material on the cleaved facet to getter oxygen and other reactive contam...
01/07/1986
4510607Semiconductor laser end-facet coatings for use in solid or liquid environments
An improvement for a semiconductor laser allows the facet reflectivity to be modified to compensate for the presence of a liquid or transparent solid medium having an index of refraction nm. A first dielectric coating is disposed on an end-face...
04/09/1985
4407061Fabrication procedure using arsenate glasses
A fabrication technique is described for making various devices in which a certain type of glass is used as a surface protection layer. The glass layers are formed by particle bombardment (generally sputtering or E-beam) of a glass target. Devices with su...
10/04/1983
4356210Method for forming a protecting film on side walls of a semiconductor device
A method for forming a protecting film on the side walls of a semiconductor device having an exposed PN junction at the side walls, e.g. a semiconductor laser, involves placing the device on a substrate target made of a protecting film material. Energetic...
10/26/1982
4236296Etch method of cleaving semiconductor diode laser wafers
Double heterostructure (Al,Ga)As wafer comprising layers of gallium arsenide and aluminum gallium arsenide on a metallized n-GaAs substrate are separated into individual devices for use as diode lasers. In contrast to prior art techniques of mechanically ...
12/02/1980
4230997Buried double heterostructure laser device
A buried double heterostructure laser device isdescribed. A wafer of double heterostructure material is formed into narrow mesa stripes. A native oxide coating is formed on the side walls of the mesa. Semiconductor material having an index of refraction w...
10/28/1980
4095011Electroluminescent semiconductor device with passivation layer
A semiconductor device has a body of a semiconductor material wherein arsenic, As, is a constituent component of the material. A passivation layer of a material selected from the group consisting of arsenic sulfide, As2 S3, arsenic s...
06/13/1978
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