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Class 438/281 - Having fuse or integral short


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making an insulated gate field effect transistor
No. of patents: 214
Last issue date: 02/22/2011


1            
NumberTitleIssue Date
7892926Fuse link structures using film stress for programming and methods of manufacture
A method of forming a programmable fuse structure includes forming at least one shallow trench isolation (STI) in a substrate, forming an e-fuse over the at least one STI and depositing an interlevel dielectric (ILD) layer over the e-fuse. Additionally, the method i...
02/22/2011
7659168eFuse and methods of manufacturing the same
In a first aspect, a first apparatus is provided. The first apparatus is an eFuse including (1) a semiconducting layer above an insulating oxide layer of a substrate; (2) a diode formed in the semiconducting layer; and (3) a silicide layer formed on the diode. Numer...
02/09/2010
7560345Method of assessing potential for charging damage in integrated circuit designs and structures for preventing charging damage
A method for preventing charging damage during manufacturing of an integrated circuit design, having silicon over insulator (SOI) transistors. The method prevents damage from charging during processing to the gate of IC devices by assigning regions to the IC design ...
07/14/2009
7517763Semiconductor device having fuse and capacitor at the same level and method of fabricating the same
In a semiconductor device and a method of fabricating the same, a fuse and a capacitor are formed at a same level on a semiconductor substrate having a fuse area and a capacitor area. The fuse is placed on the fuse area, and a lower plate is placed on the capacitor ...
04/14/2009
7517762Semiconductor device capable of preventing moisture-absorption of fuse area thereof and method for manufacturing the fuse area
A fuse area of a semiconductor device capable of preventing moisture-absorption and a method for manufacturing the fuse area are provided. When forming a guard ring for preventing permeation of moisture through the sidewall of an exposed fuse opening portion, an etc...
04/14/2009
7470590Methods of forming semiconductor constructions
The invention includes methods by which a fuse box of a semiconductor construction is fabricated to have a substantially uniform layer over fuses extending therein. In particular aspects, the invention includes methods in which one or more processing steps associate...
12/30/2008
7442596Methods of manufacturing fin type field effect transistors
A fin type field effect transistor includes a semiconductor substrate, an active fin, a first hard mask layer pattern, a gate insulation layer pattern, a first conductive layer pattern, and source/drain regions. The active fin includes a semiconductor material and i...
10/28/2008
7442626Rectangular contact used as a low voltage fuse element
A repair fuse element and method of construction are disclosed that eliminate or substantially reduce the disadvantages and problems associated with prior fuse elements. In one embodiment, the fuse element is constructed with a rectangular-shaped contact. The contac...
10/28/2008
7413936Method of forming copper layers
A programmable package with a fuse embedded therein, and fabrication method are provided. The fuse has first and second terminal ends joined by a central portion defining a fusible link. The ends include a portion of the first and second conductive layers, the centr...
08/19/2008
7402464Fuse box of semiconductor device and fabrication method thereof
A fuse box includes a semiconductor substrate having a fuse region, and a lower line in the fuse region that has a first region and a second region. An upper line is placed on the upper part of the lower line to overlap the first region. A fuse is placed on the uppe...
07/22/2008
7402887Semiconductor device having fuse area surrounded by protection means
A semiconductor device has a semiconductor substrate, first and second insulating layers, a fuse, a diffusion layer and a conductive pattern. The first insulating layer is selectively formed on a surface of the semiconductor substrate. The fuse is formed on the firs...
07/22/2008
7387937Thermal dissipation structures for FinFETs
A fin-type field effect transistor has an insulator layer above a substrate and a fin extending above the insulator layer. The fin has a channel region, and source and drain regions. A gate conductor is positioned over the channel region. The insulator layer include...
06/17/2008
7381594CMOS compatible shallow-trench efuse structure and method
A semiconductor structure including at least one e-fuse embedded within a trench that is located in a semiconductor substrate (bulk or semiconductor-on-insulator) is provided. In accordance with the present invention, the e-fuse is in electrical contact with a dopan...
06/03/2008
7354805Method of making electrically programmable fuse for silicon-on-insulator (SOI) technology
A fuse structure and method of forming the same is described, wherein the body of the fuse is formed from a crystalline semiconductor body on an insulator, preferably of a silicon-on-insulator wafer, surrounded by a fill-in dielectric. The fill-in dielectric is pref...
04/08/2008
7352050Fuse region of a semiconductor region
In a fuse region of a semiconductor device, and a method of fabricating the same, the fuse region includes an interlayer insulating layer on a semiconductor substrate, a plurality of fuses on the interlayer insulating layer disposed in parallel with each other, a bl...
04/01/2008
7338888Method for manufacturing a semiconductor device having a silicided gate electrode and a method for manufacturing an integrated circuit including the same
The present invention provides a method for manufacturing a semiconductor device and a method for manufacturing an integrated circuit including the semiconductor device. The method for manufacturing the semiconductor device (100), among other possible steps, ...
03/04/2008
7340360Method for determining projected lifetime of semiconductor devices with analytical extension of stress voltage window by scaling of oxide thickness
A method for efficiently and accurately measuring a maximum Vcc calculation or failure rate and lifetime projection for microprocessors and other semiconductor products analytically scales low voltages applied to thinner oxides to thicker oxides. The expa...
03/04/2008
7335537Method of manufacturing semiconductor device including bonding pad and fuse elements
A method of manufacturing a semiconductor device includes forming a first insulating film supported by a semiconductor substrate, forming an aluminum layer supported by the first insulating film, etching the aluminum layer to form a bonding pad and fuse elements, de...
02/26/2008
7323389Method of forming a FINFET structure
A semiconductor device (10) such as a FinFET transistor of small dimensions is formed in a process that permits substantially uniform ion implanting (32) of a source (14) electrode and a drain (16) electrode adjacent to an intervening gat...
01/29/2008
7314794Low-cost high-performance planar back-gate CMOS
A method of fabricating a high-performance planar back-gate CMOS structure having superior short-channel characteristics and reduced capacitance using processing steps that are not too lengthy or costly is provided. Also provided is a high-performance planar back-ga...
01/01/2008
7314815Manufacturing method of one-time programmable read only memory
An one-time programmable read only memory is provided. An N-type doping region and a first P-type doping layer are disposed in a P-type semiconductor substrate sequentially. A second P-type doping layer is disposed between the first P-type doping layer and the N-typ...
01/01/2008
7312125Fully depleted strained semiconductor on insulator transistor and method of making the same
An integrated circuit includes multiple layers. A semiconductor-on-insulator (SOI) wafer can be used to house transistors. Two substrates or wafers can be bonded to form the multiple layers. A strained semiconductor layer can be between a silicon germanium layer and...
12/25/2007
7306998Formation of abrupt junctions in devices by using silicide growth dopant snowplow effect
A method of forming an abrupt junction device with a semiconductor substrate is provided. A gate dielectric is formed on a semiconductor substrate, and a gate is formed on the gate dielectric. A sidewall spacer is formed on the semiconductor substrate adjacent the g...
12/11/2007
7268047Semiconductor device and method for manufacturing the same
A gate insulating film on a silicon substrate of includes a SiO2 film and a high-k film. The high-k film contains a transition metal, aluminum, silicon, and oxygen. The concentration of silicon in the high-k film is higher than the concentrations of the t...
09/11/2007
7267430Heater chip for inkjet printhead with electrostatic discharge protection
An inkjet printhead heater chip includes a resistor layer, a dielectric layer on the resistor layer and a cavitation layer on the dielectric layer. A grounded-gate MOSFET electrically attaches to the cavitation layer to protect the dielectric layer from breakdown du...
09/11/2007
7256445Fabrication of an EEPROM cell with emitter-polysilicon source/drain regions
An EEPROM memory cell uses an emitter polysilicon film for fabricating shallow source/drain regions to increase a breakdown voltage of the wells. The wells are fabricated to be approximately 100 nm (0.1 micrometers (μm)) in depth with a breakdown voltage of approxi...
08/14/2007
7253033Method of manufacturing a semiconductor device that includes implanting in multiple directions a high concentration region
In a complete depletion type SOI transistor, the roll-off of a threshold value is suppressed, independently from the formation of an SOI film to be thinner. As for a semiconductor device (1), the impurity concentration in a channel formation portion (10
08/07/2007
7250666Schottky barrier diode and method of forming a Schottky barrier diode
Disclosed is a silicon-on-insulator-based Schottky barrier diode with a low forward voltage that can be manufactured according to standard SOI process flow. An active silicon island is formed using an SOI wafer. One area of the island is heavily-doped with an n-type...
07/31/2007
7251403Light scattering structures formed in silicon waveguides
In a standard CMOS process, a layer of metallic salicide can be deposited on those selected portions of an integrated circuit, where it is desired to have metallic contacts for electronic components, such as transistors. The deposition of a salicide into optical ele...
07/31/2007
7250361Method for forming a bonding pad of a semiconductor device including a plasma treatment
Disclosed is a method for forming a bonding pad of a semiconductor device. The present invention provides a method for forming a bonding pad of a semiconductor device comprising the steps of: (a) forming a top metal line having a predetermined width on a structure o...
07/31/2007
7242558ESD protection module triggered by BJT punch-through
An electrostatic discharge protection (ESD) circuit is disclosed for protecting a pad of an integrated circuit from ESD events. The ESD circuit has an ESD trigger module having a first and second transistors connected in series, between the pad and a first common no...
07/10/2007
7242072Electrically programmable fuse for silicon-on-insulator (SOI) technology
A fuse structure and method of forming the same is described, wherein the body of the fuse is formed from a crystalline semiconductor body on an insulator, preferably of a silicon-on-insulator wafer, surrounded by a fill-in dielectric. The fill-in dielectric is pref...
07/10/2007
7238988Semiconductor memory device
A silicide film is provided in diffusion regions formed in a semiconductor layer. The silicide film has a thickness substantially same as that of the semiconductor layer. The silicide film has the bottom located in the vicinity of an interface between the insulator ...
07/03/2007
7220635Method for making a semiconductor device with a metal gate electrode that is formed on an annealed high-k gate dielectric layer
A method for making a semiconductor device is described. That method comprises forming a high-k gate dielectric layer on a substrate, and forming a sacrificial layer on the high-k gate dielectric layer. After etching the sacrificial layer, first and second spacers a...
05/22/2007
7199032Metal silicide induced lateral excessive encroachment reduction by silicon <110> channel stuffing
The present invention provides a method of manufacturing a metal silicide electrode (100) for a semiconductor device (110). The method comprises implanting small atoms into an nMOS semiconductor substrate (130) to a depth (132) no greater...
04/03/2007
7118951Method of isolating the current sense on power devices while maintaining a continuous stripe cell
An integrated circuit die includes an active area having source dopants and contacts. An active area metal layer overlies the active area. A sense area is disposed on the die. A sense area metal layer overlies the sense area. A plurality of polysilicon gate stripes,...
10/10/2006
7092273Low voltage non-volatile memory transistor
A p-channel non-volatile memory (NVM) transistor is programmed by shifting the threshold voltage of the transistor. The threshold voltage is shifted by introducing a programming current to the gate electrode of the transistor, and simultaneously introducing a negati...
08/15/2006
7087974Semiconductor integrated circuit including anti-fuse and method for manufacturing the same
An anti-fuse is manufactured by forming an isolation region including an insulating material layer buried in a surface of a device formation region on a surface of a semiconductor substrate, and by forming diffusion regions at both sides of the isolation region, the...
08/08/2006
7075127Single-poly 2-transistor based fuse element
An electrically programmable transistor fuse having a double-gate arrangement disposed in a single layer of polysilicon in which a first gate is disposed overlapping a portion of a source region and a second gate is insulated from the first gate and disposed overlap...
07/11/2006
7071534Antifuse structure and method of use
An antifuse structure and method of use are disclosed. According to one embodiment of the present invention a first programming voltage is coupled to a well of a first conductivity type in a substrate of a second conductivity type in an antifuse. A second programmin...
07/04/2006
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