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Class 438/273 - Having integral short of source and base regions


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making an insulated gate field effect transistor
No. of patents: 149
Last issue date: 01/26/2010


1        
NumberTitleIssue Date
7651918Strained semiconductor power device and method
Semiconductor structures (52-9, 52-11, 52-12) and methods (100-300) are provided for a semiconductor devices employing strained (70) and relaxed (66) semiconductors, The method comprises, forming (106, 208, ...
01/26/2010
7510938Semiconductor superjunction structure
Semiconductor structures and methods are provided for a semiconductor device (54-11, 54-12) employing a superjunction structure (81). The method comprises, forming (52-6) first spaced-apart regions (70-1, 70-
03/31/2009
7372105Semiconductor device with power supply impurity region
A semiconductor device in which by fixing a well at a predetermined potential via a contact within a memory cell, latch-up immunity is improved without accompanying increase in the area of the memory cell, and of which manufacture is facilitated, and a manufacturing...
05/13/2008
7358141Semiconductor device and method for fabricating the same
Described is a method for fabricating a semiconductor device having an FET of a trench-gate structure obtained by disposing a conductive layer, which will be a gate, in a trench extended in the main surface of a semiconductor substrate, wherein the upper surface of ...
04/15/2008
7332750Power semiconductor device with improved unclamped inductive switching capability and process for forming same
A power semiconductor device having high avalanche capability comprises an N+ doped substrate and, in sequence, N− doped, P− doped, and P+ doped semiconductor layers, the P− and P+ doped layers ...
02/19/2008
7135420Semiconductor device and manufacturing method thereof
Single crystal silicon is grown in a [100] direction to make a bulk. Next, a silicon substrate with a normal of a surface extending in an inclined direction from a [100] direction is cut from the bulk. At this time, when an angle (off-angle) of inclination of the no...
11/14/2006
7084034High voltage MOS-gated power device and related manufacturing process
MOS-gated power device including a plurality of elementary functional units, each elementary functional unit including a body region of a first conductivity type formed in a semiconductor material layer of a second conductivity type. A plurality of doped regions of ...
08/01/2006
7071537Power device having electrodes on a top surface thereof
A power device includes a substrate assembly including an upper surface and a lower surface. The substrate assembly includes a first layer and a second layer. The first layer overlies the second layer and has different conductivity than the second layer. A first ele...
07/04/2006
7045845Self-aligned vertical gate semiconductor device
A transistor (10) is formed in a semiconductor substrate (12) whose top surface (48) is formed with a pedestal structure (24). A conductive material (40) is disposed along a side surface (28) of the pedestal structure to sel...
05/16/2006
7005352Trench-type MOSFET having a reduced device pitch and on-resistance
A trench-type lateral power MOSFET is manufactured by forming an n−-type diffusion region, which will be a drift region, on a p−-type substrate; selectively removing a part of substrate and a part of n−-type diffusion region to...
02/28/2006
6979863Silicon carbide MOSFETs with integrated antiparallel junction barrier Schottky free wheeling diodes and methods of fabricating the same
Silicon carbide semiconductor devices and methods of fabricating silicon carbide semiconductor devices have a silicon carbide DMOSFET and an integral silicon carbide Schottky diode configured to at least partially bypass a built in diode of the DMOSFET. The Schottky...
12/27/2005
6979621Trench MOSFET having low gate charge
A trench MOSFET device comprising: (a) a silicon substrate of a first conductivity type (preferably N-type conductivity); (b) a silicon epitaxial layer of the first conductivity type over the substrate, the epitaxial layer having a lower majority carrier concentrati...
12/27/2005
6977203Method of forming narrow trenches in semiconductor substrates
A method of forming a trench within a semiconductor substrate. The method comprises, for example, the following: (a) providing a semiconductor substrate; (b) providing a patterned first CVD-deposited masking material layer having a first aperture over the semiconduc...
12/20/2005
6939776Semiconductor device and a method of fabricating the same
A power MOSFET comprises: a semiconductor substrate 21 of a first conduction type; a drain layer 22 of the first conduction type and formed on a surface layer of the substrate; a gate insulating film 25 formed in a partial region on the drain la...
09/06/2005
6921938Double diffused field effect transistor having reduced on-resistance
A double diffused field effect transistor and a method of forming the same is provided. The method begins by providing a substrate of a first conductivity type. Next, at least one dopant species, also of the first conductivity type, is introduced into a surface of t...
07/26/2005
6921697Method for making trench MIS device with reduced gate-to-drain capacitance
Trench MIS devices including a thick insulative layer at the bottom of the trench are disclosed, along with methods of fabricating such devices. An exemplary trench MOSFET embodiment includes a thick oxide layer at the bottom of the trench, with no appreciable chang...
07/26/2005
6905916Method for processing a surface of an SiC semiconductor layer and Schottky contact
A method for treating a surface on an SiC semiconductor body produced by epitaxy. According to the method, the parts of the epitactic layer that are deposited in the final phase of the epitaxy are removed by etching and a wet chemical treatment is then carried out i...
06/14/2005
6897525Semiconductor device and method of manufacturing the same
In order to improve the characteristics of the high breakdown voltage MOS, a semiconductor device of the present invention is characterized in that an LDMOS transistor, which comprises a source region 4, a channel region 8, and a drain region 5,...
05/24/2005
6875657Method of fabricating trench MIS device with graduated gate oxide layer
A process for manufacturing a trench MIS device includes depositing a conformal nitride layer in the trench; etching the nitride layer to create an exposed area at the bottom of the trench; and heating the substrate and thereby growing an oxide layer in the exposed ...
04/05/2005
6855581Method for fabricating a high-voltage high-power integrated circuit device
The present invention relates to a method of fabricating a high-voltage high-power integrated circuit device using a substrate of a SOI structure in which an insulating film and a silicon layer are sequentially stacked on a silicon substrate. The method comprising t...
02/15/2005
6787420Semiconductor device with alternating conductivity type layer and method of manufacturing the same
This invention clarifies the effects of parameters and enables the mass production of a super-junction semiconductor device, which has a drift layer composed of a parallel pn layer that conducts electricity in the ON state and is depleted in the OFF state. The quant...
09/07/2004
6781163Heterojunction field effect transistor
A region of an Si layer (15) located between source and drain regions (19 and 20) is an Si body region (21) which contains an n-type impurity of high concentration. An Si layer (16) and an SiGe layer (17) are, in an as grown...
08/24/2004
6768167MIS semiconductor device and the manufacturing method thereof
A MIS semiconductor device has a greatly improved relation between the on-resistance and the switching time by forming trench completely through a p base region and positioning the trench adjacent to a gate electrode, and then implanting n-type impurity ions using t...
07/27/2004
6762080Method of manufacturing a semiconductor device having a cathode and an anode from a wafer
In a method of manufacturing a semiconductor element (6) having a cathode (3) and an anode (5), the starting material used is a relatively thick wafer (1) to which, as a first step, a barrier region (21) is added on the anode side....
07/13/2004
6756259Gate insulating structure for power devices, and related manufacturing process
Semiconductor power device including a semiconductor layer of a first type of conductivity, wherein a body region of a second type of conductivity including source regions of the first type of conductivity is formed, a gate oxide layer superimposed to the semiconduc...
06/29/2004
6638824Metal gate double diffusion MOSFET with improved switching speed and reduced gate tunnel leakage
A double-diffused metal-oxide-semiconductor ("DMOS") field-effect transistor (10) with a metal gate (26). A sacrificial gate layer is patterned to provide a self-aligned source mask. The source regions (20) are thus aligned to the gate (26), and the sourc...
10/28/2003
6639275Semiconductor device with vertical MOSFET
A semiconductor device improves the gate withstand voltage of vertical MOSFETs and raises their operation speed. The gate electrode is formed in the trench of the second semiconductor layer. The interlayer dielectric layer has the contact hole that expose...
10/28/2003
6589337Method of producing silicon carbide device by cleaning silicon carbide substrate with oxygen gas
In a process of producing a SiC device, a Si layer is formed on the surface of a SiC substrate, and the Si layer is removed from the surface of the SiC substrate by supplying oxygen gas to the Si layer in a high ambient temperature and a low ambient press...
07/08/2003
6524894Semiconductor device for use in power-switching device and method of manufacturing the same
An N+ buffer layer formed on the underside of an N- layer includes an inactive region having incompletely activated ions and an active region having highly activated ions. The carrier concentration of the active region is higher than...
02/25/2003
6468866Single feature size MOS technology power device
A MOS technology power device comprises a semiconductor material layer of a first conductivity type, a conductive insulated gate layer covering the semiconductor material layer, and a plurality of elementary functional units. The conductive insulated gate...
10/22/2002
6432775Trench DMOS transistor structure having a low resistance path to a drain contact located on an upper surface
A semiconductor device includes a first region of semiconductor material, which is doped to a first concentration with a dopant of a first conductivity type. A gate trench formed within the first region has sides and a bottom. A drain access trench is als...
08/13/2002
6376311Vertical double diffused MOSFET and method for manufacturing same
A vertical double diffuses MOSFET includes a nitride film (26) formed on a gate electrode (18). An ion implant window (34) is formed through the nitride film. P-type ions are implanted through the ion implant window into the semiconductor substrate (12), ...
04/23/2002
6319778Method of making light emitting diode
A method of making a light emitting diode (LED) is disclosed. An emitting light absorbed by a substrate can be prevented by using a metal with high conductivity and high reflectivity and a bonding process can be produced at a lower temperature and a bette...
11/20/2001
6294431Process of manufacture of a non-volatile memory with electric continuity of the common source lines
A process for the manufacture of a non-volatile memory with memory cells arranged in word lines and columns in a matrix structure, with source lines extending parallel and intercalate to said lines, said source lines formed by active regions intercalated ...
09/25/2001
6285060Barrier accumulation-mode MOSFET
In a trench-gated MOSFET, a lightly doped drift region of the N-type drain lies in the mesa between the trenches. The gate is doped with N-type material so that depletion regions are formed in the drift region when the gate voltage is equal to zero. The d...
09/04/2001
6274451Method of fabricating a gate-control electrode for an IGBT transistor
This method of fabricating a gate-control electrode (28) for an insulated-gate bipolar transistor, from a plate of electrically conducting material which is covered with an electrically insulating layer (22) and, on one of its large faces, delimits a conn...
08/14/2001
6273950SiC device and method for manufacturing the same
A method for manufacturing a device of silicon carbide (SiC) and a single crystal thin film, which are wide band gap semiconductor materials and can be applied to semiconductor devices such as high power devices, high temperature devices, and environmenta...
08/14/2001
6242288Anneal-free process for forming weak collector
The collector (anode) of a non punch through IGBT formed in a float zone silicon monocrystaline wafer is formed with a DMOS top structure and is thereafter ground at its bottom surface to a less than 250 micron thickness. A shallow P type implant is then ...
06/05/2001
6228719MOS technology power device with low output resistance and low capacitance, and related manufacturing process
A MOS-gated power device includes a plurality of elementary functional units, each elementary functional unit including a body region of a first conductivity type formed in a semiconductor material layer of a second conductivity type having a first resist...
05/08/2001
6214107Method for manufacturing a SiC device
A method for manufacturing a device of silicon carbide (SiC) and a single crystal thin film, which are wide band gap semiconductor materials and can be applied to semiconductor devices such as high power devices, high temperature devices, and environmenta...
04/10/2001
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