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Class 438/250 - Planar capacitor


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making an insulated gate field effect transistor
No. of patents: 484
Last issue date: 02/14/2012


1                      
NumberTitleIssue Date
8114734Metal capacitor and method of making the same
A method of making a metal capacitor includes the following steps. A dielectric layer having a metal interconnection and a capacitor electrode is provided. Then, a treatment is performed to increase the dielectric constant of the dielectric layer surrounding the cap...
02/14/2012
8017474Process of forming an electronic device including a resistor-capacitor filter
A process of forming an electronic device can include forming a capacitor dielectric layer over a base region, wherein the base region includes a base semiconductor material, forming a gate dielectric layer over a substrate, forming a capacitor electrode over the ca...
09/13/2011
8008148Method of manufacturing M-I-M capacitor of semiconductor device
A method for manufacturing a semiconductor device includes sequentially forming an insulating layer and a metal layer over a semiconductor substrate, forming a photoresist pattern over the metal layer and etching the metal layer using the photoresist pattern as an e...
08/30/2011
7745282Interconnect structure with bi-layer metal cap
A structure and method of fabricating an interconnect structures with bi-layer metal cap is provided. In one embodiment, the method includes forming an interconnect feature in a dielectric material layer; and forming a bi-layer metallic cap on a top surface of the i...
06/29/2010
7517752Method of fabricating semiconductor device having storage capacitor and higher voltage resistance capacitor and semiconductor device fabricated using the same
Provided are a method of fabricating a semiconductor device having different kinds of capacitors, and a semiconductor device formed using the same. In a fabrication process, after preparing a substrate including a storage capacitor region and a higher voltage resist...
04/14/2009
7488643MIM capacitor and method of making same
A MIM capacitor device and method of making the device. The device includes an upper plate comprising one or more electrically conductive layers, the upper plate having a top surface, a bottom surface and sidewalls; a spreader plate comprising one or more electrical...
02/10/2009
7470586Memory cell having bar-shaped storage node contact plugs and methods of fabricating same
According to embodiments of the invention, a bit line interlayer insulating layer is placed over a semiconductor substrate. A plurality of parallel bit line patterns are placed on the bit line interlayer insulating layer. Each of the bit line patterns has a bit line...
12/30/2008
7462535Semiconductor device with analog capacitor and method of fabricating the same
A semiconductor device having an analog capacitor and a method of fabricating the same are disclosed. The semiconductor device includes a bottom plate electrode disposed at a predetermined region of a semiconductor substrate, and an upper plate electrode having a re...
12/09/2008
7439129Methods for fabricating ferroelectric memory devices
A ferroelectric memory device includes a semiconductor substrate, ferroelectric capacitors, conductive patterns, and plate lines. The ferroelectric capacitors are arranged in rows and columns on the semiconductor substrate. The conductive patterns are arranged in ev...
10/21/2008
7439127Method for fabricating a semiconductor component including a high capacitance per unit area capacitor
A method is provided for fabricating a semiconductor component that includes a capacitor having a high capacitance per unit area. The component is formed in and on a semiconductor on insulator (SOI) substrate having a first semiconductor layer, a layer of insulator ...
10/21/2008
7439153Semiconductor device and manufacturing method thereof for reducing the area of the memory cell region
A structure is adopted for a layout of an SRAM cell which provides a local wiring 3a between a gate 2a and gate 2b and connects an active region 1a and an active region 1b. This eliminates the nec...
10/21/2008
7422921Micromesh material and micromesh mono-crystal high frequency capacitor and its producing method
This invention is related to a micromesh material and a mono-crystal high frequency capacitor manufactured with said micromesh material as well as the producing method for the mono-crystal high frequency capacitor, i.e., disperse a colloidal material unevenly to for...
09/09/2008
7419873Method and apparatus for providing flexible partially etched capacitor electrode interconnect
The present subject matter includes a capacitor stack disposed in a case, the capacitor stack including one or more substantially planar electrode layers. The one or more substantially planar electrode layers have an etched surface, an unetched surface, and a grade ...
09/02/2008
7416938Inkjet patterning for thin-film capacitor fabrication, thin-film capacitors fabricated thereby, and systems containing same
An integrated thin-film capacitor includes a dielectric disposed between a first electrode and a second electrode. The thin-film capacitor includes a dielectric disposed upon the first electrode, and the dielectric exhibits a substantially uniform heat-altered morph...
08/26/2008
7407853Display device and manufacturing method of the same
The invention provides a method of manufacture of a display device which can achieve a reduction of the manufacturing process. In the manufacturing method, a semiconductor layer is formed over an upper surface of a substrate. An insulation film is formed over an upp...
08/05/2008
7408218Semiconductor device having plural dram memory cells and a logic circuit
A memory cell capacitor (C3) of a DRAM is formed by use of a MIM capacitor which uses as its electrode a metal wiring line of the same layer (M3) as metal wiring lines within a logic circuit (LOGIC), thereby enabling reduction of process costs. Higher ...
08/05/2008
7404829Electrode-separator combination for improved assembly of layered electrolytic capacitors
This disclosure provides methods for assembling multiple anode stacked capacitor configurations with a temporary adhesive to aide in the alignment of separator materials and electrodes without sacrificing energy density, and electrolytic capacitors comprising such c...
07/29/2008
7402183High capacitance cathode foil produced by abrasion process using titanium nitride powder
A dry titanium nitride (TiN) powder abrasion method roughens the surface of a valve metal foil for use as a cathode in an electrolytic capacitor. This increases the surface area of the foil, thereby increasing the double-layer capacitance of the cathode, and also me...
07/22/2008
7368365Memory array buried digit line
A method of forming a buried digit line is disclosed. Sacrificial spacers are formed along the sidewalls of an isolation trench, which is then filled with a sacrificial material. One spacer is masked while the other spacer is removed and an etch step into the substr...
05/06/2008
7368343Low leakage MIM capacitor
Capacitor structures for use in integrated circuits and methods of their manufacture. The capacitor structures include a bottom electrode, a top electrode and a dielectric layer interposed between the bottom electrode and the top electrode. The capacitor structures ...
05/06/2008
7364961SRAM cell design for soft error rate immunity
A new method to form a SRAM memory cell in an integrated circuit device is achieved. The method comprises providing a bi-stable flip-flop cell having a data storage node and a data bar storage node. A first capacitor is formed coupled to the data bar storage node, a...
04/29/2008
7361568Embedded capacitors and methods for their fabrication and connection
Embedded capacitors comprise a bimetal foil (500) that includes a first copper layer (205) and an aluminum layer (210) on the first copper layer. The aluminum layer has a smooth side adjacent the first copper layer and a high surface area textur...
04/22/2008
7341901Semiconductor processing methods of forming integrated circuitry
Semiconductor processing methods of forming integrated circuitry are described. In one embodiment, memory circuitry and peripheral circuitry are formed over a substrate. The peripheral circuitry comprises first and second type MOS transistors. Second type halo impla...
03/11/2008
7338833Dual dielectric structure for suppressing lateral leakage current in high fill factor arrays
A structure and method for suppressing lateral leakage current in full fill factor image arrays includes dual dielectric passivation layer. A first passivation layer includes a material that is an insulator, has a low dielectric constant to minimize capacitive coupl...
03/04/2008
7335569In-situ formation of metal insulator metal capacitors
The invention describes an in-situ method of fabricating a metal insulator metal (MIM) capacitor and products formed by the same. The method utilizes atomic layer deposition (ALD) or metal-organic chemical vapor deposition (MOCVD). In the method, a metal precursor i...
02/26/2008
7329939Metal-insulator-metal capacitor and method of fabricating same
A metal-insulator-metal (MIM) capacitor including a metal layer, an insulating layer formed on the metal layer, at least a first opening and at least a second opening formed in the first insultaing layer, a dielectric layer formed in the first opening, a conductive ...
02/12/2008
7329572Method of forming PIP capacitor
A method of forming a polysilicon-insulator-polysilicon (PIP) capacitor includes the steps of forming a lower electrode of a first polysilicon layer over a semiconductor substrate, forming a dielectric layer over the lower electrode, forming a second polysilicon lay...
02/12/2008
7312116Method for forming a MIM capacitor in a semiconductor device
In a method of forming a metal-insulator-metal (MIM) capacitor in a semiconductor device, after forming a capacitor insulation layer on a lower metal layer of the MIM capacitor, an upper electrode is formed by ion implantation into the capacitor insulation layer and...
12/25/2007
7306987Capacitor and method for fabricating the same
A capacitor structure and a method of fabricating the capacitor structure wherein. The lower electrode and the upper electrode are constructed to be separated from each other by a predetermined interval and to be engaged with each other using a series of alternating...
12/11/2007
7300852Method for manufacturing capacitor of semiconductor element
A method for manufacturing a capacitor of a semiconductor element including: forming a bottom electrode of the capacitor on a semiconductor substrate; performing rapid thermal nitrification (RTN) on the upper surface of the bottom electrode; performing a thermal pro...
11/27/2007
7294544Method of making a metal-insulator-metal capacitor in the CMOS process
A method for fabricating an improved metal-insulator-metal capacitor is achieved. An insulating layer is provided overlying conducting lines on a semiconductor substrate. Via openings through the insulating layer to the conducting lines are filled with metal plugs. ...
11/13/2007
7285813Metal-insulator-metal capacitor and method for manufacturing the same
A capacitor has a lower electrode formed on an insulation layer, a dielectric layer formed on the lower electrode, an upper electrode layer formed on the dielectric layer, and a first protection layer pattern formed on the upper electrode layer. The upper electrode ...
10/23/2007
7285853Multilayer anti-reflective coating for semiconductor lithography and the method for forming the same
An interconnect structure has a dielectric layer having a dielectric constant less than 3.9 overlying a substrate with a conductive region, a silicon oxycarbide layer overlying the dielectric layer, and a silicon oxynitride layer overlying the silicon oxycarbide lay...
10/23/2007
7282408Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer
A method for forming a ruthenium metal layer on a dielectric layer comprises forming a silicon dioxide layer, then treating the silicon dioxide with a silicon-containing gas, for example silicon hydrides such as silane, disilane, or methylated silanes. Subsequently,...
10/16/2007
7276422Post passivation interconnection schemes on top of the IC chips
A new method is provided for the creation of interconnect lines. Fine line interconnects are provided in a first layer of dielectric overlying semiconductor circuits that have been created in or on the surface of a substrate. A layer of passivation is deposited over...
10/02/2007
7271038Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby
A ruthenium (Ru) film is formed on a substrate as part of a two-stage methodology. During the first stage, the Ru film is formed on the substrate in a manner in which the Ru nucleation rate is greater than the Ru growth rate. During the second stage, the Ru film is ...
09/18/2007
7271053Methods of forming capacitors and electronic devices
A method of forming a capacitor includes forming a first conductive capacitor electrode layer over a substrate. The first electrode layer has an outer surface comprising a noble metal in at least one of elemental and alloy forms. A gaseous mixture comprising a metal...
09/18/2007
7271054Method of manufacturing a ferroelectric capacitor having RU1-XOX electrode
A ferroelectric capacitor has the property that polarization of a ferroelectric thin film can readily be reversed and polarization-reversal charge increased. The ferroelectric capacitor has a bottom electrode, a ferroelectric thin film and a top electrode. The top e...
09/18/2007
7268038Method for fabricating a MIM capacitor having increased capacitance density and related structure
According to one embodiment of the invention, a method for fabricating a MIM capacitor in a semiconductor die includes a step of depositing a first interconnect metal layer. The method further includes depositing a layer of silicon nitride on the first interconnect ...
09/11/2007
7264846Ruthenium layer formation for copper film deposition
A method of ruthenium layer formation for high aspect ratios, interconnect features is described. The ruthenium layer is formed using a cyclical deposition process. The cyclical deposition process comprises alternately adsorbing a ruthenium-containing precursor and ...
09/04/2007
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