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Class 438/224 - Plural wells


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making complementary insulated gate field effect
No. of patents: 256
Last issue date: 05/17/2011


1              
NumberTitleIssue Date
7943461High-voltage semiconductor device and method for manufacturing the same
A high-voltage semiconductor device and a method for manufacturing the same are disclosed. The disclosed high-voltage semiconductor device includes a semiconductor substrate, a first N type well in the semiconductor substrate, a first P type well in the first N type...
05/17/2011
7696037CMOS (complementary metal oxide semiconductor) technology
A method for forming semiconductor transistor. The method comprises providing a structure including (a) a semiconductor region, and (b) first and second dopant source regions on and in direct physical contact with the semiconductor region, wherein each region of the...
04/13/2010
7629214Method of making a transistor with a sloped drain diffusion layer
Disclosed is that in a method of manufacturing a semiconductor device of the present invention, when first and second P type diffusion layers using as a backgate region, these layers are formed in such a way that their impurity concentration peaks are shifted, respe...
12/08/2009
7618857Method of reducing detrimental STI-induced stress in MOSFET channels
A method for reducing STI processing induced stress on a substrate during fabrication of a MOSFET. The method includes providing a substrate, wells (including dopants), and STIs in an upper layer of the substrate. A layer of an oxide substance is formed on a top sur...
11/17/2009
7482219Technique for creating different mechanical strain by a contact etch stop layer stack with an intermediate etch stop layer
The present invention provides a technique for forming differently stressed contact etch stop layers, wherein sidewall spacers are removed prior to the formation of the contact etch stop layers. During the partial removal of respective contact etch stop layers, a co...
01/27/2009
7439140Formation of standard voltage threshold and low voltage threshold MOSFET devices
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within...
10/21/2008
7432136Transistors with controllable threshold voltages, and various methods of making and operating same
In one illustrative embodiment, the method comprises providing an SOI substrate comprised of an active layer, a buried insulation layer and a bulk substrate, the active layer being doped with a first type of dopant material, the bulk substrate having an inner well f...
10/07/2008
7413946Formation of standard voltage threshold and low voltage threshold MOSFET devices
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within...
08/19/2008
7410855Semiconductor device
A semiconductor device includes a semiconductor substrate, an nMISFET formed on the substrate, the nMISFET including a first dielectric formed on the substrate and a first metal gate electrode formed on the first dielectric and formed of one metal element selected f...
08/12/2008
7384829Patterned strained semiconductor substrate and device
A method that includes forming a pattern of strained material and relaxed material on a substrate; forming a strained device in the strained material; and forming a non-strained device in the relaxed material is disclosed. In one embodiment, the strained material is...
06/10/2008
7365010Semiconductor device having carbon-containing metal silicide layer and method of fabricating the same
Methods of fabricating semiconductor devices having a carbon-containing metal silicide layer and semiconductor devices fabricated by the methods are provided. A representative method includes the steps of preparing a semiconductor substrate and forming a gate electr...
04/29/2008
7366026Flash memory device and method for fabricating the same, and programming and erasing method thereof
A flash memory device of SONOS structure and a method for fabricating the same, and programming and erasing operation methods, to improve reliability such as endurance and retention, are disclosed, which includes a first conductive type semiconductor substrate; an O...
04/29/2008
7354818Process for high voltage superjunction termination
A method of manufacturing a semiconductor device having an active region and a termination region includes providing a semiconductor substrate having first and second main surfaces opposite to each other. The semiconductor substrate has an active region and a termin...
04/08/2008
7348232Highly activated carbon selective epitaxial process for CMOS
In accordance with the invention there is a method of forming a semiconductor device comprising forming a gate over a substrate, forming a source region and a drain region by doping a first portion and a second portion of active regions adjacent the gate, and formin...
03/25/2008
7338850Method for manufacturing device isolation film of semiconductor device
A method for manufacturing device isolation film of semiconductor device is disclosed. The method utilizes a plasma oxidation of a liner nitride film exposed by etching a liner oxide the film in peripheral region prior to the formation of device isolation film to pr...
03/04/2008
7339249Semiconductor device
An insulating film is provided in a region surrounding a circuit region on a p type silicon substrate, and a frame-shaped electrode is provided to surround the circuit region on the insulating film. The region directly under the electrode at the surface of the p typ...
03/04/2008
7338865Method for manufacturing dual work function gate electrodes through local thickness-limited silicidation
The present invention provides a method of manufacturing a semiconductor device. The semiconductor device (100), among other possible elements, includes a first transistor (120) located over a semiconductor substrate (110), wherein the first tra...
03/04/2008
7329583Method of fabricating isolated semiconductor devices in epi-less substrate
An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does...
02/12/2008
7323367Diagonal deep well region for routing body-bias voltage for MOSFETS in surface well regions
Diagonal deep well region for routing the body-bias voltage for MOSFETS in surface well regions is provided and described. ...
01/29/2008
7314794Low-cost high-performance planar back-gate CMOS
A method of fabricating a high-performance planar back-gate CMOS structure having superior short-channel characteristics and reduced capacitance using processing steps that are not too lengthy or costly is provided. Also provided is a high-performance planar back-ga...
01/01/2008
7312485CMOS fabrication process utilizing special transistor orientation
Complementary metal oxide semiconductor transistors are formed on a silicon substrate. The substrate has a {100} crystallographic orientation. The transistors are formed on the substrate so that current flows in the channels of the transistors are parallel to the
12/25/2007
7303951Method of manufacturing a trench isolation region in a semiconductor device
A method of manufacturing a semiconductor device for preventing dielectric breakdown of gate electrodes attributable to needle-like protrusions caused inside a trench in the step of forming element isolation trench in which includes forming a silicon oxide film over...
12/04/2007
7303950Semiconductor device, method of manufacturing same and method of designing same
A partial oxide film (31) with well regions formed therebeneath isolates transistor formation regions in an SOI layer (3) from each other. A p-type well region (11) is formed beneath part of the partial oxide film (31) which isolates NMOS...
12/04/2007
7297584Methods of fabricating semiconductor devices having a dual stress liner
In a semiconductor device having a dual stress liner for improving electron mobility, the dual stress liner includes a first liner portion formed on a PMOSFET and a second liner portion formed on an NMOSFET. The first liner portion has a first compressive stress, an...
11/20/2007
7294890Fully salicided (FUSA) MOSFET structure
A method is described to form a MOSFET with a fully silicided gate electrode and fully silicided, raised S/D elements that are nearly coplanar to allow a wider process margin when forming contacts to silicided regions. An insulator block layer is formed over STI reg...
11/13/2007
7294903Transistor assemblies
Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry are described. In one embodiment, active areas are formed over a substrate, with one of the ...
11/13/2007
7288445Double gated transistor and method of fabrication
Accordingly, the present invention provides a double gated transistor and a method for forming the same that results in improved device performance and density. The preferred embodiment of the present invention uses provides a double gated transistor with asymmetric...
10/30/2007
7279399Method of forming isolated pocket in a semiconductor substrate
A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each o...
10/09/2007
7279378Method of fabricating isolated semiconductor devices in epi-less substrate
An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does...
10/09/2007
7276431Method of fabricating isolated semiconductor devices in epi-less substrate
An structure for electrically isolating a semiconductor device is formed by implanting dopant into a semiconductor substrate that does not include an epitaxial layer. Following the implant the structure is exposed to a very limited thermal budget so that dopant does...
10/02/2007
7273776Methods of forming a P-well in an integrated circuit device
The present invention is generally directed to a method of forming a p-well in an integrated circuit device. In one illustrative embodiment, the method comprises forming a first layer of epitaxial material above an active layer of a substrate, forming a first doped ...
09/25/2007
7265012Formation of standard voltage threshold and low voltage threshold MOSFET devices
Wells are formed in a substrate where standard Vt and low Vt devices of both a first and second type are to be fabricated. Wells defining the locations of first type standard Vt devices are masked, and a first voltage threshold implant adjustment is performed within...
09/04/2007
7265434Modular bipolar-CMOS-DMOS analog integrated circuit and power transistor technology
A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each o...
09/04/2007
7259072Shallow low energy ion implantation into pad oxide for improving threshold voltage stability
A method is described to fabricate a MOSFET device with increased threshold voltage stability. After the pad oxide and pad nitride are deposited on the silicon substrate and shallow trenches are patterned and the pad nitride removed. As+ or P+ ...
08/21/2007
7253047Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry
Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry are described. In one embodiment, active areas are formed over a substrate, with one of the ...
08/07/2007
7247534Silicon device on Si:C-OI and SGOI and method of manufacture
A semiconductor structure and method of manufacturing is provided. The method of manufacturing includes forming shallow trench isolation (STI) in a substrate and providing a first material and a second material on the substrate. The first material and the second mat...
07/24/2007
7244646Pixel design to improve photodiode capacitance and method of forming same
A CMOS imager with two adjacent pixel active area regions without the presence of an intervening trench isolation region that typically separates two adjacent pixels and their associated photodiodes is provided. The shared active area region isolates the two adjacen...
07/17/2007
7226859Method of forming different silicide portions on different silicon-containing regions in a semiconductor device
A method is disclosed in which differing metal layers are sequentially deposited on silicon-containing regions so that the type and thickness of the metal layers may be adapted to specific characteristics of the underlying silicon-containing regions. Subsequently, a...
06/05/2007
7220650Sidewall spacer for semiconductor device and fabrication method thereof
An offset spacer layer for an LDD ion implantation process is formed by blanket deposition without photolithography and dry etch processes. The offset spacer layer remaining on LDD regions during an ion implantation process prevents a substrate from silicon loss and...
05/22/2007
7218347Photoelectric conversion element and solid-state image sensing device using the same
Upon reading out signals from a plurality of photodiode layers, highly color-separable signals which suffer less color mixture and noise are read out. A photoelectric conversion element which is formed by alternately stacking photoelectric conversion regions of a fi...
05/15/2007
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