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Class 438/194 - Doping of semiconductive channel region beneath gate (e.g., threshold voltage adjustment, etc.)


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a junction gate field effect transistor
No. of patents: 101
Last issue date: 05/10/2011


1      
NumberTitleIssue Date
7939393Method of adjusting FDSOI threshold voltage through oxide charges generation in the buried oxide
Different performance MOSFET Fully Depleted devices can be achieved on a single chip by varying the Vt through ion implantation. The integration of multiple Vt can be achieved through the selection of a metal gate stack with suitable effective WF for one semiconduct...
05/10/2011
7915107Integrated circuit using complementary junction field effect transistor and MOS transistor in silicon and silicon alloys
This invention describes a method of building complementary logic circuits using junction field effect transistors in silicon. This invention is ideally suited for deep submicron dimensions, preferably below 65 nm. The basis of this invention is a complementary Junc...
03/29/2011
7883949Methods of forming silicon carbide switching devices including P-type channels
Methods of forming a p-channel MOS device in silicon carbide include forming an n-type well in a silicon carbide layer, and implanting p-type dopant ions to form a p-type region in the n-type well at a surface of the silicon carbide layer and at least partially defi...
02/08/2011
7824973Method of forming a semiconductor device and semiconductor device thereof
According to one embodiment of the present invention, a method of forming a semiconductor device is provided, the method including: forming a substrate; forming a first gate on the substrate; forming a mask layer on the substrate, the mask layer including a first wi...
11/02/2010
7713804Method of forming an oxide isolated metal silicon-gate JFET
A JFET structure with self-aligned metal source, drain and gate contacts with very low resistivity and very small feature sizes. Small source, drain and gate openings are etched in a thin dielectric layer which has a thickness set according to the desired source, ga...
05/11/2010
7709311JFET device with improved off-state leakage current and method of fabrication
A junction field effect transistor comprises a semiconductor substrate. A first impurity region of a first conductivity type is formed in the substrate. A second impurity region of the first conductivity type is formed in the substrate and spaced apart from the firs...
05/04/2010
7528026Method for reducing silicide defects by removing contaminants prior to drain/source activation
By consuming a surface portion of polysilicon material or silicon material after implantation and prior to activation of dopants, contaminants may be efficiently removed, thereby significantly enhancing the process uniformity during a subsequent silicidation process...
05/05/2009
7411231JFET with drain and/or source modification implant
The present invention provides a JFET which receives an additional implant during fabrication, which extends its drain region towards its source region, and/or its source region towards its drain region. The implant reduces the magnitude of the e-field that would ot...
08/12/2008
7341906Method of manufacturing sidewall spacers on a memory device, and device comprising same
The present invention is generally directed to a method of manufacturing sidewall spacers on a memory device, and a memory device comprising such sidewall spacers. In one illustrative embodiment, the method includes forming sidewall spacers on a memory device compri...
03/11/2008
7341901Semiconductor processing methods of forming integrated circuitry
Semiconductor processing methods of forming integrated circuitry are described. In one embodiment, memory circuitry and peripheral circuitry are formed over a substrate. The peripheral circuitry comprises first and second type MOS transistors. Second type halo impla...
03/11/2008
7335988Use of palladium in IC manufacturing with conductive polymer bump
An apparatus and a method for forming a substrate having a palladium metal layer over at least one contact point of the substrate and having a flexible conductive polymer bump, preferably a two-stage epoxy, on the palladium plated contact point, are provided. The pr...
02/26/2008
7329940Semiconductor structure and method of manufacture
A structure comprises a single wafer with a first subcollector formed in a first region having a first thickness and a second subcollector formed in a second region having a second thickness, different from the first thickness. A method is also contemplated which in...
02/12/2008
7312481Reliable high-voltage junction field effect transistor and method of manufacture therefor
The present invention provides a high-voltage junction field effect transistor (JFET), a method of manufacture and an integrated circuit including the same. One embodiment of the high-voltage junction field effect transistor (JFET) (300) includes a well regio...
12/25/2007
7297580Methods of fabricating transistors having buried p-type layers beneath the source region
The present invention provides a unit cell of a metal-semiconductor field-effect transistor (MESFET). The unit cell of the MESFET includes a source, a drain and a gate. The gate is disposed between the source and the drain and on an n-type conductivity channel layer...
11/20/2007
7271436Flash memory devices including a pass transistor
Flash memory integrated circuit devices include an integrated circuit substrate. A cell array on the integrated circuit substrate includes a plurality of cell transistors. A bit line is coupled to ones of the plurality of cell transistors and a first pass transistor...
09/18/2007
7265006Method of fabricating heterojunction devices integrated with CMOS
A method of fabricating heterojunction devices, in which heterojunction devices are epitaxially formed on active area regions surrounded by field oxide regions and containing embedded semiconductor wells. The epitaxial growth of the heterojunction device layers may ...
09/04/2007
7265039Method for fabricating semiconductor device with improved refresh time
The present invention relates to a method for fabricating a semiconductor device with improved refresh time. The method includes the steps of: forming a plurality of gate lines on a substrate; forming a plurality of cell junctions by ion-implanting a first dopant wi...
09/04/2007
7238987Lateral semiconductor device and method for producing the same
A high withstand voltage lateral semiconductor device capable of improving its on-state breakdown voltage and safe operation area (SOA) without lowering its current capabilities, and structured so as to be easy to produce. The lateral semiconductor device comprises ...
07/03/2007
7232729Method for manufacturing a double bitline implant
The present invention provides a method of fabricating a doped semiconductor region comprising selectively implanting a first impurity to form a shallow heavily doped region. The method further comprises selectively implanting the first impurity to also form a deep ...
06/19/2007
7227203Power system inhibit method and device and structure therefor
A power control system (25) uses two separate currents to control a startup operation of the power control system (25). The two currents are shunted to ground to inhibit operation of the power control system (25) and one of the two currents is d...
06/05/2007
7226824Nitrogen controlled growth of dislocation loop in stress enhanced transistor
Known techniques to improve metal-oxide-semiconductor field effect transistor (MOSFET) performance is to add a high stress dielectric layer to the MOSFET. The high stress dielectric layer introduces stress in the MOSFET that causes electron mobility drive current to...
06/05/2007
7195968Method of fabricating semiconductor device
A method of fabricating a semiconductor device includes forming a resist pattern so that an opening between select gates of a select gate transistor is formed in a memory cell region, implanting threshold-adjusting ions under the select gate with the resist pattern ...
03/27/2007
7176093Semiconductor processing methods of forming integrated circuitry
Semiconductor processing methods of forming integrated circuitry are described. In one embodiment, memory circuitry and peripheral circuitry are formed over a substrate. The peripheral circuitry comprises first and second type MOS transistors. Second type halo impla...
02/13/2007
7166506Poly open polish process
A method of fabricating microelectronic structure using at least two material removal steps, such as for in a poly open polish process, is disclosed. In one embodiment, the first removal step may be chemical mechanical polishing (CMP) step utilizing a slurry with hi...
01/23/2007
7161216Depletion-mode transistor that eliminates the need to separately set the threshold voltage of the depletion-mode transistor
A semiconductor circuit with a depletion-mode transistor is formed with a method that eliminates the need for a separate mask and implant step to set the threshold voltage of the depletion-mode transistor. As a result, the method of the present invention reduces the...
01/09/2007
7144795Method for forming a depletion-mode transistor that eliminates the need to separately set the threshold voltage of the depletion-mode transistor
A semiconductor circuit with a depletion-mode transistor is formed with a method that eliminates the need for a separate mask and implant step to set the threshold voltage of the depletion-mode transistor. As a result, the method of the present invention reduces the...
12/05/2006
7135363Semiconductor processing methods of forming integrated circuitry
Semiconductor processing methods of forming integrated circuitry are described. In one embodiment, memory circuitry and peripheral circuitry are formed over a substrate. The peripheral circuitry comprises first and second type MOS transistors. Second type halo impla...
11/14/2006
7135416Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device including a gallium nitride related semiconductor. The method include preparing a substrate having surface of a gallium nitride related semiconductor; contacting the surface with atomic nitrogen, which is obtained by ...
11/14/2006
7126190Self-aligned gate and method
A semiconductor structure includes a silicon substrate of a first conductivity type including wells of a second conductivity type formed on a surface thereof. The wells may be laterally isolated by shallow trench isolation. Transistors are formed in the wells by fir...
10/24/2006
7122411SOI device with reduced drain induced barrier lowering
A CMOS device formed with a Silicon On Insulator (SOI) technology with reduced Drain Induced Barrier Lowering (DIBL) characteristics and a method for producing the same. The method involves a high energy, high dose implant of boron and phosphorus through the p- and ...
10/17/2006
7118948Semiconductor wafer having different impurity concentrations in respective regions
A semiconductor wafer has different impurity concentrations in respective regions and gate patterns have different lengths in the respective regions. The semiconductor wafer has different impurity concentrations in a central region, an intermediate region, and an ou...
10/10/2006
7089515Threshold voltage roll-off compensation using back-gated MOSFET devices for system high-performance and low standby power
A method for compensating the threshold voltage roll-off using transistors containing back-gates or body nodes is provided. The method includes designing a semiconductor system or chip having a plurality of transistors with a channel length of Lnom. For t...
08/08/2006
7078347Method for forming MOS transistors with improved sidewall structures
A gate structure (30) is formed over a semiconductor (10). Sidewall structures (200) of a first width W1 are formed adjacent to the gate structure (30) and source and drain regions (90) are formed in the semiconductor (
07/18/2006
7071044Method of making a test structure for gate-body current and direct extraction of physical gate length using conventional CMOS
A structure for testing relative to an MOS transistor, can be easily constructed as part of the CMOS process flow. A doped device well is formed, for example, in a silicon-on-insulator structure. The concentration level in the well corresponds to that for a well of ...
07/04/2006
7067362Integrated circuit with protected implantation profiles and method for the formation thereof
A method for manufacturing an integrated circuit structure includes providing a semiconductor substrate and forming at least one oxide-nitride-oxide dielectric layer above the semiconductor substrate. At least one implantation is formed into at least one area of the...
06/27/2006
7067363Vertical-conduction and planar-structure MOS device with a double thickness of gate oxide and method for realizing power vertical MOS transistors with improved static and dynamic performances and high scaling down density
A vertical-conduction and planar-structure MOS device having a double thickness gate oxide includes a semiconductor substrate including spaced apart active areas in the semiconductor substrate and defining a JFET area therebetween. The JFET area also forms a channel...
06/27/2006
7060576Epitaxially deposited source/drain
An epitaxially deposited source/drain extension may be formed for a metal oxide semiconductor field effect transistor. A sacrificial layer may be formed and etched away to undercut under the gate electrode. Then a source/drain extension of epitaxial silicon may be d...
06/13/2006
7045405Semiconductor processing methods of forming integrated circuitry
Semiconductor processing methods of forming integrated circuitry are described. In one embodiment, memory circuitry and peripheral circuitry are formed over a substrate. The peripheral circuitry comprises first and second type MOS transistors. Second type halo impla...
05/16/2006
7022560Method to manufacture high voltage MOS transistor by ion implantation
A method for fabrication of a high-voltage, high-frequency MOS-transistor combines a deep n-well and a p-well process and the formation of an extended drain region (45), and a channel region (31), the channel having a short length and becoming well ali...
04/04/2006
7011998High voltage transistor scaling tilt ion implant method
The present invention is a high voltage transistor formation method and system that includes a varying or gradient concentration lightly doped drain and source implant region. The lightly doped drain (LDD) implant region has gradient concentration characteristics th...
03/14/2006
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