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Class 438/178 - Elemental semiconductor


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for making a Schottky gate field effect transistor
No. of patents: 24
Last issue date: 04/20/2010


NumberTitleIssue Date
7700422Methods of forming memory arrays for increased bit density
A memory array having a plurality of resistance variable memory units and method for forming the same are provided. Each memory unit includes a first electrode, a resistance variable material over the first electrode, and a first second-electrode over the resistance...
04/20/2010
7427541Carbon nanotube energy well (CNEW) field effect transistor
A structure to form an energy well within a Carbon nanotube is described. The structure includes a doped semiconductor region and an undoped semiconductor region. The Carbon nanotube is between the doped semiconductor region and the undoped semiconductor region. The...
09/23/2008
7351625Recessed transistors and methods of forming the same
According to some embodiments of the invention, there is provided recessed transistors without semiconductor substrate fences formed on the sidewalls of a device isolation layer and methods of forming the same. The recessed transistors and methods provide a way of r...
04/01/2008
7208787Semiconductor device and a process for manufacturing a complex oxide film
A semiconductor device is prepared using an insulating film consisting of a tantalum-tungsten oxide crystal film, a tantalum-molybdenum oxide crystal film, or a laminated film where a silicon oxide, silicon oxynitride or silicon nitride film is laminated on the crys...
04/24/2007
7195999Metal-substituted transistor gates
One aspect of this disclosure relates to a method for forming a transistor. According to various method embodiments, a gate dielectric is formed on a substrate, a substitutable structure is formed on the gate dielectric, and source/drain regions for the transistor a...
03/27/2007
7173257Integrated assembly for delivery of air stream for optical analysis
An integrated particle detection apparatus for optical detection of particles in an air stream. The particle detection apparatus includes a scalper for removing large panicles from the air stream, a concentrator for separating out small particles and increasing the ...
02/06/2007
7135369Atomic layer deposited ZrAlO dielectric layers including ZrAlO
An atomic layer deposited ZrAlxOy dielectric layer and a method of fabricating such a dielectric layer produce a reliable dielectric layer having an equivalent oxide thickness thinner than attainable using SiO2. Pulsing a zirconium-c...
11/14/2006
7030428Strain balanced nitride heterojunction transistors
A nitride based heterojunction transistor includes a substrate and a first Group III nitride layer, such as an AlGaN based layer, on the substrate. The first Group III-nitride based layer has an associated first strain. A second Group III-nitride based layer, such a...
04/18/2006
6744104Semiconductor integrated circuit including insulated gate field effect transistor and method of manufacturing the same
A gate electrode of an n-channel IGFET includes a first region composed of at least a first IV group element and a second IV group element which are different from each other, and a second region composed of the first IV group element. Similarly, a gate electrode of...
06/01/2004
6548333Aluminum gallium nitride/gallium nitride high electron mobility transistors having a gate contact on a gallium nitride based cap segment
High electron mobility transistors (HEMTs) and methods of fabricating HEMTs are provided Devices according to embodiments of the present invention include a gallium nitride (GaN) channel layer and an aluminum gallium nitride (AlGaN) barrier layer on the c...
04/15/2003
6392271Structure and process flow for fabrication of dual gate floating body integrated MOS transistors
A dual gate transistor device and method for fabricating the same. First, a doped substrate is prepared with a patterned oxide layer on the doped substrate defining a channel. Next, a silicon layer is deposited to form the channel, with a gate oxide layer...
05/21/2002
6255149Process for restricting interdiffusion in a semiconductor device with composite Si/SiGe gate
A method which includes, prior to depositing the encapsulating silicon layer: A) depositing on the Si1-x Gex layer a thin film of amorphous or polycrystalline silicon, then in treating said silicon film with gas nitric oxide at a tem...
07/03/2001
5002897Method of making a complementary metal electrode semiconductor device
A semiconductor device referred to as complementary metal electrode semiconductor (CMES) has p-type and n-type silicon MESFETs interconnected on a substrate with an n-type barrier enhancement implanted into the p-channel of the p-type MESFET. The structur...
03/26/1991
4843024Method of producing a Schottky gate field effect transistor
A method of producing a Schottky gate field effect transistor includes depositing a dummy gate film on a semiconductor substrate, depositing a second thin film on the semiconductor substrate and on the first thin film pattern to the same thickness as the ...
06/27/1989
4745082Method of making a self-aligned MESFET using a substitutional gate with side walls
A process for producing a semiconductor device includes depositing a layer of insulator material onto a supporting substrate of the type having a surface which includes a channel region below the surface thereof containing a carrier concentration of a des...
05/17/1988
4553316Self-aligned gate method for making MESFET semiconductor
A MESFET is fabricated using a self-aligned gate process. This process uses a vertical (anisotropic) etch to self-align the gate and source/drain. The vertical etch, in conjunction with a two-level insulator, creates a barrier between the gate and source/...
11/19/1985
4546540Self-aligned manufacture of FET
This specification discloses a self-aligned manufacturing method of a Schottky gate FET. This method comprises the steps: forming a gate metallic layer on a semiconductor substrate and a mask overhanged on the metallic layer; ion-implanting impurity ions ...
10/15/1985
4481704Method of making an improved MESFET semiconductor device
An improved MESFET integrated circuit device with a metal-semiconductor diode as the control element and a source and drain as other device elements is fabricated using a self-aligned gate process which consists of an implanted channel stopper underneath ...
11/13/1984
4466174Method for fabricating MESFET device using a double LOCOS process
MESFET devices are fabricated on a semiconductor substrate using a LOCOS (localized oxidation of silicon) process twice during the fabrication. The first LOCOS process provides device separation with a self-aligned thick-field oxide (SATO). The second LOC...
08/21/1984
4455738Self-aligned gate method for making MESFET semiconductor
A MESFET is fabricated using a self-aligned gate process. This process uses a vertical (anisotropic) etch to self-align the gate and source/drain. The vertical etch, in conjunction with a two-level insulator, creates a barrier between the gate and source/...
06/26/1984
4358891Method of forming a metal semiconductor field effect transistor
A metal silicon field effect transistor and the method of producing such a transistor whereby all of the elements of the transistor are defined by a single masking step. These elements include the channel of the first effect transistor as well as the sour...
11/16/1982
4304042Self-aligned MESFETs having reduced series resistance
Disclosed herein is a structure and process for a self-aligned metal semiconductor field effect transistor having the characteristics of a high speed, high density, low power LSI circuit and specifically an improved high device gain MESFET device using co...
12/08/1981
4277882Method of producing a metal-semiconductor field-effect transistor
A metal-semiconductor field-effect transistor is formed by providing a blanket layer of the same conductivity type as the semiconductor body, with field oxide subsequently being grown, and with a region of opposite conductivity type being formed to extend...
07/14/1981
4253229Self-aligned narrow gate MESFET process
A method of making a narrow gate MESFET including the steps of placing a layered mask of nitride and polysilicon over a channel region for self-aligning in a substrate, oxidizing and then removing the polysilicon to reduce the remaining polysilicon width,...
03/03/1981
 
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