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Class 438/162 - Introduction of nondopant into semiconductor layer


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process wherein a nonelectrically active impurity (i.e.,
No. of patents: 439
Last issue date: 12/13/2011


1                      
NumberTitleIssue Date
8076186Method of laser annealing semiconductor layer and semiconductor devices produced thereby
A laser annealing method includes forming a nitrogen-doped layer on a semiconductor layer, the nitrogen-doped layer having a nitrogen concentration of at least 3×1020 atoms/cc, irradiating a first area of the nitrogen-doped layer in a low oxygen environm...
12/13/2011
8058117Method of synthesizing silicon wires
A method of synthesizing silicon wires is provided. A substrate is provided. A copper catalyst particle layer is formed on a top surface of the substrate. The reactive device is heated at a temperature of above 450° C. in a flowing protective gas. A mixture of a pr...
11/15/2011
8030146Organic light emitting diode (OLED) display panel and method of forming polysilicon channel layer thereof
An organic light emitting diode (OLED) display panel and a method of forming a polysilicon channel layer thereof are provided. In the method, firstly, a substrate having a polysilicon layer disposed thereon is provided. Then, a dopant atom not selected from the IIIA...
10/04/2011
7972911Method for forming metallic materials comprising semi-conductors
The method for forming first and second metal-based materials comprises providing a substrate comprising an area made from a first semi-conductor material and an area made from a second semi-conductor material comprising germanium separated by a pattern made from di...
07/05/2011
7943446Method of producing semiconductor device and semiconductor device
A semiconductor device able to secure electrical effective thicknesses required for insulating films of electronic circuit elements by using depletion of electrodes of the electronic circuit elements even if the physical thicknesses of the insulating films are not d...
05/17/2011
7939388Plasma doping method and plasma doping apparatus
Before a plasma doping process is performed, there is generated a plasma of a gas containing an element belonging to the same group in the periodic table as the primary element of a silicon substrate 9, e.g., a monosilane gas, in a vacuum chamber 1. Th...
05/10/2011
7927934SOI semiconductor device with body contact and method thereof
A method including providing a substrate and providing an insulating layer overlying the substrate is provided. The method further includes providing a body region comprising a body material overlying the insulating layer. The method further includes forming at leas...
04/19/2011
7897444Strained semiconductor-on-insulator (sSOI) by a simox method
A strained (tensile or compressive) semiconductor-on-insulator material is provided in which a single semiconductor wafer and a separation by ion implantation of oxygen process are used. The separation by ion implantation of oxygen process, which includes oxygen ion...
03/01/2011
7897443Production method of semiconductor device and semiconductor device
The present invention provides a production method of a semiconductor device, which can improve characteristics of a semiconductor element including a single crystal semiconductor layer formed by transferring on an insulating substrate. The present invention is a pr...
03/01/2011
7863119Semiconductor device and method for manufacturing the same
It is made possible to provide a method for manufacturing a semiconductor device that has a high-quality insulating film in which defects are not easily formed, and experiences less leakage current. A method for manufacturing a semiconductor device, includes: formin...
01/04/2011
7662680Method of producing a semiconductor element in a substrate and a semiconductor element
A method of producing a semiconductor element in a substrate includes forming a plurality of micro-cavities and carbide precipitates in the substrate, creating an amorphization of the substrate to form crystallographic defects and a doping of the substrate with dopi...
02/16/2010
7605029Method of manufacturing semiconductor device
According to the present invention, an impurity region, to which a rare gas element (also called a rare gas) and one kind or a plurality of kinds of elements selected from the group consisting of H, H2, O, O2, and P are added, are formed in a s...
10/20/2009
7566601Method of making a one transistor SOI non-volatile random access memory cell
One aspect of the present subject matter relates to a memory cell, or more specifically, to a one-transistor SOI non-volatile memory cell. In various embodiments, the memory cell includes a substrate, a buried insulator layer formed on the substrate, and a transisto...
07/28/2009
7563658Method for manufacturing semiconductor device
The present invention relates to a method for manufacturing a semiconductor film, including the steps of forming a transparent conductive film, forming a first conductive film over the transparent conductive film, forming a second conductive film over the first cond...
07/21/2009
7544549Method for manufacturing semiconductor device and MOS field effect transistor
Upon manufacture of a semiconductor device provided with a source region and a drain region formed by activating, through anneal, an n-type first dopant ion-implanted in a p-type device forming area provided in a semiconductor layer formed on an insulator, and a bod...
06/09/2009
7482211Junction leakage reduction in SiGe process by implantation
A method for forming a semiconductor device is provided. The method includes providing a semiconductor substrate, forming a gate dielectric over the semiconductor substrate, forming a gate electrode on the gate dielectric, forming a stressor in the semiconductor sub...
01/27/2009
7442592Manufacturing a semiconductor device
A technique of reducing fluctuation between elements is provided in which a semiconductor film having a crystal structure is obtained by using a metal element that accelerates crystallization of a semiconductor film and then the metal element remaining in the film i...
10/28/2008
7442600Methods of forming threshold voltage implant regions
The invention includes methods of forming channel region implants for two transistor devices simultaneously, in which a mask is utilized to block a larger percentage of a channel region location of one of the devices relative to the other. The invention also pertain...
10/28/2008
7439092Thin film splitting method
A method of fabricating thin films of semiconductor materials by implanting ions in a substrate composed of at least two different elements at least one of which can form a gaseous phase on bonding with itself and/or with impurities includes the following steps:
10/21/2008
7435635Method for crystallizing semiconductor material
A semiconductor material and a method for forming the same, said semiconductor material having produced by a process comprising melting a noncrystal semiconductor film containing therein carbon, nitrogen, and oxygen each at a concentration of 5×1019 atom...
10/14/2008
7432139Methods for forming dielectrics and metal electrodes
A method for forming a semiconductor structure, the method including forming in a processing chamber a dielectric layer over a substrate; and subsequently forming, in the same processing chamber and without removing the substrate therefrom, an electrode layer direct...
10/07/2008
7371619Semiconductor device and method of manufacturing the same
In order to obtain a thin-film transistor having high characteristics using a metal element for accelerating the crystallization of silicon, a nickel element is selectively added to the surface of an amorphous silicon film (103) in regions (101) and (
05/13/2008
7371647Methods of forming transistors
The invention encompasses a method of forming a structure over a semiconductor substrate. A silicon dioxide containing layer is formed across at least some of the substrate. Nitrogen is formed within the silicon dioxide containing layer. Substantially all of the nit...
05/13/2008
7371624Method of manufacturing thin film semiconductor device, thin film semiconductor device, electro-optical device, and electronic apparatus
A method of manufacturing a thin film semiconductor device which includes a thin film transistor having a first semiconductor layer, a gate insulating layer, and a gate electrode which are laminated in this order on a substrate, and a capacitive element having a low...
05/13/2008
7371623Semiconductor device with semiconductor circuit comprising semiconductor units, and method for fabricating it
The invention is to provide a high-productivity method for fabricating a TFT device having different LDD structures on one and the same substrate, and the TFT device. Specifically, the invention provides a novel TFT structure, and a high-productivity method for fabr...
05/13/2008
7368751Method of manufacturing an electronic device comprising a thin film transistor
A method of manufacturing an electronic device comprising a thin film transistor (42), comprises forming a hydrogen-containing layer (22) over a semiconductor layer (10;20), irradiating the hydrogen-containing layer so as to hydrogenate the semi...
05/06/2008
7358161Methods of forming transistor devices associated with semiconductor-on-insulator constructions
The invention encompasses a method of forming a semiconductor on-insulator construction. A substrate is provided. The substrate includes a semiconductor-containing layer over an insulative mass. The insulative mass comprises silicon dioxide. A band of material is fo...
04/15/2008
7358163Semiconductor device and method for fabricating the same
A novel and very useful method for forming a crystal silicon film by introducing a metal element which promotes crystallization of silicon to an amorphous silicon film and for eliminating or reducing the metal element existing within the crystal silicon film thus ob...
04/15/2008
7359010Method for producing display device
In a liquid crystal display device, a first substrate includes electrical wirings and a semiconductor integrated circuit which has TFTs and is connected electrically to the electrical wirings, and a second substrate includes a transparent conductive film on a surfac...
04/15/2008
7351622Methods of forming semiconductor device
A method of forming a semiconductor device includes forming a three-dimensional structure formed of a semiconductor on a semiconductor substrate, and isotropically doping the three-dimensional structure by performing a plasma doping process using a first source gas ...
04/01/2008
7351619Process of fabricating a semiconductor device
A semiconductor device having high operating performance and reliability is disclosed, and its fabrication process is also disclosed. In an n-channel type TFT 302, an Lov region 207 is disposed, whereby a TFT structure highly resistant to hot ca...
04/01/2008
7348222Method for manufacturing a thin film transistor and method for manufacturing a semiconductor device
It is an object of the present invention to provide a method for removing the metal element from the semiconductor film which is different from the conventional gettering step for removing the metal element from the semiconductor film. In the present inventio...
03/25/2008
7338845Fabrication method of a low-temperature polysilicon thin film transistor
An LTPS-TFT structure comprises a gate, a gate dielectric layer, a patterned silicon layer, a patterned insulating layer, an ohmic contact layer and a source/drain layer. The gate and the gate dielectric layer are disposed on the substrate. The patterned silicon lay...
03/04/2008
7338882Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same
A method of fabricating a nano silicon on insulator (SOI) wafer having an excellent thickness evenness without performing a chemical mechanical polishing (CMP) and a wafer fabricated by the same are provided. The provided method includes preparing a bond wafer and a...
03/04/2008
7335568Method of forming doped regions in the bulk substrate of an SOI substrate to control the operational characteristics of transistors formed thereabove, and an integrated circuit device comprising same
In one illustrative embodiment, the method comprises providing an SOI substrate comprised of an active layer, a buried insulation layer and a bulk substrate, forming a doped region in the bulk substrate under the active layer, forming a plurality of transistors abov...
02/26/2008
7332443Method for fabricating a semiconductor device
The present invention relates to a method for fabricating a semiconductor device. In order to provide for a high carrier mobility in an active region of the device, germanium atoms are implanted into a surface of a semiconductor substrate such that a germanium-conta...
02/19/2008
7330168Display device
A source of a driving transistor for driving an organic EL element functions as a first capacitance electrode layer. A second capacitance electrode layer is formed on the source through a gate insulating film of the driving transistor. The second capacitance electro...
02/12/2008
7320921Smart grading implant with diffusion retarding implant for making integrated circuit chips
A method of making an integrated circuit chip is provided, which combines a smart grading implant with a diffusion retarding implant, e.g., to improve short channel effect controllability and improve dopant grading in the source/drain regions. Using a smart grading ...
01/22/2008
7312125Fully depleted strained semiconductor on insulator transistor and method of making the same
An integrated circuit includes multiple layers. A semiconductor-on-insulator (SOI) wafer can be used to house transistors. Two substrates or wafers can be bonded to form the multiple layers. A strained semiconductor layer can be between a silicon germanium layer and...
12/25/2007
7300829Low temperature process for TFT fabrication
Method of fabricating a thin-film transistor (TFT) in which a gate metal is deposited onto a substrate in order to form the gate of the thin-film transistor. The substrate may be an insulative substrate or a color filter. In a first method, the gate metal is subject...
11/27/2007
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