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Class 438/160 - Utilizing backside irradiation


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process wherein single or multiple layers formed over the
No. of patents: 213
Last issue date: 08/23/2011


1            
NumberTitleIssue Date
8003451Method of manufacturing array substrate of liquid crystal display device
The embodiment of the invention discloses an exemplary method, in which a gate line, a gate electrode, and a pixel electrode are formed in a first step; a multilayer structure is formed on the gate line and the gate electrode in a second step; and a data line and so...
08/23/2011
7977176Flexible display device and fabricating method thereof
A flexible display device for improving reliability, and a fabricating method thereof are disclosed. In the method of fabricating the flexible display device, an insulating protective layer is formed at one side of a glass substrate. A display device including a thi...
07/12/2011
7915102Methods of fabricating thin film transistor and organic light emitting display device using the same
Methods of fabricating a TFT and an OLED using the same are provided. The method of fabricating a CMOS TFT includes: preparing a substrate having first and second TFT regions; forming a gate electrode on the substrate; forming a gate insulating layer on the entire s...
03/29/2011
7767506Mask and manufacturing method of a semiconductor device and a thin film transistor array panel using the mask
An exposure mask is provided, which includes: a light blocking opaque area blocking incident light; a translucent area; and a transparent area passing the most of incident light, wherein the translucent area generates the phase differences in the range of about −7...
08/03/2010
7615422Evaluation method of semiconductor device, manufacturing method of the semiconductor device, design management system of device comprising the semiconductor device, dose amount control program for the semiconductor device, computer-readable recording medium recording the program, and dose amount control apparatus
There is provided a new method of obtaining the dopant activation rate of a device accurately and simply in a different way from a method of obtaining a carrier density with use of a Hall measurement or CV measurement, and also provided a production method of a devi...
11/10/2009
7608494Thin film transistor array panel and a method for manufacturing the same
A thin film transistor array panel includes an insulating substrate, a gate wire formed on the insulating substrate. A gate insulating layer covers the gate wire. A semiconductor pattern is formed on the gate insulating layer. A data wire having source electrodes, d...
10/27/2009
7585713Method for exposing photo-sensitive SAM film and method for manufacturing semiconductor device
A disclosed technology is a method for exposing a photo-sensitive SAM film, wherein a self-assembled-monolayer (photo-sensitive SAM film) having photo-sensitivity, exhibiting hydrophobicity before exposure, and exhibiting hydrophilicity after exposure is formed on a...
09/08/2009
7585712Methods of fabricating thin film transistor array substrate and forming metal layer of thin film transistor array substrate
A method of fabricating a TFT array substrate and a metal layer thereof is provided. First, a substrate having a first patterned metal layer disposed thereon is provided, wherein the first patterned metal layer is formed by an electroplating method. Then, a gate ins...
09/08/2009
7553712Method for manufacturing a bottom substrate of a liquid crystal display
A method for manufacturing a bottom substrate of a liquid crystal display device is disclosed. The method is achieved by proceeding two lithography processes cycles with a single mask. Therefore, the method of the present invention can manufacture a bottom substrate...
06/30/2009
7485511Integrated circuit device and method for manufacturing integrated circuit device
An object of the present invention is to provide a structure of a thin film circuit portion and a method for manufacturing a thin film circuit portion by which an electrode for connecting to an external portion can be easily formed under a thin film circuit. A stack...
02/03/2009
7410882Method of manufacturing and structure of polycrystalline semiconductor thin-film heterostructures on dissimilar substrates
According to various exemplary embodiments of this invention, a method of producing a semiconductor structure is provided that includes providing a layered structure on a first substrate, the layered structure including a silicon layer that is provided over a first ...
08/12/2008
7407824Guard ring for improved matching
A semiconductor manufacturing method comprises forming a leveling guard ring defining an interior area into which are fabricated one or more devices. In certain embodiments two or more matched devices, such as in a common centroid layout, are fabricated in the inter...
08/05/2008
7393770Backside method for fabricating semiconductor components with conductive interconnects
A backside method for fabricating a semiconductor component with a conductive interconnect includes the step of providing a semiconductor substrate having a circuit side, a backside, and a substrate contact on the circuit side. The method also includes the steps of ...
07/01/2008
7381598Insulated gate semiconductor device and process for fabricating the same
A thin film transistor of reversed stagger type having improved characteristics and yet obtained by a simple process, which is fabricated by selectively doping the semiconductor region on the gate dielectric to form the source, drain, and channel forming regions by ...
06/03/2008
7351617Semiconductor device and a method of manufacturing the same
To provide a technique required for purifying the interface between an active layer and an insulating film. On a substrate (101), a gate wiring (103) is formed and the surface thereof is covered with a gate oxide film (104). Then, a first insula...
04/01/2008
7351621Array substrate for a liquid crystal display and method for fabricating thereof
An array substrate for a liquid crystal display device includes a substrate, a plurality of thin film transistors formed on the substrate, each thin film transistor includes a gate electrode, a first gate insulation layer, a second gate insulation layer, an active l...
04/01/2008
7344928Patterned-print thin-film transistors with top gate geometry
A self-aligned, thin-film, top-gate transistor and method of manufacturing same are disclosed. A first print-patterned mask is formed over a metal layer by digital lithography, for example by printing with a phase change material using a droplet ejector. The metal l...
03/18/2008
7338845Fabrication method of a low-temperature polysilicon thin film transistor
An LTPS-TFT structure comprises a gate, a gate dielectric layer, a patterned silicon layer, a patterned insulating layer, an ohmic contact layer and a source/drain layer. The gate and the gate dielectric layer are disposed on the substrate. The patterned silicon lay...
03/04/2008
7332382Thin film transistor and manufacturing method thereof
A method for manufacturing a thin film transistor is provided. In the method, a gate electrode is formed on a substrate. A crystalline gate insulating layer is formed on an entire surface of the substrate having the gate electrode formed thereon. A microcrystalline ...
02/19/2008
7312843Liquid crystal display device and fabricating method thereof
A liquid crystal display device includes a first substrate, a second substrate and a liquid crystal layer between the first and second substrates. The liquid crystal display device further includes a gate line on the first substrate, a first insulation film on the g...
12/25/2007
7303959Bottom-gate SONOS-type cell having a silicide gate
A bottom-gate thin film transistor having a silicide gate is described. This transistor is advantageously formed as SONOS-type nonvolatile memory cell, and methods are described to efficiently and robustly form a monolithic three dimensional memory array of such cel...
12/04/2007
7303978Board for mounting BGA semiconductor chip thereon, semiconductor device, and methods of fabricating such board and semiconductor device
To fabricate a semiconductor device, a pattern of recesses and lands is formed on a copper sheet as a matrix sheet, and BGA pads are formed on the lands on the copper sheet. An insulating layer is formed on the copper sheet to transfer the pattern of recesses and la...
12/04/2007
7300828Method of manufacturing a liquid crystal display device
Disclosed is a photoresist film which is formed in a manner of covering at least a source electrode, a source line, a pixel electrode, a drain electrode, a drain line, a semiconductor film and a protective film, and further covering a gate insulting film in their vi...
11/27/2007
7279711Ferroelectric liquid crystal and goggle type display devices
The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode ...
10/09/2007
7271857Method for manufacturing a liquid crystal display
A source electrode and a metal pattern for a storage capacitor are formed on an insulating substrate, a silicon layer having a doped source region and a doped drain region is formed on the substrate and the source and the drain regions directly contact to the source...
09/18/2007
7259427Semiconductor device and method of manufacturing the same
The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode ...
08/21/2007
7256422EL display device and electronic device
An electroluminescence display device has a plurality of electroluminescence elements and a driver circuit formed over a substrate. At least a part of the driver circuit is disposed in a display portion of a substrate in order that the size of the display device can...
08/14/2007
7256080Method of fabricating thin film transistor
A method of fabricating a thin film transistor includes preparing an insulating substrate; forming a first amorphous silicon layer on the substrate; forming a diffusion barrier layer pattern on the first amorphous silicon layer; forming a second amorphous silicon la...
08/14/2007
7253441Method of manufacturing thin film transistor
The object of the present invention is to form a low-concentration impurity region with good accuracy in a top gate type TFT. Phosphorus is added to a semiconductor layer by using a pattern made of a conductive film as a mask to form an N-type impurity region in a s...
08/07/2007
7253012Guard ring for improved matching
A semiconductor manufacturing method comprises forming a leveling guard ring defining an interior area into which are fabricated one or more devices. In certain aspects, two or more matched devices, such as in a common centroid layout, are fabricated in the interior...
08/07/2007
7248232Information processing device
There is provided an information processing apparatus which occupies a small space and which is capable of supplying image information having high definition and high resolution. An information processing apparatus of the invention employs a head mount display (HMD)...
07/24/2007
7238556Thin film transistor structure and method of manufacturing the same
The present invention improves the quality of the TFT structure by avoiding photo-induced current, and lowers manufacturing costs by decreasing the number of masks required in the process, wherein the former is achieved by the stacked structure including a gate laye...
07/03/2007
7235810Semiconductor device and method of fabricating the same
There is provided a crystalline TFT in which reliability comparable to or superior to a MOS transistor can be obtained and excellent characteristics can be obtained in both an on state and an off state. A gate electrode of the crystalline TFT is formed of a laminate...
06/26/2007
7233342Time and voltage gradation driven display device
To provide a display device which is capable of multi-gradation display without complicating the structure of a D/A converter circuit. Of m bit digital video data inputted from the external, upper n bit data is used as voltage gradation information and lower (m−n)...
06/19/2007
7227228Silicon on insulator device and method of manufacturing the same
An isolated semiconductor device and method for producing the isolated semiconductor device in which the device includes a silicon-on-insulator (SOI) device formed on a substrate. A dielectric film is formed on the insulator and covers the SOI device. The dielectric...
06/05/2007
7224028Semiconductor device that includes a gate insulating layer with three different thicknesses
In the fabrication of semiconductor devices such as active matrix displays, the need to pattern resist masks in photolithography increases the number of steps in the fabrication process and the time required to complete them and consequently represents a substantial...
05/29/2007
7223643Method of manufacturing a semiconductor device
Formation of LDD structures and GOLD structures in a semiconductor device is conventionally performed in a self aligning manner with gate electrodes as masks, but there are many cases in which the gate electrodes have two layer structures, and film formation process...
05/29/2007
7217605Laser irradiation method and method of manufacturing a semiconductor device
A crystalline semiconductor film having crystal grains of large grain size or crystal grains in which the position and the size are controlled is formed to manufacture a TFT, whereby a semiconductor device that enables a high-speed operation is realized. First, a re...
05/15/2007
7214554Monitoring the deposition properties of an OLED
A method for making an OLED device includes providing a substrate having one or more test regions and one or more device regions, moving the substrate into a least one deposition chamber for deposition of at least one organic layer, and depositing the at least one o...
05/08/2007
7205184Method of crystallizing silicon film and method of manufacturing thin film transistor liquid crystal display
A method of crystallizing a silicon film by which it is possible to obtain a polycrystalline silicon thin film having a uniform crystal structure and a good quality, and a method of manufacturing a thin film transistor-liquid crystal display (TFT-LCD) using the same...
04/17/2007
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