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Class 438/159 - Source-to-gate or drain-to-gate overlap


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process wherein the source or drain regions or layers of
No. of patents: 182
Last issue date: 01/25/2011


1          
NumberTitleIssue Date
7875509Manufacturing method of semiconductor apparatus and semiconductor apparatus, power converter using the same
In a manufacturing method of a SOI type high withstand voltage semiconductor device formed on a support substrate via an insulation film, a small-sized semiconductor device having small dispersion of withstand voltage is manufactured by introducing impurities into t...
01/25/2011
7776668Stripper solution and method for manufacturing liquid crystal display using the same
A method for manufacturing a liquid crystal display includes simultaneously forming a gate electrode and a gate bus line on a transparent dielectric substrate, simultaneously forming a channel layer, an ohmic contact layer, and source/drain electrodes by forming a g...
08/17/2010
7674662Process for making thin film field effect transistors using zinc oxide
The present invention comprises a method of forming a zinc oxide based thin film transistor by blanket depositing the zinc oxide layer and the source-drain metal layer and then wet etching through the zinc oxide while etching through the source-drain electrode layer...
03/09/2010
7588975Method of manufacturing pixel structure
A method of manufacturing a pixel structure controlled by a data line and a scan line is provided. A gate electrode electrically coupled to the scan line is formed on a substrate and a first dielectric layer covering the scan line and the gate electrode is formed. A...
09/15/2009
7488632Thin film transistor substrate for display device and fabricating method thereof
A thin film transistor (TFT) substrate is fabricated in three mask processes. In a first mask process, a gate line and a gate electrode are formed. In a second mask process, a data line, a source electrode, a drain electrode, a semiconductor layer, and a first upper...
02/10/2009
7459354Method for manufacturing a semiconductor device including top gate thin film transistor and method for manufacturing an active matrix device including top gate thin film transistor
The crystallization method by laser light irradiation forms a multiplicity of convexes (ridges) in the surface of an obtained crystalline semiconductor film, deteriorating film quality. Therefore, it is a problem to provide a method for forming a ridge-reduced semic...
12/02/2008
7413940Thin-film transistor and fabrication method thereof
A fabrication method of a TFT includes successively forming four thin films containing a first conductive layer, an insulation layer, a semiconductor layer, and a second conductive layer on a substrate, performing a first PEP process to pattern the four thin films f...
08/19/2008
7407846Thin film transistor, display device and their production
The present method prevents malfunctions in switching caused by a light leakage current in an active matrix type thin film transistor substrate for a liquid crystal display and prevents display failures, by selectively disposing a self assembled monolayer film in a ...
08/05/2008
7405113Fabrication method of thin film transistor
A thin film transistor is provided, including a substrate, a gate, a first dielectric layer, a channel layer, a source/drain and a second dielectric layer. The gate is disposed on the substrate, and the gate and the substrate are covered with the first dielectric la...
07/29/2008
7374982High voltage MOS transistor with gate extension
A high voltage MOS transistor with a gate extension that has a reduced electric field in the drain region near the gate is provided. The high voltage MOS transistor includes a first and second gate layers, and a dielectric layer between the gate layers. The first an...
05/20/2008
7364697System for infrared spectroscopic imaging of libraries
Methods and apparatus for screening diverse arrays of materials using infrared imaging techniques are provided. Typically, each of the individual materials on the array will be screened or interrogated for the same material characteristic. Once screened, the individ...
04/29/2008
7358122High performance FET devices and methods thereof
Structure and methods of fabrication are disclosed for an enhanced FET devices in which dopant impurities are prevented from diffusing through the gate insulator. The structure comprises a Si:C, or SiGe:C, layer which is sandwiched between the gate insulator and a l...
04/15/2008
7355225Semiconductor device and method for providing a reduced surface area electrode
An apparatus (200) such as a semiconductor device comprises a gate electrode (201) and at least a first electrode (202). The first electrode preferably has an established perimeter that at least partially overlaps with respect to the gate electr...
04/08/2008
7344928Patterned-print thin-film transistors with top gate geometry
A self-aligned, thin-film, top-gate transistor and method of manufacturing same are disclosed. A first print-patterned mask is formed over a metal layer by digital lithography, for example by printing with a phase change material using a droplet ejector. The metal l...
03/18/2008
7332385Method of manufacturing a semiconductor device that includes gettering regions
A catalytic element is added to an amorphous semiconductor film and heat treatment is conducted therefor to produce a crystalline semiconductor film with good quality, a TFT (semiconductor device) with a satisfactory characteristic is realized using the crystalline ...
02/19/2008
7312112Transistor array substrate fabrication for an LCD
A fabrication process for transistor array substrates of different sizes on a common substrate provides quality control, yield, and space efficiency advantages. In particular, a four-mask process, including a mask with diffraction slits, may be employed to fabricate...
12/25/2007
7300830Method of fabricating liquid crystal display panel
A method of fabricating a liquid crystal display panel includes forming a first conductive layer on a substrate and patterning the first conductive layer using a first resist pattern printed on the first conductive layer to form a gate pattern. A semiconductor layer...
11/27/2007
7291522Semiconductor devices and methods of making
In one method of forming a semiconductor device, a first electrode is formed electrically coupled with a semiconductor material. After the first electrode is formed, an insulator is formed over the semiconductor material adjoining the first electrode and extending a...
11/06/2007
7279711Ferroelectric liquid crystal and goggle type display devices
The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode ...
10/09/2007
7259427Semiconductor device and method of manufacturing the same
The present invention relates to a semiconductor device including a circuit composed of thin film transistors having a novel GOLD (Gate-Overlapped LDD (Lightly Doped Drain)) structure. The thin film transistor comprises a first gate electrode and a second electrode ...
08/21/2007
7238556Thin film transistor structure and method of manufacturing the same
The present invention improves the quality of the TFT structure by avoiding photo-induced current, and lowers manufacturing costs by decreasing the number of masks required in the process, wherein the former is achieved by the stacked structure including a gate laye...
07/03/2007
7229862Method for manufacturing semiconductor device
An object of the present invention is to provide a method for manufacturing a semiconductor device of which manufacturing process is simplified by improving usage rate of a material. A method for manufacturing a semiconductor device of the invention comprises the st...
06/12/2007
7220612Liquid crystal display device and fabricating method thereof
A thin film transistor substrate and a fabricating method thereof for simplifying a process are disclosed. In a liquid crystal display device according to the present invention, a gate line is provided on a substrate. A data line crosses the gate line with having a ...
05/22/2007
7221495Thin film precursor stack for MEMS manufacturing
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a ...
05/22/2007
7205194Method of fabricating a flash memory cell
A method of fabricating a flash memory cell having a split gate structure. A sacrificial layer is formed on a floating gate layer formed on a semiconductor substrate. The sacrificial layer is etched to form an opening exposing a portion of the floating gate layer. A...
04/17/2007
7196352Pixel structure, and thin film transistor
A method of fabricating a pixel structure is disclosed. A substrate having a color filter layer thereon and a leveling layer further covers the color filter layer is provided. A first metal layer is formed over the leveling layer. The first metal layer is patterned ...
03/27/2007
7192814Method of forming a low capacitance semiconductor device and structure therefor
In one embodiment a transistor is formed with a gate structure having an opening in the gate structure. An insulator is formed on at least sidewalls of the opening and a conductor is formed on the insulator. ...
03/20/2007
7179697Method of fabricating an electronic device
A method of fabricating an electronic device includes the following steps: a) providing a substrate; b) forming a first strip on the substrate; c) coating an insulation layer on the first strip and the substrate while completely overlaying the first strip and the su...
02/20/2007
7176489Thin-film transistor and method of making same
A thin-film transistor includes a substrate, and a gate including a double-layered structure having first and second metal layers provided on the substrate, the first metal layer being wider than the second metal layer by 1 to 4 μm. A method of making such a thin-f...
02/13/2007
7173303FIN field effect transistor with self-aligned gate
The present invention provides a process for fabricating a metal oxide semiconductor field effect transistor (MOSFET) having a double-gate and a double-channel wherein the gate region is self-aligned to the channel regions and the source/drain diffusion junctions. T...
02/06/2007
7151015Semiconductor device and manufacturing method thereof
There has been a problem that the manufacturing process is complicated and the number of processes is increased when a TFT with an LDD structure or a TFT with a GOLD structure is formed. In a method of manufacturing a semiconductor device, after low concentration im...
12/19/2006
7138682Organic thin-film transistor and method of manufacturing the same
A thin-film transistor includes a substrate (10), a gate electrode (20) provided on a portion of the substrate, an insulation layer (30) arranged to cover the gate electrode and the substrate, a source or drain (40) provided on the insula...
11/21/2006
7129105Method for manufacturing thin film transistor array panel for display device
A gate wire including gate lines, gate electrodes, and gate pads and extending in a transverse direction is formed on a substrate. A gate insulating layer is formed thereafter, and a semiconductor layer and an ohmic contact layer are sequentially formed thereon. A c...
10/31/2006
7125757Method of manufacturing an array substrate for a liquid crystal display device
An advantage of the present invention is to provide a method of manufacturing an array substrate for a liquid crystal display device in which a mask that has double slits in it is used in the photolithographic masking process for the pixel electrode to reduce the di...
10/24/2006
7101809Method of manufacturing a substrate for an electronic device by using etchant and electronic device having the substrate
In the case that a stacked layer, in which another metal layer is stacked on an Al layer or Al alloy layer having a low resistance, is used as a wiring material, an etchant is provided which can etch to a substantially equal etching rate by executing only one etchin...
09/05/2006
7078255Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same
Simplified method of manufacturing liquid crystal displays. A gate wire including a gate line, a gate pad and a gate electrode is formed on the substrate by using the first mask. A gate insulating layer, a semiconductor layer, a ohmic contact layer and a metal layer...
07/18/2006
7078279Manufacturing method of a thin film transistor array substrate
A method of manufacturing a thin film transistor capable of simplifying a substrate structure and a manufacturing process is disclosed. The method of manufacturing a thin film transistor array substrate includes involves a three-round mask process, which includes: f...
07/18/2006
7078321Semiconductor device and method of manufacturing the same
A crystalline semiconductor film in which the position and the size of crystal grains are controlled is provided, and a TFT that can operate at high speed is obtained by forming a channel formation region of the TFT from the crystalline semiconductor film. A heat re...
07/18/2006
7074672Self aligned method of forming a semiconductor memory array of floating gate memory cells with buried bit-line and vertical word line transistor
A self aligned method of forming a semiconductor memory array of floating gate memory cells in a semiconductor substrate, and an array formed thereby, whereby each memory cell includes a trench formed into a surface of a semiconductor substrate, spaced apart source ...
07/11/2006
7075002Thin-film photoelectric conversion device and a method of manufacturing the same
A method of manufacturing a thin-film solar cell, comprising the steps of: forming an amorphous silicon film on a substrate; placing a metal element that accelerates the crystallization of silicon in contact with the surface of the amorphous silicon film; subjecting...
07/11/2006
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