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| Number | Title | Issue Date |
| 8187929 | Mask level reduction for MOSFET A method of fabricating a thin film transistor for an active matrix display using reduced masking operations includes patterning a gate on a substrate. A gate dielectric is formed over the gate and a semiconducting metal oxide is deposited on the gate dielectric. A ... | 05/29/2012 |
| 8183102 | Semiconductor device and manufacturing method thereof To improve field effect mobility of an inverted-staggered TFT using amorphous silicon. In an inverted-staggered TFT, a thin amorphous semiconductor layer which is made to have n-type conductivity is formed between a gate insulating film and an amorphous semiconducto... | 05/22/2012 |
| 8158469 | Method of fabricating array substrate A method of fabricating an array substrate includes forming a gate line and a gate electrode; forming a gate insulating layer, an intrinsic amorphous silicon layer, an inorganic material insulating layer and a heat transfer layer on the gate line and the gate electr... | 04/17/2012 |
| 8158470 | Thin film transistor substrate and method of manufacturing thereof A thin film transistor substrate and a method of manufacturing the thin film transistor substrate comprises forming a gate line and a data line intersecting each other with a gate insulating layer interposed and defining a pixel area on the substrate, a thin film tr... | 04/17/2012 |
| 8143116 | Thin film transistor array substrate and manufacturing method thereof A thin film transistor array substrate includes a gate line disposed on a substrate, the gate line comprising a gate electrode including a lower film and an upper film thicker than the lower film, a gate insulating layer formed on the gate line, a semiconductor laye... | 03/27/2012 |
| 8143115 | Method for manufacturing thin film transistor using oxide semiconductor and display apparatus A thin film transistor is manufactured by forming a gate electrode on a substrate, forming a first insulating film on the gate electrode, forming an oxide semiconductor layer on the first insulating film with an amorphous oxide, patterning the first insulating film,... | 03/27/2012 |
| 8138032 | Method for manufacturing thin film transistor having microcrystalline semiconductor film A thin film transistor includes, over a substrate having an insulating surface, a gate insulating layer covering a gate electrode; a semiconductor layer which includes a plurality of crystalline regions in an amorphous structure and which forms a channel formation r... | 03/20/2012 |
| 8133773 | Apparatus and method for reducing photo leakage current for TFT LCD In one aspect of the invention, the method of forming a TFT array panel includes forming a patterned first conductive layer on a substrate, forming a gate insulating layer on the patterned first conductive layer and the substrate, forming a patterned semiconductor l... | 03/13/2012 |
| 8119468 | Thin film transistor and method for manufacturing the same Disclosed is a thin film transistor which includes, over a substrate having an insulating surface, a gate insulating layer covering a gate electrode; a semiconductor layer which functions as a channel formation region; and a semiconductor layer including an impurity... | 02/21/2012 |
| 8110453 | Low temperature thin film transistor process, device property, and device stability improvement A method and apparatus for forming a thin film transistor is provided. A gate dielectric layer is formed, which may be a bilayer, the first layer deposited at a low rate and the second deposited at a high rate. In some embodiments, the first dielectric layer is a si... | 02/07/2012 |
| 8093112 | Method for manufacturing display device A method for manufacturing display devices including thin film transistors with high reliability in a high yield is provided. A gate insulating film is formed over a gate electrode; a microcrystalline semiconductor is formed over the gate insulating film; the microc... | 01/10/2012 |
| 8093113 | Array substrate for LCD and method of fabrication thereof A liquid crystal display array substrate. A trench is in a substrate. A gate, a gate dielectric layer, a semiconductor layer and a doped semiconductor layer are disposed in the trench, wherein the semiconductor layer comprises a channel. A source electrode and a dra... | 01/10/2012 |
| 8058115 | Method of fabricating organic thin film transistor using surface energy control Provided is a method of fabricating an organic thin film transistor (OTFT) using surface energy control. The method changes a polarity of a gate insulating layer to a polarity of a semiconductor channel layer to be formed on the gate insulating layer by controlling ... | 11/15/2011 |
| 8053293 | Method of manufacturing a display substrate A display substrate includes a pixel, a signal transmission line, a first insulating layer and a test signal input part. The pixel is on an insulating substrate. The signal transmission line is on the insulating substrate to transmit an image signal. The first insul... | 11/08/2011 |
| 8053294 | Manufacturing method of thin film transistor by controlling generation of crystal nuclei of microcrystalline semiconductor film It is an object to control quality of a microcrystalline semiconductor film or a semiconductor film including crystal grains so that operation characteristics of a semiconductor element typified by a TFT can be improved. It is another object to improve characteristi... | 11/08/2011 |
| 8053295 | Liquid crystal display device and method of fabricating the same A liquid crystal display device includes a plurality of gate lines and data lines crossing each other to define a plurality of pixel regions, a plurality of thin film transistors, each disposed in one of the pixel regions, and a plurality of pixel electrodes, each d... | 11/08/2011 |
| 8021937 | Array substrate including thin film transistor and method of fabricating the same A method of fabricating an array substrate includes: forming a gate line and a gate electrode connected to the gate line; forming a gate insulating layer on the gate line and the gate insulting layer; sequentially forming an intrinsic amorphous silicon pattern and a... | 09/20/2011 |
| 8017462 | Method of making a liquid crystal display device capable of increasing capacitance of storage capacitor A thin film transistor substrate and a fabricating method simplify a process and enlarge a capacitance value of a storage capacitor without any reduction of aperture ratio. A transparent first conductive layer and an opaque second conductive layer of a double-layer ... | 09/13/2011 |
| 8008139 | Method of manufacturing thin film transistor array substrate A simplified method of manufacturing a thin film transistor array substrate is disclosed. The method includes: forming gate electrodes, gate lines and gate pads on a substrate with the use of a first mask; forming a gate insulation film, a semiconductor layer, and a... | 08/30/2011 |
| 7998801 | Manufacturing method of thin film transistor having altered semiconductor layer Decrease of the off-state current, increase of the on-state current, and reduction of variations of electrical characteristics. A method for manufacturing a channel-etched inversed staggered thin film transistor includes the following steps: removing, by first dry-e... | 08/16/2011 |
| 7993993 | Display device, manufacturing method thereof, and television receiver The present invention discloses a method for manufacturing a display device comprising the steps of forming a first film pattern using a photosensitive material over a substrate, forming a second film pattern in such a way that the first film pattern is exposed by b... | 08/09/2011 |
| 7981737 | Thin film transistor array panel and method for manufacturing the same A thin film transistor array panel according to the present invention includes: a gate line formed on a substrate and including a gate electrode; a gate insulating layer formed on the gate electrode; a mold layer formed on the gate insulating layer and having an ope... | 07/19/2011 |
| 7977175 | Array substrate for liquid crystal display device and method of fabricating the same An array substrate for a liquid crystal display device includes a gate line and a data line crossing each other on a substrate to define a pixel region, an insulating layer between the gate line and the data line, a gate electrode extending from the gate line, and a... | 07/12/2011 |
| 7968388 | Thin-film device, method for manufacturing thin-film device, and display A method for manufacturing a thin-film device includes forming a separation layer on a substrate, forming a base insulating layer on the separation layer, forming a thin-film device layer on the base insulating layer, bonding a transfer layer including the base insu... | 06/28/2011 |
| 7968389 | Fabrication methods of thin film transistor substrates Methods for manufacturing thin film transistor arrays utilizing three steps of lithography and one step of laser ablation while the lithography procedure is used four to five times in conventional processes are disclosed. The use of the disclosed methods assists in ... | 06/28/2011 |
| 7960221 | Thin film transistor substrate and method of manufacturing the same and mask for manufacturing thin film transistor substrate A thin film transistor substrate, wherein the moving area of electrons between source and drain electrodes of a thin film transistor (TFT) is minimized, the moving distance of electrons is increased, and the sizes of capacitors defined by a gate electrode together w... | 06/14/2011 |
| 7960220 | Method of forming polysilicon, thin film transistor using the polysilicon, and method of fabricating the thin film transistor A method of forming polysilicon, a thin film transistor (TFT) using the polysilicon, and a method of fabricating the TFT are disclosed. The method of forming the polysilicon comprises: forming an insulating layer on a substrate; forming a first electrode and a secon... | 06/14/2011 |
| 7955915 | Organic field effect transistor and method of manufacturing the same The present invention discloses an organic field effect transistor and a manufacturing method thereof. The organic field effect transistor comprises a top-contact type or a bottom-contact type, and the manufacturing method thereof comprises the following steps: a su... | 06/07/2011 |
| 7947544 | Method of manufacturing semiconductor device, film deposition method, and film deposition apparatus An object is to provide a film deposition apparatus in which the amount of leakage from the outside of the chamber to the inside of the chamber is reduced. Even if leakage occurs from the outside of the chamber to the inside of the chamber, oxygen and nitrogen inclu... | 05/24/2011 |
| 7910414 | Method of fabricating array substrate A method of fabricating an array substrate includes sequentially forming a first metal layer, a first inorganic insulating layer and an intrinsic amorphous silicon layer on a substrate, the first metal layer including a first metallic material layer and a second met... | 03/22/2011 |
| 7902006 | Method of manufacturing a thin film transistor array substrate In manufacturing a thin film transistor array substrate, a passivation film is formed over the transistors. A first photoresist pattern is formed over the passivation film, with a first portion partially overlying at least one source/drain electrode of each transist... | 03/08/2011 |
| 7879662 | Thin film transistor, thin film transistor substrate including the same and method of manufacturing the same A thin film transistor showing desirable contact characteristics during contact with indium tin oxide (ITO) or indium zinc oxide (IZO), in which a first conductive pattern including a gate electrode and a second conductive pattern including a source electrode and a ... | 02/01/2011 |
| 7851281 | Manufacturing method of flexible semiconductor device and flexible semiconductor device A layered film of a three-layer clad foil formed with a first metal layer 23, a second metal layer 25, and an inorganic insulating layer 35 interposed therebetween is prepared. After the second metal layer 25 is partially etched to form a... | 12/14/2010 |
| 7846787 | Method of manufacturing transistor and method of manufacturing organic electroluminescence display using the same A method of manufacturing a transistor and a method of manufacturing an organic electroluminescence display are disclosed. When an amorphous silicon layer is crystallized, a silicon oxide layer formed on a polysilicon layer is subsequently patterned. Impurity ions a... | 12/07/2010 |
| 7838350 | Bottom-gate sonos-type cell having a silicide gate A bottom-gate thin film transistor having a silicide gate is described. This transistor is advantageously formed as SONOS-type nonvolatile memory cell, and methods are described to efficiently and robustly form a monolithic three dimensional memory array of such cel... | 11/23/2010 |
| 7838351 | Thin film transistor manufacturing method, thin film transistor and display device using the same A thin film transistor manufacturing method includes the steps of: forming a gate electrode, gate insulating film and amorphous silicon film in succession on an insulating substrate; forming a channel protective film only in the region which will serve as a channel ... | 11/23/2010 |
| 7833849 | Method of fabricating a semiconductor structure including one device region having a metal gate electrode located atop a thinned polygate electrode A method of fabricating semiconductor structure is provided in which at least one nFET device and a least one pFET device are formed on a semiconductor substrate. Each device region formed includes a dielectric stack that has a net dielectric constant equal to or gr... | 11/16/2010 |
| 7824972 | Producing a thin film transistor substrate by using a photoresist pattern having regions of different thicknesses A thin film transistor substrate that has reduced production cost and defect rate is presented. The thin film transistor substrate includes a gate wiring line formed on an insulating substrate and including a gate electrode, a data wiring line formed on the gate wir... | 11/02/2010 |
| 7816192 | Thin film transistor substrate and fabricating method thereof The present invention relates to a thin film transistor substrate and a fabricating method thereof. The thin film transistor according to one embodiment of the present invention comprises: a gate wire and a data wire formed to cross each other on an insulating subst... | 10/19/2010 |
| 7816193 | Method for fabricating a pixel structure of a liquid crystal display A method for fabricating a pixel structure of a liquid crystal device is provided. The method comprises providing a substrate defining a thin film transistor (TFT) region and a display region thereon. An opaque conductive layer is formed on the TFT region, and a tra... | 10/19/2010 |
