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| Number | Title | Issue Date |
| 7293986 | Vestibule assembly for a heat treatment furnace The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove... | 11/13/2007 |
| 7192271 | Method and cooling device for the subracks in a chamber furnace The invention relates to a ring furnace pit (2) cooling method, comprising the production of a flux F of cooling fluid inside the pit (2) and the flow of at least a part Fr of said flux F in a roughly vertical manner along determined surfaces of the wa... | 03/20/2007 |
| 7166187 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling The present invention is directed to a semiconductor thermal processing system and an apparatus for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a semiconductor thermal processing system and associated apparatus and ... | 01/23/2007 |
| 7161663 | Lithographic apparatus In an immersion-type lithographic apparatus, in which a surface of a substrate is immersed in liquid during an exposure operation, the substrate is held against a substrate table. On completion of the exposure operation, the substrate is lifted clear of the substrat... | 01/09/2007 |
| 7104789 | Wall structure for carbon baking furnace A carbon baking furnace having spaced-apart, hollow flue walls defining a soaking pit therebetween. Each of the flue walls is formed of refractory bricks and has a pit face facing the pit and a flue face facing an inner flue gas passage. A coating is provided on the... | 09/12/2006 |
| 7037409 | Method of hot-repairing the heating flues of a coke-oven battery and device for carrying out said method A method and a device for the hot-repairing of the heating flues of a coke-oven battery according to which the completed sections of a heating flue still under construction are heated by means of a heated gas. The heated gas comprises the air usually provided for co... | 05/02/2006 |
| 6905333 | Method of heating a substrate in a variable temperature process using a fixed temperature chuck A method is provided for heating a substrate in a process chamber using a heated chuck. In accordance with the method, the substrate is lowered onto the chuck and heated to a first temperature less than a temperature of the chuck. The substrate is then raised away f... | 06/14/2005 |
| 6793844 | Heat absorbing temperature control devices and method The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are gene... | 09/21/2004 |
| 6780345 | Heat absorbing temperature control devices and method The increase of temperature of heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as lithium bicarbonate, sodium bicarbonate, potassium bicarbonate, magnesium bicarbonate, calci... | 08/24/2004 |
| 6773623 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Aldehyde in an amount sufficient to effect the required heat absorption. Where the heat generating conditions are genera... | 08/10/2004 |
| 6769908 | Wafer heat-treatment system and wafer heat-treatment method A wafer heat-treatment system for processing a wafer by a high-temperature heat-treatment process and cooling the heat-treated wafer, comprises walls surrounding a closed space placing the wafer and having a hollow sealing a gas therein, and a pressure-regulating un... | 08/03/2004 |
| 6746238 | Cooling system for reducing particles pollution The present invention relates to a cooling system of a furnace, and more particularly, to a multi-cycle cooling system, located by the furnace door. The multi-cycle cooling system comprises the first gas cooling cycle, the second gas cooling cycle, the first liquid ... | 06/08/2004 |
| 6673260 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Carbonate Salts in an amount sufficient to effect the required heat absorption. Where the heat generating con... | 01/06/2004 |
| 6652770 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Organic Acids in an amount sufficient to effect the required heat absorption. Where the heat generating condi... | 11/25/2003 |
| 6638444 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Hydrated Salt in an amount sufficient to effect the required heat absorption. Where the heat generating condi... | 10/28/2003 |
| 6572368 | Method and apparatus for cooling a furnace A method and apparatus for accelerated cooling of a furnace such as a furnace containing a susceptor. Cooling gases are split whereby a first percentage are provided to cool the furnace while a second percentage are provided to assist in cooling the heate... | 06/03/2003 |
| 6558568 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydroxide such as Lithium Hydroxide, Sodium Hydroxide, Potassium Hydroxide, Magnesium Hydroxide, Calcium Hy... | 05/06/2003 |
| 6435868 | Multi-function chamber for a substrate processing system A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition be... | 08/20/2002 |
| 6367288 | Method and apparatus for preventing burner-hole build-up in fused silica processes In furnaces for producing high purity fused silica glass boules, glass particles have a tendency to build-up adjacent the burner hole rim. It was discovered that unburned furnace gases containing silica particles where re-circulated in the furnace close t... | 04/09/2002 |
| 6352430 | Method and apparatus for cooling a CVI/CVD furnace The invention relates to method and apparatus for cooling a furnace configured for processing refractory composites. More specifically, the invention is directed to method and apparatus for cooling a furnace more rapidly than prior art methods. According ... | 03/05/2002 |
| 6328561 | Method for cooling a furnace, and furnace provided with a cooling device A furnace includes a core tube that has an elongate boundary wall and is configured to accommodate wafers for processing the wafers in a treatment atmosphere. The furnace includes a cooling chamber defined between the elongate boundary wall and an outer c... | 12/11/2001 |
| 6264854 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing Boric acid in an amount sufficient to effect the required heat absorption. Where the heat generating conditio... | 07/24/2001 |
| 6261475 | Heat absorbing temperature control devices and methods The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a salt of an organic acid such as lithium formate and its hydrates, beryllium formate and its hydrates, sodiu... | 07/17/2001 |
| 6241910 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an aldehyde such as formaldehyde (methanol), acetaldehyde (ethanal), propionaldehyde (propanal), n-butyraldeh... | 06/05/2001 |
| 6241909 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a hydrated salt such as Lithium Chloride, Magnesium Chloride, Magnesium Sulfate, Sodium Sulfate, Aluminum Oxi... | 06/05/2001 |
| 6238208 | Method and apparatus for cooling furnace A method for cooling the heating furnace during the dormant stage of the heating furnace; said method surely and sufficiently shortens the cooling time of the heating furnace irrespective of seasons such as summer or winter, and yet, without damaging the ... | 05/29/2001 |
| 6238591 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing an organic acid such as formic acid, acetic acid, propanoic acid, butyric acid and the mixtures thereof, in a... | 05/29/2001 |
| 6235216 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a bicarbonate salt, such as Lithium Bicarbonate, Sodium Bicarbonate, Potassium Bicarbonate, Magnesium Bicarbo... | 05/22/2001 |
| 6224784 | Heat absorbing temperature control devices and method The increase of temperature in heat sensitive devices during heat generating conditions is prevented through the absorption of heat, by providing a carbonate salt, such as Lithium Carbonate and its hydrates, Sodium Carbonate and its hydrates, Potassium Ca... | 05/01/2001 |
| 6129256 | Reflow furnace for an electronic assembly The invention provides a reflow furnace for an electronic assembly. The electronic assembly comprises a printed circuit board and a device on the printed circuit board. The printed circuit board has solder at a first area near the device and a metallic su... | 10/10/2000 |
| 5788484 | Rapid cycle treatment oven The invention provides an oven which can be used to rapidly heat and cool a workpiece. In one embodiment, the oven includes a first duct which defines an initial leg of an enclosed air flow path and which has an inner panel and a heat exchanger. This firs... | 08/04/1998 |
| 5584934 | Method and apparatus for preventing distortion of horizontal quartz tube caused by high temperature The present invention relates to an improved equipment in semiconductor processing. The invention includes a horizontal quartz tube surrounded with heating element for processing wafers, an inlet pipe of a gas injector mounted at the center of the closed ... | 12/17/1996 |
| 5447431 | Low-gas temperature stabilization system The temperature of articles in an "environmental" chamber is stabilized by evacuation of the "environmental" chamber, after having stabilized the temperature of such an article to approximate that of a controlled-temperature member spaced from the article... | 09/05/1995 |
| 5239612 | Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat A method of resistance heating using a graphite container having a graphite body and a pyrolytic boron nitride coating in which a metal charge of predetermined weight is deposited over the coating and the container is heated by the application of a variab... | 08/24/1993 |
| 5147083 | Method and apparatus for convection brazing of aluminum heat exchangers A convection braze furnace for brazing aluminum heat exchangers in an inert gas rich atmosphere includes entrance and exit vestibules forming atmosphere barriers of suspended stainless steel strips. The interior of the braze furnace is divided into multip... | 09/15/1992 |
| 4910684 | Method of controlling a rotary kiln during start-up To facilitate a smooth and quick start-up of a rotary kiln, a Fuzzy Logic Control system is proposed, the principal feature of which is to mandate control actions to decrease the specific heat consumption along a straight line from an initial high value t... | 03/20/1990 |
| 4900333 | Method of carrying out a gas combustion process with recovery of a part of the heat present in the combustion gases A method of carrying out a gas combustion process with recovery of the heat from the combustion gases, which comprises passing said gases during the stationary condition of the process through a recuperator in which a part of the heat released is used for... | 02/13/1990 |
| 4859175 | Apparatus and process for optimizing combustion in chamber-type furnaces for baking carbonaceous blocks The invention concerns a process and an apparatus for optimizing combustion in a furnace which has open chambers, referred to as a ring furnace, for the baking of carbonaceous blocks, the furnace comprising a plurality of preheating, baking and cooling ch... | 08/22/1989 |
| 4834646 | Process for cooling fired products in a kiln A process is provided for cooling fired products such as tiles in a kiln by repeating a cooling step to cool down said products, the cooling step comprising blowing a cooling gaseous fluid, e.g., cooling air, to the fired products in the kiln, alternately... | 05/30/1989 |
| 4761204 | Chemical recovery process using break up steam control to prevent smelt explosions An improvement in a chemical recovery process in which a hot liquid smelt is introduced into a dissolving tank containing a pool of green liquor. The improvement comprises preventing smelt explosions in the dissolving tank by maintaining a first selected ... | 08/02/1988 |
