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| Number | Title | Issue Date |
| 8105078 | Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same A heat treatment jig for semiconductor silicon substrates is configured such that a cristobalitized oxide film is formed in a region where the cristobalitized oxide film is in contact with a silicon substrate backside. When said heat treatment jig is used, generatio... | 01/31/2012 |
| 7350378 | Method for producing rotationally symmetrical quartz glass crucibles In a device (5) for the manufacture of a quartz glass crucible (2), one section (14, 15) of a wall (13) of the rotating quartz glass crucible (2) is heated at one time by means of at least two electrode arrangements (7, 8) d... | 04/01/2008 |
| 7204955 | Casting ladle A casting ladle has a body (2) with a base (3) and walls (4, 6, 8) made of a laminated composite ceramic material that includes multiple layers of a woven fiber reinforcing fabric embedded in a ceramic matrix. A rigid support element (20)... | 04/17/2007 |
| 7195479 | Hot liner insertion/removal fixture A fixture (30) adapted to permit the heated exchange of a liner (14) from an operating vertical furnace (10). The fixture is adapted to secure to the base of the liner (14) to both unlock and lower the heated liner, such as a silicon carb... | 03/27/2007 |
| 7166845 | Method of enhancing performance of cerium doped lutetium yttrium orthosilicate crystals and crystals produced thereby A method for enhancing the light yield of a single crystal of cerium doped lutetium yttrium orthosilicate (LYSO) in response to irradiation with high energy radiation includes diffusing oxygen into the crystal by heating the crystal for a period of time in an ambien... | 01/23/2007 |
| 7160387 | High purity silica crucible by electrolytic refining, and its production method and pulling method This invention provides a high purity silica crucible having low impurity concentration in its inner portion, and its production method. The crucible, in which at least each content of Na and Li being contained in the depth of 1 mm from the inside surface is less th... | 01/09/2007 |
| 7151261 | Method of enhancing performance of cerium doped lutetium orthosilicate crystals and crystals produced thereby A method for enhancing the light yield of a single crystal of cerium doped lutetium orthosilicate (LSO) in response to irradiation with high energy radiation includes diffusing oxygen into the crystal by heating the crystal for a period of time in an ambient contain... | 12/19/2006 |
| 7147910 | Pyrolytic boron nitride crucible and method A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide in a suita... | 12/12/2006 |
| 7118789 | Silica glass crucible A silica glass crucible is manufactured by introducing into a rotating crucible mold bulk silica grain to form a bulky wall including a bottom wall and a side wall. After heating the interior of the mold to begin to fuse the bulk silica grains, an inner silica grain... | 10/10/2006 |
| 6924012 | Pyrolytic boron nitride double container and manufacture thereof A pyrolytic boron nirtride double container for a source of molecular beams used in molecular beam epitaxy, wherein the transmissivity of an inner container of the pyrolytic boron nitride double container with respect to light having a wave number of 2600 cm−... | 08/02/2005 |
| 6916370 | Quartz glass crucible for pulling up silicon single crystal and method for producing the same An object of the invention is to provide a quartz glass crucible for pulling up silicon single crystal and a method for producing the same, suitable for improving the productivity of the crucible and the quality of the silicon single crystal, which, by forming a cry... | 07/12/2005 |
| 6841210 | Multilayer structured quartz glass crucible and method for producing the same Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a transluc... | 01/11/2005 |
| 6755911 | Crucible made of carbon fiber-reinforced carbon composite material for single crystal pulling apparatus A crucible 1 made of a C/C composite material for use in single crystal pulling, the crucible 1 having a lateral cylindrical portion 11 and a bottom portion 12 integrally formed as multiple layers wound by a filament winding method, in wh... | 06/29/2004 |
| 6670025 | Pyrolytic boron nitride crucible and method A method of forming a pyrolytic boron nitride (PBN) article and an article having layers of PBN separated by layers of PBN having a dopant of sufficient concentration to induce peeling, the steps of introducing vapors of ammonia and a gaseous boron halide... | 12/30/2003 |
| 6604941 | Refractory crucibles and molds for containing reactive molten metals and salts Refractory ceramics and composite materials consisting of nitrides, mixed nitrides and oxides, and oxynitrides of Group IV metals Hf, Zr, Ti, and Group III metals Sc, Y, and lanthanides La through Lu, are used to form refractory articles, or as coatings f... | 08/12/2003 |
| 6574991 | Pure fused silica, furnace and method An article of relatively pure silica, and a furnace and method of producing the article. The article is produced by collecting molten silica particles in a refractory furnace in which at least a portion of the refractory has been exposed to a halogen-cont... | 06/10/2003 |
| 6533993 | Variable height liner system A melting liner for an induction melting furnace includes an integral foot portion for locating a lip portion of the melting liner in a convenient position for pouring molten metal.... | 03/18/2003 |
| 6422861 | Quartz fusion furnace and method for forming quartz articles A crucible for melting a silica for fusion of said silica into a desired shape. The crucible having a main body with inner and outer surfaces comprised of a refractory material. In addition, the inner surface adjacent at least a melting zone of the furnac... | 07/23/2002 |
| 6200385 | Crucible for growing macrocrystals A crucible 40 having an inner surface 42 not wetted by a melt which shrinks when it solidifies is provided with indentations 41 in the walls of the crucible to support an ingot grown in it. Supporting the crystal provides a gap between the bottom of the i... | 03/13/2001 |
| 6139983 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same This invention relates to a corrosion-resistant member having a resistance to plasma of a halogen based corrosive gas, which comprises a main body and a corrosion-resistant layer formed on a surface of the main body and containing a fluoride of at least o... | 10/31/2000 |
| 6136092 | Quart crucible with large diameter for pulling single crystal and method of producing the same A crucible with 22 inches or more in inner diameter, which has a small deformation of the body under exposure to abundant heat radiation during pulling a single crystal, and which has no practical problem, and a method of producing the same are disclosed.... | 10/24/2000 |
| 6120286 | Vaporizer boat for metal vaporizing The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slig... | 09/19/2000 |
| 6057030 | Porous ceramic body and kiln furniture made from a porous ceramic body A porous ceramic body having a ceramic framework is produced having a surface roughness of about 40 microns or less. The ceramic body has a plurality of pores where each pore is interconnected with at least one adjacent pore. The ceramic body is made from... | 05/02/2000 |
| 5989021 | Quartz crucible with large diameter for pulling single crystal and method of producing the same A large diameter quartz crucible with an inner diameter of 22 inches or more comprises an opaque silica glass outer layer having bubbles of 10 μm to 250 μm in diameter and 5 mm to 20 mm in thickness and a transparent silica glass inner layer having 0.5%... | 11/23/1999 |
| 5934900 | Refractory nitride, carbide, ternary oxide, nitride/oxide, oxide/carbide, oxycarbide, and oxynitride materials and articles Refractory ceramics and composite materials consisting of nitrides, carbides, mixed carbides and oxides, oxycarbides, mixed nitrides and oxides, and oxynitrides of Group IVB metals Hf, Zr, and Ti, Group IIA metals Be, Mg, Ca, Sr, and Ba, and Group IIIB me... | 08/10/1999 |
| 5885071 | Quartz glass crucible for pulling single crystal In order to reduce concentrations of impurities in an inner layer of a quartz crucible for pulling a silicon single crystal which comprises an outer layer made of quartz glass and an inner layer formed on the inner surface of the outer layer, a migration-... | 03/23/1999 |
| 5882807 | Jig for heat treatment and process for fabricating the jig A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 μm or l... | 03/16/1999 |
| 5495550 | Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating A flash evaporator vaporization vessel for flash evaporating metal under conditions of repeated thermal cycling having a graphite body, an outer layer of pyrolytic boron nitride and an intermediate layer of a material selected from the group consisting of... | 02/27/1996 |
| 5493630 | Pyrolytic boron nitride coated flash evaporator A resistance heated evaporator includes a body of graphite having a generally rectangular geometry with opposite ends each of which has four sides. A coating of pyrolytic boron nitride covers substantially the entire surface of three of the sides at each ... | 02/20/1996 |
| 5447803 | Method for forming titanium nitride film and vessel coated by same A titanium nitride film forming method employing an ion-plating method to produce good decorative properties, to a titanium nitride film forming method which can maintain the stability of the color tone even under high temperatures, and to the vessel obta... | 09/05/1995 |
| 5391229 | Apparatus for chemical vapor deposition of diamond including graphite substrate holders Graphite substrate holders for employment in apparatus for chemical vapor deposition of diamond decrease the tendency of the formed diamond sheets to crack or shatter upon separation from the substrates. Said holders and the substrates therein preferably ... | 02/21/1995 |
| 5314599 | Barrier layer against fluoride diffusion in linings of aluminum reduction cells A barrier layer for prevention of solid fluorides penetration, e.g. NaF, from the interior of an aluminum production cell holding a fluoride-containing melt into a refractory layer intended to provide heat and electrical insulation for the cell. The barri... | 05/24/1994 |
| 5158750 | Boron nitride crucible A boron nitride crucible having a closed end, an open end, an internal surface and an external surface, and wherein at least a portion of the external surface, preferably proximate the open end of the crucible, has a duplex coating comprising an undercoat... | 10/27/1992 |
| 5120029 | Linings for crucible furnaces and transfer vessels and method of applying same A crucible furnace or molten metal transfer vessel is provided with a composite lining having an outer insulating liner and an inner cast working liner. The insulating liner has a high insulating characteristic and the working liner has a high heat-retent... | 06/09/1992 |
| 4971772 | High-purity lining for an electric low shaft furnace An inside lining for the reaction chamber of an electric low shaft furnace, particularly for producing high-purity silicon from silicon oxide by carbothermic reduction, is provided which has a melting crucible of dense graphite and a thermal insulation, w... | 11/20/1990 |
| 4956208 | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially f... | 09/11/1990 |
| 4913652 | Pyrolytic boron nitride crucible and method for producing the same A pyrolytic boron nitride crucible is provided. The crucible contains at least five wall layers consisting of first and second wall layers. The thickness of each of the first wall layers is 5 to 100 microns and the thickness of each of the second wall lay... | 04/03/1990 |
| 4911896 | Fused quartz member for use in semiconductor manufacture A composite fused quartz material is disclosed for processing semiconductor grade silicon material in an improved manner. The modified vitreous material includes a disperse phase of fine size silicon metal particles which are distributed in preselected re... | 03/27/1990 |
| 4865682 | Growth method of an organic compound single crystal and a boat used therefor In the boat growth method of the IIIb-Vb group compound, the quartz boat is tridymitized on at least the surface thereof so as to prevent wetting of the boat due to the melt of the compound and hence to enhance the yield of a single crystal.... | 09/12/1989 |
| 4823359 | Furnance having dense refractory oxide liner A refractory product is shown in the form of a dense sintered alumina-chromia, zirconia-alumina-silica, zirconia-alumina body, or zirconia-chromia-alumina having less than about 8% of homogeneously distributed closed porosity formed by sintering an intima... | 04/18/1989 |
