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| Number | Title | Issue Date |
| 7368173 | Siloxane resin-based anti-reflective coating composition having high wet etch rate Herein we disclose a composition, comprising a siloxane resin having the formula (HSiO3/2)a. (SiO4/2)b(HSiX3/2)c(SiX4/2)d, wherein each X is independently —O—, —OH, or —O... | 05/06/2008 |
| 7326523 | Low refractive index polymers as underlayers for silicon-containing photoresists A new underlayer composition that exhibits high etch resistance and improved optical properties is disclosed. The underlayer composition comprises a vinyl or acrylate polymer, such as a methacrylate polymer, the polymer comprising at least one substituted or unsubst... | 02/05/2008 |
| 7300884 | Pattern forming method, underlayer film forming composition, and method of manufacturing semiconductor device According to an aspect of the invention, there is provided a pattern forming method comprising forming an underlayer film on a film to be worked which has been formed on a semiconductor substrate, subjecting the underlayer film to an oxidizing treatment, forming an ... | 11/27/2007 |
| 7285781 | Characterizing resist line shrinkage due to CD-SEM inspection A CD-SEM (critical dimension-scanning electron microscope) system may utilize a technique for characterizing and reducing shrinkage carryover due to CD-SEM measurements. The system may identify the affects of CD-SEM measurements on the resist and adjust the operatin... | 10/23/2007 |
| 7229569 | Etching reagent, and method for manufacturing electronic device substrate and electronic device The present invention provides an etching agent that is able to etch a Cu film by a simple chemical etching method such as an immersion method when the low resistance Cu film is used for a wiring material, while allowing time-dependent changes of the etching rate to... | 06/12/2007 |
| 6969541 | Method and device for structuring a surface to form hydrophilic and hydrophobic regions A method for structuring a surface includes, by an assigned modification device, creating a latent structure of at least a first layer of the surface, which has a polymer therein, so as to form hydrophilic and hydrophobic regions for producing a printing form for of... | 11/29/2005 |
| 6899814 | Creating a mask for producing a printing plate In order to simplify the sequence of creating a mask, in particular for producing a printing plate, and at the same time to improve the quality of the printing plate produced by means of a mask, the use of laser-induced thermal transfer is provided. The structure in... | 05/31/2005 |
| 6890688 | Lithographic template and method of formation and use This invention relates to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template (10, 110, 210) is formed having a substrate (12, 112, 212) and a... | 05/10/2005 |
| 6680214 | Artificial band gap A method is disclosed for the induction of a suitable band gap and electron emissive properties into a substance, in which the substrate is provided with a surface structure corresponding to the interference of electron waves. Lithographic or similar tech... | 01/20/2004 |
| 6566274 | Lithography process for transparent substrates A method of creating an undercut sidewall profile within an opening formed in a positive resist layer disposed upon a transparent substrate includes the step of forming a positive resist layer on the upper surface of the substrate, and optically patternin... | 05/20/2003 |
| 6517977 | Lithographic template and method of formation and use This invention relates to semiconductor devices, microelectronic devices, micro electro mechanical devices, microfluidic devices, and more particularly to a lithographic template, a method of forming the lithographic template and a method for forming devi... | 02/11/2003 |
| 6503692 | Antireflective silicon-containing compositions as hardmask layer Antireflective compositions characterized by the presence of an SiO-containing polymer having pendant chromophore moieties are useful antireflective coating/hardmask compositions in lithographic processes. These compositions provide outstanding optical, m... | 01/07/2003 |
| 6410210 | Semiconductor blocking layer for preventing UV radiation damage to MOS gate oxides A system and apparatus is provided for preventing damage to gate oxide due to ultraviolet radiation associated with semiconductor processes. Included is a substrate and a gate formed on the substrate. The gate includes a gate material layer and a gate oxi... | 06/25/2002 |
| 6291140 | Low-cost photoplastic cantilever A method of manufacturing a cantilever with tip comprising the steps of forming a tip-like indent in a substrate, depositing a photoresist layer which fills said tip-like indent and covers at least a part of said substrate, and photolithographically struc... | 09/18/2001 |
| 6245487 | Methods for enhancing images on relief image printing plates Methods are provided for producing relief images having improved fidelity and resolution. The methods comprise positioning an image-bearing negative transparency closely adjacent and substantially parallel to a layer of a photocurable material; positionin... | 06/12/2001 |
| 6117344 | Method for manufacturing low work function surfaces Methods for fabricating nano-structured surfaces having geometries in which the passage of elementary particles through a potential barrier is enhanced are described. The methods use combinations of electron beam lithography, lift-off, and rolling, imprin... | 09/12/2000 |
| 6057083 | Polymers and photoresist compositions The present invention provides novel polymers and chemically-amplified positive-acting photoresist compositions that contain such polymers as a resin binder component. Preferred polymers of the invention include one or more structural groups that are capa... | 05/02/2000 |
| 5962192 | Photoresists and method for making printing plates Printing plates having a photoresist layer thereon that can be exposed by a computer controller laser have improved sensitivity and do not require a photomask step. We have found photoresists that include a film forming polymer, an organo azide and a phot... | 10/05/1999 |
| 5595785 | Orifice plate for an ink-jet pen Selected portions of the orifice plate surfaces are formed to have wetting and non-wetting surface characteristics for minimizing the accumulation of residual ink on the outer surface of the plate and for enhancing the flow of supply ink to the orifices o... | 01/21/1997 |
| 5580704 | Dye solution for photosensitive lithographic printing plate requiring no fountain solution The present invention provides a dye solution for a photosensitive lithographic printing plate requiring no fountain solution comprising a photosensitive layer and a silicone rubber layer provided in this order on a support, which comprises at least one b... | 12/03/1996 |
| 5500326 | Method of producing master and working pattern plates for etching and photolithographic apparatus therefor In a method of producing master and working pattern plates for etching to form a shadow mask, various etching patterns are needed, for example, a pattern of predetermined holes for passing electron beams, a pattern of register marks necessary for accurate... | 03/19/1996 |
| 5342784 | Electrophotographic lithographic printing plate Provided is an electrophotographic photoreceptor which comprises an electrically conductive support and a photoconductive layer comprising at least an organic photoconductive compound and an alkali and/or alcohol soluble binder resin provided on said supp... | 08/30/1994 |
| 5322763 | Process for making metal ledge on stencil screen A process for making a metal ledge on one side of a metal screen involves exposing through the stencil screen a photoresist layer, removing unexposed photoresist areas, plating the metal stencil screen where the unexposed photoresist has been removed and ... | 06/21/1994 |
| 5185296 | Method for forming a dielectric thin film or its pattern of high accuracy on a substrate A method and apparatus for forming a dielectric thin film or pattern thereof is provided in which a positive or negative resist of a desired pattern if formed on various substrates including a semiconductor substrate by contact of the resist with a liquef... | 02/09/1993 |
| 5147761 | Method for preparing relief image printing plates A method is provided for producing relief images having improved image fidelity and resolution. The method comprises positioning an image bearing negative transparency closely adjacent and substantially parallel to a layer of a photocurable material; posi... | 09/15/1992 |
| 5002857 | Method for manufacturing lithographic printing plates A method for manufacturing lithographic printing plates which comprises developing a presensitized plate for use in making lithographic printing plates imagewise opposed to light with an alkaline developer utilizing an automatic developing machine and the... | 03/26/1991 |
| 4992355 | System for the production of dot-etched lithographic films A system for the preparation of dot etched lithographic films, consisting essentially of a light sensitive silver halide material for tanning development and an etching solution, in which system the light sensitive material of various layers contains at l... | 02/12/1991 |
| 4983478 | Burn-in gumming composition for offset printing plates A burn-in gumming composition for irradiated and developed offset printing plates comprises water and a water-soluble polymer or copolymer for protecting the plate surface during the burning-in step and during long-term storage. The polymer or copolymer u... | 01/08/1991 |
| 4973543 | System for the production of dot-etched lithographic films A system for the preparation of dot etched lithographic films, consisting essentially of a light sensitive silver halide material for tanning development and an etching solution, in which system the light sensitive material of various layers contains at l... | 11/27/1990 |
| 4855198 | Photoengraving articles of zinc-free magnesium-based alloys A photoengraving article is provided formed of an essentially zinc-free magnesium-based alloy which also contains an amount of calcium effective to control lateral etching and improvement the sharpness of the resultant etched pattern. A method of forming ... | 08/08/1989 |
| 4840867 | Positive-working radiation-sensitive recording material with radiation-sensitive 1,2-quinone diazide underlayer and thicker positive-working radiation-sensitive overlayer A radiation-sensitive recording material comprising a support and first and second radiation-sensitive layers is disclosed. The first radiation-sensitive layer comprises a 1,2-quinone diazide as the radiation-sensitive compound and the second radiation-se... | 06/20/1989 |
| 4770897 | Multilayer interconnection system for multichip high performance semiconductor packaging A method for fabricating a multilayer interconnection system that is fully planar with completely sealed and corrosion resistant conductors separated by dielectric material.... | 09/13/1988 |
| 4751162 | Photoengraving articles of zinc-free magnesium-based alloys and methods of producing such articles A photoengraving article is provided formed of an essentially zinc-free magnesium-based alloy which also contains an amount of calcium effective to control lateral etching and improvement the sharpness of the resultant etched pattern. A method of forming ... | 06/14/1988 |
| 4691432 | A method of making a reinforced hard porous ink roll assembly A reinforced hard porous ink roll assembly and a method of making same. The ink roll assembly of the invention comprises a hard porous material suitable for inking, the improvement comprising a hard ink resistant material encompassing a substantial portio... | 09/08/1987 |
| 4592993 | Pattern forming and etching process using radiation sensitive negative resist A process for fabrication of resist comprising a substrate and an overlying radiation sensitive layer, said overlying layer consisting essentially of a specific polymer or copolymer of vinylnaphthalene.... | 06/03/1986 |
| 4555302 | Method and apparatus for ultrasonic etching of printing plates Method and apparatus for etching light-sensitive photopolymerizable surfaces of printing plates. The apparatus includes a bath of etching fluid (32), a conveyor (38,40,42,52) for conveying printing plates (10) in a prescribed path (54), and transducers (4... | 11/26/1985 |
| 4537496 | Method of replenishing a developer for photosensitive plate A method of replenishing a developer during the development of photosensitive plates in a conveyor-type automatic developing machine connected to a replenishing device in which the dissolution of the photosensitive layer in the non-image area of a photose... | 08/27/1985 |
| 4507331 | Dry process for forming positive tone micro patterns A dry process for forming a positive tone micro pattern by coating a substrate with an organic polymer film then with a film of an oxygen etch barrier, selected from the group consisting of films of organometallic, including organosilicon compounds and me... | 03/26/1985 |
| 4468453 | Dry process for forming an image The actinic radiation-exposed or unexposed areas, whichever are relatively low in abrasion resistance, formed in a photosensitive composition layer superimposed on a substrate are selectively removed by blowing an abrasive material against the layer, ther... | 08/28/1984 |
| 4439516 | High temperature positive diazo photoresist processing using polyvinyl phenol This invention is for a photoresist capable of withstanding temperatures in excess of 200° C. without image distortion. The photoresist comprises a high temperature diazo sensitizer, preferably an ester or amide of an o-quinone diazide sulfonic or carbox... | 03/27/1984 |
