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| Number | Title | Issue Date |
| 7176492 | Method for forming ceramic microstructures on a substrate using a mold and articles formed by the method A microstructured assembly including a barrier portions and land portions is described. The microstructures have alternating barrier portions and land portions that have barrier surfaces and land surfaces, respectively. Each barrier surface and land surface is conne... | 02/13/2007 |
| 7115524 | Methods of processing a semiconductor substrate The invention includes methods of processing semiconductor substrates. In one implementation, a semiconductor substrate is provided which has an outer surface. Such surface has a peripheral region received about a peripheral edge of the semiconductor substrate. A la... | 10/03/2006 |
| 7033534 | Method for forming microstructures on a substrate using a mold In a method of making a microstructured assembly, a substantially uniform coating of a curable material is formed on a substrate with the coating defining a leading edge. The coating is contacted with a mold starting at the leading edge to form in the curable materi... | 04/25/2006 |
| 7029798 | Ultrasonic agitation-assisted development of resist layer of master stamper/imprinter A method of forming a topographical pattern in a surface of a resist layer, comprising sequential steps of: (a) providing a substrate having a surface; (b) forming a desired thickness resist material layer on the s... | 04/18/2006 |
| 7022441 | Silver-free black-and-white thermographic materials containing a benzoquinone and methods of imaging Silver-free, aqueous-based direct thermographic materials are designed to have image tone with near neutral density. Without the use of organic silver salts containing reducible silver ions, the image is formed using a color developing agent precursor that releases ... | 04/04/2006 |
| 7022444 | Color image forming method and apparatus, and microcapsule toner for use therewith A color image forming method and apparatus using larger microcapsules each of which contains a plurality of kinds of smaller microcapsules scattered within the larger microcapsule, reacting substances that are mixed with each other to perform a coloring reaction bei... | 04/04/2006 |
| 6962763 | Silver-free black-and-white thermographic materials Silver-free, aqueous-based direct thermographic materials are designed to have image tone with near neutral density. Without the use of organic silver salts containing reducible silver ions, the image is formed using a color developing agent precursor that releases ... | 11/08/2005 |
| 6922907 | Measuring system for recording absolute angular or position values A measuring system for the recording of angular or position values, wherein the scale includes a measurement track with absolute encoding, and which is scanned by a sensor is provided. The scale is composed of at least two segments with similar absolute encod... | 08/02/2005 |
| 6896997 | Method for forming resist pattern A method of forming a resist pattern on a semiconductor substrate, includes forming a resist film on the semiconductor substrate, and supplying a developing solution on the resist film to remove the resist film, wherein a portion of the resist film remains on the se... | 05/24/2005 |
| 6841306 | Polymeric mold for providing a micro-scale part The invention is a developer system for developing a PMMA photoresist having exposed patterns comprising features having both very small sizes, and very high aspect ratios. The developer system of the present invention comprises a developer tank, an intermediate rin... | 01/11/2005 |
| 6806005 | Method and apparatus for forming resist pattern A method of forming a resist pattern on a substrate, comprises the steps of: forming a resist film on the substrate, supplying a developing solution onto the resist film, submerging the substrate and the resist film formed thereon in a rinsing liquid kept in a rinsi... | 10/19/2004 |
| 6617079 | Process and system for determining acceptibility of a fluid dispense A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detec... | 09/09/2003 |
| 6551765 | Coating apparatus, discharge device, and coating method A coating apparatus for forming a film on a surface of a substrate to be coated, comprises a holding table for holding the substrate to be coated, a discharge head, containing a coating solution and formed with a plurality of discharge holes at a portion ... | 04/22/2003 |
| 6517999 | Method of removing photoresist film A method of removing photoresist film with high efficiency of removal and friendliness with the environment while reducing the material consumption and the cost for the ventilation facility, and an apparatus used for the method are provided. Particularly ... | 02/11/2003 |
| 6372389 | Method and apparatus for forming resist pattern A method of forming a resist pattern on a substrate, comprises the steps of: forming a resist film on the substrate, supplying a developing solution onto the resist film, submerging the substrate and the resist film formed thereon in a rinsing liquid kept... | 04/16/2002 |
| 6151103 | Method and system for improved optical imaging in microlithography An improved microlithographic imaging system (100) is disclosed. The system comprises a filter (183) substantially aligned with a first image plane, adjacent to an aperture (185). The filter is formed in response to an image projected by a light source (1... | 11/21/2000 |
| 6092937 | Linear developer The inventive dispenser mechanism uniformly develops a photosensitive layer on a substrate. The mechanism uses a developer head that moves in a substantially linear relative motion with respect to the substrate and dispenses a developer at a controlled ra... | 07/25/2000 |
| 5876875 | Acoustic wave enhanced developer A method and an apparatus are disclosed for enhancing the solution diffusibility of a developing liquid in a semiconductor wafer developing unit through the agitation of the liquid by acoustic power. Two embodiments are described using sonic and ultrasoni... | 03/02/1999 |
| 5849435 | Method for forming a thin uniform layer of resist for lithography A method for forming a layer of resist on a non-planar substrate includes the steps of: dispensing resist onto the substrate; spinning the substrate to spread the resist; and then vibrating the substrate to eliminate voids in the resist. Optionally, the s... | 12/15/1998 |
| 5753390 | Method of preparing dispersions of photographically useful compounds A method is described for preparing a concentrated dispersion of a photographically useful compound ready-for-use in coating solutions of hydrophilic colloid layers of a silver halide photographic material, wherein said compound has at least one ionisable... | 05/19/1998 |
| 5696628 | Method for manufacturing optical components with periodic or quasi-periodic optical properties A method for manufacturing optical components having a periodic or quasi-periodic structure such as diffraction gratings, volume holograms or distributed feedback mirrors in optical fibers. An optical medium is subjected to acoustic waves which induce per... | 12/09/1997 |
| 5654128 | Single resist layer lift-off process for forming patterned layers on a substrate A single resist layer lift-off process for forming patterned layers on a substrate, wherein a post-soak bake is used to control the extent to which chlorobenzene penetrates the resist layer. A post-metallization bake can also be employed to improve lift-o... | 08/05/1997 |
| 5650251 | Process for producing color filter comprising an ultrasonic wave projected perpendicularly to the substrate A color filter is produced through the steps of: forming a layer of a color filter material including a colorant dispersed in a photosensitive resin on a substrate; and pre-baking, exposing and developing the color filter material layer to leave a color f... | 07/22/1997 |
| 5380607 | Thermal imaging method A thermal imaging process comprising the step of imagewise heating a donor element so as to transfer therefrom colored matter onto a contacting receptor element, characterized in that before said imagewise heating said receptor element contains in a layer... | 01/10/1995 |
| 5294505 | Pattern forming method Disclosed herein is a method of forming a thin film pattern on a semiconductor substrate, which comprises a step of forming a photosensitive thin film on a semiconductor substrate, a step of exposing the photosensitive thin film with a fine pattern, a ste... | 03/15/1994 |
| 5116704 | Barrier rib forming method of PDP A barrier rib forming method for a PDP including a process of forming an emulsion layer as a filmed deposition upon a glass substrate having transparent electrodes thereon. Exposing the film to ultraviolet rays to produce electrodes with a proper pattern ... | 05/26/1992 |
| 5096790 | Process of forming hologram and polymeric holographic recording medium with sensitizer A new class of sensitizers for photopolymerizable compositions is disclosed derived from cyclic ketones and tricyclic aminoaldehydes. A preferred compound is cyclopentanone, 2.5-bis[(2,3,6,7-tetrahydro-1H, 5H-benzo [i,j]quinolizin-9-yl)methylene]- ##... | 03/17/1992 |
| 5051295 | Protective film for photo masks and lith films The present invention relates to a durable pattern forming material having a protective film comprising a radiation cured product of a curable compound, comprising a phosphazene of the formula: --{NP(x) (Y)}n -- wherein at least one of x and y is a ... | 09/24/1991 |
| 5034292 | Method of thermally forming images from metastable metal colloids A method of forming visible images on a differentiated background comprises the application of thermal energy to a coating of metastable metal colloid on a support. Thermal energy is able to convert the metastable metal colloid to a stable spheroidal form... | 07/23/1991 |
| 4938994 | Method and apparatus for patch coating printed circuit boards A method and apparatus for premetered "patch" coating discrete, incremental surfaces or substrates, such as printed circuit boards, integrated circuits and the like, with a pre-configured layer of a liquid in which a controlled volume per unit area of the... | 07/03/1990 |
| 4908631 | Ultrasonic pixel printer An ultrasonic pixel printer is disclosed in which ultrasonic energy is applied to a dye receiver layer to cause the dye to melt and/or sublime and transfer to a receiver.... | 03/13/1990 |
| 4879564 | Ultrasonic dye image fusing A thermal printer is disclosed in which ultrasonic energy is converted to heat a dye image in a receiver to cause such dye to fuse into such receiver.... | 11/07/1989 |
| 4814808 | Developing apparatus for photo/pressure sensitive sheet Disclosed is a photo-pressure sensitive recording sheet developing apparatus in which vibratory pressure generated by an ultrasonic wave generating means is applied to a photo/pressure sensitive recording sheet using microcapsules carrying a latent image ... | 03/21/1989 |
| 4672012 | Process for modifying structural profiles in resist layers A process for modifying structural profiles produced by polymerization or depolymerization in resist layers. As a function of the acoustic impedance of the substrate carrying the resist layer, the structures are irradiated with an ultrasonic beam. An ultr... | 06/09/1987 |
| 4652106 | Process and apparatus for developing including use of sound transducers When developing a coating such as for instance a light-sensitive exposed layer on a length or plate of material through ultrasonic agitation, the material is carried at a short distance or closely past a bar or a pipe extending substantially perpendicular... | 03/24/1987 |
| 4612267 | Process for producing structures in resist layers using ultrasonic irradiation A process for the production of structures by the polymerization, or fragmentation of resist layers comprising the steps of effecting an incomplete exposure of the resist layer corresponding to the pattern of the structures, and of fully developing the st... | 09/16/1986 |
| 4521092 | Developing light sensitive plates including use of ultrasonic waves In the developing of light sensitive plates, the plates are passed through a tank of developing liquid which is subject to ultrasonic waves to assist the developing action. The tank is preferably protected from the atmosphere to hinder degradation of the ... | 06/04/1985 |
| 4517267 | Processing machine for printing An apparatus and method of use thereof is provided for use in pigment printing wherein the apparatus provides for regulated and repeatable results in the development of colored photographic pigmented gelatin images.... | 05/14/1985 |
| 4447510 | Process for producing relief copies in light hardenable materials with ultrasonic treatment A process for producing relief copies wherein the light-hardenable layer of a light-hardenable copying material, which contains a photopolymerizable mixture, a photodimerizable polymeric compound or a diazonium salt polycondensation product, is exposed to... | 05/08/1984 |
| 4324849 | Imagewise accelerating equilibration in ultrasonographic recording A process is disclosed for recording an ultrasonic exposure pattern employing an ultrasonographic element containing a support and a recording layer unit. The recording layer unit is placed into contact with a transport liquid and imagewise ultrasonically... | 04/13/1982 |
