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...Chester Carlson was a patent agent who tired of having to make multiple copies of patent applications using the only duplication method available at the time: carbon paper. In 1959 he came up with a new copying system and took it to IBM for evaluation. The "experts" at IBM determined potential sales to be only 5,000 units because people wouldn't want to use a bulky machine when they had carbon paper. Carlson's invention was the xerography process, the company founded on the system is Xerox.

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Class 427/575 - Generated by microwave (i.e., 1mm to 1m)


Subclass of Class 427 - Coating processes
Definition: Processes wherein microwave energy is utilized to activate
No. of patents: 490
Last issue date: 01/24/2012


1                      
NumberTitleIssue Date
8101245Plasma deposition of amorphous semiconductors at microwave frequencies
Apparatus and method for plasma deposition of thin film photovoltaic materials at microwave frequencies. The apparatus avoids deposition on windows or other microwave transmission elements that couple microwave energy to deposition species. The apparatus includes a ...
01/24/2012
7981485Apparatus and method for performing a PCVD process
The present invention relates to an apparatus for carrying out a PCVD process in which one or more doped or undoped glass layers are coated onto the interior of a glass substrate tube. The apparatus comprises an applicator having an inner wall and an outer wall and ...
07/19/2011
7875322Plasma processing method
Pulsated microwaves are supplied to a wave guide tube from a microwave generation unit through a matching circuit. The microwaves are supplied through an inner conductor to a planar antenna member. The microwaves are radiated from the planar antenna member through a...
01/25/2011
7807234Plasma processing method, plasma processing apparatus, and computer recording medium
According to the present invention, plasma oxidation processing and plasma nitridation processing are applied at the same time to the surface of a semiconductor substrate by plasma using a microwave. After forming an insulating film by the plasma oxynitridation proc...
10/05/2010
7776408Method and apparatus for producing single crystalline diamonds
A method and an apparatus for producing one or more single crystalline diamonds. One or more diamond seeds are placed in a substrate holder in a chemical vapor deposition (CVD) chamber. One or more metal discs are then positioned in the chemical vapor deposition cha...
08/17/2010
7435454Plasma enhanced atomic layer deposition system and method
A method for depositing a film on a substrate using a plasma enhanced atomic layer deposition (PEALD) process includes disposing the substrate in a process chamber configured to facilitate the PEALD process, introducing a first process material within the process ch...
10/14/2008
7404991Device and control method for micro wave plasma processing
A microwave is introduced into a process chamber through a waveguide (26) of the plasma process apparatus, thereby generating plasma. A reflection monitor (40) and an electric power monitor (42) monitor the electric power of a reflected wave ref...
07/29/2008
7399500Rapid process for the production of multilayer barrier layers
A process for applying alternating layers by chemical vapor deposition comprises the process steps of depositing an adhesion-promoter layer on a substrate and applying a barrier layer. Alternating layers comprising organic and inorganic materials are deposited alter...
07/15/2008
7368381Methods of forming materials
The invention includes methods of forming films over substrates. A substrate is provided within a reaction chamber, and a mixture is also provided within the chamber. The mixture includes a precursor of a desired material within a supercritical fluid. The precursor ...
05/06/2008
7367119Method for forming a reinforced tip for a probe storage device
Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon ther...
05/06/2008
7361387Plasma enhanced pulsed layer deposition
A process system and a deposition method for depositing a highly controlled layered film on a workpiece is disclosed. The basic component of the apparatus is a pulsing plasma source that is capable of either exciting or not-exciting a first precursor. The pulsing pl...
04/22/2008
7356969Electronically shaded thin film transparent monochromatic liquid crystal display laminated window shading system
An electronically shaded glass window system is described that provides a progressively darkening window, based on either user input or detection of ambient light. This invention is appropriate for use in commercial buildings, residential buildings, public areas and...
04/15/2008
7342716Multiple cavity low-emissivity coatings
Multiple cavity low-emissivity coatings. The coating includes three infrared-reflection film regions, which may each include silver. ...
03/11/2008
7339728Low-emissivity coatings having high visible transmission and low solar heat gain coefficient
Low-emissivity coatings that are highly reflective to infrared radiation. The coating includes three infrared-reflection film regions, which may each include silver. ...
03/04/2008
7336524Atomic probes and media for high density data storage
A device in accordance with embodiments of the present invention comprises a contact probe for high density data storage reading, writing, erasing, or rewriting. In one embodiment, the contact probe can include a silicon core having a conductive coating. Contact pro...
02/26/2008
7323400Plasma processing, deposition and ALD methods
A plasma processing method includes providing a substrate in a processing chamber, the substrate having a surface, and generating a plasma in the processing chamber. The plasma provides at least two regions that exhibit different plasma densities. The method include...
01/29/2008
7323230Coating for aluminum component
A coated aluminum component for a substrate processing chamber comprises an aluminum component having a surface; a first aluminum oxide layer formed on the surface of the aluminum component, the aluminum oxide layer having a surface comprising penetrating surface fe...
01/29/2008
7309630Method for forming patterned media for a high density data storage device
Systems in accordance with the present invention can include a tip contactable with a media, the media including a substrate and a plurality of cells disposed over the substrate, one or more of the cells being electrically isolated from the other of the cells by a m...
12/18/2007
7304263Systems and methods utilizing an aperture with a reactive atom plasma torch
The footprint of a reactive atom plasma processing tool can be modified using an aperture device. A flow of reactive gas can be injected into the center of an annular plasma. An aperture can be positioned relative to the plasma such that the effective footprint of t...
12/04/2007
7303790Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained
Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and...
12/04/2007
7303789Methods for producing thin films on substrates by plasma CVD
Methods are provided to form a thin film reproducibly in a process for forming the thin film on the inner wall surface facing a space formed in a substrate by plasma CVD. A thin film is produced on an inner wall surface of a substrate facing a space formed in the su...
12/04/2007
7301887Methods for erasing bit cells in a high density data storage device
Methods in accordance with the present invention can be applied, in an embodiment, to a media comprising a phase change material to alter a resolved portion of the phase change material to have a resistance different from a resistance of the bulk material. A tip hav...
11/27/2007
7301190Structures and methods to enhance copper metallization
Disclosed structures and methods inhibit atomic migration and related capacitive-resistive effects between a metallization layer and an insulator layer in a semiconductor structure. One exemplary structure includes an inhibiting layer between an insulator and a meta...
11/27/2007
7294404Graded photocatalytic coatings
The invention provides graded photocatalytic coatings. In one aspect, the invention provides a substrate carrying a photocatalytic coating that includes a first graded film region and a second graded film region. The first graded film region has a substantially cont...
11/13/2007
7285506Lamp reflector substrate, glass, glass-ceramic materials and process for making the same
The present invention relates to glass, glass-ceramic materials, lamp reflectors and processes for making them. The glass material has a composition, by weight of the total composition, comprising 56-67% SiO2; 9-22% Al2O3; 3.4-3.8% L...
10/23/2007
7285196Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals
In recent years, copper wiring has emerged as a promising substitute for the aluminum wiring in integrated circuits, because copper offers lower electrical resistance and better reliability at smaller dimensions than aluminum. However, use of copper typically requir...
10/23/2007
7276266Functionalization of carbon nanotubes
Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2 or F2 or CnHm) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, i...
10/02/2007
7276184Surfactant assisted nanomaterial generation process
A process for the preparation of nanoscale particulate material is described comprising: (i) combining one or more functional material to be precipitated as nanoscale particles and one or more surface active material in a compressed CO2 phase with a densi...
10/02/2007
7262505Selective electroless-plated copper metallization
Structures and methods are provided which include a selective electroless copper metallization. The present invention includes a novel methodology for forming copper vias on a substrate, including depositing a thin film seed layer of Palladium (Pd) or Copper (Cu) on...
08/28/2007
7262130Methods for making integrated-circuit wiring from copper, silver, gold, and other metals
Integrated circuits, the key components in thousands of electronic and computer products, include interconnected networks of electrical components. The components are typically wired, or interconnected, together with aluminum wires. In recent years, researchers have...
08/28/2007
7260500Method and apparatus for monitoring and verifying equipment status
An equipment status monitoring system having at least one multi-modal resonator included as a part of a semiconductor processing system and a power source coupled to the at least one multi-modal resonator. The power source is configured to produce a microwave excita...
08/21/2007
7253521Methods for making integrated-circuit wiring from copper, silver, gold, and other metals
Integrated circuits include networks of electrical components that are typically wired, or interconnected, together with aluminum wires. In recent years, researchers have begun using copper in combination with diffusion barriers, rather than aluminum, to form the wi...
08/07/2007
7244475Plasma treatment apparatus and control method thereof
A frequency control circuit (45) controls an oscillation frequency of a second high frequency power source 51 based on a phase difference between a voltage component and a current component measured by a phase difference sensor (41) and an input...
07/17/2007
7244474Chemical vapor deposition plasma process using an ion shower grid
A chemical vapor deposition process is carried out in a reactor chamber with an ion shower grid that divides the chamber into an upper ion generation region and a lower process region, the ion shower grid having plural orifices oriented in a non-parallel direction r...
07/17/2007
7229485Plasma reduction processing of materials
In a process for the reduction of a metalliferous ore or concentrate the ore or concentrate is first prepared into a particulate form. A reaction chamber (3, 103, 203, 301, 401, 503, 603, 702) is then charged with ore or concentrate, a reductant and an input ...
06/12/2007
7226510Film forming apparatus
In a film forming apparatus according to the aerosol deposition method, the thickness of a structure being formed can be controlled accurately. The film forming apparatus includes an aerosol generating part in which raw material powder is to be provided, a compresse...
06/05/2007
7223445Process for the deposition of uniform layer of particulate material
A process for the deposition of particulate material of a desired substance on a surface includes: (i) charging a particle formation vessel with a compressed fluid; (ii) introducing into the particle formation vessel a first feed stream comprising a solvent and the ...
05/29/2007
7220318Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
A semiconductor device manufacturing apparatus which uses a thermal CVD reaction to deposit a film onto a substrate has a ring with an electrode terminal that makes contact with either the substrate or the deposited film thereon, a power supply that applies a curren...
05/22/2007
7220665H plasma treatment
Electronic devices are constructed by a method that includes forming a first conductive layer in an opening in a multilayer dielectric structure supported by a substrate, forming a core conductive layer on the first conductive layer, subjecting the core conductive l...
05/22/2007
7217398Deposition reactor with precursor recycle
A reactor vessel is provided with a solvent in a supercritical PVT state for use in depositing films on a deposition substrate. A metal organic precursor is dissolved in the supercritical solvent, as is a reaction agent. A chemical reaction deposits a film, such as ...
05/15/2007
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