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Class 427/571 - With magnetic enhancement


Subclass of Class 427 - Coating processes
Definition: Processes wherein a plasma utilized having an activating
No. of patents: 339
Last issue date: 09/13/2011


1                  
NumberTitleIssue Date
8017198Thin film deposition via charged particle-depleted plasma achieved by magnetic confinement
A method and apparatus for forming thin film materials via a plasma deposition process in the presence of a magnetic field. A precursor is delivered to a deposition chamber and activated to form a plasma. The plasma may be initiated in the presence of a magnetic fie...
09/13/2011
7838086Magnetic enhancement for mechanical confinement of plasma
A method for processing a substrate is provided. The substrate is placed in a process chamber. A gas is provided from a gas source to the process chamber. A plasma is generated from the gas in the process chamber. The gas flows through a gap adjacent to at least one...
11/23/2010
7368729Method, apparatus and system for specimen fabrication by using an ion beam
A method and system for separating and preparing a sample for analysis from a wafer without contaminating the wafer with an element such as Ga. A first ion beam is irradiated on a sample and scanned to fabricate a micro sample from a part of the sample. A probe for ...
05/06/2008
7367119Method for forming a reinforced tip for a probe storage device
Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon ther...
05/06/2008
7361387Plasma enhanced pulsed layer deposition
A process system and a deposition method for depositing a highly controlled layered film on a workpiece is disclosed. The basic component of the apparatus is a pulsing plasma source that is capable of either exciting or not-exciting a first precursor. The pulsing pl...
04/22/2008
7355951High density data recording/reproduction method utilizing electron emission and phase change media, and data recording system adopting the same, and media for the system
A rapid data recording/reproducing method, a data recording system adopting the same, media for the system, and a tracking method, wherein the recording/reproducing method includes preparing media having a data recording layer in which a phase change is generated th...
04/08/2008
7336524Atomic probes and media for high density data storage
A device in accordance with embodiments of the present invention comprises a contact probe for high density data storage reading, writing, erasing, or rewriting. In one embodiment, the contact probe can include a silicon core having a conductive coating. Contact pro...
02/26/2008
7323218Synthesis of composite nanofibers for applications in lithium batteries
Methods of fabricating one-dimensional composite nanofiber on a template membrane with porous array by chemical or physical process are disclosed. The whole procedures are established under a base concept of “secondary template”. First of all, tubular first nano...
01/29/2008
7310466Photonic crystal waveguides and systems using such waveguides
In general, in one aspect, the invention features a waveguide that includes a core extending along a waveguide axis and a confinement region surrounding the core. The confinement region includes a spiral portion and a non-spiral portion, wherein the spiral portion a...
12/18/2007
7309630Method for forming patterned media for a high density data storage device
Systems in accordance with the present invention can include a tip contactable with a media, the media including a substrate and a plurality of cells disposed over the substrate, one or more of the cells being electrically isolated from the other of the cells by a m...
12/18/2007
7303790Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained
Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and...
12/04/2007
7300559Filtered cathodic arc deposition method and apparatus
An apparatus for the application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting system communicating with a first plasma source and a coating chamber in which a substrate holder is arranged off of an optical axis of the plasma s...
11/27/2007
7300742Data storage medium and method for the preparation thereof
A data storage medium includes a substrate, a reflective metal layer, and a haze-prevention layer between the substrate and the reflective metal layer. The substrate includes an amorphous thermoplastic resin having a heat distortion temperature of at least about 140...
11/27/2007
7301887Methods for erasing bit cells in a high density data storage device
Methods in accordance with the present invention can be applied, in an embodiment, to a media comprising a phase change material to alter a resolved portion of the phase change material to have a resistance different from a resistance of the bulk material. A tip hav...
11/27/2007
7294404Graded photocatalytic coatings
The invention provides graded photocatalytic coatings. In one aspect, the invention provides a substrate carrying a photocatalytic coating that includes a first graded film region and a second graded film region. The first graded film region has a substantially cont...
11/13/2007
7276266Functionalization of carbon nanotubes
Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2 or F2 or CnHm) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, i...
10/02/2007
7252745Filtered cathodic arc deposition method and apparatus
An apparatus for the application of coatings in a vacuum comprising a plasma duct surrounded by a magnetic deflecting system communicating with a first plasma source and a coating chamber in which a substrate holder is arranged off of an optical axis of the plasma s...
08/07/2007
7226312Micro coated electrical feedthru
A method and apparatus for electrically interfacing between two or more distinct environments. The method and apparatus are directed to an electrical feedthru with one or more electrical transmission lines coated with one or more thin dielectric layers of material t...
06/05/2007
7220683Transparent amorphous carbon structure in semiconductor devices
A transparent amorphous carbon layer is formed. The transparent amorphous carbon layer has a low absorption coefficient such that the amorphous carbon is transparent in visible light. The transparent amorphous carbon layer may be used in semiconductor devices for di...
05/22/2007
7211708Exhaust processing method, plasma processing method and plasma processing apparatus
A chemical-reaction inducing means is provided in an exhaust line connecting a processing space for subjecting a substrate or a film to plasma processing to an exhaust means, and at least either an unreacted gas or byproduct exhausted from the processing space are c...
05/01/2007
7199328Apparatus and method for plasma processing
A plasma processing system including a process chamber, a substrate holder provided within the process chamber, and a gas injection system configured to supply a first gas and a second gas to the process chamber. The system includes a controller that controls the ga...
04/03/2007
7182842Device for amplifying the current of an abnormal electrical discharge and system for using an abnormal electrical discharge comprising one such device
A device (1) for amplifying the current of an abnormal electrical discharge, characterized in that it comprises an electrode which is positively polarized (2) and associated with a magnetic circuit (3) producing a magnetic field (4) which...
02/27/2007
7167622Photonic crystal fibers and medical systems including photonic crystal fibers
In general, in one aspect, the invention features systems, including a photonic crystal fiber including a core extending along a waveguide axis and a dielectric confinement region surrounding the core, the dielectric confinement region being configured to guide radi...
01/23/2007
7163721Method to plasma deposit on organic polymer dielectric film
A method for protecting an organic polymer underlayer during a plasma assisted process of depositing a subsequent film on the organic polymer underlayer is disclosed. The method provides the deposition of a protective continuous layer using organic polymer damage-fr...
01/16/2007
7160616DLC layer system and method for producing said layer system
The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition ...
01/09/2007
7160585Process for making at least one nanotube between two electrically conducting elements and device for implementing such a process
A process makes at least one nanotube between two electrically conducting elements located on a substrate, using, inside a deposition chamber, a microwave power, a magnetic field, and at least one electronic cyclotron resonance zone faciliting ionization and/or diss...
01/09/2007
7156960Method and device for continuous cold plasma deposition of metal coatings
A method for the deposition of a metal layer on a substrate (1) uses a cold plasma inside an enclosure (7) heated to avoid the formation of a metal deposit at its surface. The enclosure has an inlet (21) and an outlet (22) for the substra...
01/02/2007
7157123Plasma-enhanced film deposition
Methods and equipment for depositing films. In certain embodiments, there is provided a deposition chamber having a substrate-coating region and an electrode-cleaning region. In these embodiments, an electrode is positioned in the deposition chamber and has an inter...
01/02/2007
7156922Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor
A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13...
01/02/2007
7132201Transparent amorphous carbon structure in semiconductor devices
A transparent amorphous carbon layer is formed. The transparent amorphous carbon layer has a low absorption coefficient such that the amorphous carbon is transparent in visible light. The transparent amorphous carbon layer may be used in semiconductor devices for di...
11/07/2006
7125588Pulsed plasma CVD method for forming a film
A method of forming an insulating ceramic film or a metallic film by a plasma CVD process in which a high density plasma is generated in the presence of a magnetic field wherein the electric power for generating the plasma has a pulsed waveform. The electric power t...
10/24/2006
7118782Method for manufacturing diamond coatings
A method of manufacturing diamond coatings, at low temperature and low pressure on a substrate utilizing chemical vapor transport (CVT) comprising the steps of: providing a wire-wrapped graphite assembly component and the substrate into a chamber; filling the chambe...
10/10/2006
7112354Electron spin mechanisms for inducing magnetic-polarization reversal
An apparatus includes a low magnetic-coercivity layer of material (LMC layer) having a majority electron-spin-polarization (M-ESP), an energy-gap coupled with the LMC layer, wherein a flow of spin-polarized electrons having an electron-spin-polarization anti-paralle...
09/26/2006
7097501Micro coated electrical feedthru
A method and apparatus for electrically interfacing between two or more distinct environments. The method and apparatus are directed to an electrical feedthru with one or more electrical transmission lines coated with one or more thin dielectric layers of material t...
08/29/2006
7095179Methods and apparatus for generating strongly-ionized plasmas with ionizational instabilities
Methods and apparatus for generating strongly-ionized plasmas are disclosed. A strongly-ionized plasma generator according to one embodiment includes a chamber for confining a feed gas. An anode and a cathode assembly are positioned inside the chamber. A pulsed powe...
08/22/2006
7092611Method for manufacturing a bar-shaped preform as well as a method for manufacturing optical fibres from such a bar-shaped preform
The present invention relates to a method for manufacturing a bar-shaped preform. The present invention further relates to a method for manufacturing optical fibers using the manufactured bar-shaped preform. ...
08/15/2006
7087525Methods of forming layers over substrates
The invention includes methods of forming films over substrates. A substrate is provided within a reaction chamber, and a mixture is also provided within the chamber. The mixture comprises a precursor of a desired material within a supercritical fluid. The precursor...
08/08/2006
7070657Method and apparatus for depositing antireflective coating
This invention provides a stable process for depositing an antireflective layer. Helium gas is used to lower the deposition rate of plasma-enhanced silane oxide, silane oxynitride, and silane nitride processes. Helium is also used to stabilize the process, so that d...
07/04/2006
7067436Method of forming silicon oxide film and forming apparatus thereof
In a method of forming a silicon oxide film, the silicon oxide film is formed on a substrate by the use of a plasma CVD method. A plasma-generating region is separated from a deposition region which includes excitation oxygen molecules and excitation oxygen atoms. P...
06/27/2006
7067414Low k interlevel dielectric layer fabrication methods
A low k inter-level dielectric layer fabrication method includes providing a substrate having integrated circuitry at least partially formed thereon. An oxide-comprising inter-level dielectric layer including carbon and having a dielectric constant no greater than 3...
06/27/2006
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