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Class 427/535 - Plasma (e.g., cold plasma, corona, glow discharge, etc.)


Subclass of Class 427 - Coating processes
Definition: Processes wherein an ionized gas used is a plasma, having
No. of patents: 613
Last issue date: 05/29/2012


1                      
NumberTitleIssue Date
8187678Ultra-thin microporous/hybrid materials
Ultra-thin hybrid and/or microporous materials and methods for their fabrication are provided. In one embodiment, the exemplary hybrid membranes can be formed including successive surface activation and reaction steps on a porous support that is patterned or non-pat...
05/29/2012
8182883Method of forming a protective film for a magnetic recording medium, a protective film formed by the method and a magnetic recording medium having the protective film
A method of forming a protective film of a magnetic recording medium is provided that achieves a good bonding characteristic with a lubricant film and at the same time, suppressing adhesion of contamination gases, to attain a reduced thickness of the magnetic record...
05/22/2012
8137760Nanocrater catalyst in metal nanoparticles and method for preparing the same
Disclosed are a nanocrater catalyst in metal nanoparticles with a nanocrater form of hole structure in center of the catalyst which is useful for manufacturing nano-sized materials and/or articles with desired structure and characteristics, a preparation method ther...
03/20/2012
8084103Method for treating a hydrophilic surface
One embodiment comprises a method for increasing the hydrophobic characteristics of a surface. A coupling agent is applied to the surface, and the surface is subsequently exposed to a first ionizing gas plasma at about atmospheric pressure for a predetermined period...
12/27/2011
8039060Barrier film substrate and method for producing same, and organic device
A method for producing a barrier film substrate with excellent gas-barrier capability having, on at least one surface of a plastic film, a barrier layer that contains at least one inorganic layer and at least one organic layer, which includes forming the organic lay...
10/18/2011
7829157Methods of making multilayered, hydrogen-containing thermite structures
Methods of making multi-layered, hydrogen-containing thermite structures including at least one metal layer and at least one metal oxide layer adjacent to the metal layer are disclosed. At least one of the metal layers contains hydrogen, which can be introduced by p...
11/09/2010
7807232Inline passivation of vacuum-deposited aluminum on web substrate
In a continuous in-vacuum process for the manufacture of a film metallized with aluminum, the aluminum layer is exposed to a passivating agent, inline, immediately after deposition and prior to rewinding of the film onto a take-up roller. Passivation is carried out ...
10/05/2010
7807231Process for forming thermal barrier coating resistant to infiltration
A process for protecting a thermal barrier coating (TBC) on a component used in a high-temperature environment, such as the hot section of a gas turbine engine. The process applies a protective film on the surface of the TBC to resist infiltration of contaminants su...
10/05/2010
7771796Plasma processing method and film forming method
A plasma processing method of carrying out curing processing on a low dielectric constant film produced on a to-be-processed substrate by applying plasma thereto in a processing chamber of a plasma processing apparatus, includes the steps of: a) introducing, in the ...
08/10/2010
7767270Selective functionalization of carbon nanotubes based upon distance traveled
Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2 or NH3 or NF3 or F2 or CF4 or CnHm) is irradiated to provide a cold plasma ...
08/03/2010
7744964Vacuum roll coated security thin film interference products with overt and/or covert patterned layers
A method for forming an optically variable device upon a substrate comprises the steps of: patterning a reflective layer on the substrate using an oil-ablation technique; removing oil residue from the first side of the substrate using a first glow discharge; and dep...
06/29/2010
7713593Surface treatment method, manufacturing method of color filter substrate, and manufacturing method of electro-optical device
A surface treatment method using a plasma treatment apparatus which has an electric discharge generation portion facing a surface of a substrate with a gap therebetween, the substrate being placed on a supporting body, and a construction in which the gap is supplied...
05/11/2010
7713592Nanolayer deposition process
A hybrid deposition process of CVD and ALD, called NanoLayer Deposition (NLD) is provided. The nanolayer deposition process is a cyclic sequential deposition process, comprising the first step of introducing a first plurality of precursors to deposit a thin film wit...
05/11/2010
7674504Article with lubricated surface and method
A method for preparing one or more lubricated surfaces of an article to reduce the break-out force and sliding frictional force. A lubricant is applied to one or more surfaces, and the lubricant-coated surface is treated by exposing the surface to an energy source, ...
03/09/2010
7629031Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films
Plasma Enhanced Bonding (PEB) during a coating process is used to improve both adhesion and corrosion resistance of the resulting coating. New interfacial compounds may be formed, offering the increased resistance to corrosion, as well as enhanced bonding to the wor...
12/08/2009
7618686Method and apparatus for sequential plasma treatment
An apparatus for plasma treatment of a non-conductive hollow substrate, including a plurality of ionization energy sources disposed adjacent to each other all along the part of the substrate to be treated. The apparatus also includes a processor to sequentially powe...
11/17/2009
7615259Method and apparatus for processing workpiece
The present invention is a processing method for applying predetermined processing to a workpiece with said workpiece mounted on a mounting stage arranged in a process chamber in a depressurized atmosphere, in which when no workpiece is mounted on the mounting stage...
11/10/2009
7601402Method for forming insulation film and apparatus for forming insulation film
A method for forming a porous insulating film includes an insulating film forming step and a hole forming step. During the insulating film forming step, plasma processing of an organic siloxane group compound and an organic compound having a polar group forms an ins...
10/13/2009
7427429Continuous in-line process for making ink-jet recording media comprising a radiation-cured coating layer
A continuous in-line process for manufacturing ink-jet recording media is provided. The process includes applying a radiation-curable coating to a surface of a substrate material, irradiating the radiation-curable coating to form a “freshly”irradiated coating th...
09/23/2008
7404990Non-thermal process for forming porous low dielectric constant films
Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. In certain embodiments of the invention, there is provided a low-temperatu...
07/29/2008
7399503Process for producing multi-layer coating wherein the quotient of the surface energies of a second coating layer divided by a first coating layer is less-than-or-equal-to 1
Process for producing a multilayer coating, in which a first coating (A) has applied to it a subsequent coating material (B) which is then cured involves selecting and/or modifying the first coating (A) and/or selecting the coating material (B) in such a way that th...
07/15/2008
7396774Methods for forming an enriched metal oxide surface
Methods of forming a metal oxide surface that is enriched with metal oxide in its higher oxidation state are provided. A metal oxide surface that is enriched with metal oxide in its higher oxidation state is also provided. ...
07/08/2008
7393391Fabrication of an anisotropic super hydrophobic/hydrophilic nanoporous membranes
Anisotropic hydrophobic/hydrophilic nanoporous membranes and methods of forming anisotropic hydrophobic/hydrophilic nanoporous membranes are disclosed. The method of forming the nanoporous membrane includes growing a nanoporous oxide film on a substrate. A nanoporou...
07/01/2008
7371695Use of TEOS oxides in integrated circuit fabrication processes
A method for manufacturing a low temperature removable silicon dioxide hard mask for patterning and etching is provided, wherein tetra-ethyl-ortho-silane (TEOS) is used to deposit a silicon dioxide hard mask. ...
05/13/2008
7371487Method of fabricating black matrix of a color filter
A method of fabricating a black matrix of a color filter is provided. In the method, a black matrix layer formed of a hydrophobic organic material is formed on an upper surface of a transparent substrate. A black matrix is formed by patterning the black matrix layer...
05/13/2008
7371992Method for non-contact cleaning of a surface
A flame torch can be used to clean the surface of a contact-sensitive object, such as a glass optic, extremely thin workpiece, or semiconductor wafer by providing a reactive precursor gas to the feed gases of the torch. Reactive atom plasma processing can be used to...
05/13/2008
7368723Diamond radiation detector
A method of detecting radiation that includes providing a layer of high purity single crystal CVD diamond, applying an electric field of no greater than 0.5 V/μm to the layer, exposing the layer to the radiation thereby generating a signal, and detecting the signal...
05/06/2008
7361387Plasma enhanced pulsed layer deposition
A process system and a deposition method for depositing a highly controlled layered film on a workpiece is disclosed. The basic component of the apparatus is a pulsing plasma source that is capable of either exciting or not-exciting a first precursor. The pulsing pl...
04/22/2008
7361421Lubricant, magnetic recording medium and production method of magnetic recording medium
A lubricant is obtained by mixing at least one compound selected from specific fluorine-based diester dicarboxylic acid compounds having has two carboxyl groups, two ester bonds, terminal groups each of which is an alkyl group or an alkenyl group, and one fluoroethe...
04/22/2008
7359177Dual bias frequency plasma reactor with feedback control of E.S.C. voltage using wafer voltage measurement at the bias supply output
A plasma reactor has a dual frequency plasma RF bias power supply furnishing RF bias power comprising first and second frequency components, f(1), f(2), respectively, and an RF power path having an input end coupled to the plasma RF bias power supply a...
04/15/2008
7357681Electrical connector
A board-mount electrical connector capable of maintaining favorable solderability of a connecting section of a terminal for a long term and preventing occurrence of a whisker in a bent section of the terminal is provided. The electrical connector includes a pluralit...
04/15/2008
7354630Use of oxygen-containing gases in fabrication of granular perpendicular magnetic recording media
A granular perpendicular magnetic recording medium, comprising: (a) a non-magnetic substrate having a surface; and (b) a layer stack on the substrate surface, the layer stack including a granular perpendicular magn...
04/08/2008
7354617Fixing belt and method for evaluating it
A method for evaluating a fixing belt includes forming a fixing belt which includes a substrate, an elastic layer laminated on the substrate, and a mold releasing layer laminated on the elastic layer. A universal hardness test for the fixing belt is performed. The f...
04/08/2008
7341792Biaxially oriented saturated polyester film, method of making the same, laminate of biaxially oriented saturated polyester film and method of making the same
A biaxially oriented saturated polyester film made by a biaxial orientation method, includes a heat-seal side formed in at least one of two sides of the film, the heat-seal side being made by applying a low-temperature plasma treatment to a film surface so that the ...
03/11/2008
7341760Light-emitting device
The present invention provides a technique for performing film-forming of a cathode comprising a metallic with a good adhesion, as well as a light-emitting device producing a good image to be displayed. An EL element is fabricated to have a structure in which an ele...
03/11/2008
7335277Vacuum processing apparatus
A vacuum processing apparatus comprising a transfer unit disposed at a center thereof, plural processing chambers, each processing chamber having a processing table for supporting an object to be processed and carrying out processing using a gas; and a mass flow con...
02/26/2008
7335426High strength vacuum deposited nitinol alloy films and method of making same
A vacuum deposition method for fabricating high-strength nitinol films by sputter depositing nickel and titanium from a heated sputtering target, and controlling the sputter deposition process parameters in order to create high-strength nitinol films that exhibit sh...
02/26/2008
7329608Method of processing a substrate
The invention is embodied in a plasma flow device or reactor having a housing that contains conductive electrodes with openings to allow gas to flow through or around them, where one or more of the electrodes are powered by an RF source and one or more are grounded,...
02/12/2008
7329609Substrate processing method and substrate processing apparatus
In a substrate processing apparatus, a control electrode (131) separates a process space (11C) including a substrate to be processed and a plasma formation space (11B) not including the substrate. The control electrode includes a conductive memb...
02/12/2008
7326438Method for depositing nitride film using chemical vapor deposition apparatus of single chamber type
The present invention relates to a method for depositing a nitride film using a chemical vapor deposition apparatus of single chamber type, and more particularly to a method for depositing a nitride film that is capable of depositing the nitride film in which an are...
02/05/2008
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