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Class 427/533 - Ionized gas utilized (e.g., electrically powered source, corona discharge, plasma, glow discharge, etc.)


Subclass of Class 427 - Coating processes
Definition: Processes wherein an energetic (charged) gaseous medium
No. of patents: 312
Last issue date: 11/01/2011


1                
NumberTitleIssue Date
8048493Method of forming piezoelectric resin film
An objective is to provide a method of forming a piezoelectric resin film produced at low cost, and specifically to provide the method in which a large-area piezoelectric resin film is produced at low cost, and at reduced investment in facilities. Disclosed is a met...
11/01/2011
7968153Continuous method for production of a regioselective porous hollow fibre membrane
A continuous method for production of a porous hollow fibre membrane having regioselective affinity for compounds in blood or other biologically active fluids to be removed during purification of blood or said fluids is disclosed, as well as a porous hollow fibre me...
06/28/2011
7871676System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant (low-k) films, high dielectric constant (high-k) films, and other conduct...
01/18/2011
7829156Method and apparatus for producing biaxially oriented thin films
A method and an apparatus serve to produce thin films having a biaxial crystal orientation. The method includes the steps of: depositing atoms on a substrate, the atoms having a composition corresponding to the thin film to be produced; bombarding the deposited atom...
11/09/2010
7611756Process for coating particles for generative rapid prototyping
The invention relates to a method for coating particles of a plastic, metal and/or ceramic powder material for producing an adhesive-containing coating material, in particular for producing appropriate particles by compressing a 3D binder. Said coating is applied to...
11/03/2009
7399507Method for preparation of a lithographic printing plate and to a lithographic printing plate produced by the method
A method of preparation of a Lithographic Printing Plate comprising the steps of, selecting a substrate for making of the printing plate from a natural or synthetic polymeric sheet element material having a tensile strength in the range of 400 to 3000 Kgm/cm2 and th...
07/15/2008
7389580Method and apparatus for thin-film battery having ultra-thin electrolyte
A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl...
06/24/2008
7384684Polyester film with hydrophilic coating, process for its production and its use
The invention relates to an aqueous coating composition which comprises a mixture of polyvinylpyrrolidone, a surfactant and optionally an adhesion-promoting polymer. This mixture is suitable for inline coating of biaxially oriented polyester films. The thus obtained...
06/10/2008
7378356Biased pulse DC reactive sputtering of oxide films
A biased pulse DC reactor for sputtering of oxide films is presented. The biased pulse DC reactor couples pulsed DC at a particular frequency to the target through a filter which filters out the effects of a bias power applied to the substrate, protecting the pulsed...
05/27/2008
7354630Use of oxygen-containing gases in fabrication of granular perpendicular magnetic recording media
A granular perpendicular magnetic recording medium, comprising: (a) a non-magnetic substrate having a surface; and (b) a layer stack on the substrate surface, the layer stack including a granular perpendicular magn...
04/08/2008
7341792Biaxially oriented saturated polyester film, method of making the same, laminate of biaxially oriented saturated polyester film and method of making the same
A biaxially oriented saturated polyester film made by a biaxial orientation method, includes a heat-seal side formed in at least one of two sides of the film, the heat-seal side being made by applying a low-temperature plasma treatment to a film surface so that the ...
03/11/2008
7338683Superconductor fabrication processes
A method of forming a superconductive device is provided, including providing a substrate having a dimension ratio of not less than about 102, depositing a buffer film to overlie the substrate by ion beam assisted deposition utilizing and ion beam, monito...
03/04/2008
7316831Tilted vertical alignment of liquid crystals employing inorganic thin film composition and ion beam treatment
A liquid crystal display device includes an alignment layer with constituent materials. The constituent materials have a stoichiometric relationship configured to provide a given pretilt angle. Liquid crystal material is provided in contact with the alignment layer....
01/08/2008
7314667Process to optimize properties of polymer pellicles and resist for lithography applications
Disclosed are pellicle compositions and methods of making such pellicle compositions. The pellicle compositions provided include highly fluorinated polymers as well as fluorinated polymer/PVDF co-polymers. ...
01/01/2008
7307772Hybrid process for depositing electrochromic coating
A method of producing an electrochromic device, includes the steps of: providing a first electron conducting layer on a substrate, providing a working electrode in communication with the first electron conducting layer, providing an ion conducting layer in communica...
12/11/2007
7276266Functionalization of carbon nanotubes
Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2 or F2 or CnHm) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, i...
10/02/2007
7268846Diamond like carbon films
Alignment films for use within a liquid crystal display (LCD) and methods for their manufacture are disclosed. Embodiments of the invention generally relate to process conditions that are selected to improve certain properties of the alignment films. The alignment f...
09/11/2007
7264741Coater having substrate cleaning device and coating deposition methods employing such coater
A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a...
09/04/2007
7258811Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage
A wafer stage including an electrostatic chuck and a method for dechucking a wafer using the wafer stage are provided, wherein, the wafer stage includes an electrostatic chuck support, an electrostatic chuck, a lifting means, and a grounding means including a device...
08/21/2007
7253121Method for forming IMD films
A method for forming IMD films. A substrate is provided. A plurality of dielectric films are formed on the substrate, wherein each of the dielectric layers are deposited in-situ in one chamber with only one thermal cycle. ...
08/07/2007
7241490Metallized polyimide film and manufacturing method therefor
A metallized polyimide film includes: a polyimide film; an intermediate layer formed in the polyimide film, the intermediate layer extending 20 nm or less from a surface of the polyimide film, and the intermediate layer including at least one element selected from t...
07/10/2007
7241472Method for producing antireflection film-coated plastic lens, and antireflection film-coated plastic lens
The method produces a plastic lens with an antireflection film which have the advantages of good adhesion of the antireflection film to any type of hard coat film that underlies it and good abrasion resistance and provides a plastic lens with an antireflection film....
07/10/2007
7241478Process for coating three-dimensional substrates with thin organic films and products
The present invention relates to an apparatus and process for producing a thin organic film on a substrate using an ultrasonic nozzle to produce a cloud of micro-droplets in a vacuum chamber. The micro-droplets move turbulently within the vacuum chamber, isotropical...
07/10/2007
7229675Protective coating method for pieces made of heat resistant alloys
The invention relates to metallurgy and mechanical engineering, in particular to the development of methods for providing metallic pieces with protective coatings with a view to improving the performance characteristics thereof. In accordance with the inventive meth...
06/12/2007
7220461Method and apparatus for forming silicon oxide film
A method for forming a silicon oxide film includes disposing a silicon oxide film on a surface of a target substrate, and performing a reformation process on the silicon oxide film. The reformation process is performed by annealing the silicon oxide film while expos...
05/22/2007
7191930Electrostatic methods and apparatus for mounting and demounting particles from a surface having an array of tacky and non-tacky areas
Methods and associated apparatus are disclosed for use in mounting particles on and de-mounting particles from a substrate having an array of tacky and non-tacky areas. The particles can be either electrically conducting or electrically non-conducting. Selection of ...
03/20/2007
7175878Cold antireflection layer deposition process
The invention concerns a method for making an antiglare stack by vacuum evaporation on an organic substrate (1) at a temperature lower than 150° C., comprising steps which consist in depositing at least a layer of material having a refractive index different...
02/13/2007
7176114Method of depositing patterned films of materials using a positive imaging process
The invention generally encompasses a method for forming a pattern on a substrate. The method comprises applying a precursor comprising at least one metal to a substrate to form a precursor layer, exposing a predetermined portion of the precursor layer and developin...
02/13/2007
7172792Method for forming a high quality low temperature silicon nitride film
A method of forming a silicon nitride film is described. According to the present invention, a silicon nitride film is deposited by thermally decomposing a silicon/nitrogen containing source gas or a silicon containing source gas and a nitrogen containing source gas...
02/06/2007
7166342Thermoplastic resin film and process for producing the same
A heat-shrinkable resin film which has heat shrinkage in the maximum shrinkage direction of 20% or higher when a 10 cm×10 cm square sample cut out thereof is immersed in hot water at 85° C. for 10 seconds, pulled out, subsequently immersed in water at 25° C. for ...
01/23/2007
7150844Dry passivation process for stamper/imprinter family making for patterned recording media
A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of pr...
12/19/2006
7141277Self-generating inorganic passivation layers for polymer-layered silicate nanocomposites
A method for preparing high-use temperature, light-weight polymer/inorganic nanocomposite materials with enhanced thermal stability and performance characteristics, which comprises treating a polymer/inorganic nanocomposite material with oxygen plasma under conditio...
11/28/2006
7135230Functional particle and preparing/plasma-treating method of the same
At least one of a hollow particle 14, a porous particle 24, and a solid particle 34 having the pores 18, 28, 38 on the surface thereof is subjected to plasma irradiation under a reduced pressure while changing plasma irradiation intensity...
11/14/2006
7125587Ion beam for enhancing optical properties of materials
A system and method to expose a material to an ion beam during a continuous material production process may include a vacuum fixture to form the ion beam and a slit in the fixture to allow at least a portion of the ion beam to exit the fixture through the slit. The ...
10/24/2006
7125583Chemical vapor deposition chamber pre-deposition treatment for improved carbon doped oxide thickness uniformity and throughput
A method for improving thickness uniformity and throughput of a carbon doped oxide deposition process is described. That method comprises removing pre-deposition steps in a deposition phase. Moreover, helium plasma is added to a pre-clean phase to eliminate the prod...
10/24/2006
7112528Fully planarized dual damascene metallization using copper line interconnect and selective CVD aluminum plug
The present invention generally provides a metallization process for forming a highly integrated interconnect. More particularly, the present invention provides a dual damascene interconnect module that incorporates selective chemical vapor deposition aluminum (CVD ...
09/26/2006
7106488Hybrid process for depositing electrochromic coating
A method of producing an electrochromic device, includes the steps of: providing a first electron conducting layer on a substrate, providing a working electrode in communication with the first electron conducting layer, providing an ion conducting layer in communica...
09/12/2006
7097884Stability of ion beam generated alignment layers by surface modification
A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer...
08/29/2006
7095603Electrode for an energy storage device
An electrode for an energy storage device, including a substrate of at least one metal that forms a native oxide layer; and a treated layer formed on the substrate from the native oxide layer, the treated layer having a resistance that is less than the resistance of...
08/22/2006
7087269Multi-component composite membrane and method for preparing the same
The present invention relates to a multi-component composite separate membrane and a method for preparing the same, and to a multi-component composite membrane comprising a support layer and active layers, wherein the support layer is located between the active laye...
08/08/2006
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